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    • 35. 发明申请
    • METHOD FOR MANUFACTURING CONTACT PROBE
    • 制造接触探针的方法
    • US20130227835A1
    • 2013-09-05
    • US13885610
    • 2012-08-16
    • Yukifumi ChibaKoji NittaTakeshi Tokuda
    • Yukifumi ChibaKoji NittaTakeshi Tokuda
    • G01R1/067
    • G01R1/067C25D1/00C25D1/20G01R1/06716G01R1/06761G01R1/07357G01R3/00Y10T29/49002
    • A method for manufacturing a contact probe includes: a lithography step of obtaining a resin mold by forming a pattern for the contact probe, a pattern for a tie bar in a shape of a frame therearound, and a pattern for a coupling portion coupling these two patterns, in a resist formed on a conductive substrate, by lithography; an electroforming step of forming a layer made of a metal material on the resin mold by electroforming to form a metal structure in which the contact probe is integral with the tie bar at the coupling portion; a removal step of removing the resin mold and the conductive substrate; a plating step of forming a plating layer on a surface of the metal structure by electroplating after the removal step; and a separation step of separating the contact probe from the metal structure after the plating step.
    • 一种接触探针的制造方法,其特征在于,包括:光刻工序,通过形成接触探针的图案,所述框架周围的连接条的图案,以及将这两者连接的联接部的图案, 通过光刻法形成在导电基板上的抗蚀剂中的图案; 电铸步骤,通过电铸在所述树脂模具上形成由金属材料制成的层,以形成金属结构,其中所述接触探针与所述连接杆在所述耦合部分成一体; 去除树脂模具和导电基板的去除步骤; 电镀步骤,在去除步骤之后通过电镀在所述金属结构体的表面上形成镀层; 以及在电镀步骤之后将接触探针与金属结构分离的分离步骤。