专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20180191330A1 RESONATOR AND RESONANCE DEVICE 审中-公开
公开(公告)号：US20180191330A1
公开(公告)日：2018-07-05
申请号：US15904975
申请日：2018-02-26
申请人： Murata Manufacturing Co., Ltd.
发明人： Toshio Nishimura , Ville Kaajakari
IPC分类号： H03H9/24 , H03H9/02 , H03H9/05 , H03H9/10
CPC分类号： H03H9/2405 , H03H9/02433 , H03H9/0595 , H03H9/1057 , H03H2009/0244
摘要： A resonator that includes a piezoelectric vibrator, a frame, and a first node generator between the piezoelectric vibrator and the frame. Moreover, a first connecting arm connects the first node generator to the piezoelectric vibrator that opposes the first, and a first holding arm connects the first node generator to a part of the frame that opposes the first node generator. The first node generator includes a width extending in a second direction, which is orthogonal to a first direction of the first connecting arm, that is a maximum width where the first node generator is closer to the first connecting arm than a center of the first node generator relative to the first direction. Moreover, the width of the first node generator gradually decreases from the maximum width as the first node generator extends towards the first holding arm.

2. 发明授权

US08951821B2 Method for producing oscillator 有权
标题翻译：振荡器的制造方法
公开(公告)号：US08951821B2
公开(公告)日：2015-02-10
申请号：US14093290
申请日：2013-11-29
申请人： Seiko Epson Corporation
发明人： Takahiko Yoshizawa
IPC分类号： H01L21/00 , B81C1/00
CPC分类号： H03H9/2457 , H03H3/0072 , H03H9/02433
摘要： A method for producing an oscillator includes: (a) forming a first layer on a substrate; (b) ion implanting a first impurity into a first region of the first layer; (c) forming a first electrode having a tapered plane on a side surface thereof by patterning the first layer; (d) forming a sacrificial layer on the first electrode and on the tapered plane of the first electrode; (e) forming a second electrode on the substrate and the sacrificial layer; and (f) removing the sacrificial layer. The step (b) is performed so that the concentration of the first impurity monotonically decreases from the upper surface side to the lower surface side in a region located at a depth of more than 10 nm from the upper surface of the first electrode.
摘要翻译：制造振荡器的方法包括：（a）在基板上形成第一层; （b）将第一杂质离子注入第一层的第一区域; （c）通过对所述第一层进行构图而在其侧表面上形成具有锥形平面的第一电极; （d）在第一电极上和第一电极的锥形平面上形成牺牲层; （e）在所述衬底和所述牺牲层上形成第二电极; 和（f）去除牺牲层。执行步骤（b），使得第一杂质的浓度在距第一电极的上表面大于10nm的深度的区域中从上表面侧到下表面侧单调减小。

3. 发明授权

US08749315B2 Resonator electrode shields 有权
标题翻译：谐振器电极屏蔽
公开(公告)号：US08749315B2
公开(公告)日：2014-06-10
申请号：US13561862
申请日：2012-07-30
申请人： David Raymond Pedersen , Aaron Partridge , Thor Juneau
发明人： David Raymond Pedersen , Aaron Partridge , Thor Juneau
IPC分类号： H03B5/30
CPC分类号： H03H9/2405 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2457 , H03H9/2468 , H03H2009/02456 , H03H2009/02496
摘要： A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.
摘要翻译：一种MEMS谐振器系统，其减少由不同系统元件之间的不期望的电容耦合引起的干扰信号。在一个实施例中，该系统包括MEMS谐振器，电极和至少一个谐振器电极屏蔽。在某些实施例中，谐振器电极屏蔽件通过防止或减少谐振器电极与支撑和辅助元件之间的电容耦合，确保谐振器电极与一个或多个分流节点或MEMS谐振器的有源元件相互作用的MEMS谐振器结构。通过使用一个或多个谐振器电极屏蔽减少干扰信号的有害影响，提出了相对于现有技术方法的更简单，更低干扰和更有效的系统。

4. 发明授权

US08680951B2 MEMS resonator 有权
标题翻译： MEMS谐振器
公开(公告)号：US08680951B2
公开(公告)日：2014-03-25
申请号：US12993486
申请日：2009-05-08
申请人： Peter G. Steeneken
发明人： Peter G. Steeneken
IPC分类号： H03H9/00 , H01P7/00
CPC分类号： H03H9/2436 , H03H9/02244 , H03H9/02433 , H03H2009/0237 , H03H2009/2442 , Y10T29/49002
摘要： A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
摘要翻译：包括具有各向异性方向弹性特性的材料的微机电谐振器。谐振器的形状使得从谐振器的质心到谐振器的周边边缘上的第一点的第一方向上的第一距离大于从质心到第二不同点的第二方向上的第二距离在边缘。对于每个第一方向和每第二方向都是如此，其中材料在第一方向上具有比第二方向更小的弹性模量。

5. 发明授权

US08667665B2 Method of manufacturing a microelectromechanical system (MEMS) resonator 有权
标题翻译：制造微机电系统（MEMS）谐振器的方法
公开(公告)号：US08667665B2
公开(公告)日：2014-03-11
申请号：US13562684
申请日：2012-07-31
申请人： Paul Merritt Hagelin , Charles Grosjean
发明人： Paul Merritt Hagelin , Charles Grosjean
IPC分类号： H04R31/00
CPC分类号： H03H9/02448 , H01L41/22 , H01L41/253 , H02N1/00 , H03B5/30 , H03B5/32 , H03H3/0072 , H03H3/0073 , H03H3/0076 , H03H9/02244 , H03H9/02433 , H03H9/125 , H03H9/21 , H03H9/2405 , H03H9/2468 , H03H9/2484 , H03H2009/02251 , H03H2009/02283 , H03H2009/02291 , H03H2009/02299 , H03H2009/02322 , H03H2009/0233 , H03H2009/02496 , H03H2009/155 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： One embodiment of the present inventions sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with a compensating material (for example, an oxide) wherein the temperature coefficient of Young's Modulus (TCE) of the compensating material has a sign opposite to a TCE of the material of the resonating element.
摘要翻译：本发明的一个实施例提出了降低MEMS谐振器的频率（TCF）的温度系数的方法。该方法包括光刻地限定MEMS谐振器光束中的狭缝并用补偿材料（例如，氧化物）填充槽，其中补偿材料的杨氏模量（TCE）的温度系数具有与材料的TCE相反的符号的谐振元件。

6. 发明授权

US08633552B1 ESD protection for MEMS resonator devices 有权
标题翻译： MEMS谐振器器件的ESD保护
公开(公告)号：US08633552B1
公开(公告)日：2014-01-21
申请号：US12041552
申请日：2008-03-03
申请人： Barry D. Wissman , Andrew R. Brown , John R. Clark
发明人： Barry D. Wissman , Andrew R. Brown , John R. Clark
IPC分类号： H01L29/84
CPC分类号： B81C1/00341 , H03H3/0072 , H03H9/02433
摘要： Disclosed herein are MEMS resonator device designs and fabrication techniques that provide protection against electrostatic charge imbalances. In one aspect, a MEMS resonator device includes a substrate, an electrode including a first microstructure supported by the substrate, a resonant element including a second microstructure spaced from the first microstructure by a gap for resonant displacement of the second microstructure within the gap during operation, and a disabled shunt coupled to the electrode or the resonant element. The disabled shunt is disabled to enable the resonant displacement but otherwise configured to protect against damage from an electrostatic charge imbalance before the operation of the MEMS resonator device.
摘要翻译：这里公开了提供防止静电电荷不平衡的保护的MEMS谐振器装置设计和制造技术。一方面，MEMS谐振器装置包括基板，包括由基板支撑的第一微结构的电极，包括与第一微结构间隔开的第二微结构的谐振元件，用于在操作期间间隙内的第二微结构在间隙内的共振位移以及耦合到电极或谐振元件的受阻分流。禁用的分路被禁止以启用谐振位移，但是另外被配置为在MEMS谐振器装置的操作之前防止静电电荷不平衡的损坏。

7. 发明授权

US08525607B2 Crystal oscillator with reduced acceleration sensitivity 有权
公开(公告)号：US08525607B2
公开(公告)日：2013-09-03
申请号：US13474361
申请日：2012-05-17
申请人： Steven Fry , Wayne Bolton , John Esterline
发明人： Steven Fry , Wayne Bolton , John Esterline
IPC分类号： H03B5/32 , H03L1/02 , H01L41/08
CPC分类号： H03B5/32 , H01L41/08 , H03B5/04 , H03B5/30 , H03H9/02086 , H03H9/02433 , H03H9/02818 , H03H9/205 , H03L1/02 , H03L1/028
摘要： A crystal oscillator having a plurality of quartz crystals that are manufactured so that the directional orientation of the acceleration sensitivity vector is essentially the same for each crystal. This enables convenient mounting of the crystals to a circuit assembly with consistent alignment of the acceleration vectors. The crystals are aligned with the acceleration vectors in an essentially anti-parallel relationship and can be coupled to the oscillator circuit in either a series or parallel arrangement. Mounting the crystals in this manner substantially cancels the acceleration sensitivity of the composite resonator and oscillator, rendering it less sensitive to vibrational forces and shock events.

8. 发明授权

US08446078B2 Mechanical resonating structures and methods 有权
标题翻译：机械共振结构和方法
公开(公告)号：US08446078B2
公开(公告)日：2013-05-21
申请号：US12732575
申请日：2010-03-26
申请人： Behraad Bahreyni , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf
发明人： Behraad Bahreyni , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf
IPC分类号： H01L41/08
CPC分类号： H03H9/02338 , H03H9/02433 , H03H2009/0244
摘要： Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
摘要翻译：描述了将机械谐振结构连接到主体的装置和方法。多元件锚固件可以包括当机械共振结构振动时弯曲的柔性部分。柔性部分可以具有与机械谐振结构的谐振频率相关的长度。一些多元件锚定件包括彼此垂直取向的元件。还描述了结合这种结构的MEMS。

9. 发明授权

US08289092B2 Microelectromechanical resonant structure having improved electrical characteristics 有权
标题翻译：具有改善的电特性的微机电谐振结构
公开(公告)号：US08289092B2
公开(公告)日：2012-10-16
申请号：US12953930
申请日：2010-11-24
申请人： Anna Pomarico , Pasquale Flora , Annarita Morea , Giuditta Roselli
发明人： Anna Pomarico , Pasquale Flora , Annarita Morea , Giuditta Roselli
IPC分类号： H03B5/30 , H01L41/02
CPC分类号： H03H9/02338 , H03H9/02259 , H03H9/02409 , H03H9/02433 , H03H9/2436 , H03H2009/02511 , H03H2009/2442
摘要： The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.
摘要翻译：本公开涉及一种设置有半导体材料的衬底的MEMS谐振结构; 悬浮在衬底上方并通过约束元件锚固到衬底以便以共振频率自由振荡的移动质量; 以及电容耦合到所述移动质量块的固定电极结构，以形成电容器，所述电容器随着所述移动质量块的振荡而变化; 所述固定电极结构布置在所述衬底的顶表面上，并且所述约束元件被配置成使得所述移动质量块在使用中在垂直方向上垂直于所述衬底的顶表面振荡，保持基本平行到顶面。

10. 发明授权

US08063721B2 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof 有权
标题翻译：微机电系统（MEMS）谐振器及其制造方法
公开(公告)号：US08063721B2
公开(公告)日：2011-11-22
申请号：US12639102
申请日：2009-12-16
申请人： Shogo Inaba , Akira Sato
发明人： Shogo Inaba , Akira Sato
IPC分类号： H03H9/00 , H03H3/007
CPC分类号： H03H9/2457 , H03H3/0072 , H03H9/02433 , H03H2009/02511
摘要： A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
摘要翻译：一种微电子机械系统谐振器，包括：基板; 形成在基板上的固定电极; 以及可动电极，其布置成面对固定电极并且通过作用在固定电极和可动电极之间的间隙的静电吸引力或静电排斥力驱动。面对固定电极的可动电极的支撑梁的内表面具有倾斜表面。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式