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    • 61. 发明授权
    • Solid oxide fuel cell
    • 固体氧化物燃料电池
    • US08546029B2
    • 2013-10-01
    • US13040884
    • 2011-03-04
    • Toshiharu OtsukaKatsuhisa TsuchiyaTsukasa ShigezumiToshiharu OoeKiyotaka NakanoTakuya Matsuo
    • Toshiharu OtsukaKatsuhisa TsuchiyaTsukasa ShigezumiToshiharu OoeKiyotaka NakanoTakuya Matsuo
    • H01M8/06
    • H01M8/04776H01M8/04425H01M8/0612H01M8/0618H01M8/2428H01M8/243H01M2008/1293
    • To provide a solid oxide fuel cell in which the reformer is compact but is capable of supplying an appropriate quantity of fuel. The present invention is a solid oxide fuel cell (1) for generating electricity using fuel reformed by a reformer (20) and air, including a fuel supply means (38), a reformed air supply means (44), a water supply means (28) for supplying water to the reformer, a fuel supply quantity detection sensor (132) for detecting the quantity of fuel actually supplied, a fuel cell module (2), and a control means (110) for controlling each supply means so that the target quantities of fuel, reforming air, and water are fed into the reformer; the control means controls the fuel supply means to match the target fuel supply quantity, and controls the fuel supply means so that tracking performance of fuel supply quantity relative to target fuel supply quantity is higher when reforming air is being supplied to the reformer than when it is not being supplied.
    • 提供固体氧化物燃料电池,其中重整器紧凑但能够供应适量的燃料。 本发明是一种使用由重整器(20)重整的燃料和空气发电的固体氧化物型燃料电池(1),包括燃料供给装置(38),改质空气供给装置(44),供水装置 28),用于向重整器供水的燃料供给量检测传感器(132),用于检测实际供给的燃料量的燃料供给量检测传感器(132),燃料电池模块(2)和控制装置(110),用于控制每个供给装置, 将目标量的燃料,重整空气和水进料到重整器中; 控制装置控制燃料供给装置以匹配目标燃料供应量,并且控制燃料供应装置,使得当向重整器供应重整空气时,相对于目标燃料供应量的燃料供应量的跟踪性能比在 没有提供。
    • 64. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07868398B2
    • 2011-01-11
    • US11542217
    • 2006-10-04
    • Takeshi NodaHidehito KitakadoTakuya Matsuo
    • Takeshi NodaHidehito KitakadoTakuya Matsuo
    • H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L29/66757H01L29/42384H01L29/78603H01L29/78621H01L29/78675
    • A semiconductor device, which can improve the effect of a hydrogenation treatment in case of using a GOLD structure, and a method of manufacturing thereof is provided. A gate insulating film is formed on a semiconductor layer, and a source region, a drain region, and LDD regions are formed in the semiconductor layer. A main gate is formed on the gate insulating film. A sub-gate is formed on the main gate and the gate insulating film so as to cover a part of the main gate and either the LDD regions adjacent to the source region or the drain region. An interlayer insulating film containing hydrogen is formed on the sub-gate, main gate, and gate insulating film. Subsequently, a heat treatment for hydrogenation is performed to terminate a crystal defect of the semiconductor layer with hydrogen.
    • 提供了可以提高在使用GOLD结构的情况下氢化处理的效果的半导体器件及其制造方法。 在半导体层上形成栅极绝缘膜,在半导体层中形成源极区,漏极区,LDD区。 在栅极绝缘膜上形成主栅极。 在主栅极和栅极绝缘膜上形成子栅极,以覆盖主栅极的一部分和与源极区域或漏极区域相邻的LDD区域。 在子栅极,主栅极和栅极绝缘膜上形成含有氢的层间绝缘膜。 随后,进行用于氢化的热处理,以氢终止半导体层的晶体缺陷。
    • 66. 发明授权
    • Semiconductor device and method for manufacturing the same
    • 半导体装置及其制造方法
    • US07528410B2
    • 2009-05-05
    • US11584524
    • 2006-10-23
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • H01L29/12H01L29/786
    • H01L27/124H01L27/1214H01L27/1259H01L29/6675H01L29/78621H01L29/78648
    • A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25a, 25c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.
    • 公开了可以通过减少掩模数而降低成本的半导体器件,并且公开了一种用于制造半导体器件的方法。 制造半导体器件的方法包括以下步骤:形成具有源极和漏极区域10,11以及LDD区域16,17的半导体层3; 栅极绝缘膜5; 和栅电极6; 在栅极电极6和栅极绝缘膜5上形成第一和第二层间绝缘膜24,25; 将这些层间绝缘膜形成接触孔25a,25c,以便位于源极区域和漏极区域的每一个上; 和这些层间绝缘膜的开口部25b,以位于栅电极和LDD区之上; 通过开口部中的导电膜形成第二栅电极26b,以覆盖栅电极和LDD区; 和在第二层间绝缘膜上方的像素电极26a; 去除接触孔中的栅极绝缘膜; 以及形成连接到每个源极区域和漏极区域的布线27,28。
    • 67. 发明申请
    • Semiconductor Device and Manufacturing Method Thereof
    • 半导体器件及其制造方法
    • US20070170513A1
    • 2007-07-26
    • US11694467
    • 2007-03-30
    • Saishi FujikawaEtsuko AsanoTatsuya AraoTakashi YokoshimaTakuya MatsuoHidehito Kitakado
    • Saishi FujikawaEtsuko AsanoTatsuya AraoTakashi YokoshimaTakuya MatsuoHidehito Kitakado
    • H01L29/94H01L29/76H01L31/00
    • H01L29/78621H01L27/1237H01L29/42384H01L29/49H01L29/66757
    • A semiconductor device of which manufacturing steps can be simplified by doping impurities at a time, and a manufacturing method thereof. The manufacturing method of the semiconductor device comprises the steps of: forming first and second semiconductor layers over a substrate, forming a first insulating film over the first and second semiconductor layers, forming first and second conductive films thereover, forming a first gate electrode having a stacked layer of the first and second conductive films, in which a portion of the first conductive film is exposed from the second conductive film, over the first semiconductor layer with the first insulating film interposed therebetween, forming a second insulating film over the first insulating film, forming third and fourth conductive films thereover, and forming a second gate electrode having a stacked layer of the third and fourth conductive films, in which a portion of the third conductive film is exposed from the fourth conductive film, over the second semiconductor layer with the first and second insulating films interposed therebetween.
    • 通过一次掺杂杂质可以简化制造步骤的半导体器件及其制造方法。 半导体器件的制造方法包括以下步骤:在衬底上形成第一和第二半导体层,在第一和第二半导体层上形成第一绝缘膜,在其上形成第一和第二导电膜,形成具有 将第一导电膜的一部分从第二导电膜露出的第一导电膜和第二导电膜的第一绝缘膜在第一绝缘膜之上形成第二绝缘膜, 在其上形成第三和第四导电膜,并且形成第二栅电极,其具有第三导电膜和第四导电膜的堆叠层,其中第三导电膜的一部分从第四导电膜暴露在第二半导体层上, 其间插入第一绝缘膜和第二绝缘膜。
    • 69. 发明授权
    • Semiconductor device and method for manufacturing the same
    • 半导体装置及其制造方法
    • US07157321B2
    • 2007-01-02
    • US10963822
    • 2004-10-14
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • H01L21/338H01L21/84
    • H01L27/124H01L27/1214H01L27/1259H01L29/6675H01L29/78621H01L29/78648
    • A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25a, 25c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.
    • 公开了可以通过减少掩模数而降低成本的半导体器件,并且公开了一种用于制造半导体器件的方法。 制造半导体器件的方法包括以下步骤:形成具有源极和漏极区域10,11以及LDD区域16,17的半导体层3; 栅极绝缘膜5; 和栅电极6; 在栅极电极6和栅极绝缘膜5上形成第一和第二层间绝缘膜24,25; 向这些层间绝缘膜形成接触孔25a,25c,以便位于源极区域和漏极区域之上; 和这些层间绝缘膜的开口部分25b,以便位于栅电极和LDD区之上; 通过开口部中的导电膜形成第二栅电极26b,以覆盖栅电极和LDD区; 以及在第二层间绝缘膜上的像素电极26a; 去除接触孔中的栅极绝缘膜; 以及形成连接到每个源极区域和漏极区域的布线27,28。