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    • 3. 发明申请
    • QUANTUM CASCADE LASER
    • 量子CASCADE激光
    • US20110007768A1
    • 2011-01-13
    • US12919289
    • 2009-02-24
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • H01S5/34
    • H01S5/3402B82Y20/00H01S5/3406H01S5/3418H01S5/34313
    • A quantum cascade laser is configured so as to include a semiconductor substrate and an active layer which is provided on the substrate and has a cascade structure including multistage-laminated unit laminate structures 16 each including a quantum well emission layer 17 and an injection layer 18. Moreover, the unit laminate structure 16 has, in its subband level structure, an emission upper level 3, a lower level 2, and an injection level 4 of higher energy than the upper level 3, and light hv is generated by intersubband transition of electrons from the level 3 to the level 2 in the emission layer 17, and electrons after emission transition are injected into the injection level 4 of the subsequent stage via the injection layer 18. In addition, the emission layer 17 includes two or more well layers, and the first well layer closest to the injection layer of the preceding stage is used as a well layer for injection level formation. Accordingly, a quantum cascade laser capable of operation with high efficiency at high temperature can be realized.
    • 量子级联激光器被配置为包括半导体衬底和设置在衬底上的有源层,并且具有包括多层叠单元叠层结构16的级联结构,每个包括量子阱发射层17和注入层18。 此外,单元叠层结构16在其子带层结构中具有比上层3更高能量的发射上层3,下层2和注入级4,并且通过电子的子带间转变产生光hv 从发光层17的3级到2级,发射转变后的电子经由注入层18注入后级的注入电平4.此外,发光层17包括两层以上的阱层, 并且最靠近前一级的注入层的第一阱层用作注入层形成的阱层。 因此,可以实现能够在高温下高效率地操作的量子级联激光器。
    • 4. 发明授权
    • Quantum cascade laser
    • 量子级联激光器
    • US08374208B2
    • 2013-02-12
    • US12919289
    • 2009-02-24
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/3406H01S5/3418H01S5/34313
    • A quantum cascade laser is configured so as to include a semiconductor substrate and an active layer which is provided on the substrate and has a cascade structure including multistage-laminated unit laminate structures each including a quantum well emission layer and an injection layer. Moreover, the unit laminate structure has, in its subband level structure, an emission upper level, a lower level, and an injection level 4 of higher energy than the upper level, and light hν is generated by intersubband transition of electrons from the level to the level in the emission layer, and electrons after emission transition are injected into the injection level 4 of the subsequent stage via the injection layer. In addition, the emission layer includes two or more well layers, and the first well layer closest to the injection layer of the preceding stage is used as a well layer for injection level formation.
    • 量子级联激光器被配置为包括半导体衬底和设置在衬底上的有源层,并且具有包括多层叠单元层压结构的级联结构,每个层叠结构均包括量子阱发射层和注入层。 此外,单元层叠结构在其子带层结构中具有比上层更高能量的发射上限,较低水平和注入水平4,以及光h&ngr; 通过电子从发射层中的电平的子带间跃迁产生,并且发射转变后的电子经由注入层注入到后续级的注入级4中。 此外,发射层包括两个或更多个阱层,并且最靠近前一级的注入层的第一阱层用作用于注入电平形成的阱层。
    • 5. 发明授权
    • Quantum cascade laser
    • 量子级联激光器
    • US08068528B2
    • 2011-11-29
    • US12523277
    • 2007-06-06
    • Tadataka EdamuraNaota AkikusaKazuue FujitaAtsushi SugiyamaTakahide Ochiai
    • Tadataka EdamuraNaota AkikusaKazuue FujitaAtsushi SugiyamaTakahide Ochiai
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/3086H01S5/309H01S5/34313
    • A quantum cascade laser includes a semiconductor substrate, and an active layer which is provided on the semiconductor substrate, and has a cascade structure in which unit laminate structures 16 having quantum well emission layers 17 and injection layers 18 are laminated in multiple stages. Further, the quantum cascade laser is configured such that the unit laminate structure 16 has an emission upper level Lup, an emission lower level Llow, and a relaxation miniband MB including an energy level lower than the emission lower level in its subband level structure, and light is generated by an intersubband transition of electrons from the upper level to the lower level, and the electrons after the intersubband transition are relaxed from the lower level Llow to the miniband MB through LO phonon scattering, to be injected from the injection layer 18 to the latter stage emission layer via the miniband MB. Thereby, the quantum cascade laser which is capable of efficiently forming an inverted population in the quantum well emission layer, to improve its laser operation performance, is realized.
    • 量子级联激光器包括半导体衬底和设置在半导体衬底上的有源层,并且具有级联结构,其中具有量子阱发射层17和注入层18的单元叠层结构16多层叠。 此外,量子级联激光器被配置为使得单元层压结构16具有包括其子带级结构中的低于发射较低电平的能级的发射上电平Lup,发射低电平Llow和弛豫微型MB,以及 光通过从上层到下层的电子的子带间跃迁产生,并且子带间过渡之后的电子通过LO声子散射从低层Llow松弛到微型MB,从注入层18注入到 后级发射层通过miniband MB。 由此,可以实现能够在量子阱发射层中有效地形成反向群体的量子级联激光器,以提高其激光器的操作性能。
    • 6. 发明申请
    • Quantum cascade laser
    • 量子级联激光器
    • US20080069164A1
    • 2008-03-20
    • US11979294
    • 2007-11-01
    • Tadataka EdamuraNaota Akikusa
    • Tadataka EdamuraNaota Akikusa
    • H01S5/343
    • B82Y20/00H01S5/32366H01S5/3402H01S5/34313
    • A quantum cascade laser 1, which generates infrared light or other light of a predetermined wavelength by making use of intersubband transitions in a quantum well structure, is arranged by forming, on a GaAs substrate 10, an AlGaAs/GaAs active layer 11 having a cascade structure in which quantum well light emitting layers and injection layers are laminated alternately. Also, at the GaAs substrate 10 side and the side opposite the GaAs substrate 10 side of active layer 11, is provided a waveguide structure, comprising waveguide core layers 12 and 14, each being formed of an n-type GaInNAs layer, which is a group III-V compound semiconductor that contains N (nitrogen), formed so as to be lattice matched with the GaAs substrate 10, and waveguide clad layers 13 and 15, each formed of an n++-type GaAs layer. A quantum cascade laser, with which the waveguide loss of generated light in the laser is reduced, is thereby realized.
    • 通过在GaAs衬底10上形成具有级联的AlGaAs / GaAs活性层11,通过在量子阱结构中利用子带间跃迁来产生预定波长的红外光或其他光的量子级联激光器1 量子阱发光层和注入层交替层叠的结构。 此外,在GaAs衬底10侧和与有源层11的GaAs衬底10侧相对的一侧提供波导结构,其包括波导芯层12和14,每个波导芯层12和14由n型GaInNA层形成,其为 形成为与GaAs衬底10晶格匹配的N(氮)的III-V族化合物半导体以及由n + GaAs层。 从而实现了激光器中产生的光的波导损耗减小的量子级联激光器。
    • 10. 发明授权
    • Semiconductor light emitting device
    • 半导体发光器件
    • US08330140B2
    • 2012-12-11
    • US12843196
    • 2010-07-26
    • Tadataka EdamuraKazuue FujitaAkira HiguchiNaota AkikusaMasamichi Yamanishi
    • Tadataka EdamuraKazuue FujitaAkira HiguchiNaota AkikusaMasamichi Yamanishi
    • H01L31/00
    • H01L33/06B82Y20/00H01S5/3402
    • A semiconductor light emitting device including a semiconductor substrate and an active layer which is formed on the substrate and has a cascade structure formed by multistage-laminating unit laminate structures 16 each including an emission layer 17 and an injection layer 18 is configured. The unit laminate structure 16 has a first upper level L3, a second upper level L4, and a lower level L2 in the emission layer 17, and an injection level L1 in the injection layer 18, an energy interval between the levels L3 and L4 is set to be smaller than the energy of an LO phonon, the layer thickness of the exit barrier layer is set in a range not less than 70% and not more than 150% of the layer thickness of the injection barrier layer, light is generated by emission transition in the emission layer 17, and electrons after the emission transition are injected from the level L2 into the level L4 of the emission layer of a subsequent stage via the level L1. Accordingly, a semiconductor light emitting device using polaritons, capable of performing a light emitting operation by current injection, is realized.
    • 构成半导体发光器件,其包括半导体衬底和有源层,该有源层形成在衬底上并且具有由包括发射层17和注入层18的多层叠层单元叠层结构16形成的级联结构。 单元层叠结构16在发光层17中具有第一上层L3,第二上层L4和下层L2,以及注入层18中的注入层L1,层L3和L4之间的能量间隔为 设定为小于LO声子的能量,出射阻挡层的层厚度设定在不小于注入阻挡层的层厚度的70%且不大于150%的范围内,光由 发射层17中的发射跃迁以及发射跃迁之后的电子经由电平L1从电平L2注入到后级的发射层的电平L4。 因此,实现了能够通过电流注入进行发光操作的使用极化子的半导体发光器件。