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71. 发明申请

US20120133450A1 METHOD OF MULTI-STAGE SUBSTRATE ETCHING AND TERAHERTZ OSCILLATOR MANUFACTURED USING THE SAME METHOD 有权
标题翻译：使用相同方法制造的多阶段衬底蚀刻和TERAHERTZ振荡器的方法
公开(公告)号：US20120133450A1
公开(公告)日：2012-05-31
申请号：US13306146
申请日：2011-11-29
申请人： Chan Wook BAIK , Jong Seok KIM , Seong Chan JUN , Sun Il KIM , Jong Min KIM , Chan Bong JUN , Sang Hun LEE
发明人： Chan Wook BAIK , Jong Seok KIM , Seong Chan JUN , Sun Il KIM , Jong Min KIM , Chan Bong JUN , Sang Hun LEE
IPC分类号： H03B5/30 , H01L21/762
CPC分类号： H01P11/003 , Y10T428/24802
摘要： A method of multi-stage substrate etching and a terahertz oscillator manufactured by using the method are provided. The method comprises the steps of forming a first mask pattern on any one surface of a first substrate, forming a hole by etching the first substrate using the first mask pattern as an etching mask, bonding, to the first substrate, a second substrate having the same thickness as a depth to be etched, forming a second mask pattern on the second substrate bonded, forming a hole by etching the second substrate using the second mask pattern as an etching mask, and removing an oxide layer having the etching selectivity between the first substrate and the second substrate.
摘要翻译：提供了一种多级衬底蚀刻的方法和使用该方法制造的太赫兹振荡器。该方法包括以下步骤：在第一衬底的任何一个表面上形成第一掩模图案，通过使用第一掩模图案作为蚀刻掩模将第一衬底蚀刻形成孔，将第一衬底粘合到第一衬底上，与要蚀刻的深度相同的厚度，在第二衬底上形成第二掩模图案，通过使用第二掩模图案作为蚀刻掩模蚀刻第二衬底形成孔，并且去除在第一衬底之间具有蚀刻选择性的氧化物层基板和第二基板。

72. 发明授权

US08179201B2 Resonator 失效
标题翻译：谐振器
公开(公告)号：US08179201B2
公开(公告)日：2012-05-15
申请号：US12892672
申请日：2010-09-28
申请人： Robert James Pascoe Lander
发明人： Robert James Pascoe Lander
IPC分类号： H03B5/30 , H03L1/00 , H01P1/30
CPC分类号： H03H9/02448 , B81B3/0072 , B81B2201/0271 , B81B2203/0118 , H03H9/2447 , Y10T29/49002
摘要： A resonator having an effective spring constant (kz) and comprising a beam having a beam spring constant (kB) adapted to resonate in an oscillation direction, and extending at a non-zero angle (θ) to the oscillation direction, wherein the resonator has a predetermined geometry and is formed from one or more materials, the or each material having a coefficient of thermal expansion (CTE), the CTE of the or each material together with the predetermined geometry of the resonator causing θ to vary with temperature, such that the temperature dependence of the beam spring constant is compensated for, resulting in the effective spring constant of the resonator remaining substantially constant within an operating temperature range.
摘要翻译：一种具有有效弹簧常数（kz）并且包括具有适于在振荡方向上谐振并且以非零角度（θ）延伸到振荡方向的光束弹簧常数（kB）的光束的谐振器，其中所述谐振器具有预定的几何形状并且由一种或多种材料形成，所述材料或每种材料具有热膨胀系数（CTE），所述材料的每个材料的CTE以及所述谐振器的预定几何形状引起所述材料; 随着温度而变化，使得光束弹簧常数的温度依赖性被补偿，导致共振器的有效弹簧常数在工作温度范围内保持基本恒定。

73. 发明授权

US08159307B2 Logical element 有权
标题翻译：逻辑元素
公开(公告)号：US08159307B2
公开(公告)日：2012-04-17
申请号：US12678737
申请日：2008-09-19
申请人： Hiroshi Yamaguchi , Imran Mahboob , Hajime Okamoto
发明人： Hiroshi Yamaguchi , Imran Mahboob , Hajime Okamoto
IPC分类号： H03B5/30
CPC分类号： H03H9/2463 , G11C11/20 , G11C19/12 , H03H9/02259 , H03H2009/02496 , H03K19/162
摘要： In a logical element, supporting portions, and a beam supported by them at two ends are formed. The beam has a back side surface spaced apart from the top side surface of a substrate, creating a space between the facing surfaces of the beam and substrate. An excitation electrode is formed on one supporting portion, whereas an oscillation detecting electrode is formed on the other supporting portion.
摘要翻译：在逻辑元件中，形成支撑部分和由它们在两端支撑的梁。光束具有与衬底的顶侧表面间隔开的后侧表面，在光束和衬底的相对表面之间产生空间。激励电极形成在一个支撑部分上，而振荡检测电极形成在另一支撑部分上。

74. 发明申请

US20120032747A1 MEMS OSCILLATOR 有权
标题翻译： MEMS振荡器
公开(公告)号：US20120032747A1
公开(公告)日：2012-02-09
申请号：US13198067
申请日：2011-08-04
申请人： Petrus Antonius Thomas Marinus Vermeeren , Kim Phan Le
发明人： Petrus Antonius Thomas Marinus Vermeeren , Kim Phan Le
IPC分类号： H03B5/30 , H02N1/08
CPC分类号： H03H9/02259
摘要： A piezoresistive MEMS oscillator comprises a resonator body, first and second drive electrodes located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode connected to a respective anchor point. The voltages at the electrodes are controlled and/or processed such that the feedthrough AC current from one drive electrode to the sense electrode is at least partially offset by the feedthrough AC current from the other drive electrode to the sense electrode.
摘要翻译：压电MEMS振荡器包括谐振器体，位于谐振器本体附近的第一和第二驱动电极，用于提供致动信号; 以及至少连接到相应锚点的第一感测电极。电极处的电压被控制和/或处理，使得从一个驱动电极到感测电极的馈通AC电流至少部分地被从另一驱动电极到感测电极的馈通AC电流偏移。

75. 发明申请

US20120013412A1 MEMS RESONATOR DEVICES 有权
标题翻译： MEMS谐振器器件
公开(公告)号：US20120013412A1
公开(公告)日：2012-01-19
申请号：US13241638
申请日：2011-09-23
申请人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
IPC分类号： H03B5/30
CPC分类号： H03H9/02244 , G04C3/12 , G04F5/063 , H03B5/30 , H03H3/0072 , H03H9/02433 , H03H9/02448 , H03H9/2431
摘要： Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
摘要翻译：实施例涉及微机电系统（MEMS）装置，系统和方法。在一个实施例中，MEMS谐振装置包括被配置为提供定时的谐振元件; 以及布置在谐振器元件上的至少一个被动温度补偿结构。

76. 发明申请

US20120007685A1 RESONATOR ELEMENT, RESONATOR, AND OSCILLATOR 有权
标题翻译：谐振器元件，谐振器和振荡器
公开(公告)号：US20120007685A1
公开(公告)日：2012-01-12
申请号：US13176332
申请日：2011-07-05
申请人： Akinori YAMADA
发明人： Akinori YAMADA
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03H9/02102 , H03H9/0519 , H03H9/1021 , H03H9/21
摘要： A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.
摘要翻译：谐振器元件包括：至少一个谐振臂延伸，其中所述谐振臂具有高于其热弛豫频率的机械共振频率，所述谐振臂具有沟槽部分，所述沟槽部分包括底部，第一侧表面，其沿着谐振臂的纵向方向延伸并与打开的主表面和底部接触;以及第二侧表面，其面对第一侧表面，底部设置在它们之间并与开放的主体接触表面和底部，并且所述槽部具有从靠近所述底部的所述第一侧表面的一部分延伸到靠近所述底部的所述第二侧表面的一部分的非电极区域，并且其中没有电极提供。

77. 发明申请

US20120001700A1 RESONATOR 有权
标题翻译：谐振器
公开(公告)号：US20120001700A1
公开(公告)日：2012-01-05
申请号：US13165595
申请日：2011-06-21
申请人： Robert J. P. Lander
发明人： Robert J. P. Lander
IPC分类号： H03B5/30 , H01L41/22
CPC分类号： H01F1/08 , B22D7/005 , B22F1/0003 , B22F3/20 , B22F3/24 , B22F9/04 , B22F2003/202 , B22F2003/248 , B22F2009/041 , B22F2304/05 , B22F2998/10 , C22C1/02 , C22C22/00 , H01F1/047 , H03H3/0072 , H03H9/02448 , H03H9/2447 , Y10T29/42
摘要： A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator. The method includes the steps of forming the resonator from the first material; applying the second material to the resonator; and controlling the quantity of the second material applied to the resonator by the geometry of the resonator.
摘要翻译：一种由具有第一杨氏模量和第一杨氏模量的第一温度系数的第一材料形成的MEMS谐振器的制造方法，以及具有第二杨氏模量和第二杨氏模量的第二温度系数的第二材料，的第二温度系数至少在谐振器的工作条件下与第一温度系数的符号相反。该方法包括从第一材料形成谐振器的步骤; 将所述第二材料施加到所述谐振器; 以及通过谐振器的几何形状来控制施加到谐振器的第二材料的量。

78. 发明申请

US20110309891A1 MICRO-ELECTROMECHANICAL RESONATOR GEOMETRY 有权
标题翻译：微机电谐振器几何
公开(公告)号：US20110309891A1
公开(公告)日：2011-12-22
申请号：US13161818
申请日：2011-06-16
申请人： Casper van der Avoort
发明人： Casper van der Avoort
IPC分类号： H03B5/30
CPC分类号： H03H3/0076 , H03H9/2452 , H03H2009/02251 , H03H2009/0233
摘要： A micro-electromechanical resonator suspended from an anchor. The resonator has: a length; a first width at a first distance from the anchor; and a second width at a second, greater distance from the anchor. The second width is greater than the first width, and the width of the resonator tapers gradually along at least part of its length from the second width to the first width.
摘要翻译：从锚固器悬挂的微机电谐振器。谐振器具有：长度; 距离锚的第一距离处的第一宽度; 并且距离锚的第二宽度更大。第二宽度大于第一宽度，并且谐振器的宽度沿其长度的至少一部分从第二宽度逐渐逐渐变细到第一宽度。

79. 发明申请

US20110279188A1 RESONATOR USING CARBON NANO SUBSTANCE AND METHOD OF MANUFACTURING RESONATOR 有权
标题翻译：使用碳纳米材料的谐振器和制造谐振器的方法
公开(公告)号：US20110279188A1
公开(公告)日：2011-11-17
申请号：US13105070
申请日：2011-05-11
申请人： Jea Shik Shin , Seong Chan Jun , Yun Kwon Park , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim
发明人： Jea Shik Shin , Seong Chan Jun , Yun Kwon Park , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim
IPC分类号： H03B5/30 , B05D5/12 , B82Y40/00
CPC分类号： H03H9/2463 , B82Y30/00 , H03H2009/02322
摘要： A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon carbide layer.
摘要翻译：提供了谐振器和制造谐振器的方法。谐振器包括形成在衬底上的牺牲层和形成在牺牲层上的谐振结构，谐振结构包括碳纳米物质层和碳化硅层。

80. 发明授权

US08044736B2 Timing oscillators and related methods 有权
标题翻译：定时振荡器及相关方法
公开(公告)号：US08044736B2
公开(公告)日：2011-10-25
申请号：US12111535
申请日：2008-04-29
申请人： Pritiraj Mohanty , Klaus Juergen Schoepf , Alexei Gaidarzhy , Guiti Zolfagharkhani , David M. Chen , Matthew J. Crowley
发明人： Pritiraj Mohanty , Klaus Juergen Schoepf , Alexei Gaidarzhy , Guiti Zolfagharkhani , David M. Chen , Matthew J. Crowley
IPC分类号： H03B5/30
CPC分类号： H03L1/00 , H03B5/30 , H03L1/04 , H03L7/16
摘要： Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit.
摘要翻译：描述了定时振荡器以及相关方法和设备。定时振荡器可以包括具有耦合到主要元件的主要元件和次要元件的机械谐振结构。定时振荡器可以以非常高的频率产生具有低相位噪声的稳定信号，这允许定时振荡器在包括计算机和移动电话在内的多个设备中被有效地用于时间和数据同步目的。由定时振荡器产生的信号可以使用驱动电路和补偿电路进行调谐。

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