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    • 9. 发明申请
    • Nano tip and fabrication method of the same
    • 纳米尖端和制造方法相同
    • US20070114457A1
    • 2007-05-24
    • US11506826
    • 2006-08-21
    • Chang-Soo HanJune-Ki Park
    • Chang-Soo HanJune-Ki Park
    • H01J37/08
    • H01J37/073G01Q70/12G01Q70/16H01J2201/30469H01J2237/06341Y10S977/876
    • The present invention relates to a nano tip and a fabrication method of the nano tip that is generally usable in mechanical, physical, and electrical devices for detecting surface signals or chemical signals, or is usable for a source scanning energy beam. The fabrication method of a nano tip according to the present invention includes providing a supporting holder that is fixed at one end thereof to a mechanical or electrical device, bonding a carbon nanotube to the free end of the supporting holder, and modifying the property or the shape of the carbon nanotube by scanning an energy beam thereto. The nano tip, having improved stiffness and perpendicularity, is fabricated by adjusting the length, the diameter, and the shape of the end of the carbon nanotube tip attached with carbon nanotubes by means of the energy beam so that the nano tip may stably and repeatedly reproduce information of a sample and may minimize a deviation between the tips.
    • 本发明涉及通常可用于检测表面信号或化学信号的机械,物理和电气装置的纳米尖端的纳米尖端和制造方法,或可用于源扫描能量束。 根据本发明的纳米尖端的制造方法包括提供一个支撑保持器,该支撑保持器的一端被固定在机械或电气装置上,将碳纳米管粘合到支撑保持器的自由端,并且改变其特性或 通过扫描能量束来形成碳纳米管。 具有改善的刚度和垂直度的纳米尖端通过借助于能量束调节碳纳米管附着的碳纳米管尖端的长度,直径和形状来制造,使得纳米尖端可以稳定和重复 再现样品的信息并且可以最小化尖端之间的偏差。