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    • 3. 发明授权
    • MEMS resonator
    • MEMS谐振器
    • US08698569B2
    • 2014-04-15
    • US13522781
    • 2012-01-31
    • Kunihiko Nakamura
    • Kunihiko Nakamura
    • H03B5/30
    • H03H9/2463H03H9/02259H03H9/02338H03H2009/02496
    • In order to provide a MEMS resonator having a higher Q factor, by suppressing losses in high-frequency signals due to barriers of thin-film lamination portions, in cases where there exist junction interfaces (barriers), such as pn junctions, in AC-current input/output lines for a vibrator (1) and electrodes (2, 3), the MEMS resonator is structured such that a DC current is flowed therethrough along with an AC current at the same time, in order to reduce resistance losses applied to the AC current, wherein there are provided DC bias circuits (22, 23, 24) for continuously flowing DC currents through the junction interfaces, in an input-electrode side and/or output-electrode side.
    • 为了提供具有更高Q因子的MEMS谐振器,通过抑制由于薄膜层压部分的屏障而导致的高频信号的损耗,在存在交联接点(阻挡层)如pn结的情况下, 用于振动器(1)和电极(2,3)的电流输入/输出线,MEMS谐振器被构造成使得DC电流同时与AC电流一起流过其中,以便减少施加到 AC电流,其中在输入电极侧和/或输出电极侧提供用于连续流过直流电流通过结接口的DC偏置电路(22,23,24)。
    • 4. 发明授权
    • Resonator and oscillator using same
    • 谐振器和振荡器使用相同
    • US08368473B2
    • 2013-02-05
    • US13063316
    • 2010-05-21
    • Kunihiko Nakamura
    • Kunihiko Nakamura
    • H03B5/32
    • H03H9/02409H03H9/02259H03H9/2463H03H2009/02496H03L1/026H03L7/099H03L2207/06
    • There is provided with a resonator which can correct the resonance frequency of a vibrator in a wide range and with a high accuracy and also provided with an oscillator using the resonator. In the resonator configured by the vibrator 101, electrodes 4, 5 disposed so as to oppose to parts of the surface of the vibrator 101 via gaps, and variable voltage sources 24, 25 for applying a voltage to both or one of the vibrator 101 and the electrodes 4, 5, each of the electrodes 4, 5 is configured by plural electrodes. The electrodes 4, 5 are respectively disposed via gaps close to the portions of the vibrator 101 having different vibration amplitudes. The DC voltages being applied are independently adjusted with respect to the electrodes 4, 5 which differ in distances from the shaft of the vibrator among the plural electrodes close to the vibrator 101.
    • 设置有可以在宽范围内以高精度校正振动器的谐振频率并且还设置有使用谐振器的振荡器的谐振器。 在由振动器101构成的谐振器中,通过间隙配置为与振动器101的表面的一部分相对设置的电极4,5以及用于向振动器101和/或振动器101中的一个施加电压的可变电压源24,25 电极4,5分别由电极4,5构成。 电极4,5分别经由靠近具有不同振动幅度的振动器101的部分的间隙设置。 施加的直流电压相对于靠近振动器101的多个电极中与振动器的轴的距离不同的电极4,5独立地调节。
    • 9. 发明授权
    • Torsional resonator and filter using this
    • 扭转谐振器和滤波器
    • US07741932B2
    • 2010-06-22
    • US11569883
    • 2005-07-22
    • Kunihiko NakamuraHideki Kawakatsu
    • Kunihiko NakamuraHideki Kawakatsu
    • H03H9/125H03H9/52
    • H03H3/0076H03H9/02259H03H9/02433H03H9/2463H03H2009/02519
    • A torsional resonator for suppressing unnecessary flexural vibration and providing excellent resonance characteristic is provided. A vibrator is a beam structure or a paddle-like projection structure added onto a beam structure and an electrostatic force produced due to the potential difference between an electrode and the vibrator adds a moment with the axis of the beam of the vibrator as the center axis, but does not add a force for producing flexure to the beam. As one method, the same AC signal and DC bias voltages different in polarity are applied to an electrode pair of the electrode brought away from the vibrator and the electrode brought close to the vibrator with torsional vibration of the vibrator, so that only torsional vibration can be excited.
    • 提供用于抑制不必要的弯曲振动并提供优异的谐振特性的扭转谐振器。 振动器是加在梁结构上的梁结构或桨状突起结构,由于电极和振子之间的电位差而产生的静电力与振动器的梁的轴线作为中心轴 ,但不会增加用于产生挠曲梁的力。 作为一种方法,将不同极性的相同的AC信号和DC偏置电压施加到远离振动器的电极的电极对上,并且电极靠近振动器带有振动器的扭转振动,使得只有扭转振动可以 兴奋。