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71. 发明授权

US08025830B2 UV nanoimprint lithography process and apparatus 有权
标题翻译： UV纳米压印光刻工艺和装置
公开(公告)号：US08025830B2
公开(公告)日：2011-09-27
申请号：US12626788
申请日：2009-11-27
申请人： Jun-Ho Jeong , HyonKee Sohn , Young-Suk Sim , Young-Jae Shin , Eung-Sug Lee , Kyung-Hyun Whang
发明人： Jun-Ho Jeong , HyonKee Sohn , Young-Suk Sim , Young-Jae Shin , Eung-Sug Lee , Kyung-Hyun Whang
IPC分类号： B29C59/00
CPC分类号： G03F7/0002 , B29C35/0888 , B29C59/022 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y30/00 , B82Y40/00 , Y10S977/887
摘要： A UV nanoimprint lithography process and its apparatus that are able to repeatedly fabricates nanostructures on a substrate (wafer, UV-transparent plate) by using a stamp that is as large as or smaller than the substrate in size are provided. The apparatus includes a substrate chuck for mounting the substrate; a stamp made of UV-transparent materials and having more than two element stamps, wherein nanostructures are formed on the surface of each element stamp; a stamp chuck for mounting the stamp; a UV lamp unit for providing UV light to cure resist applied between the element stamps and the substrate; a moving unit for moving the substrate chuck or the stamp chuck to press the resist with the element stamps and substrate; and a pressure supply unit for applying pressurized gas to some selected regions of the substrate to help complete some incompletely filled element stamps.
摘要翻译：提供了能够通过使用尺寸大于或小于基板的印模来重复地在基板（晶片，UV透明板）上制造纳米结构的UV纳米压印光刻工艺及其装置。该装置包括用于安装基板的基板卡盘; 由UV透明材料制成并具有多于两个元件印章的印章，其中纳米结构形成在每个元件印模的表面上; 用于安装印章的邮票卡盘; UV灯单元，用于提供UV光以固化施加在元件印记和基板之间的抗蚀剂; 移动单元，用于移动基板卡盘或印模卡盘以用元件印刷和基板按压抗蚀剂; 以及用于将加压气体施加到所述基板的某些选定区域以帮助完成一些未完全填充的元件印章的压力供应单元。

72. 发明授权

US08008815B2 Planar stage moving apparatus for machine 有权
标题翻译：机台平台移动装置
公开(公告)号：US08008815B2
公开(公告)日：2011-08-30
申请号：US12198476
申请日：2008-08-26
申请人： Seung-Kook Ro , Jong-Kweon Park
发明人： Seung-Kook Ro , Jong-Kweon Park
IPC分类号： H02K41/02 , H02K7/08 , B23Q1/62
CPC分类号： B23Q1/62 , B23Q5/28 , H02K7/08 , H02K11/22 , H02K41/031 , H02K2201/18
摘要： A planar stage moving apparatus for a machine includes: first to fourth linear motors for applying, between a base, i.e. a fixed body and a table, i.e. a movable body, a movement force to the table, each linear motor including a stator core on which a coil is wound and which is fixed to the base and a mover core to which a permanent magnet is attached and which is fixed to the table; an air bearing unit provided between the base and the table to move the table under the influence of magnet fields when currents are applied to the coils of the linear motors; and a linear encoder installed on one side of the table to measure movement of the table.
摘要翻译：一种用于机器的平台移动装置包括：第一至第四线性马达，用于在基座（即，固定主体和工作台之间）即即可移动体（即，移动台）上施加移动力，每个线性马达包括定子芯线圈被卷绕并且固定到基座和附接有永磁体并且固定到工作台的动子芯体; 当电流施加到线性电动机的线圈时，设置在基座和工作台之间的空气轴承单元在磁场的影响下移动工作台; 并安装在桌子一侧的线性编码器，以测量桌子的移动。

73. 发明授权

US07958566B2 AFM probe with variable stiffness 有权
标题翻译：具有可变刚度的AFM探头
公开(公告)号：US07958566B2
公开(公告)日：2011-06-07
申请号：US11962037
申请日：2007-12-20
申请人： Hak-Joo Lee , Seung Min Hyun , Jae Hyun Kim , Jung Yup Kim , Seung Woo Han , Jung Min Park , Byung Ik Choi
发明人： Hak-Joo Lee , Seung Min Hyun , Jae Hyun Kim , Jung Yup Kim , Seung Woo Han , Jung Min Park , Byung Ik Choi
IPC分类号： G01Q60/38 , G01Q60/40 , G01Q10/00 , G01Q20/00 , G01Q80/00 , G01N3/42
CPC分类号： G01Q60/38 , G01Q60/366 , G01Q70/10
摘要： Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
摘要翻译：公开了一种用于AFM的原子力显微镜（AFM）探针，更具体地说，涉及一种适用于测试尺寸在数量级或微米级的微结构的形貌和机械性能的AFM探针。为此，根据本发明的AFM探针包括一个可弹性变形的框架，其具有固定端和一个轴上的可动端; 由所述可动端支撑的AFM尖端能够沿着所述轴线的方向抵靠测试样品移动; 以及设置在所述框架的内表面上的止动件，以控制所述AFM尖端在预定范围内的移动。

74. 发明授权

US07914693B2 Stamp for micro/nano imprint lithography using diamond-like carbon and method of fabricating the same 有权
标题翻译：用于使用类金刚石碳的微/纳刻蚀平版印刷及其制造方法
公开(公告)号：US07914693B2
公开(公告)日：2011-03-29
申请号：US11582461
申请日：2006-10-18
申请人： Jun-Ho Jeong , Young-Suk Sim , Ki-Don Kim , Dae-Geun Choi , Eung-Sug Lee
发明人： Jun-Ho Jeong , Young-Suk Sim , Ki-Don Kim , Dae-Geun Choi , Eung-Sug Lee
IPC分类号： B44C1/22
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： The present invention relates to a micro/nano imprint lithography technique and in particular, to a stamp that is used in an UV-micro/nano imprint lithography process or thermal micro/nano imprint lithography process and a method for fabricating the stamp.The method for fabricating a stamp for micro/nano imprint lithography of the present invention includes i) depositing a thin film of diamond-like carbon on a substrate, ii) applying resist on the diamond-like carbon thin film, iii) patterning the resist, iv) etching the diamond-like carbon thin film by using the resist as a protective layer, and v) removing the resist.
摘要翻译：微型/纳米压印光刻技术本发明涉及一种微/纳米压印光刻技术，尤其涉及一种用于UV-微/纳刻印版光刻工艺或热微/纳印版光刻工艺的印模，以及一种用于制造印模的方法。制造本发明的微/纳刻印光刻用印模的方法包括：i）在基板上沉积类金刚石碳薄膜，ii）在金刚石状碳薄膜上涂布抗蚀剂，iii）使抗蚀剂图案化，iv）通过使用抗蚀剂作为保护层来蚀刻类金刚石碳薄膜，以及v）除去抗蚀剂。

75. 发明申请

US20110069274A1 VISION ASSISTANCE DEVICE HAVING CONDUCTIVE TRANSPARENT THIN FILM 有权
标题翻译：具有导电透明薄膜的视觉辅助装置
公开(公告)号：US20110069274A1
公开(公告)日：2011-03-24
申请号：US12993866
申请日：2009-05-21
申请人： Chang-Soo Han , Jin-Won Song , Joon-Dong Kim
发明人： Chang-Soo Han , Jin-Won Song , Joon-Dong Kim
IPC分类号： G02C11/08 , B82B1/00 , B82Y99/00
CPC分类号： G02C11/08 , A61F9/029 , H05B3/84 , H05B2203/013 , H05B2203/016 , H05B2214/04
摘要： A vision assistance device includes a lens based on a transparent material, a conductive transparent thin film contacting the lens and containing carbon nanotubes, electrodes electrically connected to the conductive transparent thin film, and a portable power supply electrically connected to the electrodes. The vision assistance device prevents fogging and retains heat.
摘要翻译：视觉辅助装置包括基于透明材料的透镜，与透镜接触并且包含碳纳米管的导电透明薄膜，与导电透明薄膜电连接的电极以及电连接到电极的便携式电源。视力辅助装置防止起雾并保持热量。

76. 发明授权

US07887635B2 Printing head for nano patterning 有权
标题翻译：纳米图案印刷头
公开(公告)号：US07887635B2
公开(公告)日：2011-02-15
申请号：US11417114
申请日：2006-05-04
申请人： Dong-Soo Kim , Won-Hee Lee , Taek-Min Lee , Doo-Sun Choi , Byung-Oh Choi
发明人： Dong-Soo Kim , Won-Hee Lee , Taek-Min Lee , Doo-Sun Choi , Byung-Oh Choi
IPC分类号： C23C16/00 , H01L21/306
CPC分类号： C23C16/00 , B01L3/0268 , B01L2400/027 , B01L2400/0439 , B33Y30/00 , B41J2/14 , B82Y30/00
摘要： The present invention provides a printing head for nano patterning including a manifold for accommodating a liquid printing material, a cartridge with an injection chamber communicating with the manifold, and a sample holder for patterning installed outside the injection chamber of the cartridge. The printing head comprises a shadow mask which is installed outside the injection chamber to be finely moved in an X-Y direction and has a single injection hole with a relatively very small size; an actuator for finely moving the shadow mask; an injection-inducing unit including a high voltage generator, a power supply electrode that is installed within the injection chamber and receives power from the high voltage generator to generate positive charges, and an opposite electrode for generating negative charges on the sample holder in a state where the shadow mask is interposed between the power supply electrode and the opposite electrode, thereby generating induced discharge from the injection chamber toward the sample holder; and a control unit for controlling the driving of the actuator so that the injection hole of the shadow mask can be moved to patterning positions corresponding to patterning data input in advance. According to the present invention, patterning accuracy can be improved, ultra-fine patterning and patterning of arbitrary shapes can be achieved, and a configuration for injecting the printing material can be simplified.
摘要翻译：本发明提供了一种用于纳米图案化的打印头，包括用于容纳液体印刷材料的歧管，具有与歧管连通的注射室的药筒，以及安装在药筒的注射室外部的图案样品保持器。打印头包括荫罩，该荫罩安装在注射室的外部以在X-Y方向上微动地移动并具有相对非常小尺寸的单个注射孔; 用于使荫罩微调的致动器; 注射诱导单元，包括高压发生器，安装在注射室内并且从高压发生器接收电力以产生正电荷的电源电极，以及在状态下在样品架上产生负电荷的相对电极其中荫罩插入在电源电极和相对电极之间，从而从注射室向样品保持器产生感应放电; 以及控制单元，用于控制致动器的驱动，使得荫罩的喷射孔可以移动到与预先输入的图案化数据相对应的图形位置。根据本发明，可以提高图形精度，可以实现任意形状的超精细图案化和图案化，并且可以简化用于注入打印材料的构造。

77. 发明授权

US07866954B2 Valve and micro fluid pump having the same 有权
标题翻译：阀和微流体泵具有相同的功能
公开(公告)号：US07866954B2
公开(公告)日：2011-01-11
申请号：US11617865
申请日：2006-12-29
申请人： Duck-jong Kim , Yun-wook Hwang , Yu-chang Kim , Sang-jin Park , Pil-woo Heo , Eui-soo Yoon , Deuk-yong Koh
发明人： Duck-jong Kim , Yun-wook Hwang , Yu-chang Kim , Sang-jin Park , Pil-woo Heo , Eui-soo Yoon , Deuk-yong Koh
IPC分类号： F04F1/06
CPC分类号： F04F1/06 , F04B19/006 , F04B53/141 , Y10T137/4643
摘要： Disclosed herein are a valve and a micro fluid pump having the same. The valve is mounted in a micro fluid pump having a capillary tube, to which a gas supply unit and a fluid transfer pipe are connected, for controlling the introduction and the discharge of fluid. The valve includes a discharge pipe filled with liquid such that the discharge pipe has a predetermined resistance pressure and constructed in a structure in which one end of the discharge pipe is connected to the capillary tube such that the discharge pipe communicates with the interior of the capillary tube, and the other end of the discharge pipe is open, thereby allowing gas out of the capillary tube through the discharge pipe when a gas pressure in the capillary tube exceeds the resistance pressure of the discharge pipe.
摘要翻译：本文公开了具有该阀和微流体泵的阀。阀安装在具有毛细管的微流体泵中，气体供给单元和流体输送管连接到毛细管上，用于控制流体的引入和排出。阀包括填充有液体的排出管，使得排出管具有预定的电阻压力，并且构造成排出管的一端连接到毛细管的结构，使得排出管与毛细管的内部连通管，排出管的另一端开放，从而当毛细管中的气体压力超过排出管的阻力压力时，通过排出管使气体从毛细管流出。

78. 发明申请

US20100133802A1 LUMINOUS ADVERTISEMENT SHEET 有权
标题翻译： LUMINOUS广告片
公开(公告)号：US20100133802A1
公开(公告)日：2010-06-03
申请号：US12598629
申请日：2007-12-05
申请人： Taik-Min Lee , Dong-Youn Shin , Chung-Hwan Kim , Jeong-Dai Jo , Dong-Soo Kim , Byung-Oh Choi
发明人： Taik-Min Lee , Dong-Youn Shin , Chung-Hwan Kim , Jeong-Dai Jo , Dong-Soo Kim , Byung-Oh Choi
IPC分类号： B42D15/00 , B44F1/00
CPC分类号： G09F13/22 , G09F17/00
摘要： The present invention relates to a luminous advertisement sheet. The luminous advertisement sheet includes a light-transmitting print sheet having an EL advertisement region formed in at least one area of the print sheet, and a general advertisement region formed in the other area thereof. The EL advertisement region has at least one of a fixed pattern portion in which a transparent electrode layer, an EL layer and a dielectric layer are sequentially laminated and a variable pattern portion in which a transparent electrode layer, an EL layer, a dielectric layer and a plurality of pixel electrode layers are sequentially laminated. The general advertisement region allows general dye printing to be performed therein. The luminous advertisement sheet further includes a pattern electrode layer laminated and printed with a conductive ink material to have a predetermined luminous pattern in at least one area of the dielectric layer laminated in the fixed pattern portion and/or the variable pattern portion. Accordingly, there are provided a luminous advertisement sheet that exhibits excellent advertisement effects and can be easily produced in a multi-line small-batch production manner and at remarkably reduced manufacturing costs, and a method of manufacturing the same.
摘要翻译：本发明涉及发光广告片。发光广告片包括在打印片的至少一个区域中形成有EL广告区的透光打印片，以及形成在其他区域中的一般广告区。 EL广告区具有其中依次层叠透明电极层，EL层和电介质层的固定图案部分和可变图案部分中的至少一个，其中透明电极层，EL层，电介质层和依次层叠多个像素电极层。通用广告区域允许在其中执行一般染料印刷。发光广告片还包括层压并印刷有导电油墨材料的图案电极层，以在层压在固定图案部分和/或可变图案部分中的电介质层的至少一个区域中具有预定的发光图案。因此，提供了一种显示出优异的广告效果并且可以容易地以多线小批量生产方式生产并且显着降低制造成本的发光广告片及其制造方法。

79. 发明申请

US20100102093A1 Hollow Actuator-Driven Droplet Dispensing Apparatus 有权
标题翻译：空心致动器驱动滴液分配装置
公开(公告)号：US20100102093A1
公开(公告)日：2010-04-29
申请号：US12606335
申请日：2009-10-27
申请人： Young Bog Ham , Jung Ho Park , So Nam Yun , Sang Gyu Choi
发明人： Young Bog Ham , Jung Ho Park , So Nam Yun , Sang Gyu Choi
IPC分类号： B65D47/18 , B05C17/005
CPC分类号： B05B1/086
摘要： A hollow actuator-driven droplet dispensing apparatus may include an elastic tube having an elastic body, defining a storage space therein, and extending a predetermined length, and a hollow actuator fitted around the elastic tube so as to generate a force and a displacement in the longitudinal direction when an electric field is applied. The hollow actuator is expanded or contracted in the longitudinal direction of the elastic tube when the external voltage is applied, thereby reducing or enlarging the volume of an inner space of the elastic tube. The droplet dispensing apparatus can press the elastic tube to expand or contract the volume of the inner space of the tube using the hollow actuator capable of quickly generating a displacement in response to an application voltage so that a fixed amount of content can be discharged out and taken into the tube.
摘要翻译：中空致动器驱动的液滴分配装置可以包括弹性管，该弹性管具有限定其中的存储空间并延伸预定长度的弹性体，以及安装在弹性管周围的中空致动器，以便在弹性管中产生力和位移施加电场时的纵向。当施加外部电压时，中空致动器在弹性管的纵向方向上膨胀或收缩，从而减小或扩大弹性管的内部空间的体积。液滴分配装置可以使用能够响应于施加电压快速产生位移的中空致动器来按压弹性管来膨胀或收缩管的内部空间的体积，使得固定量的内容物可以排出，被带入管中。

80. 发明申请

US20100091107A1 HIGH SPEED OPTICAL MONITORING SYSTEM 审中-公开
标题翻译：高速光学监测系统
公开(公告)号：US20100091107A1
公开(公告)日：2010-04-15
申请号：US12326254
申请日：2008-12-02
申请人： Dong Youn SHIN , Kyung Hyun HWANG , Taik Min LEE , Dong Soo KIM
发明人： Dong Youn SHIN , Kyung Hyun HWANG , Taik Min LEE , Dong Soo KIM
IPC分类号： H04N7/18
CPC分类号： H04N7/183 , B41J2/2142 , G01N21/276 , G01N21/278 , G01N21/85 , G01N2021/8564 , H04N5/2256 , H04N5/2259
摘要： The present invention discloses a high speed optical monitoring system being capable of monitoring clearly a subject at a high speed and having a small dimension. The high speed optical monitoring system for monitoring at least one subject which is in a stationary state or being moved, comprises at least one subject source for generating the subject; a subject source support for aligning and supporting the subject source so as to allow the subject to be placed on an identical focal space plane; an image acquisition means provided with an electrically-powered zoom lens capable of controlling a focal length between the image acquisition means and the subject, a magnification and a depth; a mirror body mounted between the subject and the image acquisition means; a mirror driving unit for changing a rotational angle of the mirror body; an image processing unit for processing an image acquired by the image acquisition means into digital data; a lighting means for illuminating the subject; and a control unit for controlling the lighting means and driving of the subject source, the image acquisition means and the mirror.
摘要翻译：本发明公开了一种高速光学监视系统，其能够以高速清晰地监视被摄体并具有小的尺寸。用于监视处于静止状态或被移动的至少一个被摄体的高速光学监视系统包括用于产生被摄体的至少一个被摄体源; 用于对准和支撑主体源的主体源支架，以便允许被摄体放置在相同的聚焦空间平面上; 具有能够控制图像获取装置和被摄体之间的焦距的倍率和深度的电动变焦镜头的图像获取装置; 安装在被摄体和图像获取装置之间的镜体; 用于改变镜体的旋转角度的镜驱动单元; 图像处理单元，用于将由图像获取装置获取的图像处理成数字数据; 用于照亮被摄体的照明装置; 以及控制单元，用于控制照明装置和驱动被摄体源，图像获取装置和反射镜。

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