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    • 31. 发明授权
    • Conveyor, and weighing machine and metal detecting machine using the conveyor
    • 输送机,称重机和金属检测机使用输送机
    • US06509533B1
    • 2003-01-21
    • US09700758
    • 2000-11-20
    • Osamu TanakaHiroyuki SekiguchiNorikazu Murata
    • Osamu TanakaHiroyuki SekiguchiNorikazu Murata
    • G01G2100
    • B65G15/00B65G21/06B65G21/14B65G23/24B65G2201/02B65G2201/04G01G11/00
    • There is provided a conveyor capable of carrying out attachment and detachment of a portion of carrying an article easily and safely by a simple constitution in cleaning or the like and preventing parts from falling in attaching and detaching thereof. A support unit is provided with a carry unit and a motor unit respectively attachably and detachably. The carry unit is attachable to and detachable from the support unit in an upward direction. An output shaft of the motor unit can be connected to and detached from a drive roller of the carry unit by first and second connecting pieces. When a fixed state of the motor unit is released by releasing clamps, connection between the connecting peices is released and a state of fixing the carry unit to the support unit is released by releasing clamps, so that the carry unit can be removed in the upward direction.
    • 提供了能够通过清洁等中的简单构造容易且安全地执行携带物品的一部分的附接和分离的输送机,并且防止部件在其附着和分离中落下。 支撑单元分别具有可携带单元和马达单元。 携带单元可沿着向上的方向附接到支撑单元并且可从支撑单元拆卸。 电动机单元的输出轴可以通过第一和第二连接件连接到搬运单元的驱动辊并从其拆下。 当通过释放夹具释放电动机单元的固定状态时,释放连接孔之间的连接,并且通过释放夹具来将搬运单元固定到支撑单元的状态被释放,使得搬运单元可以向上移动 方向。
    • 32. 发明授权
    • Exposure apparatus with setting of stage driving in accordance with type of motion of stage and device manufacturing method
    • 根据舞台运动类型和装置制造方法设置舞台驱动的曝光装置
    • US06233040B1
    • 2001-05-15
    • US09099147
    • 1998-06-18
    • Hiroyuki Sekiguchi
    • Hiroyuki Sekiguchi
    • G03B2742
    • G03F7/70358G03F7/70716G03F7/70725
    • In order to obtain a high throughput without degrading superposition alignment, an exposure device for performing exposure to a substrate on a substrate stage while moving and positioning the substrate stage includes a setting unit which can set the value of a drive parameter for driving the substrate stage as different values depending on the types of movement of the substrate stage. The setting unit can set the value of the drive parameter in movement to alignment measurement shots, the value of the drive parameter in scanning exposure, the value of the drive parameter in another movement, and the like as values which are different from each other, and sets the highest velocity or/and the maximum acceleration in movement to alignment measurement shots to be lower than the highest velocity or/and the maximum acceleration in another movement.
    • 为了获得高通量而不降低叠加对准,用于在移动和定位衬底台的同时对基板台上的基板进行曝光的曝光装置包括设置单元,该设置单元可以设定用于驱动基板台的驱动参数的值 作为不同的值,取决于衬底载物台的运动类型。 设置单元可以将驱动参数的值移动到对准测量镜头,扫描曝光中的驱动参数的值,另一移动中的驱动参数的值等作为彼此不同的值, 并将移动中的最高速度或/和最大加速度设置为对准测量镜头,使其低于另一运动中的最高速度或/和最大加速度。
    • 35. 发明授权
    • Parallel drive system
    • 并行驱动系统
    • US08947036B2
    • 2015-02-03
    • US13579237
    • 2010-02-17
    • Shigeo AmigasayaHiroyuki SekiguchiHidetoshi Ikeda
    • Shigeo AmigasayaHiroyuki SekiguchiHidetoshi Ikeda
    • G05B11/32G05B19/23
    • G05B19/237G05B2219/50228
    • To provide a parallel drive system that can reduce vibrations of an arm member and can realize positioning at a high speed even when a slave servomotor does not have a position detector, at a low cost. To achieve this object, a parallel drive system of the invention includes: a master servomotor and a slave servomotor that include linearly-moving movable units that are arranged in parallel to each other, respectively; and an arm member that forms a bridge between the two movable units. The system includes: a position detector detecting position information on the movable unit of the master servomotor; an acceleration sensor detecting acceleration information on the movable unit of the slave servomotor; a master servo amplifier controlling the master servomotor based on the position information; and a slave servo amplifier controlling the slave servomotor based on the position information and the acceleration information.
    • 为了提供能够降低臂构件的振动的并联驱动系统,即使在从动伺服电动机不具有位置检测器的情况下也能够以高速实现定位。 为了实现该目的,本发明的并联驱动系统包括:主伺服电动机和从动伺服电动机,其分别包括彼此平行布置的线性运动的可移动单元; 以及在两个可移动单元之间形成桥的臂构件。 该系统包括:位置检测器,检测主伺服电机的可移动单元上的位置信息; 检测从动伺服电机的可动部的加速度信息的加速度传感器; 主伺服放大器,基于位置信息控制主伺服电动机; 以及从伺服放大器,其基于位置信息和加速度信息来控制从伺服马达。
    • 37. 发明授权
    • Object recognizing apparatus
    • 物体识别装置
    • US07710247B2
    • 2010-05-04
    • US11750879
    • 2007-05-18
    • Hiroyuki Sekiguchi
    • Hiroyuki Sekiguchi
    • B60Q1/00
    • G06K9/00369G06K9/00805
    • An existence probability of an image object based on an image taken by a stereo camera 2 is calculated by an image object existence probability calculating portion 11, an existence probability of a millimeter wave object based on an output of a millimeter wave radar 3 is calculated by a millimeter wave object existence probability calculating portion 12, and an existence probability of a laser object based on an output of a laser radar 4 is calculated by a laser object existence probability calculating portion 13. Further, the respective existence probabilities of the image object, the millimeter wave object, the laser object are corrected based on recognizing rates of the respective recognizing sensors by an existence probability correcting portion 14, the existence probabilities after correction is fused as a fusion existence probability by a fusion existence probability calculating portion 15, thereby, a control of avoiding contact with a hazard or alarming or the like is made to be able to execute by a firm and optimum timing.
    • 通过图像对象存在概率计算部11来计算基于立体照相机2拍摄的图像的图像对象的存在概率,基于毫米波雷达3的输出的毫米波对象的存在概率由 毫米波对象存在概率计算部分12以及基于激光雷达4的输出的激光对象的存在概率由激光对象存在概率计算部分13计算。此外,图像对象的各自的存在概率, 毫米波物体,通过存在概率校正部分14基于各个识别传感器的识别率来校正激光对象,通过融合存在概率计算部分15将修正后的存在概率融合为融合存在概率,从而, 避免与危险或警报等接触的控制 能够通过坚定和最佳的时间执行。