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    • 3. 发明申请
    • PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATOR, METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE
    • 压电振动片,压电振动器,制造压电振动器的方法,振荡器,电子装置和无线电控制时序
    • US20110187472A1
    • 2011-08-04
    • US13018930
    • 2011-02-01
    • Junya Fukuda
    • Junya Fukuda
    • H03B5/32H01L41/053H01L41/22
    • H03H9/1021H03H3/02H03H9/21H03H2003/026Y10T29/42
    • There are provided a piezoelectric vibrating reed capable of securing a stable bonding strength between a bump and the piezoelectric vibrating reed, a piezoelectric vibrator having the piezoelectric vibrating reed, a method for manufacturing the piezoelectric vibrator, and an oscillator, an electronic apparatus, and a radio-controlled timepiece each having the piezoelectric vibrator. A piezoelectric vibrating reed includes: a vibrating portion; a base portion adjacent to the vibrating portion; excitation electrodes formed in the vibrating portion; mount electrodes formed in the base portion; and extraction electrodes for electrically connecting the excitation electrodes and the mount electrodes to each other. A bonding film made of gold is formed on the surfaces of the mount electrodes, and the bonding film is formed to a thickness such that, when the bonding film is ultrasonically bonded to a bump made of gold, mutual diffusion occurs over approximately the entire area in the thickness direction of the bonding film.
    • 提供一种压电振动片,其能够确保凸块与压电振动片之间的稳定的结合强度,具有压电振动片的压电振动器,压电振动器的制造方法以及振荡器,电子设备和 各自具有压电振动器的无线电控制时计。 压电振动片包括:振动部分; 与所述振动部相邻的基部; 激励电极形成在振动部分中; 形成在基部的安装电极; 以及用于将激励电极和安装电极彼此电连接的引出电极。 在安装电极的表面上形成由金制成的接合膜,并且接合膜形成为使得当接合膜超声波接合到由金制成的凸块上时,在大致整个区域上发生相互扩散 在接合膜的厚度方向上。
    • 5. 发明申请
    • PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD, FIXING JIG, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED WATCH
    • 压电振动器制造方法,固定电极,压电振动器,振荡器,电子器件和无线电控制手表
    • US20100308694A1
    • 2010-12-09
    • US12857234
    • 2010-08-16
    • Masashi NUMATAKiyoshi AratakeOsamu OnitsukaJunya FukudaKazuyoshi Sugama
    • Masashi NUMATAKiyoshi AratakeOsamu OnitsukaJunya FukudaKazuyoshi Sugama
    • H01L41/053H01L41/22H01L41/047B23Q3/00
    • H03H3/02H01L2224/16225H01L2924/00011H01L2924/00014H03H9/1021H03H9/21H03H2003/026Y10T29/42Y10T29/49165H01L2224/0401
    • The piezoelectric vibrator comprises a base substrate; a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate; a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate; an external electrode formed on the lower face of the base substrate; a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity; and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed of a cylindrical body, which is formed of a glass material to have two flat ends and a thickness substantially equal to that of the base substrate, and is implanted in the through-hole running through the base substrate; and an electroconductive core member which is formed to have two flat ends and a thickness substantially equal to that of the base substrate and is inserted into the center hole of the cylindrical body; and the through-hole, the cylindrical body and the core member are integrally fixed to each other by firing.
    • 压电振子包括基底; 盖基板,其中形成有空腔凹部,并且在凹部面向基底基板的状态下结合到基底基板; 压电振动构件,其被接合到基底基板的上表面,其状态是将其容纳在由基底基板和盖基板之间的凹部形成的空腔中; 形成在所述基底基板的下表面上的外部电极; 形成在基底基板内并通过基底基板的贯通电极,与外部电极电连接,同时保持腔内的气密性; 以及布线电极,形成在所述基底基板的上表面上,以将所述通孔电连接到所述接合的压电振动部件; 其特征在于,所述贯通电极由圆筒体形成,所述圆筒体由玻璃材料形成,具有两个平坦的端部,并且基本上等于所述基底基板的厚度,并且被植入穿过所述基底基板的所述通孔中; 以及导电芯体,其形成为具有两个平坦端部,并且具有基本上等于所述基底基板的厚度并且被插入到所述圆筒体的中心孔中的厚度; 并且通孔,筒体和芯部件通过烧结而彼此一体地固定。
    • 8. 发明授权
    • Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
    • 压电振子,振荡器,电子设备和无线电控制时计,以及制造压电振动器的方法
    • US08410861B2
    • 2013-04-02
    • US13035443
    • 2011-02-25
    • Junya Fukuda
    • Junya Fukuda
    • H03B5/32H01L41/053
    • H03H9/21H03H3/02H03H9/1014H03H2003/026Y10T29/42
    • A piezoelectric vibrator including a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrate the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, the piezoelectric vibrating reed being mounted on the base substrate within the cavity via the mount electrode; an insulation film which is formed on the piezoelectric vibrating reed so as to cover the excitation electrodes; and a getter material formed of the metallic material that is formed on any of the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated.
    • 一种压电振动器,包括基底基板和盖基板,它们彼此接合并形成有腔; 具有平行延伸的一对振动臂部的压电振动片,使一对振动臂部振动的一对激励电极和与该一对激励电极电连接的安装电极,压电振动片为 通过安装电极安装在腔内的基底基板上; 绝缘膜,形成在压电振动片上以覆盖激励电极; 以及由金属材料形成的吸气材料,所述吸气材料形成在所述基底基板或盖基板中的任一个上,以便布置在所述空腔内,并且通过加热来提高所述空腔内的真空度。
    • 9. 发明授权
    • Angle detecting apparatus and angle detecting method
    • 角度检测装置和角度检测方法
    • US08258782B2
    • 2012-09-04
    • US12458881
    • 2009-07-27
    • Yoshio KaitaHirokazu MiyamotoToshinao KidoJunya Fukuda
    • Yoshio KaitaHirokazu MiyamotoToshinao KidoJunya Fukuda
    • G01B7/30
    • G01B7/30
    • An angle detecting apparatus includes a rotor fixed to a rotating shaft, a pair of magnetic sensors arranged close to the outer periphery of the rotor so as to have a difference in angle (π/2) with respect to the center of rotation of the rotor, a differential operational circuit performing differential operation on detection signals output by the magnetic sensors to output a differential signal, and the angle calculating circuit calculating the angle of rotation of the rotating shaft based on the differential signal. The planar shape of the rotor is such that the sum of the distances between the center of rotation and the respective two points where two straight lines crossing at the center of rotation at a crossing angle of (π/2) cross the outer periphery of the rotor is constant, and the planar shape is symmetric with respect to a straight line passing through the center of rotation.
    • 一种角度检测装置,包括固定在旋转轴上的转子,配置在转子的外周侧的一对磁性传感器,以相对于转子的旋转中心的角度(&pgr / 2) 转子,对由所述磁传感器输出的检测信号执行差分运算以输出差分信号的差分运算电路,以及根据所述差分信号计算所述旋转轴的旋转角度的所述角度运算电路。 转子的平面形状使得旋转中心之间的距离和在两个交点处的旋转中心交叉的两条直线(& / 2)的两个直线之间的距离之和与 转子是恒定的,并且平面形状相对于通过旋转中心的直线是对称的。
    • 10. 发明授权
    • Magnetic field measurement method and magnetic sensor
    • 磁场测量方法和磁传感器
    • US08164331B2
    • 2012-04-24
    • US12411842
    • 2009-03-26
    • Takakazu ImaiJunya FukudaKei Tanabe
    • Takakazu ImaiJunya FukudaKei Tanabe
    • G01R33/02
    • G01R33/07G01R33/072
    • The magnetic field measurement method has: a step of preparing a magnetic sensor which includes: a magneto-resistive effect element having a magnetization-free layer and a magnetization fixed layer, and having a longitudinal direction; and magnetic field application means, wherein the magnetization direction of the magnetization fixed layer is fixed in a direction which forms an angle equal to or less than 45 degrees to the longitudinal direction, and a magnetic field generated by the magnetic field application means forms an angle equal to or less than 45 degrees to the longitudinal direction; a step of saturating the magnetization of the magnetization-free layer by the magnetic field application means and magnetizing the magnetization-free layer in one direction in the longitudinal direction; and a step of measuring the strength of an external magnetic field by applying the external magnetic field to the magnetization-free layer in the other direction in the longitudinal direction.
    • 磁场测量方法具有:制备磁传感器的步骤,其包括:具有无磁化层和磁化固定层并具有纵向方向的磁阻效应元件; 以及磁场施加装置,其中,所述磁化固定层的磁化方向在与所述纵向方向形成等于或小于45度的角度的方向上固定,并且由所述磁场施加装置产生的磁场形成角度 等于或小于45度; 通过磁场施加装置使无磁化层的磁化饱和并沿纵向在一个方向上使无磁化层磁化的步骤; 以及通过将外部磁场沿长度方向向另一方向施加外部磁场而测量外部磁场的强度的步骤。