会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Device with a sandwich structure for detecting thermal radiation, and method for the production thereof
    • 具有用于检测热辐射的夹层结构的装置及其制造方法
    • US08487257B2
    • 2013-07-16
    • US12601613
    • 2008-05-28
    • Carsten GiebelerMatthias SchreiterJörg Zapf
    • Carsten GiebelerMatthias SchreiterJörg Zapf
    • G01J5/00
    • H01L27/16G01J5/04G01J5/045G01J5/10G01J5/34H01L27/14618H01L2924/0002H01L2924/00
    • In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.
    • 在用于检测热辐射的装置和用于生产这种装置的方法中,叠层形成有具有用于将热辐射转换成电信号的检测器元件的检测器支架,具有读出电路的电路支架 用于读出电信号和盖以屏蔽检测器元件。 检测器支架和盖被布置成使得在检测器元件和盖之间形成第一堆叠空腔,并且在检测器支架和电路支架之间形成第二堆叠腔。 将第一堆叠空腔和/或第二堆叠空腔抽真空并密封。 在制造操作中,将功能化的硅衬底彼此堆叠,牢固地结合在一起并随后进行细分。 优选地,检测器元件是热电探测器元件。 该设备在运动检测器,存在记录器和热像摄像机中找到应用。