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41. 发明授权

US08884711B2 MEMS device oscillator loop with amplitude control 有权
标题翻译：具有幅度控制的MEMS器件振荡器回路
公开(公告)号：US08884711B2
公开(公告)日：2014-11-11
申请号：US13625690
申请日：2012-09-24
申请人： InvenSense, Inc.
发明人： Vadim Tsinker
IPC分类号： H03B5/04 , H03B5/30 , H03L1/00
CPC分类号： H03B5/30 , H03B5/04 , H03B2202/042 , H03L1/00
摘要： A MEMS device and method for amplitude regulation of a MEMS device are disclosed. In a first aspect, the MEMS device comprises a MEMS resonator, a limiter coupled to the MEMS resonator, and a regulator coupled to the limiter. The MEMS device includes an amplitude control circuit coupled to the MEMS resonator. The amplitude control circuit controls a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device. In a second aspect, the method includes coupling a regulator to the limiter, coupling an amplitude control circuit to the MEMS resonator, and controlling a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device.
摘要翻译：公开了一种用于MEMS器件的幅度调节的MEMS器件和方法。在第一方面，MEMS器件包括MEMS谐振器，耦合到MEMS谐振器的限幅器和耦合到限幅器的调节器。 MEMS器件包括耦合到MEMS谐振器的幅度控制电路。幅度控制电路通过调节器控制限幅器的供应，以调节MEMS装置的振荡环路振幅。在第二方面，该方法包括将调节器耦合到限幅器，将振幅控制电路耦合到MEMS谐振器，以及通过调节器控制限幅器的供应以调节MEMS装置的振荡环路振幅。

42. 发明申请

US20140320225A1 BONDING TYPE CRYSTAL CONTROLLED OSCILLATOR 有权
标题翻译：结合型晶体控制振荡器
公开(公告)号：US20140320225A1
公开(公告)日：2014-10-30
申请号：US14258026
申请日：2014-04-22
申请人： NIHON DEMPA KOGYO CO., LTD.
发明人： HIDENORI HARIMA
IPC分类号： H03B5/30
CPC分类号： H03H9/10 , G04F5/063 , H03B5/32 , H03H9/0509 , H03H9/0519 , H03H9/0547 , H03H9/0561 , H03H9/1014 , H03H9/17
摘要： A bonding type crystal controlled oscillator includes a crystal package and a circuit package bonded by two-tier bonding. An anisotropy conductive adhesive is interposed between back surface of the crystal package facing the circuit package and an upper surface of the circuit package facing the crystal package. The anisotropy conductive adhesive includes a thermosetting resin containing solder micro particles dispersed in the thermosetting resin. Assuming that a thickness of the output terminal formed at the crystal package is C μm, a thickness of the external terminal formed at the circuit package is D μm, and an average outside diameter of the solder micro particles dispersed in the anisotropy conductive adhesive is E μm the dimensional relation is set to (C+D)>E.
摘要翻译：键合型晶体振荡器包括晶体封装和通过双层结合键合的电路封装。各向异性导电粘合剂介于面向电路封装的晶体封装的背面与面向晶体封装的电路封装的上表面之间。各向异性导电粘合剂包括含有分散在热固性树脂中的焊料微粒的热固性树脂。假设晶体封装上形成的输出端的厚度为Cμm，则形成在电路封装处的外部端子的厚度为Dμm，分散在各向异性导电粘合剂中的焊料微粒的平均外径为E μm的尺寸关系设定为（C + D）> E。

43. 发明申请

US20140300425A1 ELECTRO-MECHANICAL RESONANCE LOOP 有权
标题翻译：电子机械谐振圈
公开(公告)号：US20140300425A1
公开(公告)日：2014-10-09
申请号：US13736591
申请日：2013-01-08
申请人： Maxim Integrated Products, INC.
发明人： Gabriele Cazzaniga , Federico Forte , Luciano Prandi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , G01C19/5649 , G01C19/567 , G01C19/5726 , G01C19/5776 , G01P15/097 , G01P15/14
摘要： The invention relates to a controller, and more particularly, to systems, devices and methods of controlling a sensor having a resonating mass. The controller includes: an analog-to-digital converter (ADC) unit for extracting a digitized sensor signal from the sensor signal; a phase controller for generating, based on the digitized sensor signal, a phase-controlled signal that is locked in phase with the digitized sensor signal; an amplitude controller for applying a gain to the digitized sensor signal to thereby generate an amplitude-adjusted signal; a modulator for modulating the amplitude-adjusted signal to thereby generate a modulated signal; and a phase shifter for shifting the phase of the modulated signal by 90 degrees. The output signal from the phase shifter is amplified and input to the drive for exciting the resonating mass, to thereby form a closed resonance loop for controlling the oscillation amplitude of the resonating mass.
摘要翻译：本发明涉及一种控制器，更具体地，涉及一种控制具有共振质量传感器的系统，装置和方法。控制器包括：用于从传感器信号中提取数字化传感器信号的模数转换器（ADC）单元; 相位控制器，用于基于所述数字化传感器信号，生成与所述数字化传感器信号同相锁定的相位控制信号; 幅度控制器，用于对数字化的传感器信号施加增益，从而产生经调幅的信号; 调制器，用于调制经调幅的信号从而产生调制信号; 以及用于将调制信号的相位偏移90度的移相器。来自移相器的输出信号被放大并输入到用于激励谐振块的驱动器，从而形成用于控制谐振质量的振荡幅度的闭合谐振回路。

44. 发明授权

US08803624B2 MEMS resonator 有权
标题翻译： MEMS谐振器
公开(公告)号：US08803624B2
公开(公告)日：2014-08-12
申请号：US13537303
申请日：2012-06-29
申请人： Kim Phan Le
发明人： Kim Phan Le
IPC分类号： H03B5/30
CPC分类号： H03H9/2431
摘要： A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.
摘要翻译： MEMS谐振器具有围绕环的点锚定的闭环形式的谐振器质量。一组环形梳状电极布置在固定点之间的位置处固定到环上，以将谐振器质量的输入（驱动）和输出（感测）信号耦合。

45. 发明申请

US20140210567A1 CRYSTAL RESONATOR, CRYSTAL RESONATOR PACKAGE, AND OSCILLATOR 审中-公开
标题翻译：晶体谐振器，晶体谐振器封装和振荡器
公开(公告)号：US20140210567A1
公开(公告)日：2014-07-31
申请号：US14156430
申请日：2014-01-15
申请人： NIHON DEMPA KOGYO CO., LTD.
发明人： MITSUAKI KOYAMA
IPC分类号： H03B5/30
CPC分类号： H03H9/1021 , H03H9/132 , H03H9/215
摘要： A crystal resonator includes a plate-shaped crystal element, excitation electrodes, and a second crystal region. The plate-shaped crystal element is supported to a supporting portion. The crystal element is configured to vibrate at a thickness shear vibration. The excitation electrodes are disposed at both surfaces of a first crystal region of the crystal element. The second crystal region is positioned outside with respect to the excitation electrodes. The second crystal region is formed at a peripheral edge portion of the crystal element so as to occupy a region of equal to or more than 75% of a whole circumference of the crystal element. The second crystal region has a positive/negative direction of an X-axis of a crystal different from a positive/negative direction of an X-axis of a crystal of the first crystal region.
摘要翻译：晶体谐振器包括板状晶体元件，激励电极和第二晶体区域。板状晶体元件支撑在支撑部上。晶体元件被配置为以厚度剪切振动振动。励磁电极设置在晶体元件的第一晶体区域的两个表面。第二晶体区域相对于激励电极位于外部。第二晶体区域形成在晶体元件的周边部分处，以占据晶体元件的整个周长等于或大于75％的区域。第二晶体区域具有与第一晶体区域的晶体的X轴的正/负方向不同的晶体的X轴的正/负方向。

46. 发明申请

US20140176248A1 USE OF ELECTRONIC ATTENUATOR FOR MEMS OSCILLATOR OVERDRIVE PROTECTION 有权
标题翻译：电子衰减器用于MEMS振荡器过载保护的使用
公开(公告)号：US20140176248A1
公开(公告)日：2014-06-26
申请号：US13721630
申请日：2012-12-20
申请人： Silicon Laboratories Inc.
发明人： Aaron Caffee , Manu Seth , Brian Drost
IPC分类号： H03B5/30 , B81B7/02
CPC分类号： H03B5/30 , B81B7/02 , H03B2200/001
摘要： An apparatus includes a microelectromechanical system (MEMS) device configured as part of an oscillator. The MEMS device includes a mass suspended from a substrate of the MEMS, a first electrode configured to provide a first signal based on a displacement of the mass, and a second electrode configured to receive a second signal based on the first signal. The apparatus includes an amplifier coupled to the first electrode and a first node. The amplifier is configured to generate an output signal, the output signal being based on the first signal and a first gain. The apparatus includes an attenuator configured to attenuate the output signal based on a second gain and provide as the second signal an attenuated version of the output signal.
摘要翻译：一种装置包括被配置为振荡器的一部分的微机电系统（MEMS）装置。 MEMS器件包括从MEMS的衬底悬挂的质量，第一电极，被配置为基于质量的位移提供第一信号，以及第二电极，被配置为基于第一信号接收第二信号。该装置包括耦合到第一电极和第一节点的放大器。放大器被配置为产生输出信号，输出信号基于第一信号和第一增益。该装置包括衰减器，其被配置为基于第二增益来衰减输出信号，并将输出信号的衰减版本提供为第二信号。

47. 发明授权

US08742872B2 MEMS element, and manufacturing method of MEMS element 有权
标题翻译： MEMS元件和MEMS元件的制造方法
公开(公告)号：US08742872B2
公开(公告)日：2014-06-03
申请号：US13322990
申请日：2011-02-24
申请人： Tomohiro Iwasaki , Keiji Onishi , Kunihiko Nakamura
发明人： Tomohiro Iwasaki , Keiji Onishi , Kunihiko Nakamura
IPC分类号： H03H9/02 , H03H9/10 , H03B5/30 , H03H3/007 , H01L21/62 , H01L23/02 , H03H9/24 , B81B3/00 , B81B7/00 , B81C1/00
CPC分类号： H03H9/1057 , B81B3/00 , B81B7/0077 , B81C1/00333 , B81C1/00476 , H03H3/0072 , H03H9/2405 , H03H9/2447
摘要： In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.
摘要翻译：在具有基板1，密封膜7和梁的可动部分3以及具有与垂直于基板1表面的间隙重叠的区域的电极5的MEMS装置中，第一空腔9位于可动部3的与该基板的表面垂直的方向的一侧，第二空腔为另一个空腔，与第一空腔9的电极5接触的侧壁A的内表面a为定位在比与第二腔10的电极5接触的侧壁B的内表面b更靠内侧表面b的平行于基底表面的方向上，使得当机械的时候可动部分3不与电极5碰撞从外部向密封膜7施加应力。

48. 发明授权

US08729973B2 MEMS resonator 有权
标题翻译： MEMS谐振器
公开(公告)号：US08729973B2
公开(公告)日：2014-05-20
申请号：US13062877
申请日：2009-09-07
申请人： Jozef Thomas Martinus van Beek , Ronald Vogels
发明人： Jozef Thomas Martinus van Beek , Ronald Vogels
IPC分类号： H03B5/30 , H03B1/02 , H03L1/04 , B81B7/02
CPC分类号： H03H9/02448
摘要： A MEMS resonator comprises a resonator body (34), and an anchor (32) which provides a fixed connection between the resonator body (34) and a support body. A resistive heating element (R1,R2) and a feedback control system are used to maintain the resonator body (34) at a constant temperature. A location for thermally coupling the anchor (32) to the resistive heating element (R1,R2) is selected which has a lowest dependency of its temperature on the ambient temperature during the operation of the feedback control.
摘要翻译： MEMS谐振器包括谐振器主体（34）和在谐振器主体（34）和支撑体之间提供固定连接的锚固件（32）。使用电阻加热元件（R1，R2）和反馈控制系统将谐振器本体（34）保持在恒定温度。选择用于将锚固件（32）热耦合到电阻加热元件（R1，R2）的位置，其在反馈控制的操作期间具有最低的温度对环境温度的依赖性。

49. 发明授权

US08723611B2 Micromechanical resonator 有权
标题翻译：微机械谐振器
公开(公告)号：US08723611B2
公开(公告)日：2014-05-13
申请号：US13032106
申请日：2011-02-22
申请人： Ville Kaajakari
发明人： Ville Kaajakari
IPC分类号： H03B5/30
CPC分类号： G01C19/5621 , H03H9/02275 , H03H9/02338 , H03H9/2484 , H03H9/2494
摘要： The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.
摘要翻译：本发明的目的是提供一种用于微机电（MEMS）谐振器的改进的结构。根据本发明的第一方面，根据本发明的谐振器结构具有与给定的机械振幅相结合的振荡的特征频率，由此通过在锚定点处锚固来在谐振器结构中设定所述机械振幅位于谐振器结构基板的给定点处，第一元件适于振荡，并且第二元件适于以使得所述第一元件和所述第二元件中的至少一个被布置成相对于所述第二元件同步振荡的方式振荡由此所述锚点的位置被选择为基本上在由所述第一和所述第二元件的尺寸限定的联合突起内。

50. 发明申请

US20140070901A1 RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT 有权
标题翻译：谐振器元件，谐振器，振荡器，电子设备和移动对象
公开(公告)号：US20140070901A1
公开(公告)日：2014-03-13
申请号：US14022921
申请日：2013-09-10
申请人： SEIKO EPSON CORPORATION
发明人： Akinori YAMADA , Masaru MIKAMI
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03H9/2489
摘要： A resonator element includes a base section, a pair of vibrating arms projecting toward the same side from the base section, and disposed side by side in a predetermined direction, a support arm projecting from the base section toward the same side as the pair of vibrating arms, disposed between the pair of vibrating arms, and having a recessed portion disposed on one principal surface, and a first electrically-conductive pad and a second electrically-conductive pad disposed side by side across the recessed portion.
摘要翻译：谐振器元件包括基部，从基部朝向同一侧突出的一对振动臂，并且沿预定方向并排布置;支撑臂，从基部突出到与该一对振动相同的一侧臂，设置在一对振动臂之间，并且具有设置在一个主表面上的凹部，以及并排设置在该凹部上的第一导电垫和第二导电垫。

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