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    • 8. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US08813261B2
    • 2014-08-19
    • US13974634
    • 2013-08-23
    • Hitachi High-Tech Science Corporation
    • Masato IyokiNaokatsu NosakaHiroumi MomotaJunji Kuwahara
    • G01Q30/18G01Q10/00G01Q30/02B82Y35/00
    • G01Q10/00B82Y35/00G01Q30/025G01Q30/18
    • A scanning probe microscope including: a scanning probe microscope unit section including, a cantilever having a probe, a cantilever holder configured to fix the cantilever, a sample holder on which a sample is configured to be placed, a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe, a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface, an optical microscope configured to observe the cantilever and the sample; a control device; an imaging device to which a viewing field, wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; and an image display device configured to display images observed by the optical microscope and the imaging device.
    • 一种扫描探针显微镜,包括:扫描探针显微镜单元部分,包括具有探针的悬臂,构造成固定所述悬臂的悬臂保持器,其上配置有待放置的样本的样本保持器,被配置为相对于所述样本的水平细转移机构 用探针扫描样品的表面,配置成控制探针和样品表面之间的距离的垂直精细转移机构,配置成观察悬臂和样品的光学显微镜; 控制装置; 能够设置比光学显微镜宽的视场并且能够同时观察悬臂和样本的成像装置; 以及图像显示装置,被配置为显示由所述光学显微镜和所述成像装置观察到的图像。
    • 9. 发明授权
    • Fast-scanning SPM scanner and method of operating same
    • 快速扫描SPM扫描仪及其操作方法
    • US08443459B2
    • 2013-05-14
    • US13435086
    • 2012-03-30
    • Nghi PhanCraig CusworthCraig Prater
    • Nghi PhanCraig CusworthCraig Prater
    • G01Q10/00G01Q20/02G01Q60/24
    • G01Q10/02G01Q20/02G01Q30/025
    • A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.
    • 高带宽SPM尖端扫描器包括在扫描头内可垂直移动的物镜,以增加感测光束的聚焦深度。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束,并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击,结果允许使用相对较小的悬臂 小谐振频率。 可以在尺寸超过7 mm的大样品上扫描图像,分辨率小于1埃,扫描速度超过30赫兹。
    • 10. 发明申请
    • PROBE ALIGNMENT TOOL FOR THE SCANNING PROBE MICROSCOPE
    • 扫描探针显微镜探针对准工具
    • US20110173728A1
    • 2011-07-14
    • US12998126
    • 2008-09-18
    • Ali R. Afshari
    • Ali R. Afshari
    • G01Q10/00
    • G01Q40/00B82Y35/00G01Q30/025
    • A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.
    • 用于扫描探针显微镜的探针对准工具(10)利用附接的中继光学器件来观察扫描探针显微镜探针尖端(40)并将其图像对准在光学显微镜(36)的视场的中心。 光学显微镜电动级(50)和(60)的调整以及扫描探针显微镜级(44),(46)和(58)的调整允许确定从视场中心到探头的路径和距离 尖端(40)。 从这样的判断可以精确而准确地将扫描探针显微镜检查的目标区域定位在探针尖端(40)的下方。 在原子力显微镜单元(42)中更换扫描探针显微镜探针尖端(40)可以在不损失对准测量的情况下实现。