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1. 发明授权

US09793876B2 Resonator element, method for manufacturing resonator element, resonator, gyro sensor, electronic apparatus, and moving object 有权
公开(公告)号：US09793876B2
公开(公告)日：2017-10-17
申请号：US14746128
申请日：2015-06-22
申请人： SEIKO EPSON CORPORATION
发明人： Atsushi Matsuo
IPC分类号： H03H9/21 , H03H9/215 , H03H3/02 , G01C19/5747 , G01C19/5769
CPC分类号： H03H9/215 , G01C19/5747 , G01C19/5769 , H03H3/02 , H03H2003/026
摘要： To improve durability against impact, a quartz crystal resonator element includes a recess in a plan view. The quartz crystal resonator element further includes a first principal surface and a second principal surface that are front and rear surfaces facing away from each other and a side surface disposed between the first principal surface and the second principal surface, and the side surface is formed of flat surfaces and curved surfaces formed by dry etching and alternately arranged. The quartz crystal resonator element preferably has a base and at least one resonating arm extending from the base.

2. 发明授权

US09748921B2 Electronic device, electronic apparatus, and moving object 有权
公开(公告)号：US09748921B2
公开(公告)日：2017-08-29
申请号：US14721441
申请日：2015-05-26
申请人： Seiko Epson Corporation
发明人： Takashi Yamazaki , Masahiro Ishii
IPC分类号： H03H9/21 , H03H9/10 , H03H3/02
CPC分类号： H03H9/21 , H03H9/1035 , H03H2003/026
摘要： A vibrator (electronic device) includes: a vibrator element including vibrating arms; a base portion supporting the vibrator element and having a rectangular shape in a plan view; and a lid provided on the side of the vibrator element opposite to the base portion 3. Extending directions of long and short sides of the base portion and an extending direction of the vibrating arms cross each other. When an angle formed by the vibrating arms and a Y-axis direction is θ, the angle θ is more than 0° and less than 90°.

3. 发明授权

US09455683B2 Piezoelectric piece for piezoelectric vibrator and manufacturing method thereof 有权
标题翻译：压电振子用压电片及其制造方法
公开(公告)号：US09455683B2
公开(公告)日：2016-09-27
申请号：US14108575
申请日：2013-12-17
申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人： Je-Hong Kyoung , Ho-Phil Jung , Tae-Joon Park , Won Han , Sung-Wook Kim
IPC分类号： H03H9/21 , H03H3/02
CPC分类号： H03H9/21 , H03H3/02 , H03H2003/026 , Y10T29/42
摘要： The present invention presents a piezoelectric piece for a piezoelectric vibrator and a manufacturing method thereof. The piezoelectric piece for a piezoelectric vibrator in accordance with an embodiment of the present invention includes: a base; and a vibrating arm connected to the base and having a groove formed therein. Here, one surface inside the groove includes: a first slope extended from an upper portion of the groove in a lower direction so as to have a first angle; and a second slope extended from a lower portion of the first slope in a lower direction so as to have a second angle that is greater than the first angle, and a rate of a depth of the first slope for a depth of the groove is greater than or equal to 0.5 and less than or equal to 1.
摘要翻译：本发明提供一种压电振动器用压电体及其制造方法。根据本发明实施例的用于压电振动器的压电片包括：基座; 以及连接到所述基座并且在其中形成有凹槽的振动臂。这里，凹槽内的一个表面包括：从下部方向的槽的上部延伸的第一斜面，以便具有第一角度; 以及从第一斜面的下部沿下方延伸的第二斜面，以具有大于第一角度的第二角度，并且所述凹槽的深度的第一斜率的深度的比率更大大于等于0.5且小于等于1。

4. 发明授权

US09255802B2 Resonator element, resonator, oscillator, electronic apparatus, physical quantity sensor, mobile object, and frequency adjustment method of resonator element 有权
标题翻译：谐振器元件，谐振器，振荡器，电子设备，物理量传感器，移动物体和谐振元件的频率调节方法
公开(公告)号：US09255802B2
公开(公告)日：2016-02-09
申请号：US14582606
申请日：2014-12-24
申请人： SEIKO EPSON CORPORATION
发明人： Akinori Yamada , Shuhei Yoshida , Takashi Ito , Keiji Nakagawa
IPC分类号： H03B5/32 , H03H9/215 , G01C19/5607 , H03H9/02 , H03H9/05 , H03H9/10 , H03H3/02 , H03H3/04
CPC分类号： G01C19/5607 , H03B5/32 , H03H9/02102 , H03H9/02551 , H03H9/0509 , H03H9/0547 , H03H9/1014 , H03H9/215 , H03H2003/026 , H03H2003/0492 , H03H2009/02165
摘要： A resonator element includes a base portion, and a vibrating arm which extends from the base portion and on which a weight portion is provided, and the weight portion includes a first weight portion which is disposed on one main surface of a distal end portion of the vibrating arm, and a second weight portion which is disposed on the distal end side with respect to the first weight portion and has a thickness smaller than that of the first weight portion. The vibrating arm transmits an energy beam, and a laser incidence area where incidence of the energy beam to the inside of the vibrating arm is allowed, is disposed in a position of the other main surface on the opposite side of the vibrating arm overlapped with the second weight portion.
摘要翻译：谐振器元件包括基部和从基部延伸并且设置有重物部分的振动臂，并且所述重物部分包括第一重物部分，所述第一重量部分设置在所述第一重量部分的远端部分的一个主表面上振动臂和相对于第一配重部分设置在远端侧的第二重物部分，其厚度小于第一重量部分的厚度。振动臂传递能量束，并且允许能量束入射到振动臂内部的激光入射区域设置在与振动臂的相反侧的另一个主表面的重叠的位置第二重量部分。

5. 发明授权

US09172347B2 Wafer, method of manufacturing package, and piezoelectric oscillator 有权
标题翻译：晶圆，制造方法和压电振荡器
公开(公告)号：US09172347B2
公开(公告)日：2015-10-27
申请号：US13406992
申请日：2012-02-28
申请人： Toshiyuki Wagai
发明人： Toshiyuki Wagai
IPC分类号： H01L21/78 , H03H3/02 , H03H9/10
CPC分类号： H03H3/02 , H03H9/1014 , H03H2003/026 , Y10T428/2457
摘要： To provide a wafer, a method of manufacturing a package, and a piezoelectric oscillator in which warping of a wafer body is reduced to improve the yields. A wafer for lid substrate has a product region in which a number of recess portions for cavities are formed and a non-forming region of the recess portions set in the product region in the form of a straight line extending along a diameter direction of the product region.
摘要翻译：提供晶片，制造封装的方法和压电振荡器，其中晶片体的翘曲减小以提高产量。用于盖基板的晶片具有产品区域，在该产品区域中形成有用于空腔的多个凹部，并且凹陷部的非成形区域设置在沿着产品的直径方向延伸的直线形式的产品区域中地区。

6. 发明申请

US20150188515A1 RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, PHYSICAL QUANTITY SENSOR, MOBILE OBJECT, AND FREQUENCY ADJUSTMENT METHOD OF RESONATOR ELEMENT 有权
标题翻译：谐振器元件，谐振器，振荡器，电子设备，物理量传感器，移动对象和谐波器元件的频率调整方法
公开(公告)号：US20150188515A1
公开(公告)日：2015-07-02
申请号：US14582606
申请日：2014-12-24
申请人： SEIKO EPSON CORPORATION
发明人： Akinori YAMADA , Shuhei YOSHIDA , Takashi ITO , Keiji NAKAGAWA
IPC分类号： H03H9/24
CPC分类号： G01C19/5607 , H03B5/32 , H03H9/02102 , H03H9/02551 , H03H9/0509 , H03H9/0547 , H03H9/1014 , H03H9/215 , H03H2003/026 , H03H2003/0492 , H03H2009/02165
摘要： A resonator element includes a base portion, and a vibrating arm which extends from the base portion and on which a weight portion is provided, and the weight portion includes a first weight portion which is disposed on one main surface of a distal end portion of the vibrating arm, and a second weight portion which is disposed on the distal end side with respect to the first weight portion and has a thickness smaller than that of the first weight portion. The vibrating arm transmits an energy beam, and a laser incidence area where incidence of the energy beam to the inside of the vibrating arm is allowed, is disposed in a position of the other main surface on the opposite side of the vibrating arm overlapped with the second weight portion.
摘要翻译：谐振器元件包括基部和从基部延伸并且设置有重物部分的振动臂，并且所述重物部分包括第一重物部分，所述第一重量部分设置在所述第一重量部分的远端部分的一个主表面上振动臂和相对于第一配重部分设置在远端侧的第二重物部分，其厚度小于第一重量部分的厚度。振动臂传递能量束，并且允许能量束入射到振动臂内部的激光入射区域设置在与振动臂的相反侧的另一个主表面的重叠的位置第二重量部分。

7. 发明申请

US20140346930A1 ELECTRONIC COMPONENT PACKAGE, ELECTRONIC COMPONENT PACKAGE SEALING MEMBER AND METHOD FOR PRODUCING THE ELECTRONIC COMPONENT PACKAGE SEALING MEMBER 有权
标题翻译：电子元件封装，电子元件封装密封件和用于生产电子元器件密封件的方法
公开(公告)号：US20140346930A1
公开(公告)日：2014-11-27
申请号：US14345484
申请日：2012-09-28
申请人： DAISHINKU CORPORATION
发明人： Naoki Kohda
IPC分类号： H01L41/053 , H01L41/23
CPC分类号： H01L41/0533 , H01L41/23 , H01L2924/0002 , H03H9/0519 , H03H9/1021 , H03H2003/022 , H03H2003/026 , H01L2924/00
摘要： The present invention relates to an electronic component package, an electronic component package sealing member, and a method for producing the electronic component package sealing member. A through hole 49 is formed in a base 4 so as to pass through between both main surfaces 42 and 43 of a base material of the base 4. An inner side surface 491 of the through hole 49 includes a curved surface 495 that expands outward in a width direction of the through hole 49.
摘要翻译：本发明涉及一种电子部件封装，电子部件封装密封部件及其制造方法。通孔49形成在底座4中，以便穿过基座4的基底的两个主表面42和43之间。通孔49的内侧表面491包括弯曲表面495，通孔49的宽度方向。

8. 发明申请

US20140078870A1 PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO TIMEPIECE 有权
标题翻译：压电振动片，压电振动器，振荡器，电子装置和无线电时钟
公开(公告)号：US20140078870A1
公开(公告)日：2014-03-20
申请号：US14024857
申请日：2013-09-12
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H01L41/09 , G04R60/00
CPC分类号： H01L41/09 , G04C3/12 , G04R20/10 , G04R60/00 , H03H9/1021 , H03H9/215 , H03H2003/026
摘要： A piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, an electronic apparatus and a radio timepiece capable of reducing the size while suppressing reduction of rigidity and having excellent vibration characteristics. The piezoelectric vibrating piece includes a pair of vibrating arm portions in parallel to each other, a base portion integrally fixing base end portions of the pair of vibrating arm portions in a length direction, groove portions on main surfaces of the pair of vibrating arm portions and extending along the length direction, where each of the groove portions includes a first groove portion near a tip portion end of the vibrating arm portions and a second groove portion near the base end portion side of the vibrating arm portions with respect to the first groove portion, and the second groove portion is offset in a −X axis direction with respect to the first groove portion.
摘要翻译：压电振动片，压电振动器，振荡器，电子设备和无线电钟表，能够在抑制刚度降低并且具有优异的振动特性的同时减小尺寸。压电振动片包括彼此平行的一对振动臂部，将一对振动臂部的基端部沿长度方向整体固定的基部，一对振动臂部的主表面上的槽部，沿长度方向延伸，其中每个凹槽部分包括在振动臂部分的尖端部分附近的第一凹槽部分和相对于第一凹槽部分在振动臂部分的基端部侧附近的第二凹槽部分并且第二槽部相对于第一槽部在-X轴方向上偏移。

9. 发明授权

US08663487B2 Method for manufacturing crystal oscillator 有权
标题翻译：制造晶体振荡器的方法
公开(公告)号：US08663487B2
公开(公告)日：2014-03-04
申请号：US12997927
申请日：2009-10-16
申请人： Akiko Katoh , Tohru Yanagisawa
发明人： Akiko Katoh , Tohru Yanagisawa
IPC分类号： G01C19/56 , H03H9/215 , H03H9/21 , H03H9/02 , H03H3/02 , G01C19/5628
CPC分类号： H03H9/215 , G01C19/5628 , H03H9/02023 , H03H9/02118 , H03H9/21 , H03H2003/026 , Y10T29/42
摘要： The invention is directed to the provision of a method for manufacturing a crystal oscillator manufacturing method that can achieve a highly precise fine adjustment without applying unnecessary external force to a crystal oscillator, and that can adjust a plurality of crystal oscillators in a collective manner. More specifically, the invention provides a method for manufacturing a crystal oscillator includes a first etching step for forming a prescribed external shape, an electrode forming step for forming an electrode at least in a portion of a surface of the external shape, a leakage amount measuring step for measuring leakage amount associated with leakage vibration of the external shape, and a second etching step for etching the external shape by an amount that is determined based on a measurement result of the leakage amount measuring step so as to adjust balance.
摘要翻译：本发明涉及提供一种制造晶体振荡器制造方法，该方法可以在不对外界施加不必要的外力的情况下实现高精度的精细调整，并且能够以集体的方式调节多个晶体振荡器。更具体地说，本发明提供了一种制造晶体振荡器的方法，该方法包括用于形成规定的外部形状的第一蚀刻步骤，至少在外部形状的一部分中形成电极的电极形成步骤，用于测量与外部形状的泄漏振动相关的泄漏量的步骤，以及用于根据泄漏量测量步骤的测量结果确定的量蚀刻外部形状以调整平衡的第二蚀刻步骤。

10. 发明申请

US20140055206A1 RESONATOR ELEMENT HAVING A NOTCHED BASE 审中-公开
标题翻译：谐振器元件有一个凹陷的基座
公开(公告)号：US20140055206A1
公开(公告)日：2014-02-27
申请号：US14068126
申请日：2013-10-31
申请人： Seiko Epson Corporation
发明人： Akinori YAMADA , Shuhei YOSHIDA
IPC分类号： H01L41/02 , H03B28/00
CPC分类号： H01L41/02 , A63F13/08 , A63F2300/204 , G04F5/06 , G06F1/1616 , H03B28/00 , H03H3/02 , H03H9/19 , H03H9/215 , H03H2003/026 , H03H2003/0492
摘要： A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.
摘要翻译：提供了能够改善耐冲击性的谐振元件。石英晶体振子元件是通过蚀刻相对于石英晶体的晶轴以预定角度切割的Z板形成的谐振器元件。石英晶体振子元件包括基座，从基座沿Y轴方向延伸的一对谐振臂，以及在X轴方向上开槽基部形成的正X轴槽口和负X轴槽口。正X轴槽口通过从X轴的负侧朝向正侧切开基座而形成，使得正X轴槽口的宽度随着接近外圆周而增加。

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