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1. 发明申请

US20180149673A1 APPARATUS AND METHODS FOR INVESTIGATING A SAMPLE SURFACE 审中-公开
公开(公告)号：US20180149673A1
公开(公告)日：2018-05-31
申请号：US15575348
申请日：2016-05-12
申请人： NANYANG TECHNOLOGICAL UNIVERSITY
发明人： Fengwei HUO , Jin WU
IPC分类号： G01Q10/06 , G01Q20/02 , G01Q60/22 , G01Q70/06
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q60/22 , G01Q70/06 , G01Q70/14 , G02B21/002
摘要： An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

2. 发明授权

US09966253B2 Forming nanotips 有权
公开(公告)号：US09966253B2
公开(公告)日：2018-05-08
申请号：US15054005
申请日：2016-02-25
申请人： International Business Machines Corporation
发明人： Kangguo Cheng , Ramachandra Divakaruni , Juntao Li , Shogo Mochizuki
IPC分类号： H01L29/06 , H01L21/02 , H01J9/02 , G01Q70/14 , G01Q70/16
CPC分类号： H01L21/02236 , G01Q70/14 , G01Q70/16 , H01J1/3044 , H01J9/025
摘要： A nanotip apparatus which includes nanotips arranged in a pattern on a semiconductor base. Each of the nanotips have a pointed tip portion and a base portion in contact with the semiconductor base. Further, each of the nanotips include a gradient of silicon germanium (SiGe) with the highest concentration of germanium being at the pointed tip portion and the lowest concentration of germanium being at the base in contact with the semiconductor base. Also disclosed is a method in which the nanotips may be formed.

3. 发明授权

US09612258B2 Probe configuration and method of fabrication thereof 有权
公开(公告)号：US09612258B2
公开(公告)日：2017-04-04
申请号：US14527526
申请日：2014-10-29
申请人： IMEC , Katholieke Universiteit Leuven
发明人： Thomas Hantschel , Menelaos Tsigkourakos , Wilfried Vandervorst
IPC分类号： G01Q70/16 , G01Q70/14 , B82Y35/00
CPC分类号： G01Q70/14 , B82Y35/00 , G01Q70/16
摘要： The disclosed technology relates generally to probe configurations, and more particularly to probe configurations and methods of making probe configurations that have a diamond body and a diamond layer covering at least an apex region of the diamond body. In one aspect, a method of fabricating a probe configuration includes forming a probe tip. Forming the probe tip includes providing a substrate and forming a recessed mold into the substrate on a first side of the substrate, wherein the recessed mold is shaped to form a probe body having an apex region. Forming the probe tip additionally includes forming a first diamond layer on the substrate on the first side, wherein forming the first diamond layer includes at least partially filling the recessed mold with the first diamond layer such that a probe body having an apex region is formed in the recessed mold. Forming the probe tip additionally includes patterning to remove at least partially the first diamond layer which surrounds the probe body, removing a substrate material surrounding at least the apex region of the probe body, and forming a second diamond layer covering at least the apex region of the probe body. The method additionally includes attaching the probe tip to a first end of a cantilever and attaching the second end of the cantilever to a holder.

4. 发明授权

US09465048B1 Probe unit for test tools and method of manufacturing the same 有权
标题翻译：用于测试工具的探头单元及其制造方法
公开(公告)号：US09465048B1
公开(公告)日：2016-10-11
申请号：US14667676
申请日：2015-03-24
申请人： INOTERA MEMORIES, INC.
发明人： Wei-Chih Wang
IPC分类号： G01Q70/16 , G01Q70/14 , B22C9/22 , B22D19/00 , B22D21/02 , B22D25/02 , B23K31/02 , G01Q70/08
CPC分类号： G01Q70/16 , B22C9/22 , B22D19/00 , B22D21/022 , B22D25/02 , B23K26/21 , B23K31/02 , G01Q60/48 , G01Q70/08 , G01Q70/14
摘要： The present invention provides a novel method of manufacturing the probe unit and a tip assemble and disassemble procedure for test tools, which includes a body with a joint portion and a base portion and a probe tip extending from one side of the base portion opposite to the joint portion, where the probe tip and the base portion are integrally made of same material different from the material of the joint portion.
摘要翻译：本发明提供了一种制造探针单元的新方法以及用于测试工具的尖端组装和拆卸过程，该测试工具包括具有接合部分和基部的主体以及从基部的相对侧的一侧延伸的探针尖端接头部分，其中探针尖端和基部部分由与接合部分的材料不同的相同材料整体制成。

5. 发明申请

US20160282385A1 PROBE UNIT FOR TEST TOOLS AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：用于测试工具的探针单元及其制造方法
公开(公告)号：US20160282385A1
公开(公告)日：2016-09-29
申请号：US14667676
申请日：2015-03-24
申请人： INOTERA MEMORIES, INC.
发明人： Wei-Chih Wang
IPC分类号： G01Q70/14 , B22D19/00 , B23K26/21 , B22D25/02 , B23K31/02 , G01Q70/08 , B22C9/22 , B22D21/02
CPC分类号： G01Q70/16 , B22C9/22 , B22D19/00 , B22D21/022 , B22D25/02 , B23K26/21 , B23K31/02 , G01Q60/48 , G01Q70/08 , G01Q70/14
摘要： The present invention provides a novel method of manufacturing the probe unit and a tip assemble and disassemble procedure for test tools, which includes a body with a joint portion and a base portion and a probe tip extending from one side of the base portion opposite to the joint portion, where the probe tip and the base portion are integrally made of same material different from the material of the joint portion.
摘要翻译：本发明提供了一种制造探针单元的新方法以及用于测试工具的尖端组装和拆卸过程，该测试工具包括具有接合部分和基部的主体以及从基部的相对侧的一侧延伸的探针尖端接头部分，其中探针尖端和基部部分由与接合部分的材料不同的相同材料整体制成。

6. 发明申请

US20140196179A1 ULTRA-COMPACT NANOCAVITY-ENHANCED SCANNING PROBE MICROSCOPY AND METHOD 审中-公开
标题翻译：超紧凑型纳米增强扫描探针显微镜和方法
公开(公告)号：US20140196179A1
公开(公告)日：2014-07-10
申请号：US14150389
申请日：2014-01-08
申请人： The Trustees of Columbia University in the City of New York
发明人： Dirk R. ENGLUND
IPC分类号： G01Q70/14 , G01Q10/00
CPC分类号： G01Q70/14 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q70/10
摘要： Techniques for measuring the topography of a surface using a device including a semiconductor slab having a distal end and a base region, and an air slot therein. A sensor tip can be coupled to the slab below the air-slot. A photonic crystal including a lattice pattern with a cavity region defined by a local perturbation in the lattice pattern can be integrated into the semiconductor slab above and below the air slot, thereby providing a split-cavity photonic crystal resonator integrated into the semiconductor slab.
摘要翻译：使用包括具有远端和底部区域的半导体板的装置以及其中的空气槽来测量表面的形貌的技术。传感器尖端可以连接到空气槽下方的板坯。包括具有由格子图案中的局部扰动限定的空腔区域的格子图案的光子晶体可以集成到空气狭缝上方和下方的半导体板中，从而提供集成到半导体板中的分裂腔光子晶体谐振器。

7. 发明申请

US20140130215A1 Indented Mold Structures For Diamond Deposited Probes 审中-公开
标题翻译：金刚石沉积探针的缩进模具结构
公开(公告)号：US20140130215A1
公开(公告)日：2014-05-08
申请号：US13671133
申请日：2012-11-07
申请人： RAVE, LLC
发明人： David Brinkley , Roy L. White
IPC分类号： G01Q70/16 , G01Q70/08
CPC分类号： G01Q70/16 , G01Q70/14
摘要： The present invention discloses a method of fabricating a scanning probe microscopy probe including positioning a pattern probe over a mold substrate; indenting the pattern probe into the mold substrate material to form a mold pit; depositing a film onto the mold substrate including the mold pit; removing a portion of the deposited film to form a probe, and releasing the probe from the mold substrate material.
摘要翻译：本发明公开了一种制造扫描探针显微镜探针的方法，包括在模具基底上定位图案探针; 将图案探针压入模具基底材料中以形成模具凹坑; 在包括模具凹坑的模具基板上沉积膜; 去除沉积膜的一部分以形成探针，并将探针从模具基底材料上释放出来。

8. 发明授权

US08387161B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US08387161B2
公开(公告)日：2013-02-26
申请号：US12921832
申请日：2009-03-12
申请人： Martin F. Finlan , Shelley J. Wilkins
发明人： Martin F. Finlan , Shelley J. Wilkins
IPC分类号： G01Q60/24
CPC分类号： G01Q60/38 , G01Q60/34 , G01Q70/10 , G01Q70/14
摘要： An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.
摘要翻译：用于探针显微镜的细长探针（50）包括设置在探针末端（53）和驱动器（52）之间的模块（51）。在使用中，驱动器（52）向模块（51）施加振荡，模块（51）由模块传送到尖端（53）。当探针尖端（53）位于样品表面附近时，尖端相对于驱动振荡的振荡的任何相位变化代表尖端和样品表面之间的相互作用。当用于探测需要液体环境的样品时，探针（50）的细长布置是特别有利的。

9. 发明授权

US08373431B2 Probe for scanning over a substrate and data storage device 失效
标题翻译：用于扫描基板和数据存储设备的探头
公开(公告)号：US08373431B2
公开(公告)日：2013-02-12
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译：数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。存储介质可以包含在基板中。探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。提供具有纳米级顶点的尖端。梁结构包括加热电阻器，并且在端部附接到支撑结构。与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。

10. 发明申请

US20120279287A1 Transferable Probe Tips 有权
标题翻译：可转移探头技巧
公开(公告)号：US20120279287A1
公开(公告)日：2012-11-08
申请号：US13101253
申请日：2011-05-05
申请人： Paul S. Andry , Bing Dang , Steven L. Wright
发明人： Paul S. Andry , Bing Dang , Steven L. Wright
IPC分类号： G01B5/28 , B05D5/00 , C23F1/00
CPC分类号： G01B5/28 , B81B2201/12 , B81C3/001 , B81C2201/0194 , G01Q40/02 , G01Q70/14 , G01Q70/16 , G01R1/067 , G01R1/06738 , G01R1/07378 , G01R3/00 , G03F7/00
摘要： Transferable probe tips including a metallic probe, a delamination layer covering a portion of the metallic probe, and a bonding alloy, wherein the bonding alloy contacts the metallic probe at a portion of the probe that is not covered by the delamination layer are provided herein. Also, techniques for creating a transferable probe tip are provided, including etching a handler substrate to form one or more via arrays, depositing a delamination layer in each via array, depositing one or more metals in each via array to form a probe tip structure, and depositing a bonding alloy on a portion of the probe tip structure that is not covered by the delamination layer. Additionally, techniques for transferring transferable probe tips are provided, including removing a handler substrate from a probe tip structure, and transferring the probe tip structure via flip-chip joining the probe tip structure to a target probe head substrate.
摘要翻译：本发明提供了包括金属探针，覆盖金属探针的一部分的分层和可接合的探针尖端，以及接合合金，其中接合合金在探针的未被分层的覆盖部分处接触金属探针。此外，提供了用于产生可转移探针尖端的技术，包括蚀刻处理器衬底以形成一个或多个通孔阵列，在每个通孔阵列中沉积分层，在每个通孔阵列中沉积一个或多个金属以形成探针尖端结构，以及在未被分层层覆盖的探针尖端结构的一部分上沉积接合合金。此外，提供了用于传送可转移的探针尖端的技术，包括从探针尖端结构去除处理器基底，以及通过将探针尖端结构连接到目标探针头基底的倒装芯片来传送探针尖端结构。

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