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31. 发明申请

US20130145506A1 Systems And Methods For Performing Microscopy At Hyperbaric Pressures 审中-公开
标题翻译：用于在高压压力下进行显微镜的系统和方法
公开(公告)号：US20130145506A1
公开(公告)日：2013-06-06
申请号：US13680724
申请日：2012-11-19
申请人： Jay B. Dean , Dominic P. D'agostino , Stephen Reimers , Ramesh K. Dixit
发明人： Jay B. Dean , Dominic P. D'agostino , Stephen Reimers , Ramesh K. Dixit
IPC分类号： G01Q60/24
CPC分类号： G01Q60/24 , G01N21/6458 , G01Q30/12 , G02B7/007 , G02B21/0004
摘要： In some embodiments, a system for performing microscopy at hyperbaric pressures includes a hyperbaric chamber that defines a sealed interior space, and an imaging system contained within the interior space that is operated from outside of the hyperbaric chamber to image materials within the interior space at hyperbaric pressures.
摘要翻译：在一些实施例中，用于在高压下进行显微镜检查的系统包括限定密封的内部空间的高压舱，以及包含在内部空间内的成像系统，其从高压舱的外部操作，以在高压条件下在内部空间内成像材料压力。

32. 发明授权

US08387161B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US08387161B2
公开(公告)日：2013-02-26
申请号：US12921832
申请日：2009-03-12
申请人： Martin F. Finlan , Shelley J. Wilkins
发明人： Martin F. Finlan , Shelley J. Wilkins
IPC分类号： G01Q60/24
CPC分类号： G01Q60/38 , G01Q60/34 , G01Q70/10 , G01Q70/14
摘要： An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.
摘要翻译：用于探针显微镜的细长探针（50）包括设置在探针末端（53）和驱动器（52）之间的模块（51）。在使用中，驱动器（52）向模块（51）施加振荡，模块（51）由模块传送到尖端（53）。当探针尖端（53）位于样品表面附近时，尖端相对于驱动振荡的振荡的任何相位变化代表尖端和样品表面之间的相互作用。当用于探测需要液体环境的样品时，探针（50）的细长布置是特别有利的。

33. 发明申请

US20130047302A1 PROCESSES FOR SURFACE MEASUREMENT AND MODIFICATION BY SCANNING PROBE MICROSCOPY FUNCTIONING IN CONTINUOUS CURVILINEAR MODE, SCANNING PROBE MICROSCOPE AND DEVICE PERMITTING THEIR IMPLEMENTATION OF SAID METHODS 有权
标题翻译：通过扫描探针显微镜功能进行表面测量和修改的方法，扫描探针显微镜和允许其实现方法的设备
公开(公告)号：US20130047302A1
公开(公告)日：2013-02-21
申请号：US13695685
申请日：2011-05-05
申请人： Olivier Noel , Pierre-Emmanuel Mazeran , Hussein Nasrallah
发明人： Olivier Noel , Pierre-Emmanuel Mazeran , Hussein Nasrallah
IPC分类号： G01Q20/02 , G01Q60/24
CPC分类号： G01Q60/26 , B82Y35/00 , G01Q60/28
摘要： The invention relates to processes for the modification of surfaces and on processes for the measurement of adhesion forces and of different forces of interaction (friction forces, adhesion forces) by scanning probe microscopy functioning in continuous > mode, as well as to a scanning probe microscope and a device permitting the implementation of said processes.
摘要翻译：本发明涉及用于通过扫描连续“曲线”模式中的扫描探针显微镜来修饰表面和用于测量粘附力和不同相互作用力（摩擦力，粘附力）的方法的方法，以及扫描探针显微镜和允许实施所述方法的装置。

34. 发明授权

US08291510B2 Tandem piezoelectric actuator and single drive circuit for atomic force microscopy 有权
标题翻译：用于原子力显微镜的串联压电致动器和单驱动电路
公开(公告)号：US08291510B2
公开(公告)日：2012-10-16
申请号：US12890894
申请日：2010-09-27
申请人： Dale W. Schroeder , Richard P. Tella
发明人： Dale W. Schroeder , Richard P. Tella
IPC分类号： G01Q60/24
CPC分类号： G01Q10/04 , G01Q10/06
摘要： An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.
摘要翻译：用于原子力显微镜（AFM）的装置包括：第一致动器，被配置成沿着轴线移动悬臂; 第二致动器，被配置为沿所述轴线移动所述悬臂; 放大器以及连接在放大器与第一致动器和第二致动器之间的交叉网络。交叉网络适于在第一频率范围上向第一致动器提供第一驱动信号，并且在第二频率范围上向第二致动器提供第二驱动信号。

35. 发明授权

US08250668B2 Cantilever with paddle for operation in dual-frequency mode 有权
标题翻译：悬臂用双桨模式操作
公开(公告)号：US08250668B2
公开(公告)日：2012-08-21
申请号：US12586172
申请日：2009-09-16
申请人： Hendrik Hölscher , Santiago De Jesus Solares
发明人： Hendrik Hölscher , Santiago De Jesus Solares
IPC分类号： G01Q60/24
CPC分类号： G01Q70/10 , G01Q60/32 , G01Q60/38
摘要： A microcantilever system comprising a paddle, its use and a method of simultaneously acquiring the topography and measuring the tip-sample interactions of a sample with it.
摘要翻译：一种包括桨叶的微悬臂梁系统，其用途和同时获取地形并测量样品的尖端 - 样品相互作用的方法。

36. 发明申请

US20120182412A1 Inspection Instrument 审中-公开
标题翻译：检验仪器
公开(公告)号：US20120182412A1
公开(公告)日：2012-07-19
申请号：US13352289
申请日：2012-01-17
申请人： Jizhong HE
发明人： Jizhong HE
IPC分类号： G01N21/01 , B23P11/00 , H04N7/18 , G01N33/00 , G01Q60/24
CPC分类号： B82Y35/00 , G01N21/88 , G01N21/9501 , G01N2021/8825 , G01Q30/02 , G01Q30/025 , G02B21/0016 , Y10T29/49826
摘要： The present disclosure relates an inspection instrument adapted to increase testing throughput in a manufacturing process. In one embodiment, the inspection instrument includes a base plate and a vertical frame, where the base plate and the vertical frame are configured to provide structural support of the inspection instrument, a first mounting mechanism coupled to the base plate, where the first mounting mechanism is configured to hold a sample for inspection, and a second mounting mechanism coupled to the vertical frame, where the second mounting mechanism is configured to hold a set of sensors and an optical system for inspecting the sample. The first mounting mechanism and the second mounting mechanism are decoupled from each other to reduce impact of movements of the sample to the set of sensors and the optical system.
摘要翻译：本公开涉及一种适于增加制造过程中的测试吞吐量的检验仪器。在一个实施例中，检查仪器包括基板和垂直框架，其中基板和垂直框架构造成提供检查仪器的结构支撑;联接到基板的第一安装机构，其中第一安装机构被配置为保持用于检查的样品，以及联接到所述竖直框架的第二安装机构，其中所述第二安装机构被构造成保持一组传感器和用于检查所述样品的光学系统。第一安装机构和第二安装机构彼此解耦以减少样品移动到传感器组和光学系统的影响。

37. 发明申请

US20120117695A1 AFM MEASURING METHOD AND SYSTEM THEREOF 有权
标题翻译： AFM测量方法及其系统
公开(公告)号：US20120117695A1
公开(公告)日：2012-05-10
申请号：US13378514
申请日：2010-04-05
申请人： Jae Wan Hong , Won Young Song
发明人： Jae Wan Hong , Won Young Song
IPC分类号： G01Q60/24
CPC分类号： G01Q30/02
摘要： Provided are an AFM measuring method and a system thereof. The tip of a cantilever is provided to a plurality of points on a substrate, to which incident light is radiated from a light source. Scattered light is generated between the tip of the cantilever and the substrate by the incident light and the intensity of the scattered light is measured. The measured intensity of the scattered light is input to a data processing unit so as to find a point where the intensity of the incident is highest. The tip of the cantilever is moved to the point where the intensity of the incident light is highest.
摘要翻译：提供了一种AFM测量方法及其系统。将悬臂的尖端设置在基板上的多个点上，入射光从光源发射到该点上。通过入射光在悬臂的尖端和基板之间产生散射光，并测量散射光的强度。将测得的散射光的强度输入到数据处理单元，以便找到事件强度最高的点。悬臂的尖端移动到入射光强度最高的点。

38. 发明授权

US08166567B2 Fast-scanning SPM scanner and method of operating same 有权
标题翻译：快速扫描SPM扫描仪及其操作方法
公开(公告)号：US08166567B2
公开(公告)日：2012-04-24
申请号：US11687304
申请日：2007-03-16
申请人： Nghi Phan , Craig Cusworth , Craig Prater
发明人： Nghi Phan , Craig Cusworth , Craig Prater
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q60/24
CPC分类号： G01Q10/02 , G01Q20/02 , G01Q30/025
摘要： A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.
摘要翻译：提供了一种高带宽SPM尖端扫描器，其另外包括可在扫描头内垂直移动以增加感测光束的聚焦深度的物镜。优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂小谐振频率。以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率和小于10μm的感测光束光点小直径。可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

39. 发明申请

US20120079634A1 TANDEM PIEZOELECTRIC ACTUATOR AND SINGLE DRIVE CIRCUIT FOR ATOMIC FORCE MICROSCOPY 有权
标题翻译：用于原子力显微镜的TANDEM压电致动器和单驱动电路
公开(公告)号：US20120079634A1
公开(公告)日：2012-03-29
申请号：US12890894
申请日：2010-09-27
申请人： Richard P. Tella , Dale W. Schroeder
发明人： Richard P. Tella , Dale W. Schroeder
IPC分类号： G01Q60/24
CPC分类号： G01Q10/04 , G01Q10/06
摘要： An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.
摘要翻译：用于原子力显微镜（AFM）的装置包括：第一致动器，被配置成沿着轴线移动悬臂; 第二致动器，被配置为沿所述轴线移动所述悬臂; 放大器以及连接在放大器与第一致动器和第二致动器之间的交叉网络。交叉网络适于在第一频率范围上向第一致动器提供第一驱动信号，并且在第二频率范围上向第二致动器提供第二驱动信号。

40. 发明授权

US08069493B2 Atomic force microscope apparatus 失效
标题翻译：原子力显微镜装置
公开(公告)号：US08069493B2
公开(公告)日：2011-11-29
申请号：US12529903
申请日：2008-03-04
申请人： Hiroshi Fujimoto , Takashi Ooshima
发明人： Hiroshi Fujimoto , Takashi Ooshima
IPC分类号： G01Q60/24
CPC分类号： G01Q10/065 , G01Q60/363
摘要： An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.
摘要翻译：本发明的目的是提供一种能够使跟踪误差尽可能接近零的原子力显微镜装置，以便通过高速扫描获得的图像降低。为了实现本发明的目的，本发明提供一种以接触模式对样品的表面形貌进行成像的原子力显微镜装置，该装置包括具有经由原子力与样品表面相互作用的探针的悬臂，通过原子力的偏转，用于允许第一激光进入悬臂的激光提供装置，光检测装置，估计样品表面的表面形貌的控制器和用于记录估计的表面形貌的数据存储装置。

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