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    • 10. 发明申请
    • Cobalt-based alloy electroless planting solution and electroless plating method using the same
    • 钴基合金无电解种植液及使用其的化学镀方法
    • US20070160857A1
    • 2007-07-12
    • US11647283
    • 2006-12-29
    • Sang-chul LeeMin-kyoun KimMin-jin Ko
    • Sang-chul LeeMin-kyoun KimMin-jin Ko
    • B05D3/04C22C19/07B05D1/18B32B15/00
    • C23C18/1834C23C18/34C23C18/50Y10T428/31678
    • The present invention provides a cobalt-based alloy electroless plating solution comprising a cobalt precursor, a tungsten precursor, a phosphorus precursor, a reducing agent, a complexing agent, a pH regulator and a stabilizer, in which the reducing agent is dimethylamine borane (DMAB) or borohydride and the stabilizer is one or more compounds selected from a group consisting of imidazole, thiazole, triazole, disulfide and their derivatives; and an electroless plating method using the cobalt-based alloy electroless plating solution, as well as a thin film prepared by the same. According to the present invention, the cobalt-based alloy electroless plating solution is stable enough for long-term reuse and prevents deterioration of metal thin-film quality by inhibiting the formation of a precipitate. The present invention further provides an electroless plating method using the cobalt-based alloy electroless plating solution, and a cobalt-based alloy thin film prepared by the same.
    • 本发明提供了一种钴基合金无电解镀液,其包含钴前体,钨前体,磷前体,还原剂,络合剂,pH调节剂和稳定剂,其中还原剂是二甲胺硼烷(DMAB )或硼氢化物,稳定剂是一种或多种选自咪唑,噻唑,三唑,二硫化物及其衍生物的化合物; 以及使用该钴基合金化学镀溶液的无电镀方法,以及使用其制备的薄膜。 根据本发明,钴基合金化学镀溶液的稳定性足以长期重复利用,并且通过抑制沉淀物的形成来防止金属薄膜质量的劣化。 本发明还提供了一种使用钴基合金化学镀溶液的化学镀方法和由其制备的钴基合金薄膜。