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    • 2. 发明授权
    • Precision positioning apparatus for positioning a component especially an optical component
    • 用于定位组件,特别是光学部件的精密定位装置
    • US06603615B2
    • 2003-08-05
    • US09866089
    • 2001-05-25
    • Frank MelzerMartin Bayer
    • Frank MelzerMartin Bayer
    • G02B702
    • G02B7/1824G02B7/023
    • An apparatus for the precision positioning of an optical component a group of lenses or mirror, in the axial direction and/or for tilting the component and has an axial adjustment device and/or a tilting device. The axial adjustment device has an adjusting nut that includes a guide ring and a clamping ring. The two rings are connected to one another elastically via a blade. Individual clamping jaws are formed by axial incisions in the clamping ring and are braced with the guide ring via tensioning members. The tilting device has an inner and an outer tilting part. The inner tilting part is connected to the outer tilting part via torsion joints, and the outer tilting part is connected to a bearing part via torsion joints.
    • 一种用于在轴向方向上精确定位一组透镜或反射镜的光学部件和/或用于倾斜部件并具有轴向调节装置和/或倾斜装置的装置。 轴向调节装置具有包括引导环和夹紧环的调节螺母。 两个环通过叶片弹性地相互连接。 单个夹爪通过夹紧环中的轴向切口形成,并通过张紧构件与导向环支撑。 倾斜装置具有内部和外部倾斜部。 内倾斜部通过扭转接头与外倾斜部连接,外倾斜部通过扭转接头与轴承部连接。
    • 4. 发明授权
    • Method to test the measurement accuracy of at least one magnetic field sensor using a semiconductor chip having a measurement coil
    • 使用具有测量线圈的半导体芯片测试至少一个磁场传感器的测量精度的方法
    • US08558537B2
    • 2013-10-15
    • US11949393
    • 2007-12-03
    • Martin BayerHans-Jörg Fink
    • Martin BayerHans-Jörg Fink
    • G01R35/00
    • G01R35/00G01R33/07H01L22/14H01L2924/0002H01L2924/014H01L2924/00
    • In a process for testing the measurement accuracy of at least one magnetic field sensor, in particular during manufacturing, a semiconductor wafer that has at least two semiconductor chips is provided. A measurement coil is integrated into at least one first semiconductor chip, and a magnetic field-sensitive electric circuit is integrated into at least one second semiconductor chip that forms the magnetic field sensor. The first semiconductor chip, of which at least one is present, is positioned at an exciter coil that is supplied with current in order to generate a reference magnetic field. With the aid of the measurement coil a first measured value that is dependent on the magnetic flux density is acquired and the current in the exciter coil is adjusted depending on the first measured value. The second semiconductor chip, of which at least one is present, is positioned at the exciter coil. With the aid of the electronic circuit a second measured value that is dependent on the magnetic flux density is acquired and compared with a reference value range.
    • 在用于测试至少一个磁场传感器的测量精度的过程中,特别是在制造期间,提供具有至少两个半导体芯片的半导体晶片。 测量线圈集成到至少一个第一半导体芯片中,并且磁场敏感电路集成到形成磁场传感器的至少一个第二半导体芯片中。 其中存在至少一个的第一半导体芯片位于被提供有电流以便产生参考磁场的励磁线圈上。 借助于测量线圈,获得取决于磁通密度的第一测量值,并且根据第一测量值调整励磁线圈中的电流。 其中存在至少一个的第二半导体芯片位于激励器线圈处。 借助于电子电路,获得取决于磁通密度的第二测量值并与参考值范围进行比较。
    • 6. 发明申请
    • Method to Test the Measurement Accuracy of At Least One Magnetic Field Sensor
    • 测试至少一个磁场传感器的测量精度的方法
    • US20090015242A1
    • 2009-01-15
    • US11949393
    • 2008-02-21
    • Martin BayerHans-Jorg Fink
    • Martin BayerHans-Jorg Fink
    • G01R35/00
    • G01R35/00G01R33/07H01L22/14H01L2924/0002H01L2924/014H01L2924/00
    • In a process for testing the measurement accuracy of at least one magnetic field sensor, in particular during manufacturing, a semiconductor wafer that has at least two semiconductor chips is provided. A measurement coil is integrated into at least one first semiconductor chip, and a magnetic field-sensitive electric circuit is integrated into at least one second semiconductor chip that forms the magnetic field sensor. The first semiconductor chip, of which at least one is present, is positioned at an exciter coil that is supplied with current in order to generate a reference magnetic field. With the aid of the measurement coil a first measured value that is dependent on the magnetic flux density is acquired and the current in the exciter coil is adjusted depending on the first measured value. The second semiconductor chip, of which at least one is present, is positioned at the exciter coil. With the aid of the electronic circuit a second measured value that is dependent on the magnetic flux density is acquired and compared with a reference value range.
    • 在用于测试至少一个磁场传感器的测量精度的过程中,特别是在制造期间,提供具有至少两个半导体芯片的半导体晶片。 测量线圈集成到至少一个第一半导体芯片中,并且磁场敏感电路集成到形成磁场传感器的至少一个第二半导体芯片中。 其中存在至少一个的第一半导体芯片位于被提供有电流以便产生参考磁场的励磁线圈上。 借助于测量线圈,获得取决于磁通密度的第一测量值,并根据第一测量值调整励磁线圈中的电流。 其中存在至少一个的第二半导体芯片位于激励器线圈处。 借助于电子电路,获得取决于磁通密度的第二测量值并与参考值范围进行比较。