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    • 4. 发明申请
    • NEGATIVE DIFFERENTIAL RESISTANCE DIODE AND SRAM UTILIZING SUCH DEVICE
    • 负极差电阻二极管和使用此类器件的SRAM
    • US20090146212A1
    • 2009-06-11
    • US12368775
    • 2009-02-10
    • Gen PeiZoran Krivokapic
    • Gen PeiZoran Krivokapic
    • H01L27/06
    • H01L27/11H01L29/7391
    • A negative differential resistance (NDR) diode and a memory cell incorporating that NDR diode are provided. The NDR diode comprises a p-type germanium region in contact with an n-type germanium region and forming a germanium pn junction diode. A first gate electrode overlies the p-type germanium region, is electrically coupled to the n-type germanium region, and is configured for coupling to a first electrical potential. A second gate electrode overlies the n-type germanium region and is configured for coupling to a second electrical potential. A third electrode is electrically coupled to the p-type germanium region and may be coupled to the second gate electrode. A small SRAM cell uses two such NDR diodes with a single pass transistor.
    • 提供负差分电阻(NDR)二极管和包含该NDR二极管的存储单元。 NDR二极管包括与n型锗区接触并形成锗pn结二极管的p型锗区。 第一栅电极覆盖在p型锗区上,电耦合到n型锗区,并且被配置为耦合到第一电位。 第二栅电极覆盖在n型锗区上,并被配置成耦合到第二电位。 第三电极电耦合到p型锗区域并且可以耦合到第二栅电极。 一个小的SRAM单元使用两个这样的NDR二极管与单通道晶体管。
    • 7. 发明授权
    • Fin bipolar transistors having self-aligned collector and emitter regions
    • 鳍状双极晶体管具有自对准的集电极和发射极区域
    • US08617957B1
    • 2013-12-31
    • US13607877
    • 2012-09-10
    • Josephine B ChangGen Pei LauerIsaac LauerJeffrey W Sleight
    • Josephine B ChangGen Pei LauerIsaac LauerJeffrey W Sleight
    • H01L21/331
    • H01L29/42304H01L29/1008H01L29/6625H01L29/66265H01L29/7317H01L29/735H01L29/785
    • A method for fabricating a bipolar transistor device. The method includes the steps of: providing a SOI substrate having a silicon layer thereon; patterning lithographically a fin hardmask on the silicon layer; placing a dummy contact line over a central portion of patterned fin hardmask; doping the collector/emitter regions; depositing a filler layer over the collector region and the emitter region; removing the dummy contact line to reveal a trench and the central portion of the patterned fin hardmask; forming fin-shaped base regions by removing, within the trench, a portion of the silicon layer not covered by the central portion of the patterned fin hardmask after the step of removing the dummy contact line; doping the fin-shaped base region; and forming a contact line by filling the trench with a contact line material over the fin-shaped base regions, where the collector/emitter regions are self-aligned with the contact line.
    • 一种制造双极晶体管器件的方法。 该方法包括以下步骤:提供其上具有硅层的SOI衬底; 在硅层上平版印刷鳍状硬掩模; 将虚拟接触线放置在图案化翅片硬掩模的中心部分上; 掺杂集电极/发射极区域; 在所述集电极区域和所述发射极区域上沉积填充层; 去除虚拟接触线以露出沟槽和图案化散热片硬掩模的中心部分; 在除去虚拟接触线的步骤之后,通过在沟槽内去除未被图案化翅片硬掩模的中心部分覆盖的硅层的一部分来形成翅片形基底区域; 掺杂鳍片状基底区域; 以及通过在所述鳍状基极区域上的接触线材料填充所述沟槽而形成接触线,其中所述集电极/发射极区域与所述接触线自对准。
    • 8. 发明授权
    • Stress enhanced CMOS circuits and methods for their fabrication
    • 应力增强CMOS电路及其制造方法
    • US07442601B2
    • 2008-10-28
    • US11532753
    • 2006-09-18
    • Gen PeiScott D. LuningJohannes van Meer
    • Gen PeiScott D. LuningJohannes van Meer
    • H01L21/8238H01L27/092
    • H01L21/823807H01L21/823878H01L21/84H01L27/092H01L29/7843
    • A stress enhanced CMOS circuit and methods for its fabrication are provided. One fabrication method comprises the steps of forming an NMOS transistor and a PMOS transistor adjacent the NMOS transistor in a channel width direction, the PMOS transistor and the NMOS transistor separated by an isolation region. A compressive stress liner is deposited overlying the transistors and the isolation region and is etched to remove the compressive stress liner from the NMOS transistor and from a portion of the isolation region. A tensile stress liner is deposited overlying the transistors, the isolation region, and the compressive stress liner and is etched to remove a portion of the tensile stress liner overlying a portion of the compressive stress liner and to leave the tensile stress liner overlying the NMOS transistor, the isolation region, and a portion of the compressive stress liner.
    • 提供了一种应力增强CMOS电路及其制造方法。 一种制造方法包括以下步骤:在沟道宽度方向上形成与NMOS晶体管相邻的NMOS晶体管和PMOS晶体管,PMOS晶体管和NMOS晶体管由隔离区隔开。 压缩应力衬垫沉积在晶体管和隔离区上,并被蚀刻以从NMOS晶体管和隔离区的一部分去除压应力衬垫。 拉伸应力衬垫沉积在晶体管,隔离区域和压缩应力衬垫上,并被蚀刻以去除覆盖压缩应力衬垫的一部分的拉伸应力衬垫的一部分,并且留下覆盖NMOS晶体管的拉伸应力衬垫 ,隔离区域和压缩应力衬垫的一部分。