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1. 发明申请

US20190056429A1 SCANNING HEAD OF SCANNING PROBE MICROSCOPE 审中-公开
公开(公告)号：US20190056429A1
公开(公告)日：2019-02-21
申请号：US16102833
申请日：2018-08-14
申请人： INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES
发明人： Qing Huan , Zebin Wu , Hongjun Gao
IPC分类号： G01Q70/10 , G01Q70/14 , G01Q30/20
CPC分类号： G01Q70/10 , G01Q30/20 , G01Q70/02 , G01Q70/14
摘要： A scanning head of a scanning probe microscope includes a scanning head frame having a first end portion and a second end portion which are oppositely disposed, the first end portion and the second end portion defining a first receiving space and a second receiving space, respectively; a sample table located in the first receiving space; a scanning module located in the second receiving space; and a plurality of fixed electrodes fixed on the second end portion of the scanning head frame. Signal lines of the scanning head of the present invention do not fall off or tear off during operation. In addition, the scanning head allows a laser to be incident on its scanning probe, enabling the scanning probe to be coupled with the laser, so that the range of application is wide.

2. 发明申请

US20180120345A1 METALLIC DEVICE FOR SCANNING NEAR-FIELD OPTICAL MICROSCOPY AND SPECTROSCOPY AND METHOD FOR MANUFACTURING SAME 审中-公开
公开(公告)号：US20180120345A1
公开(公告)日：2018-05-03
申请号：US15572355
申请日：2016-05-06
申请人： Universidade Federal de Minas Gerais - UFMG , INSTITUTO NACIONAL DE METROLOGIA, QUALIDADE E TECNOLOGIA - INMETRO
发明人： Thiago DE LOURENÇO E VASCONCELOS , Bráulio SOARES ARCHANJO , Luiz Gustavo DE OLIVEIRA LOPES CANÇADO , Carlos Alberto ACHETE , Wagner NUNES RODRIGUES , Ado JORIO DE VASCONCELOS , Benjamin FRAGNEAUD , Douglas DOS SANTOS RIBEIRO , Cassiano RABELO E SILVA , Bruno SANTOS DE OLIVEIRA
IPC分类号： G01Q70/10 , G01Q60/22
CPC分类号： G01Q70/10 , G01Q60/22
摘要： The present invention relates to a metallic device for near-field optical microscopy and spectroscopy, as well as to a method of preparing it. Said device comprises a single body (1) with longitudinal prolongation (2), nanometric apex (4) and has at least one trimming (3) on its surface, being applied as a probe of high optical efficiency, with adequate dimensions and details that enable the best photon-plasmon coupling, enabling the analysis, with high space resolution, of structures of nanometric dimensions with high efficiency and reproducibility.

3. 发明授权

US09091705B2 System and method for high-speed atomic force microscopy with switching between two feedback loops 有权
标题翻译：用于高速原子力显微镜的系统和方法，在两个反馈回路之间切换
公开(公告)号：US09091705B2
公开(公告)日：2015-07-28
申请号：US13875122
申请日：2013-05-01
申请人： Boise State University
发明人： Byung I. Kim
IPC分类号： G01Q10/06 , G01Q20/02 , G01Q30/14 , G01Q60/38 , G01Q70/10 , B82Y35/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/36 , G01Q60/38 , G01Q70/10
摘要： A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop.
摘要翻译：本文公开了高速原子力显微镜（HSAFM）。 HSAFM包括悬臂，压电管，光学检测器，电路元件和反馈控制器。悬臂具有探针，并且压电管布置在探头附近。光学检测器被配置为检测悬臂的偏转，并且电路元件邻接悬臂的第一端并且构造成在悬臂上施加力以阻止悬臂的偏转。电路元件通过第一反馈回路可通信地连接到光学检测器。反馈控制器可通信地连接到压电管并被配置成沿Z轴朝向和远离探头调制压电管。并且反馈控制器通过第二反馈回路可通信地连接到光学检测器。

4. 发明申请

US20150158724A1 METHOD FOR MAKING A 3D NANOSTRUCTURE HAVING A NANOSUBSTRUCTURE, AND AN INSULATING PYRAMID HAVING A METALLIC TIP, A PYRAMID HAVING NANO-APERTURES AND HORIZONTAL AND/OR VERTICAL NANOWIRES OBTAINABLE BY THIS METHOD 有权
标题翻译：制造具有纳米结构的3D纳米结构的方法以及具有金属尖端的绝缘薄膜，具有纳米孔径的平面和通过该方法获得的水平和/或垂直的纳米线
公开(公告)号：US20150158724A1
公开(公告)日：2015-06-11
申请号：US14570652
申请日：2014-12-15
申请人： Universiteit Twente
发明人： Johan Willem Berenschot , Niels Roelof Tas
IPC分类号： B81C1/00 , G01Q70/16
CPC分类号： B81C1/00111 , B33Y10/00 , B33Y80/00 , B81C2201/034 , B82Y35/00 , G01Q70/10 , G01Q70/16 , Y10T428/2913 , Y10T428/2982
摘要： The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
摘要翻译：本发明涉及一种制备具有纳米级结构的3D纳米结构的方法，包括以下步骤：i）提供包括至少一个锐角凹入角的模具; ii）在锋利的凹角中构造沉积至少一种结构材料; iii）各向同性地除去结构材料; iv）沉积至少一种其他结构材料; v）清除较早沉积的结构材料; vi）形成纳米结构; 和vii）去除模具，从而提供具有纳米结构的3D纳米结构。

5. 发明申请

US20140130214A1 MONOLITHIC INTERFEROMETRIC ATOMIC FORCE MICROSCOPY DEVICE 审中-公开
标题翻译：单片干涉原子力显微镜装置
公开(公告)号：US20140130214A1
公开(公告)日：2014-05-08
申请号：US13833498
申请日：2013-03-15
申请人： THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
发明人： Olav Solgaard , Antonio A. Gellineau , Xuan Wu , Jo Wonuk , Karthik Vijayraghavan
IPC分类号： G01Q60/38
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , G01Q70/10
摘要： A fiber-facet AFM probe enabling high-resolution, high sensitivity measurement of a sample surface is presented. AFM probes in accordance with the present invention include an optically resonant cavity that is defined by two mirrors, at least one of which is a photonic-crystal mirror. One of the mirrors is movable and is mechanically coupled with an AFM tip such that a force imparted on the tip by an interaction with the sample surface induces a change in the cavity length of the optically resonant cavity and, therefore, its reflectivity.
摘要翻译：介绍了一种能够对样品表面进行高分辨率，高灵敏度测量的光纤小面AFM探针。根据本发明的AFM探针包括由两个反射镜限定的光学谐振腔，其中至少一个是光子晶体镜。其中一个反射镜是可移动的并且与AFM尖端机械耦合，使得通过与样品表面的相互作用赋予尖端的力引起光学谐振腔的腔长度的变化，并因此引起其反射率。

6. 发明授权

US08695111B2 Video rate-enabling probes for atomic force microscopy 失效
标题翻译：用于原子力显微镜的视频速率探测器
公开(公告)号：US08695111B2
公开(公告)日：2014-04-08
申请号：US13275451
申请日：2011-10-18
申请人： Chung Hoon Lee
发明人： Chung Hoon Lee
IPC分类号： G01Q70/10 , G01Q70/16 , G01Q70/14
CPC分类号： G01Q70/10 , G01N23/00 , G01Q60/38 , G01Q70/14 , G01Q70/16
摘要： Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
摘要翻译：用于制备具有氮化硅悬臂的原子力显微镜探针的方法和用于高速AFM成像的具有高谐振频率和低弹簧常数的集成单晶硅四面体尖端的方法。

7. 发明申请

US20140007308A1 Scanned Probe Microscopy (SPM) Probe Having Angled Tip 有权
标题翻译：扫描探针显微镜（SPM）探头具有倾斜尖端
公开(公告)号：US20140007308A1
公开(公告)日：2014-01-02
申请号：US13539778
申请日：2012-07-02
申请人： Mark C. Reuter , Brian A. Bryce , Bojan R. Ilic , Sandip Tiwari
发明人： Mark C. Reuter , Brian A. Bryce , Bojan R. Ilic , Sandip Tiwari
IPC分类号： G01Q70/08 , G01Q60/38
CPC分类号： G01Q70/10 , B82Y15/00 , G01Q70/12
摘要： A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
摘要翻译：提供扫描探针显微镜探针。探头包括悬臂梁和尖端。悬臂梁沿着大致水平的轴线延伸。悬臂梁具有相对于大致水平轴线倾斜倾斜的晶面表面。尖端从晶面表面向外突出。

8. 发明授权

US08584261B2 Method of determining a spring constant of a cantilever and scanning probe microscope using the method 有权
标题翻译：使用该方法确定悬臂弹簧常数和扫描探针显微镜的方法
公开(公告)号：US08584261B2
公开(公告)日：2013-11-12
申请号：US13545197
申请日：2012-07-10
申请人： Masafumi Watanabe , Hiroumi Momota
发明人： Masafumi Watanabe , Hiroumi Momota
IPC分类号： G01Q70/16 , G01Q70/08 , G01Q60/22 , G01Q70/10 , G01Q60/38
CPC分类号： G01Q60/22 , G01Q60/38 , G01Q70/10
摘要： In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
摘要翻译：在扫描探针显微镜等中使用的具有通过硅工艺中的各向异性蚀刻形成的梯形截面形状的悬臂中，在不直接测量厚度的情况下确定悬臂弹簧常数。基于梯形截面形状的上基底和下基底长度以及通过各向异性蚀刻产生的表面的几何规则度来确定悬臂厚度。然后，基于悬臂厚度，悬臂长度和杨氏模量确定悬臂弹簧常数。

9. 发明授权

US08484761B2 Method for cost-efficient manufacturing diamond tips for ultra-high resolution electrical measurements and devices obtained thereof 有权
标题翻译：用于超高分辨率电气测量的成本有效的制造金刚石尖端的方法及其获得的装置
公开(公告)号：US08484761B2
公开(公告)日：2013-07-09
申请号：US12483160
申请日：2009-06-11
申请人： Thomas Hantschel , Wilfried Vandervorst , Kai Arstila
发明人： Thomas Hantschel , Wilfried Vandervorst , Kai Arstila
IPC分类号： G01Q70/14
CPC分类号： G01Q60/40 , G01Q60/30 , G01Q70/10 , G01Q70/14 , G01Q70/16
摘要： An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
摘要翻译：公开了一种原子力显微镜探针结构及其制造方法。在一个方面，探针配置包括悬臂和连接到悬臂的平面末端。悬臂仅部分地与平坦的尖端重叠，并且沿其纵向方向延伸。平面尖端是具有远离悬臂的至少一个角的二维几何形状，在使用过程中，该角接触待扫描的表面。

10. 发明授权

US08393011B2 Piezoresistor height sensing cantilever 失效
标题翻译：压敏电阻高度检测悬臂
公开(公告)号：US08393011B2
公开(公告)日：2013-03-05
申请号：US12465625
申请日：2009-05-13
申请人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
发明人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
IPC分类号： G01Q70/14
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

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