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1. 发明授权

US09281230B2 Apparatus for manufacturing a hierarchical structure 有权
标题翻译：用于制造分层结构的装置
公开(公告)号：US09281230B2
公开(公告)日：2016-03-08
申请号：US13122240
申请日：2009-09-28
申请人： Jae-Hyun Kim , Hak-Joo Lee , Seung-Min Hyun , Seung-Woo Han , Byung-Ik Choi
发明人： Jae-Hyun Kim , Hak-Joo Lee , Seung-Min Hyun , Seung-Woo Han , Byung-Ik Choi
IPC分类号： H01L21/683 , B29C43/46 , B29C43/48 , B29C47/06 , B32B27/00 , H01L23/02 , B29L9/00 , H01L23/00 , H01L25/065
CPC分类号： H01L21/6836 , B29C47/067 , B29C2043/463 , H01L24/80 , H01L24/83 , H01L24/95 , H01L25/0652 , H01L2221/68359 , H01L2221/68368 , H01L2224/27312 , H01L2224/7565 , H01L2224/83192 , H01L2224/838 , H01L2224/95145 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01033 , H01L2924/01047 , H01L2924/01057 , H01L2924/01082 , H01L2924/1461 , Y10T156/1195 , Y10T156/1705 , Y10T156/1744 , H01L2924/00
摘要： The present invention relates to an apparatus for massive manufacturing a hierarchical structure that can hierarchically form high performance micro units one a flexible substrate. For this purpose, an apparatus for manufacturing a hierarchical structure according to the present invention is provided to layer micro units provided on a dummy substrate that is made of a hard material on a target substrate that is made of a flexible material by releasing the micro units from the dummy substrate. The apparatus includes: a transfer stage flat-transferring the dummy substrate by supporting the same and a main roller rolling the target substrate by winding the same as the transfer stage proceeds and layering the micro unit of the dummy substrate on the target substrate.
摘要翻译：本发明涉及一种用于大规模制造分层结构的装置，其可以分层地形成柔性基板的高性能微单元。为此，根据本发明的用于制造分级结构的装置被提供到通过释放微单元而将由柔性材料制成的目标基板上由硬质材料制成的虚拟基板上的微单元从虚设基板。该装置包括：通过支撑该平台来传送虚设基板的转印台和通过卷绕目标基板的主滚筒作为转印台进行卷绕而进行，并将该虚设基板的微单元分层在目标基板上。

2. 发明授权

US08957690B2 Micro contact probe coated with nanostructure and method for manufacturing the same 有权
标题翻译：用纳米结构涂覆的微接触探针及其制造方法
公开(公告)号：US08957690B2
公开(公告)日：2015-02-17
申请号：US13119590
申请日：2009-02-19
申请人： Jung-Yup Kim , Hak-Joo Lee , Chang-Soo Han
发明人： Jung-Yup Kim , Hak-Joo Lee , Chang-Soo Han
IPC分类号： G01R1/067 , G01R3/00
CPC分类号： G01R3/00 , G01R1/06727 , G01R1/06744 , Y10S977/742 , Y10T29/49155
摘要： The present invention relates to a micro contact probe used for a probe card. An exemplary embodiment of the present invention provides a micro contact probe including a coating layer of a nanostructure such as carbon nanotubes formed on a surface thereof to reduce contact resistance when contacting a semiconductor chip. According to the micro contact probe of which the surface is coated with the nanostructure, contact resistance between the probe and the semiconductor chip is lowered and the high frequency characteristics are improved, such that a more accurate measurement can be obtained.
摘要翻译：本发明涉及用于探针卡的微型接触探针。本发明的示例性实施例提供了一种微接触探针，其包括在其表面上形成的诸如碳纳米管的纳米结构的涂层，以在接触半导体芯片时降低接触电阻。根据其表面被纳米结构涂覆的微接触探针，探针与半导体芯片之间的接触电阻降低，并且提高了高频特性，从而可以获得更准确的测量。

3. 发明授权

US08723541B2 Vertical micro contact probe having variable stiffness structure 有权
标题翻译：具有可变刚度结构的垂直微接触探针
公开(公告)号：US08723541B2
公开(公告)日：2014-05-13
申请号：US12991492
申请日：2009-04-30
申请人： Jung-Yup Kim , Hak-Joo Lee , Kyung-Shik Kim
发明人： Jung-Yup Kim , Hak-Joo Lee , Kyung-Shik Kim
IPC分类号： G01R1/067
CPC分类号： G01R1/06722 , G01R1/06711 , G01R1/06716 , G01R1/06733
摘要： An exemplary embodiment of the present invention provides a vertical micro contact probe that includes a column formed by longitudinally continuously stacking a plurality of basic units and a front end formed at the front end of the column and contacting an electrode pad of a semiconductor chip. The basic unit includes a probe body alternately bending to the left and right and protrusions protruding from the probe body at the left and right sides from the center of the width direction, and contacting the adjacent probe body to support the probe body under compression.
摘要翻译：本发明的一个示例性实施例提供一种垂直微接触探针，其包括通过纵向连续堆叠多个基本单元而形成的柱和形成在柱的前端的前端，并与半导体芯片的电极焊盘接触。基本单元包括从宽度方向的中心左右交替地向左右弯曲的探针体和从探针主体突出的突起，并且使相邻的探针体接触以在被压缩的状态下支撑探针体。

4. 发明授权

US07958566B2 AFM probe with variable stiffness 有权
标题翻译：具有可变刚度的AFM探头
公开(公告)号：US07958566B2
公开(公告)日：2011-06-07
申请号：US11962037
申请日：2007-12-20
申请人： Hak-Joo Lee , Seung Min Hyun , Jae Hyun Kim , Jung Yup Kim , Seung Woo Han , Jung Min Park , Byung Ik Choi
发明人： Hak-Joo Lee , Seung Min Hyun , Jae Hyun Kim , Jung Yup Kim , Seung Woo Han , Jung Min Park , Byung Ik Choi
IPC分类号： G01Q60/38 , G01Q60/40 , G01Q10/00 , G01Q20/00 , G01Q80/00 , G01N3/42
CPC分类号： G01Q60/38 , G01Q60/366 , G01Q70/10
摘要： Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
摘要翻译：公开了一种用于AFM的原子力显微镜（AFM）探针，更具体地说，涉及一种适用于测试尺寸在数量级或微米级的微结构的形貌和机械性能的AFM探针。为此，根据本发明的AFM探针包括一个可弹性变形的框架，其具有固定端和一个轴上的可动端; 由所述可动端支撑的AFM尖端能够沿着所述轴线的方向抵靠测试样品移动; 以及设置在所述框架的内表面上的止动件，以控制所述AFM尖端在预定范围内的移动。

5. 发明授权

US07246517B2 Atomic force microscope with probe with improved tip movement 有权
标题翻译：带有探头的原子力显微镜，具有改进的尖端运动
公开(公告)号：US07246517B2
公开(公告)日：2007-07-24
申请号：US11455353
申请日：2006-06-19
申请人： Hak-Joo Lee , Jae-Hyun Kim , Chung-Seog Oh , Seung-Woo Han , Shin Hur , Soon-Gyu Ko , Byung-Ik Choi
发明人： Hak-Joo Lee , Jae-Hyun Kim , Chung-Seog Oh , Seung-Woo Han , Shin Hur , Soon-Gyu Ko , Byung-Ik Choi
IPC分类号： G01B5/28
CPC分类号： G01Q60/366 , G01N3/42 , G01N2203/0286
摘要： An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.
摘要翻译：原子力显微镜探针在沿着轴的方向上提供压痕测试功能。探针具有保持尖端的尖端和臂结构。臂结构具有安装在固定台上的一端，另一端连接到AFM顶端，以及具有相对于包括其两端位于其上的轴线的平面对称的形状的中空框架。

6. 发明申请

US20060171579A1 Apparatus for measuring adhesive and frictional properties of polymer 有权
标题翻译：用于测量聚合物的粘合剂和摩擦性能的装置
公开(公告)号：US20060171579A1
公开(公告)日：2006-08-03
申请号：US11132508
申请日：2005-05-19
申请人： Hak-joo Lee , Shin Hur , Jae-hyun Kim , Seung-woo Han , Jung-yup Kim , Ki-ho Cho
发明人： Hak-joo Lee , Shin Hur , Jae-hyun Kim , Seung-woo Han , Jung-yup Kim , Ki-ho Cho
IPC分类号： G06K9/00 , G01N19/04
CPC分类号： G01N19/02 , G01N3/42 , G01N19/04
摘要： Disclosed herein is an apparatus for measuring adhesive and frictional properties of a polymer hemisphere relative to a contact plate provided in the apparatus. The apparatus comprise a body having a movable table installed to move along an X-axis and Y-axis and a vertical column positioned at a rear side of the movable table, a sample mount provided on the movable table and having a mirror to reflect surface images of a horizontal contact plate, a head assembly located at a front side of the column and having a polymer hemisphere used to press a surface of the contact plate to implement an adhesive force test, a camera device located at a front side of the mirror to capture the surface images of the contact plate during the adhesive force test, and a control device for analyzing various data inputted thereto during the adhesive force test.
摘要翻译：本文公开了一种用于测量聚合物半球相对于设备中提供的接触板的粘合剂和摩擦性能的装置。该装置包括：主体，其具有安装成沿着X轴和Y轴移动的可移动台和位于可移动台的后侧的垂直柱;设置在可移动台上的具有反射表面的反射镜水平接触板的图像，位于柱的前侧的头部组件，并且具有用于按压接触板的表面以实现粘合力测试的聚合物半球，位于镜的前侧的相机装置以在粘合力测试期间捕获接触板的表面图像，以及用于在粘合力测试期间分析输入到其中的各种数据的控制装置。

7. 发明授权

US08551353B2 Hierarchical structure and manufacturing method thereof 有权
标题翻译：分层结构及其制造方法
公开(公告)号：US08551353B2
公开(公告)日：2013-10-08
申请号：US12995204
申请日：2009-08-24
申请人： Jae-Hyun Kim , Hak-Joo Lee , Seung-Min Hyun , Hyun-Ju Choi , Byung-Ik Choi , Ki-Don Kim , Dae-Guen Choi
发明人： Jae-Hyun Kim , Hak-Joo Lee , Seung-Min Hyun , Hyun-Ju Choi , Byung-Ik Choi , Ki-Don Kim , Dae-Guen Choi
IPC分类号： C03C15/00
CPC分类号： B81C1/00095 , B33Y80/00 , B81B2207/056 , B81B2207/07 , B82Y30/00 , Y10T428/24479 , Y10T428/24851
摘要： Provided are a shape of a hierarchical structure, an engineering effect of the hierarchical structure according to the shape, an increasing method of the engineering effect, an application method of the hierarchical structure for novel material or parts, and a mass-manufacturing method of the hierarchical structure. The present invention relates to a hierarchical structure and a manufacturing method thereof, and includes a hierarchical structure in which at least one nano-object that has a characteristic length of a nanoscale region in an internal matrix is arranged in a predetermined pattern. According to the exemplary embodiments of the present invention, an excellent characteristic that is generated in a nanoscale region may be used in a structure of a macroscopic scale region, and structures that have different scales may be simply interconnected or interfaced regardless of the different scales.
摘要翻译：提供了层次结构的形状，根据形状的层次结构的工程效果，工程效果的增加方法，新颖材料或部件的分级结构的应用方法以及批量制造方法层次结构。本发明涉及一种层次结构及其制造方法，并且包括其中在内部矩阵中具有纳米尺度区域的特征长度的至少一个纳米对象以预定图案布置的分层结构。根据本发明的示例性实施例，在纳米尺度区域中产生的优异特性可以用于宏观尺度区域的结构，并且具有不同尺度的结构可以简单地互连或接合，而不管不同的尺度。

8. 发明申请

US20130162276A1 PROBE CARD AND METHOD FOR MANUFACTURING SAME 有权
标题翻译：探针卡及其制造方法
公开(公告)号：US20130162276A1
公开(公告)日：2013-06-27
申请号：US13821045
申请日：2011-09-07
申请人： Hak Joo Lee , Jung Yup Kim , Jun-Hyub Park
发明人： Hak Joo Lee , Jung Yup Kim , Jun-Hyub Park
IPC分类号： G01R3/00 , G01R1/073
CPC分类号： G01R1/07307 , G01R1/07378 , G01R3/00 , Y10T29/49126
摘要： Provided is a probe card including a plurality of unit plates including pad areas and contact probe areas, a plurality of electrode pads formed in the pad areas, a plurality of contact probes formed in the contact probe areas, and a plurality of interconnecting layers electrically connecting the electrode pads and the contact probes. The plurality of unit plates has different sizes and are arranged and laminated so as to expose all the pad areas of each unit plate.
摘要翻译：提供了一种探针卡，其包括多个单元板，包括焊盘区域和接触探针区域，形成在焊盘区域中的多个电极焊盘，形成在接触探针区域中的多个接触探针，以及多个互连层电极焊盘和接触探针。多个单元板具有不同的尺寸并且被布置和层叠以便暴露每个单元板的所有垫区域。

9. 发明申请

US20110163772A1 MICRO CONTACT PROBE COATED WITH NANOSTRUCTURE AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：微型接触探针用纳米结构及其制造方法
公开(公告)号：US20110163772A1
公开(公告)日：2011-07-07
申请号：US13119590
申请日：2009-02-19
申请人： Jung-Yup Kim , Hak-Joo Lee , Chang-Soo Han
发明人： Jung-Yup Kim , Hak-Joo Lee , Chang-Soo Han
IPC分类号： G01R1/067 , H05K3/10
CPC分类号： G01R3/00 , G01R1/06727 , G01R1/06744 , Y10S977/742 , Y10T29/49155
摘要： The present invention relates to a micro contact probe used for a probe card.An exemplary embodiment of the present invention provides a micro contact probe including a coating layer of a nanostructure such as carbon nanotubes formed on a surface thereof to reduce contact resistance when contacting a semiconductor chip.According to the micro contact probe of which the surface is coated with the nanostructure, contact resistance between the probe and the semiconductor chip is lowered and the high frequency characteristics are improved, such that a more accurate measurement can be obtained.
摘要翻译：本发明涉及用于探针卡的微型接触探针。本发明的示例性实施例提供了一种微接触探针，其包括在其表面上形成的诸如碳纳米管的纳米结构的涂层，以在接触半导体芯片时降低接触电阻。根据其表面被纳米结构涂覆的微接触探针，探针与半导体芯片之间的接触电阻降低，并且提高了高频特性，从而可以获得更准确的测量。

10. 发明申请

US20110057675A1 PERPENDICULAR FINE-CONTACT PROBE HAVING A VARIABLE-STIFFNESS STRUCTURE 有权
标题翻译：具有可变刚度结构的PERPENDICULAR FINE-CONTACT PROBE
公开(公告)号：US20110057675A1
公开(公告)日：2011-03-10
申请号：US12991492
申请日：2009-04-30
申请人： Jung-Yup Kim , Hak-Joo Lee , Kyung-Shik Kim
发明人： Jung-Yup Kim , Hak-Joo Lee , Kyung-Shik Kim
IPC分类号： G01R1/067
CPC分类号： G01R1/06722 , G01R1/06711 , G01R1/06716 , G01R1/06733
摘要： An exemplary embodiment of the present invention provides a vertical micro contact probe that includes a column formed by longitudinally continuously stacking a plurality of basic units and a front end formed at the front end of the column and contacting an electrode pad of a semiconductor chip. The basic unit includes a probe body alternately bending to the left and right and protrusions protruding from the probe body at the left and right sides from the center of the width direction, and contacting the adjacent probe body to support the probe body under compression.
摘要翻译：本发明的一个示例性实施例提供一种垂直微接触探针，其包括通过纵向连续堆叠多个基本单元而形成的柱和形成在柱的前端的前端，并与半导体芯片的电极焊盘接触。基本单元包括从宽度方向的中心左右交替地向左右弯曲的探针体和从探针主体突出的突起，并且使相邻的探针体接触以在被压缩的状态下支撑探针体。

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