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    • 2. 发明授权
    • Vacuum pump
    • 真空泵
    • US08814542B2
    • 2014-08-26
    • US13055977
    • 2009-05-29
    • Heinrich Englaender
    • Heinrich Englaender
    • F04D19/04F04D29/048F04D29/058
    • F04D29/048F04D19/042F04D19/048F04D29/058F16C32/047F16C32/0489F16C2360/45
    • A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, includes a rotor shaft (12) that supports at least one rotor device (14). The rotor shaft (12) is mounted on the pressure side by way of a bearing arrangement (56) and on the suction side by way of a bearing arrangement (30). The suction-side bearing arrangement (30) is disposed in a high-vacuum area (22) and includes an electromagnetic bearing. Preferably, a coil (32) of the electromagnetic bearing is disposed in a recess (38) of a housing element (40). The recess (38) is pressure-encapsulated, in particular by a tubular closure element (42).
    • 真空泵,特别是涡轮分子泵或多入口泵,包括支撑至少一个转子装置(14)的转子轴(12)。 转子轴(12)通过轴承装置(56)安装在压力侧,并通过轴承装置(30)安装在吸力侧。 吸入侧轴承装置(30)设置在高真空区域(22)中并且包括电磁轴承。 优选地,电磁轴承的线圈(32)设置在壳体元件(40)的凹部(38)中。 凹部(38)被压力封装,特别是通过管状封闭元件(42)。