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1. 发明申请

US20210025919A1 ACTIVE NOISE ISOLATION FOR TUNNELING APPLICATIONS (ANITA) 有权
公开(公告)号：US20210025919A1
公开(公告)日：2021-01-28
申请号：US16964453
申请日：2019-01-24
申请人： The Penn State Research Foundation
发明人： Eric Hudson , Lavish Pabbi
IPC分类号： G01Q70/04 , G01Q60/16 , G01Q30/06 , G01Q20/00
摘要： An active noise isolation apparatus and method for cancelling vibration noise from the probe signal of a scanning tunneling microscope by generating a correction signal by convolution based on the probe signal and the sensor signal, which is based on the ambient vibration that adds noise to the probe signal.

2. 发明申请

US20180364277A1 A METHOD TO MEASURE NANOSCALE MECHANICAL PROPERTIES USING ATOMIC FORCE MICROSCOPY WITHOUT INITIALLY CHARACTERIZING CANTILEVER TIP GEOMETRY 审中-公开
公开(公告)号：US20180364277A1
公开(公告)日：2018-12-20
申请号：US16060435
申请日：2016-12-08
申请人： Sean Andrew Cantrell , Sean Murdock
发明人： Sean Andrew Cantrell , Sean Murdock
IPC分类号： G01Q30/06 , G01Q10/06 , G01Q60/28 , G01B5/28 , G01Q20/00
摘要： The atomic force microscope has evolved from purely a qualitative apparatus that measures the topography of a sample into a quantitative tool that also measures mechanical properties of a sample at the nanoscale. Prior technologies that attempt to measure the bulk parameters must characterize the geometry of the atomic force microscope cantilever tip in a separate experiment before being able to measure the mechanical properties of the sample. This is the single biggest obstruction to the accuracy and expediency of quantitative atomic force microscopy methodologies. Present techniques are also unable to probe the full set of viscoelastic properties of a material as they do not include any method to measure the damping of samples. We propose a method herein that simultaneously circumvents the need for a separate experiment to characterize the tip geometry and measures the full set of viscoelastic properties of a material.

3. 发明授权

US09995765B2 Method and apparatus of using peak force tapping mode to measure physical properties of a sample 有权
公开(公告)号：US09995765B2
公开(公告)日：2018-06-12
申请号：US15077708
申请日：2016-03-22
申请人： Bruker Nano, Inc.
发明人： Chanmin Su , Jian Shi , Yan Hu , Shuiqing Hu , Ji Ma
IPC分类号： G01Q20/00 , G01Q20/04 , G01Q10/06 , G01Q60/32
CPC分类号： G01Q20/04 , G01Q10/065 , G01Q20/00 , G01Q60/32
摘要： Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

4. 发明授权

US09869694B2 Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode 有权
公开(公告)号：US09869694B2
公开(公告)日：2018-01-16
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/24 , G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

5. 发明申请

US20170199220A1 Systems and Devices for Non-Destructive Surface Chemical Analysis of Samples 有权
公开(公告)号：US20170199220A1
公开(公告)日：2017-07-13
申请号：US15428552
申请日：2017-02-09
申请人： AIST-NT, Inc.
发明人： Sergey A. Saunin , Andrey V. Krayev , Vladimir V. Zhishimontov , Vasily V. Gavrilyuk , Leonid N. Grigorov , Alexey V. Belyaev , Dmitry A. Evplov
IPC分类号： G01Q30/02 , G01Q20/00 , G01Q10/00
CPC分类号： G01Q30/02 , G01Q10/00 , G01Q20/00 , G01Q30/025 , G01Q60/06
摘要： Aspects of the present invention include systems and devices useful for surface chemical analysis of solid samples by Tip Enhanced Raman Spectrometry (“TERS”), and particularly it relates to devices useful for chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, and devices for non-destructive analysis combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining important information regarding vibration spectra of atoms and molecular groups contained in a thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that use sensors to carefully regulate the motion of, and force applied to, probes of atomic force microscopes.

6. 发明申请

US20170138982A1 METHOD OF MEASURING A TOPOGRAPHIC PROFILE AND/OR A TOPOGRAPHIC IMAGE 审中-公开
公开(公告)号：US20170138982A1
公开(公告)日：2017-05-18
申请号：US15001049
申请日：2016-01-19
申请人： Anton Paar TriTec SA
发明人： Bertrand Bellaton , Richard Consiglio , Jacques Woirgard
IPC分类号： G01Q20/00 , G01Q60/38
CPC分类号： G01Q20/00 , G01N3/42 , G01Q30/02 , G01Q60/38
摘要： Measuring a topographic profile and/or a topographic image of a surface of a sample includes positioning an indenter out of contact with a sample and in a constant position with respect to a headstock; positioning a topographic tip to detect a surface of the sample and positioning a reference structure at a predetermined distance from said surface; measuring the relative position of the indenter with respect to the reference structure by a relative position sensor; translating said sample perpendicular to said longitudinal axis while maintaining the reference structure at said predetermined distance from the surface of the sample by the feedback control system and the second actuator while measuring the relative position of the indenter with respect to the reference structure by the relative position sensor; and generating a topographic profile and/or a topographic image based on measurements of the relative position.

7. 发明授权

US09588136B2 Method and apparatus of operating a scanning probe microscope 有权
标题翻译：操作扫描探针显微镜的方法和装置
公开(公告)号：US09588136B2
公开(公告)日：2017-03-07
申请号：US15137937
申请日：2016-04-25
申请人： Bruker Nano, Inc.
发明人： Yan Hu , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q60/32 , G01Q20/02 , G01Q60/30 , G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。通过改进的分辨率和高的样品通量实现样品成像和力学性能测绘，该模式可以在不同的环境中工作，包括气态，流体和真空。

8. 发明授权

US09535086B2 Interface of a microfabricated scanning force sensor for combined force and position sensing 有权
标题翻译：用于组合力和位置感测的微加工扫描力传感器的接口
公开(公告)号：US09535086B2
公开(公告)日：2017-01-03
申请号：US14742105
申请日：2015-06-17
申请人： FEMTOTOOLS AG
发明人： Felix Beyeler , Simon Muntwyler
IPC分类号： G01Q20/00 , B81C99/00 , G01Q20/04 , G01Q60/36 , G01N3/42 , G01L1/14 , G01L5/00 , G01Q10/04
CPC分类号： G01Q20/00 , B81C99/005 , G01L1/148 , G01L5/0038 , G01N3/42 , G01N2203/0286 , G01Q10/045 , G01Q20/04 , G01Q60/366
摘要： A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip.
摘要翻译：一种用于微机械和纳米机械测试和纳米压痕的微型制造传感器。传感器包括用于感测施加到样本的力的力感测电容梳驱动器，用于感测样品位置的感测位置感应电容梳驱动器和微制造致动器以向样品施加负载。上述所有传感器组件都是单片集成在同一个硅MEMS芯片上。

9. 发明申请

US20160258980A1 Material Property Measurements Using Multiple Frequency Atomic Force Microscopy 审中-公开
标题翻译：使用多频率原子力显微镜的材料属性测量
公开(公告)号：US20160258980A1
公开(公告)日：2016-09-08
申请号：US15064405
申请日：2016-03-08
申请人： OXFORD INSTRUMENTS PLC , OXFORD INSTRUMENTS AFM INC.
发明人： Roger Proksch , Roger Callahan
IPC分类号： G01Q20/00 , G01Q60/24
CPC分类号： G01Q20/00 , G01Q60/24 , G01Q60/32
摘要： Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
摘要翻译：描述了用于提取在原子力显微镜和有关MEMs工作中的振荡悬臂或其它振荡传感器的较高本征模或谐波中携带的信息的装置和技术。还描述了使用具有多个激励信号的接触谐振提取信息的类似装置和技术。

10. 发明申请

US20160154022A1 PROBE MICROSCOPE 有权
标题翻译：探针显微镜
公开(公告)号：US20160154022A1
公开(公告)日：2016-06-02
申请号：US14905378
申请日：2014-07-18
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/00 , G01Q20/00
CPC分类号： G01Q10/00 , G01Q10/065 , G01Q20/00
摘要： A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
摘要翻译：一种扫描探针显微镜，包括：信号发生器，用于为致动器提供驱动信号，以使样本重复地朝向和远离样品移动。响应于探测器与样品的相互作用的检测，驱动信号被修改以使探针远离样品。驱动信号包括其中驱动信号的强度增加到最大值的接近阶段; 以及回缩阶段，其中响应于表面位置的检测，驱动信号的强度从最大值减小到最小值。在退回阶段，驱动信号的强度保持在最小值，然后在收回阶段结束时增加。缩回阶段的持续时间取决于接近阶段的最大值。

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