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81. 发明申请

US20130270454A1 SYSTEM AND METHOD OF ION BEAM SOURCE FOR SEMICONDUCTOR ION IMPLANTATION 有权
标题翻译：用于半导体离子植入的离子束源的系统和方法
公开(公告)号：US20130270454A1
公开(公告)日：2013-10-17
申请号：US13443994
申请日：2012-04-11
申请人： Chih-Hong HWANG , Chun-Lin CHANG , Chi-Ming YANG , Chin-Hsiang LIN , Wen-Yu KU
发明人： Chih-Hong HWANG , Chun-Lin CHANG , Chi-Ming YANG , Chin-Hsiang LIN , Wen-Yu KU
IPC分类号： C23C14/48 , H01J27/02
CPC分类号： C23C14/48 , H01J27/08 , H01J37/08 , H01J2237/082 , H01J2237/31701
摘要： An apparatus comprises an ionization chamber for providing ions during a process of ion implantation, and an electron beam source device inside the ionization chamber. The electron beam source device comprises a field emission array having a plurality of emitters for generating electrons in vacuum under an electric field.
摘要翻译：一种装置包括用于在离子注入过程中提供离子的电离室和电离室内的电子束源装置。电子束源装置包括具有多个用于在电场下在真空中产生电子的发射器的场致发射阵列。

82. 发明授权

US08497486B1 Ion source having a shutter assembly 有权
标题翻译：具有快门组件的离子源
公开(公告)号：US08497486B1
公开(公告)日：2013-07-30
申请号：US13651685
申请日：2012-10-15
申请人： Varian Semiconductor Equipment Associates, Inc.
发明人： Jeffrey Charles Blahnik , William T. Weaver
IPC分类号： H01J49/10 , H01J37/317 , H01J27/02 , H01J3/07
CPC分类号： H01J27/024 , H01J27/08 , H01J37/08 , H01J37/302 , H01J37/3171 , H01J2237/043 , H01J2237/30472 , H01J2237/3171
摘要： An ion source includes arc chamber housing defining an arc chamber. The arc chamber housing has an extraction plate in a fixed position, and the extraction plate defines a plurality of extraction apertures. The ion source also includes a shutter assembly positioned outside of the arc chamber proximate the extraction plate. The shutter assembly is configured to block at least a portion of one of the plurality of extraction apertures during one time interval. The ion source combined with relative movement of a workpiece to be treated with an ion beam extracted from the ion source enables a two dimensional ion implantation pattern to be formed on the workpiece using only one ion source.
摘要翻译：离子源包括限定电弧室的电弧室壳体。电弧室壳体具有固定位置的提取板，并且提取板限定多个提取孔。离子源还包括位于靠近提取板的弧形室外部的快门组件。快门组件构造成在一个时间间隔期间阻挡多个提取孔中的一个的至少一部分。离子源与从离子源提取的离子束相关的待处理工件的相对移动结合使得仅使用一个离子源就能在工件上形成二维离子注入图案。

83. 发明申请

US20130170592A1 DEVICE AND METHOD FOR ION GENERATION 有权
标题翻译：用于离子生成的装置和方法
公开(公告)号：US20130170592A1
公开(公告)日：2013-07-04
申请号：US13338702
申请日：2011-12-28
申请人： ZILU ZHOU , JOYCE WONG
发明人： ZILU ZHOU , JOYCE WONG
IPC分类号： G21G4/02 , H01J27/02
CPC分类号： H01J27/02 , G21G4/02 , H01J1/3044 , H01J35/065 , H01J37/08 , H05H3/06
摘要： Illustrative embodiments of the present invention are directed to devices and methods for ion generation. One such device includes a substrate. The substrate is disposed within a housing that is configured to contain a gas. The substrate includes an interior surface that at least partially defines an interior volume. The substrate also includes a number of channels with walls. Nano-tips are disposed on the walls of the channels.
摘要翻译：本发明的说明性实施例涉及用于离子产生的装置和方法。一种这样的装置包括基板。衬底设置在被配置为容纳气体的壳体内。衬底包括至少部分地限定内部容积的内表面。衬底还包括多个具有壁的通道。纳米尖端设置在通道的壁上。

84. 发明申请

US20130161530A1 LASER ION SOURCE 有权
标题翻译：激光源
公开(公告)号：US20130161530A1
公开(公告)日：2013-06-27
申请号：US13771584
申请日：2013-02-20
申请人： Kabushiki Kaisha Toshiba
发明人： Kazuo HAYASHI , Akiko KAKUTANI , Akihiro OSANAI , Kiyokazu SATO , Tsutomu KURUSU , Takeshi YOSHIYUKI
IPC分类号： H01J27/02 , H01J27/24
CPC分类号： H01J37/08 , H01J27/24 , H01J2237/022 , H01J2237/08 , H01J2237/186 , H01J2237/31701
摘要： According to one embodiment, a laser ion source is configured to generate ions by application of a laser beam, the laser ion source including a case to be evacuated, an irradiation box disposed in the case and including a target which generates ions by irradiation of laser light, an ion beam extraction mechanism which electrostatically extracts ions from the irradiation box and guides the ions outside the case as an ion beam, a valve provided to an ion beam outlet of the case, the valve being opened at ion beam emission and being closed at other times, and a shutter provided between the valve and the irradiation box, the shutter being intermittently opened at ion beam emission and being closed at other times.
摘要翻译：根据一个实施例，激光离子源被配置为通过施加激光束产生离子，激光离子源包括要抽真空的壳体，设置在壳体中的照射盒，并且包括通过照射激光产生离子的靶光，离子束提取机构，其从照射箱静电提取离子并将离子引导到壳体外部作为离子束;阀设置在壳体的离子束出口处，阀门以离子束发射打开并被封闭在其他时间，以及设置在阀和照射箱之间的闸门，闸门以离子束发射间歇地打开并且在其它时间被关闭。

85. 发明申请

US20130082189A1 PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE 审中-公开
标题翻译：预先对准的多光束喷嘴/滑块模块
公开(公告)号：US20130082189A1
公开(公告)日：2013-04-04
申请号：US13250553
申请日：2011-09-30
申请人： Robert K. Becker , Avrum Freytsis , Matthew Gwinn
发明人： Robert K. Becker , Avrum Freytsis , Matthew Gwinn
IPC分类号： H01J27/02 , B05B1/14
CPC分类号： H01J37/08 , H01J27/024 , H01J2237/006 , H01J2237/0812 , H01J2237/0822
摘要： A pre-aligned multi-output nozzle/skimmer (PMNS) module includes a pre-aligned nozzle assembly having at least two nozzles and a pre-aligned skimmer subassembly. The PMNS module can be pre-aligned to more accurately position a Multi-Beam Gas Cluster Ion Beam (MBGCIB), and to more accurately control the formation of the multi-beam gas clusters of a pre-aligned MBGCIB.
摘要翻译：预排列的多输出喷嘴/分离器（PMNS）模块包括具有至少两个喷嘴和预对准撇油器子组件的预对准喷嘴组件。可以预先对准PMNS模块以更准确地定位多束气体簇离子束（MBGCIB），并更准确地控制预对准MBGCIB的多光束气体簇的形成。

86. 发明授权

US08389953B2 Focused ion beam apparatus 有权
标题翻译：聚焦离子束装置
公开(公告)号：US08389953B2
公开(公告)日：2013-03-05
申请号：US12931993
申请日：2011-02-15
申请人： Takashi Ogawa , Kenichi Nishinaka , Yoshihiro Koyama
发明人： Takashi Ogawa , Kenichi Nishinaka , Yoshihiro Koyama
IPC分类号： H01J49/10 , H01J37/08 , H01J27/02 , H01J3/14
CPC分类号： H01J37/08 , H01J2237/0451 , H01J2237/0458 , H01J2237/0807 , H01J2237/083 , H01J2237/24535 , H01J2237/28 , H01J2237/31749
摘要： A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit that supplies gas to the tip, and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample. An aperture member has an opening that passes therethrough a part of the ion beam ejected from the ion gun unit, and a lens system focuses the ion beam onto the sample.
摘要翻译：聚焦离子束装置包括具有发射极尖端的离子枪单元，向尖端供应气体的气体供应单元和离子源气体供应源。提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。阴极将离子加速到样品。孔部件具有从离子枪单元喷出的离子束的一部分通过的开口，透镜系统将离子束聚焦到样品上。

87. 发明申请

US20120313005A1 ION GENERATING APPARATUS AND ION PRESENCE DETERMINING METHOD 有权
标题翻译：离子发生装置和离子存在测定方法
公开(公告)号：US20120313005A1
公开(公告)日：2012-12-13
申请号：US13579111
申请日：2010-11-02
申请人： Masafumi Nishino
发明人： Masafumi Nishino
IPC分类号： H01J27/02
CPC分类号： F24F3/16 , A61L9/22 , G01N27/605
摘要： It is expected to provide an ion generating apparatus and an ion presence determination method that can prevent the lower accuracy of the ion presence determination caused by the humidity effect. The ion generators are switched ON at the different timing, the electrical potential of the collecting electrode is measured to determine that the ion is present (or not present) when the voltage difference is larger (or smaller) than the threshold. A humidity detecting unit is arranged in a duct. The set threshold for the determination is based on the humidity of the humidity detecting unit, and the ion presence determination is not performed when the humidity is equal to or more than a predetermined humidity. When the determination representing no ion is obtained predetermined times, the warning is output for the users with a LED of a display, a buzzer of a controller or the like.
摘要翻译：期望提供可以防止由湿度效应引起的离子存在确定的较低精度的离子产生装置和离子存在确定方法。离子发生器在不同的定时被接通，当电压差大于（或小于）阈值时，测量集电极的电位以确定离子存在（或不存在）。湿度检测单元布置在管道中。用于确定的设定阈值基于湿度检测单元的湿度，并且当湿度等于或大于预定湿度时不执行离子存在确定。当预定次数获得不表示离子的确定时，对于具有显示器的LED，控制器的蜂鸣器等的用户输出警告。

88. 发明申请

US20120257703A1 CHARGED PARTICLE GENERATOR 审中-公开
标题翻译：充电颗粒发生器
公开(公告)号：US20120257703A1
公开(公告)日：2012-10-11
申请号：US13517488
申请日：2010-12-21
申请人： Neil Bliss , Susan Smith , Bruno Muratori , Shinji Machida , Robert Cywinski , Christopher Prior
发明人： Neil Bliss , Susan Smith , Bruno Muratori , Shinji Machida , Robert Cywinski , Christopher Prior
IPC分类号： H01J27/02 , G21G1/10
CPC分类号： H05H7/06 , G21C1/30 , G21G1/06 , Y02E30/37
摘要： The present invention relates to a charged particle beam generator comprising multiple charged particle beam generator units. In particular, the present invention is concerned with apparatus for generating a high-energy, high-current proton beam such as are used in accelerator driven subcritical reactors. The present invention provides a method of generating a composite proton beam using a proton beam generator comprising multiple proton beam generator units. A negative hydrogen ion source is used to generate a beam of negative hydrogen ions in each unit. The negative hydrogen ions are stripped to create a proton beam in each unit, that is accelerated beam and guided to a common point where the beams are merged to form the composite proton beam.
摘要翻译：本发明涉及一种带电粒子束发生器，其包括多个带电粒子束发生器单元。特别地，本发明涉及用于产生诸如在加速器驱动的亚临界反应器中使用的高能量，高电流质子束的装置。本发明提供使用包括多个质子束发生器单元的质子束发生器来产生复合质子束的方法。负氢离子源用于在每个单元中产生负氢离子束。去除负氢离子以在每个单元中产生质子束，即加速光束并被引导到共同点，其中光束被合并以形成复合质子束。

89. 发明申请

US20120235058A1 METHOD FOR EXTENDING LIFETIME OF AN ION SOURCE 审中-公开
标题翻译：延长离子源寿命的方法
公开(公告)号：US20120235058A1
公开(公告)日：2012-09-20
申请号：US13229939
申请日：2011-09-12
申请人： Ashwini SINHA , Lloyd A. BROWN
发明人： Ashwini SINHA , Lloyd A. BROWN
IPC分类号： H01J27/02
CPC分类号： H01J37/08 , H01J37/3171 , H01J2237/022
摘要： This invention relates in part to a method for preventing or reducing the formation and/or accumulation of deposits in an ion source component of an ion implanter used in semiconductor and microelectronic manufacturing. The ion source component includes an ionization chamber and one or more components contained within the ionization chamber. The method involves introducing into the ionization chamber a dopant gas, wherein the dopant gas has a composition sufficient to prevent or reduce the formation of fluorine ions/radicals during ionization. The dopant gas is then ionized under conditions sufficient to prevent or reduce the formation and/or accumulation of deposits on the interior of the ionization chamber and/or on the one or more components contained within the ionization chamber. The deposits adversely impact the normal operation of the ion implanter causing frequent down time and reducing tool utilization.
摘要翻译：本发明部分地涉及用于防止或减少在半导体和微电子制造中使用的离子注入机的离子源组分中沉积物的形成和/或积累的方法。离子源组件包括电离室和包含在电离室内的一个或多个组分。该方法包括向电离室中引入掺杂气体，其中掺杂剂气体具有足以防止或减少离子化过程中氟离子/自由基形成的组成。然后在足以防止或减少离子化室内部和/或包含在电离室内的一种或多种组分上的沉积物的形成和/或积累的条件下将掺杂气体电离。沉积物对离子注入机的正常运行产生不利影响，导致频繁的停机时间并降低刀具利用率。

90. 发明授权

US08247784B2 Switched ferroelectric plasma ionizer 有权
标题翻译：开关铁电等离子体离子发生器
公开(公告)号：US08247784B2
公开(公告)日：2012-08-21
申请号：US12845785
申请日：2010-07-29
申请人： Evan L. Neidholdt , Jesse L. Beauchamp
发明人： Evan L. Neidholdt , Jesse L. Beauchamp
IPC分类号： H01J49/10 , H01J49/26 , H01J27/02
CPC分类号： H01J49/10 , H01J2201/30496
摘要： A novel ion source for ambient mass spectrometry (switched ferroelectric plasma ionizer or “SwiFerr”), which utilizes the ambient pressure plasma resulting from a sample of barium titanate [001] whose polarization is switched by an audio frequency electric field. High yields of both anions and cations are produced by the source and detected using an ion trap mass spectrometer. Protonated amines and deprotonated volatile acid species, respectively, are detected in the observed mass spectra. Aerodynamic sampling is employed to analyze powders of drug tablets of loperamide and ibuprofen. A peak corresponding to the active pharmaceutical ingredient for each drug is observed in the mass spectra. Pyridine is detected at concentrations in the low part-per-million range in air. The low power consumption of the source is consistent with incorporation into field portable instrumentation for detection of hazardous materials and trace substances in a variety of different applications.
摘要翻译：用于环境质谱的新型离子源（开关铁电等离子体离子发生器或“SwiFerr”），其利用由通过音频电场切换极化的钛酸钡[001]样品产生的环境压力等离子体。阴离子和阳离子的高产率由源产生并使用离子阱质谱仪进行检测。在观察到的质谱中分别检测质子化的胺和去质子化的挥发性酸物质。采用气动取样法分析洛哌丁胺和布洛芬药物片剂粉末。在质谱中观察到对应于每种药物的活性药物成分的峰。在空气中以百万分之几的范围内的浓度检测到吡啶。源的低功耗与将现有便携式仪器结合在一起用于检测各种不同应用中的有害物质和痕量物质。

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