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1. 发明授权

US08638026B2 Stage drive device 失效
标题翻译：舞台驱动装置
公开(公告)号：US08638026B2
公开(公告)日：2014-01-28
申请号：US13123199
申请日：2009-10-06
申请人： Masashi Shibahara , Mikio Tokuyama , Koichiro Takeuchi , Shigeru Haneda , Osamu Yamada , Naoki Sakamoto , Eiichi Hazaki , Akito Tanokuchi
发明人： Masashi Shibahara , Mikio Tokuyama , Koichiro Takeuchi , Shigeru Haneda , Osamu Yamada , Naoki Sakamoto , Eiichi Hazaki , Akito Tanokuchi
IPC分类号： H01L41/08
CPC分类号： H01J37/20 , H01J2237/20221 , H01J2237/20264 , H01J2237/28
摘要： A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.
摘要翻译：平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12）和用于保持从动杆（12）的相对端的平行板簧（30）。线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止了定位精度的降低。此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。该配置使舞台高度准确和高度可靠。

2. 发明授权

US08481935B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08481935B2
公开(公告)日：2013-07-09
申请号：US13190153
申请日：2011-07-25
申请人： Akira Ikegami , Minoru Yamazaki , Hideyuki Kazumi , Koichiro Takeuchi , Hisaya Murakoshi
发明人： Akira Ikegami , Minoru Yamazaki , Hideyuki Kazumi , Koichiro Takeuchi , Hisaya Murakoshi
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , H01J37/21 , H01J37/28 , H01J37/3045 , H01J2237/24564 , H01J2237/2594 , H01J2237/28 , H01J2237/2816 , H01J2237/30461
摘要： A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
摘要翻译：一种具有带电粒子束的扫描电子显微镜，其在朝向样品照射的状态下，向样品施加电压，使得带电粒子束未到达样品。扫描电子显微镜还使用所获得的信号检测样品的电位信息，以及根据测定结果自动调整条件的装置。

3. 发明授权

US07989768B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07989768B2
公开(公告)日：2011-08-02
申请号：US12188870
申请日：2008-08-08
申请人： Akira Ikegami , Minoru Yamazaki , Hideyuki Kazumi , Koichiro Takeuchi , Hisaya Murakoshi
发明人： Akira Ikegami , Minoru Yamazaki , Hideyuki Kazumi , Koichiro Takeuchi , Hisaya Murakoshi
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/244 , H01J37/21 , H01J37/28 , H01J37/3045 , H01J2237/24564 , H01J2237/2594 , H01J2237/28 , H01J2237/2816 , H01J2237/30461
摘要： A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
摘要翻译：一种具有带电粒子束的扫描电子显微镜，其在朝向样品照射的状态下，向样品施加电压，使得带电粒子束未到达样品。扫描电子显微镜还使用所获得的信号检测样品的电位信息，以及根据测定结果自动调整条件的装置。

4. 发明授权

US07759652B2 Electron lens and charged particle beam apparatus 失效
标题翻译：电子透镜和带电粒子束装置
公开(公告)号：US07759652B2
公开(公告)日：2010-07-20
申请号：US11749181
申请日：2007-05-16
申请人： Takashi Ohshima , Mitsugu Sato , Yutaka Kaneko , Souichi Katagiri , Koichiro Takeuchi
发明人： Takashi Ohshima , Mitsugu Sato , Yutaka Kaneko , Souichi Katagiri , Koichiro Takeuchi
IPC分类号： H01J1/50
CPC分类号： H01J37/143 , H01J37/28 , H01J2237/1405 , H01J2237/2813 , H01J2237/31749
摘要： The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.
摘要翻译：本发明提供一种产生很小像差的小型电子透镜，以及诸如扫描电子显微镜的带电粒子束装置，其具有超级紧凑并且提供高分辨率。上磁极和样本侧磁极磁耦合到由诸如稀土钴体系或钕铁硼体系的高强度磁性材料制成的永磁体的各极上，即，轴向对称，并且在其中心具有孔。在中心轴的一侧产生内部间隙。因此，磁性透镜轴向形成。此外，将外部磁场屏蔽并具有调节磁阻的半静态磁路设置在外部。样品侧磁极和磁路限定永磁体外磁阻最高的区域。由永磁体，上磁极，样品芯磁极和半静态磁路限定的空间填充有由非磁性材料制成的填充物。因此，构成物镜。

5. 发明授权

US07550740B2 Focused ION beam apparatus 有权
标题翻译：聚焦光束装置
公开(公告)号：US07550740B2
公开(公告)日：2009-06-23
申请号：US11828714
申请日：2007-07-26
申请人： Koichiro Takeuchi , Tohru Ishitani
发明人： Koichiro Takeuchi , Tohru Ishitani
IPC分类号： G21K1/093 , H01J29/58 , H01J29/64 , H01J37/21
CPC分类号： H01J37/3056 , H01J37/09 , H01J37/1471 , H01J2237/31745 , H01J2237/31749
摘要： A focused ion beam apparatus enables an ion beam to be focused highly accurately on a sample at the beam spot position of the case of the absence of magnetic field without causing isotope separation of the ion beam on the sample, even when there is a magnetic field on the ion beam optical axis or the magnetic field fluctuates. The focused ion beam apparatus comprises a corrective magnetic field generating unit 10 disposed on the optical axis of the ion beam 3 for correcting the deflection of the ion beam 3 due to an external magnetic field. The corrective magnetic field generating unit 10 includes pole-piece pairs 26A and 26B, each of which having two pole pieces 26a and 26b or 26c and 26d that are adjacent to each other with a gap d. The pole-piece pairs 26A and 26B are disposed opposite to each other with a gap g (>d) across the optical axis of the ion beam 3. Each of the pole pieces 26a to 26d is wound with an internal coil 29, and the pole-piece pairs 26A and 26B are each wound with an external coil 30 in such a manner as to surround the internal coils 29.
摘要翻译：聚焦离子束装置使得离子束能够在不存在磁场的情况下的光束位置处的样品上高精度地聚焦，而不会导致样品上的离子束同位素分离，即使存在磁场在离子束光轴上或磁场波动。聚焦离子束装置包括设置在离子束3的光轴上的校正磁场产生单元10，用于校正由外部磁场引起的离子束3的偏转。校正磁场产生单元10包括极片对26A和26B，每个具有间隙d彼此相邻的两个极片26a和26b或26c和26d。极片对26A和26B彼此相对地设置有跨越离子束3的光轴的间隙g（> d）。每个极片26a至26d都缠绕有内部线圈29，并且极片对26A和26B分别以包围内部线圈29的方式缠绕有外部线圈30。

6. 发明授权

US5824158A Chemical vapor deposition using inductively coupled plasma and system therefor 失效
标题翻译：使用电感耦合等离子体的化学气相沉积及其系统
公开(公告)号：US5824158A
公开(公告)日：1998-10-20
申请号：US917803
申请日：1997-08-27
申请人： Koichiro Takeuchi , Hirokazu Ueda , Akira Narai
发明人： Koichiro Takeuchi , Hirokazu Ueda , Akira Narai
IPC分类号： C23C16/507 , H01J37/32 , C23C16/00
CPC分类号： H01J37/321 , C23C16/507
摘要： An ICP (Inductively Coupled Plasma) system is used as a plasma generating means. A CVD process gas is introduced within a vacuum vessel from a gas inlet nozzle, and is then converted into plasma by a high frequency electric field induced within the vacuum vessel by an electromagnetic wave from an antenna. A sample can be located at a position not to be exposed to plasma, and a decomposed product material produced from the CVD process gas by the plasma is deposited on the surface of the sample mounted on a sample stage, thus forming a film. A dielectric viewing port, the antenna and the sample are disposed along the same axial direction such that the directions of the planes thereof correspond to each other, so that the film formation on the surface of the sample within the vacuum vessel can be observed through the transparent dielectric viewing port. When a CVD process gas of a CVD source gas mixed with a rare gas is introduced in the vacuum vessel and a bias voltage is applied to the sample, the film is formed by the CVD source gas and it is simultaneously planarized by sputter etching by the rare gas. When an antenna serving as a target material is disposed within the vacuum vessel, it is possible to eliminate the cutoff of the high frequency power which, has been generated for the inductive coupling from the outside of the vacuum vessel.
摘要翻译：使用ICP（感应耦合等离子体）系统作为等离子体发生装置。将CVD工艺气体从气体入口喷嘴引入真空容器内，然后通过来自天线的电磁波在真空容器内感应的高频电场转换成等离子体。样品可以位于不暴露于等离子体的位置，并且通过等离子体由CVD处理气体产生的分解产物材料沉积在安装在样品台上的样品的表面上，从而形成膜。电介质观察口，天线和样品沿着相同的轴向方向设置，使得其平面的方向彼此对应，使得真空容器内的样品表面上的成膜可以通过透明电介质观察口。当将与稀有气体混合的CVD源气体的CVD工艺气体引入真空容器中并向样品施加偏置电压时，该膜由CVD源气体形成，并且通过溅射蚀刻同时被平坦化稀有气体当用作目标材料的天线设置在真空容器内时，可以消除从真空容器的外部产生的用于电感耦合的高频功率的截止。

7. 发明授权

US5583446A Electro-optically controlled measurement probe system 失效
标题翻译：电光测量探头系统
公开(公告)号：US5583446A
公开(公告)日：1996-12-10
申请号：US351396
申请日：1995-02-14
申请人： Koichiro Takeuchi , Yukio Kasahara , Akira Miura , Hideto Iwaoka , Tadashi Sugiyama
发明人： Koichiro Takeuchi , Yukio Kasahara , Akira Miura , Hideto Iwaoka , Tadashi Sugiyama
IPC分类号： G01Q30/02 , G01Q60/24 , G01R1/06 , G01R1/067 , G01R1/07 , G01R19/00 , G01R31/28 , G01R31/302 , G01R31/316 , G01R31/02
CPC分类号： G01R31/2886 , B82Y35/00 , G01Q60/38 , G01R1/06711 , G01R1/071 , Y10S977/868
摘要： A needle-shaped terminal, i.e., a probe tip, is brought into extremely close proximity with an object being measured. This probe tip is formed from an optically active material and in itself is electrically non-conductive, so that it has no electrical influence whatsoever on the object being measured. When optical pulses are beamed onto this probe tip, the probe tip becomes an electric conductor and a current flows between it and the object being measured, so that the electric potential of the object can be measured. This facilitates previously impossible measurements of high-speed electric waveforms. It also facilitates high spatial resolution monitoring and control of probe tip position and characterization of measurement sites, and enables highly reliable measurements to be made inexpensively.
摘要翻译： PCT No.PCT / JP94 / 00611 Sec。 371日期：1995年2月14日 102（e）1995年2月14日PCT PCT 1994年4月12日PCT公布。出版物WO94 / 24575 日期：1994年10月27日将针状端子，即探针尖端与被测量物体非常接近。该探针尖端由光学活性材料形成，并且其本身是非导电的，使得其对所测量的物体无任何电学影响。当光脉冲发射到该探针尖端上时，探针尖端变成电导体，并且电流在它和被测量物体之间流动，从而可以测量物体的电位。这有助于以前不可能测量的高速电波形。它还有助于高空间分辨率监测和控制探针尖端位置和测量位置的表征，并且可以低成本地实现高度可靠的测量。

8. 发明授权

US5159856A Automatic transmission line pressure control system 失效
标题翻译：自动传输线压力控制系统
公开(公告)号：US5159856A
公开(公告)日：1992-11-03
申请号：US764687
申请日：1991-09-24
申请人： Hiroshi Yoshimura , Masahito Kitada , Koichiro Takeuchi , Junichi Doi
发明人： Hiroshi Yoshimura , Masahito Kitada , Koichiro Takeuchi , Junichi Doi
IPC分类号： F16H59/38 , F16H61/00 , F16H61/02 , F16H61/04 , F16H61/21
CPC分类号： F16H61/0021 , F16H61/0437 , F16H2059/385 , F16H2061/0255 , F16H61/21 , Y10T477/693964 , Y10T477/693965
摘要： An automatic transmission line pressure control system controls line pressure in an automatic transmission equipped with a torque convertor for hydraulically coupling and uncoupling friction coupling elements of the automatic transmission. The automatic transmission line pressure control system regulates line pressure for selectively coupling and uncoupling the friction coupling elements so as to shift the automatic transmission into desired speed gears. The line pressure is forcibly dropped to a level lower than a level present before an occurrence of a manual shift-down operation when a shift-down sensor detects the occurrence of a manual shift-down. The line pressure is then raised as a speed sensor detects an increase in rotational speed transmitted the automatic transmission, thereby shifting the automatic transmission into desired speed gears.
摘要翻译：自动变速器线压力控制系统控制配备有扭矩转换器的自动变速器中的管路压力，用于液压耦合和解耦自动变速器的摩擦联接元件。自动传输线压力控制系统调节线路压力，用于选择性地耦合和分离摩擦联接元件，以便将自动变速器移动到期望的速度齿轮。当减速传感器检测到手动换档的发生时，行压力被强制下降到低于手动换档操作发生之前的水平。随着速度传感器检测到传动自动变速器的转速的增加，线压力升高，从而将自动变速器移动到所需的速度档位。

9. 发明授权

US5339935A Control system for torque converter 失效
标题翻译：变矩器控制系统
公开(公告)号：US5339935A
公开(公告)日：1994-08-23
申请号：US928165
申请日：1992-08-13
申请人： Kozo Ishii , Kazuo Takemoto , Takuji Fujiwara , Tatsutoshi Mizobe , Fumiaki Baba , Shigeru Nagayama , Osamu Watanabe , Koichiro Takeuchi
发明人： Kozo Ishii , Kazuo Takemoto , Takuji Fujiwara , Tatsutoshi Mizobe , Fumiaki Baba , Shigeru Nagayama , Osamu Watanabe , Koichiro Takeuchi
IPC分类号： F16H61/02 , F16H61/14 , F16H45/02
CPC分类号： F16H61/143 , F16H2045/021 , F16H2061/0255 , F16H2061/145
摘要： A control system for a torque converter includes a lock-up clutch provided in the torque converter for connecting input and output members of the torque converter directly, and a shift valve having first and second spools disposed in series in a sleeve for shifting an introduction of an engaging and releasing pressure acting on the lock-up clutch in accordance with positions of the first and second spools. The first spool is subjected to a first hydraulic pressure at one end thereof. The second spool is subjected to a second hydraulic pressure at one end thereof opposite to the one end of the first spool. The first and second spools are subjected to a third hydraulic pressure therebetween. The control system further has a first control device for controlling the first hydraulic pressure, and an adjusting valve for controlling the releasing pressure of the lock-up clutch. The shift valve provides the first and second spools with first, second and third positions corresponding to a converter condition, lock-up condition and slip condition, respectively. The shift valve is shifted between the second and third positions when the releasing pressure is relatively low so that the releasing pressure is continuously changed irrespective of the shifting action among the first, second and third positions of the shift valve. An abrupt change in the engaging force of the lock-up clutch is prevented.
摘要翻译：用于变矩器的控制系统包括设置在变矩器中用于直接连接变矩器的输入和输出构件的锁止离合器，以及具有串联设置在套筒中的第一和第二线轴的换档阀，根据第一和第二卷轴的位置，作用在锁止离合器上的接合和释放压力。第一阀芯在其一端经受第一液压。第二阀芯在与第一阀芯的一端相对的一端处受到第二液压。第一和第二线轴之间经受第三液压。控制系统还具有用于控制第一液压的第一控制装置和用于控制锁止离合器的释放压力的调节阀。换档阀提供第一和第二线轴，其中第一，第二和第三位置分别对应于转换器状态，锁定状态和滑动状态。当释放压力相对较低时，换档阀在第二和第三位置之间移动，使得释放压力连续地改变，而与换挡阀的第一，第二和第三位置之间的换档动作无关。防止了锁止离合器的接合力的突然变化。

10. 发明授权

US5253614A Intake system for engine 失效
标题翻译：发动机进气系统
公开(公告)号：US5253614A
公开(公告)日：1993-10-19
申请号：US742575
申请日：1991-08-07
申请人： Noritaka Matsuo , Koichiro Takeuchi , Tokuji Muramatsu
发明人： Noritaka Matsuo , Koichiro Takeuchi , Tokuji Muramatsu
IPC分类号： F02B27/00 , F02B75/02
CPC分类号： F02M35/108 , F02B27/003 , F02B27/008 , F02M35/1019 , F02B2075/025 , Y02T10/14 , Y02T10/146
摘要： Several embodiments of engine intake systems that improve the charging efficiency by providing a closed branch passage which forms a volume in the intake tract between the throttle valve and the point of discharge into an engine chamber. The illustrated embodiments of the application of this concept is to both four and two cycle engines. In addition, a plenum chamber is illustrated for permitting the effective volume of the branch passage to be increased without unduly increasing its length. The branch passage outlet in certain embodiments is oriented so that its discharge during the intake cycle increases turbulence to improve combustion efficiency.
摘要翻译：发动机进气系统的几个实施例通过提供闭合的分支通道来提高充气效率，该分支通道在节流阀和排放点之间的进气道中形成体积到发动机室中。这个概念的应用的所示实施例是四循环和二循环引擎。此外，示出了增压室，以允许增加分支通道的有效体积而不会不适当地增加其长度。在某些实施例中，分支通道出口定向成使得其在进气循环期间的排放增加了湍流以提高燃烧效率。

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