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    • 14. 发明授权
    • Probe card for semiconductor wafers having mounting plate and socket
    • 带安装板和插座的半导体晶圆探头卡
    • US07250780B2
    • 2007-07-31
    • US10742729
    • 2003-12-19
    • David R. HembreeWarren M. FarnworthSalman AkramAlan G. WoodC. Patrick DohertyAndrew J. Krivy
    • David R. HembreeWarren M. FarnworthSalman AkramAlan G. WoodC. Patrick DohertyAndrew J. Krivy
    • G01R1/073G01R31/28
    • G01R31/2886
    • A probe card for testing semiconductor wafers, and a method and system for testing wafers using the probe card are provided. The probe card is configured for use with a conventional testing apparatus, such as a wafer probe handler, in electrical communication with test circuitry. The probe card includes an interconnect substrate having contact members for establishing electrical communication with contact locations on the wafer. The probe card also includes a membrane for physically and electrically connecting the interconnect substrate to the testing apparatus, and a compressible member for cushioning the pressure exerted on the interconnect substrate by the testing apparatus. The interconnect substrate can be formed of silicon with raised contact members having penetrating projections. Alternately the contact members can be formed as indentations for testing bumped wafers. The membrane can be similar to multi layered TAB tape including metal foil conductors attached to a flexible, electrically-insulating, elastomeric tape. The probe card can be configured to contact all of the dice on the wafer at the same time, so that test signals can be electronically applied to selected dice as required.
    • 提供了用于测试半导体晶片的探针卡,以及使用探针卡测试晶片的方法和系统。 探针卡被配置用于与测试电路电气通信的常规测试装置,例如晶片探测器处理器。 探针卡包括具有用于与晶片上的接触位置建立电连通的接触构件的互连基板。 探针卡还包括用于将互连基板物理和电连接到测试装置的膜,以及用于缓冲由测试装置施加在互连基板上的压力的可压缩构件。 互连衬底可以由具有穿透突起的凸起接触构件的硅形成。 或者,接触构件可以形成为用于测试凸起的晶片的凹陷。 膜可以类似于多层TAB带,其包括附接到柔性,电绝缘的弹性体带的金属箔导体。 探针卡可以配置为同时接触晶片上的所有骰子,以便测试信号可以根据需要以电子方式应用于选定的骰子。
    • 15. 发明授权
    • Methods of processing a workpiece, methods of communicating signals with respect to a wafer, and methods of communicating signals within a workpiece processing apparatus
    • 处理工件的方法,相对于晶片传送信号的方法,以及在工件处理装置内传送信号的方法
    • US07245136B2
    • 2007-07-17
    • US09827248
    • 2001-04-04
    • David R. Hembree
    • David R. Hembree
    • G01R31/26G01R31/06
    • H01L21/67253H01L21/67248
    • An electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus are provided. One embodiment of an electronic device workpiece processing apparatus includes a chuck including a surface, an electrical coupling adjacent the surface, and electrical interconnect configured to connect with the electrical coupling of the chuck and conduct signal within the chuck; an intermediate member having a first surface and a second surface and the intermediate member including: and electrical coupling adjacent the first surface and configured to couple with the electrical coupling of the chuck; an electrical coupling adjacent the second surface; and an electrical interconnect configured to connect the electrical coupling adjacent the first surface and the electrical coupling adjacent the second surface; and an electronic device workpiece configured to couple with the second surface of the intermediate member, the electronic device workpiece including a sensor and an electrical coupling configured to provide electrical connection of the sensor with the electrical coupling of the second surface of the intermediate member.
    • 提供一种电子设备工件处理设备和在电子设备工件处理设备内传送信号的方法。 电子设备工件处理设备的一个实施例包括:卡盘,其包括表面,邻近表面的电耦合;以及被配置为与卡盘的电耦合连接并且卡盘内的导通信号的电互连; 具有第一表面和第二表面的中间构件,所述中间构件包括:与所述第一表面相邻的并且被配置为与所述卡盘的电耦合耦合的电耦合; 邻近第二表面的电耦合; 以及电互连,其被配置为将邻近所述第一表面的所述电耦合和邻近所述第二表面的所述电耦合连接; 以及电子设备工件,被配置为与所述中间构件的第二表面联接,所述电子设备工件包括传感器和电耦合,所述电耦合被配置为提供所述传感器与所述中间构件的第二表面的电耦合的电连接。
    • 19. 发明授权
    • Spring element for use in an apparatus for attaching to a semiconductor and a method of attaching
    • 用于连接到半导体的装置中的弹簧元件和附接方法
    • US06703640B1
    • 2004-03-09
    • US09510828
    • 2000-02-23
    • David R. HembreeSalman AkramDerek Gochnour
    • David R. HembreeSalman AkramDerek Gochnour
    • H01L2329
    • G01R1/0466
    • A spring element used in a temporary package for testing semiconductors is provided. The spring element is compressed so as to press the semiconductor, either in the form of a bare semiconductor die or as part of a package, against an interconnect structure. The spring element is configured so that it provides sufficient pressure to keep the contacts on the semiconductor in electrical contact with the interconnect structure. Material is added and/or removed from the spring element so that it has the desired modulus of elasticity. The shape of the spring element may also be varied to change the modulus of elasticity, the spring constant, and the force transfer capabilities of the spring element. The spring element also includes conductive material to increase the thermal and electrical conductivity of the spring element.
    • 提供了用于测试半导体的临时封装中的弹簧元件。 弹簧元件被压缩以将半导体以裸半导体管芯的形式或作为封装的一部分压在互连结构上。 弹簧元件构造成使得其提供足够的压力以保持半导体上的触点与互连结构电接触。 向弹簧元件添加和/或移除材料,使其具有所需的弹性模量。 弹簧元件的形状也可以改变以改变弹性元件的弹性模量,弹簧常数和力传递能力。 弹簧元件还包括导电材料以增加弹簧元件的导热性和导电性。