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1. 发明授权

US08342119B2 Self aligning non contact shadow ring process kit 有权
公开(公告)号：US08342119B2
公开(公告)日：2013-01-01
申请号：US11870285
申请日：2007-10-10
申请人： Joseph Yudovsky , Lawrence C. Lei , Salvador Umotoy , Tom Madar , Girish Dixit , Gwo-Chuan Tzu
发明人： Joseph Yudovsky , Lawrence C. Lei , Salvador Umotoy , Tom Madar , Girish Dixit , Gwo-Chuan Tzu
IPC分类号： C23C16/458
CPC分类号： C23C16/4585 , C30B25/12 , C30B31/14
摘要： The invention provides a removable first edge ring configured for pin and recess/slot coupling with a second edge ring disposed on the substrate support. In one embodiment, a first edge ring includes a plurality of pins, and a second edge ring includes one or more alignment recesses and one or more alignment slots for mating engagement with the pins. Each of the alignment recesses and alignment slots are at least as wide as the corresponding pins, and each of the alignment slots extends in the radial direction a length that is sufficient to compensate for the difference in thermal expansion between the first edge ring and the second edge ring.

2. 发明申请

US20070040265A1 Substrate support having brazed plates and resistance heater 有权
标题翻译：具有钎焊板和电阻加热器的基板支撑
公开(公告)号：US20070040265A1
公开(公告)日：2007-02-22
申请号：US11506460
申请日：2006-08-17
申请人： Salvador Umotoy , Lawrence Lei , Gwo-Chuan Tzu , Xiaoxiong Yuan , Michael Jackson , Hymam Lam
发明人： Salvador Umotoy , Lawrence Lei , Gwo-Chuan Tzu , Xiaoxiong Yuan , Michael Jackson , Hymam Lam
IPC分类号： H01L23/12
CPC分类号： H01L21/67103 , C23C16/45521 , C23C16/4586 , C23C16/466 , H01L21/6838 , H01L21/68735 , H01L21/6875 , H01L21/68785
摘要： A substrate support comprises top, middle and bottom plates which are brazed together. The top plate has a top surface with a plurality of outwardly projecting mesas dispersed across a recessed pocket, a network of recessed grooves, a vacuum port terminating in the recessed grooves, and plurality of gas ports. The middle plate has a plurality of middle feedthroughs aligned to corresponding top feedthroughs of the top plate, and the bottom plate has a plurality of bottom feedthroughs aligned to the middle feedthroughs of the middle plate. The top and middle plates are joined by a first brazed bond layer and the middle and bottom plates are joined by a second brazed bond layer.
摘要翻译：衬底支撑件包括钎焊在一起的顶板，中板和底板。顶板具有顶表面，多个向外突出的台面分散在凹槽中，凹槽网络，终止于凹槽中的真空端口以及多个气体端口。中间板具有与顶板的相应的顶部馈通对准的多个中间馈通，并且底板具有与中间板的中间馈通对准的多个底部馈通。顶板和中间板通过第一钎焊接合层连接，中间和底板通过第二钎焊接合层连接。

3. 发明申请

US20060021703A1 Dual gas faceplate for a showerhead in a semiconductor wafer processing system 审中-公开
标题翻译：用于半导体晶片处理系统中喷头的双气面板
公开(公告)号：US20060021703A1
公开(公告)日：2006-02-02
申请号：US10901768
申请日：2004-07-29
申请人： Salvador Umotoy , Lawrence Chung-Lai Lei , Anh Nguyen , Steve Chiao , Hanh Nguyen
发明人： Salvador Umotoy , Lawrence Chung-Lai Lei , Anh Nguyen , Steve Chiao , Hanh Nguyen
IPC分类号： C23C16/00 , C23F1/00
CPC分类号： C23C16/45565 , H01J37/3244 , H01J37/32522
摘要： A faceplate for a showerhead of a semiconductor wafer processing system is provided. The faceplate has a plurality of gas passageways to provide a plurality of gases to the process region without commingling those gases before they reach the processing region within a reaction chamber. The showerhead includes a faceplate and a gas distribution manifold assembly. The faceplate defines a plurality of first gas holes that carry a first gas from the manifold assembly through the faceplate to the process region, and a plurality of channels that couple a plurality of second gas holes to a radial plenum that receives the second gas from the manifold assembly. The faceplate and the manifold assembly are each fabricated from a substantially solid nickel material.
摘要翻译：提供了一种用于半导体晶片处理系统的喷头的面板。面板具有多个气体通道，以在工艺区域内提供多个气体，而不会在这些气体到达反应室内的处理区域之前混合。喷头包括面板和气体分配歧管组件。面板限定了多个第一气体孔，其将来自歧管组件的第一气体通过面板传送到处理区域，以及将多个第二气体孔连接到径向增压室的多个通道，其将从第二气体接收第二气体歧管组件。面板和歧管组件各自由基本上固体的镍材料制成。

4. 发明申请

US20050115675A1 Lid assembly for a processing system to facilitate sequential deposition techniques 有权
标题翻译：用于处理系统的盖组件以便顺序沉积技术
公开(公告)号：US20050115675A1
公开(公告)日：2005-06-02
申请号：US10993924
申请日：2004-11-19
申请人： Gwo-Chuan Tzu , Salvador Umotoy
发明人： Gwo-Chuan Tzu , Salvador Umotoy
IPC分类号： C23C16/44 , C23C16/455 , H01L21/00 , C23F1/00
CPC分类号： C23C16/45544 , C23C16/455 , C23C16/45512 , C23C16/45525 , C23C16/45538 , C23C16/45561 , C23C16/50 , H01L21/67017
摘要： A lid assembly for a semiconductor processing system is provided. The lid assembly generally includes a lid having first and second opposed surfaces, a plurality of controllable flow channels extending from the first and second opposed surfaces and a gas control system disposed on the first surface and operably opening and closing the channels. The gas control system includes a gas manifold disposed on the lid, at least one valve coupled to the gas manifold and adapted to control a flow through one of the flow channels, a reservoir fluidly connected to the gas manifold, and a precursor source fluidly connected to the reservoir.
摘要翻译：提供了一种用于半导体处理系统的盖组件。盖组件通常包括具有第一和第二相对表面的盖，从第一和第二相对表面延伸的多个可控流动通道和设置在第一表面上并可操作地打开和关闭通道的气体控制系统。气体控制系统包括设置在盖上的气体歧管，至少一个阀，其连接到气体歧管并且适于控制通过流动通道之一的流动，流体连接到气体歧管的储存器和流体连接的前体源到水库

5. 发明授权

US08231431B2 Solar panel edge deletion module 失效
标题翻译：太阳能电池板边缘删除模块
公开(公告)号：US08231431B2
公开(公告)日：2012-07-31
申请号：US12358814
申请日：2009-01-23
申请人： Dhruv Gajaria , Zhiyong Li , Gopalakrishna B. Prabhu , Yacov Elgar , John Visitacion , Yong Liu , Jeffrey S. Sullivan , Salvador Umotoy , Tai T. Ngo , Michael Marriott , Peter Crundwell , Vinay Shah , Ho Gene Choi , Dennis C. Pierce
发明人： Dhruv Gajaria , Zhiyong Li , Gopalakrishna B. Prabhu , Yacov Elgar , John Visitacion , Yong Liu , Jeffrey S. Sullivan , Salvador Umotoy , Tai T. Ngo , Michael Marriott , Peter Crundwell , Vinay Shah , Ho Gene Choi , Dennis C. Pierce
IPC分类号： B24B49/00 , B24B7/06 , B24B53/21
CPC分类号： B24B9/10 , B24B49/045 , B24B55/02 , H01L21/67092 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L31/186 , Y02E10/50 , Y02P70/521
摘要： The present invention generally relates to an edge deletion module positioned within an automated solar cell fabrication line. The edge deletion module may include a grinding wheel device for removing material from edge regions of a solar cell device and cleaning the edge regions of the solar cell device after removing the material. The edge deletion module may also include an abrasive element, a portion of which is ground as it is periodically, laterally advanced toward the grinding wheel device. A controller is provided for controlling the operation and function of various facets of the module.
摘要翻译：本发明一般涉及位于自动太阳能电池生产线内的边缘删除模块。边缘删除模块可以包括用于从太阳能电池装置的边缘区域去除材料并在去除材料之后清洁太阳能电池装置的边缘区域的砂轮装置。边缘删除模块还可以包括研磨元件，其一部分被周期性地研磨成横向前进到研磨轮装置。提供控制器来控制模块的各个面的操作和功能。

6. 发明申请

US20090221217A1 SOLAR PANEL EDGE DELETION MODULE 失效
标题翻译：太阳能板边缘删除模块
公开(公告)号：US20090221217A1
公开(公告)日：2009-09-03
申请号：US12358814
申请日：2009-01-23
申请人： DHRUV GAJARIA , Zhiyong Li , Gopalakrishna B. Prabhu , Yacov Elgar , John Visitacion , Yong Liu , Jeffrey S. Sullivan , Salvador Umotoy , Tai T. Ngo , Michael Marriott , Peter Crundwell , Vinay Shah , Ho Gene Choi , Dennis C. Pierce
发明人： DHRUV GAJARIA , Zhiyong Li , Gopalakrishna B. Prabhu , Yacov Elgar , John Visitacion , Yong Liu , Jeffrey S. Sullivan , Salvador Umotoy , Tai T. Ngo , Michael Marriott , Peter Crundwell , Vinay Shah , Ho Gene Choi , Dennis C. Pierce
IPC分类号： B24B1/00 , B24B19/02 , B24B41/02 , B24B53/007 , B24B55/06
CPC分类号： B24B9/10 , B24B49/045 , B24B55/02 , H01L21/67092 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L31/186 , Y02E10/50 , Y02P70/521
摘要： The present invention generally relates to an edge deletion module positioned within an automated solar cell fabrication line. The edge deletion module may include a grinding wheel device for removing material from edge regions of a solar cell device and cleaning the edge regions of the solar cell device after removing the material. The edge deletion module may also include an abrasive element, a portion of which is ground as it is periodically, laterally advanced toward the grinding wheel device. A controller is provided for controlling the operation and function of various facets of the module.
摘要翻译：本发明一般涉及位于自动太阳能电池生产线内的边缘删除模块。边缘删除模块可以包括用于从太阳能电池装置的边缘区域去除材料并在去除材料之后清洁太阳能电池装置的边缘区域的砂轮装置。边缘删除模块还可以包括研磨元件，其一部分被周期性地研磨成横向前进到研磨轮装置。提供控制器来控制模块的各个面的操作和功能。

7. 发明申请

US20070095285A1 APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS 审中-公开
标题翻译：用于循环沉积薄膜的装置
公开(公告)号：US20070095285A1
公开(公告)日：2007-05-03
申请号：US11612931
申请日：2006-12-19
申请人： Randhir Thakur , Alfred Mak , Ming Xi , Walter Glenn , Ahmad Khan , Ayad Al-Shaikh , Avgerinos Gelatos , Salvador Umotoy
发明人： Randhir Thakur , Alfred Mak , Ming Xi , Walter Glenn , Ahmad Khan , Ayad Al-Shaikh , Avgerinos Gelatos , Salvador Umotoy
IPC分类号： C23C16/00
CPC分类号： C23C16/45544 , C23C16/4412 , C23C16/452 , C23C16/45536 , C23C16/45565 , C23C16/45582 , H01J37/32009 , H01J37/32091 , H01J37/3244 , H01J37/32834 , H01L21/6719
摘要： An apparatus for cyclical depositing of thin films on semiconductor substrates, comprising a process chamber having a gas distribution system with separate paths for process gases and an exhaust system synchronized with operation of valves dosing the process gases into a reaction region of the chamber.
摘要翻译：一种用于在半导体衬底上循环沉积薄膜的装置，包括具有气体分配系统的处理室，该气体分配系统具有用于处理气体的独立路径，以及与将所述工艺气体计量到所述室的反应区域的阀的操作同步的排气系统。

8. 发明授权

US06379466B1 Temperature controlled gas distribution plate 失效
标题翻译：温控气体分布板
公开(公告)号：US06379466B1
公开(公告)日：2002-04-30
申请号：US08238598
申请日：1994-05-05
申请人： Turgut Sahin , Salvador Umotoy , Avi Tepman , Ronald Lloyd Rose
发明人： Turgut Sahin , Salvador Umotoy , Avi Tepman , Ronald Lloyd Rose
IPC分类号： C23C1600
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/45572 , F28F3/12
摘要： The temperature controlled gas distribution plate of the present invention includes a liquid cooling passage, with inlet and outlet ports, that is formed within the gas distribution plate. In the preferred embodiment, the plate is formed with an upper passage cover and a lower base having a liquid passage channel formed within the side walls thereof. The cover and base are welded together to form a sealed liquid passage within the plate through which the liquid coolant flows.
摘要翻译：本发明的温度控制气体分配板包括形成在气体分配板内的具有入口和出口的液体冷却通道。在优选实施例中，板形成有上通道盖和下基部，其具有形成在其侧壁内的液体通道通道。盖和基座焊接在一起，以在液体冷却剂流过的板内形成密封的液体通道。

9. 发明授权

US06302965B1 Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces 失效
标题翻译：用于流动的分散板将用于化学气相沉积膜的化合物蒸发到半导体表面上
公开(公告)号：US06302965B1
公开(公告)日：2001-10-16
申请号：US09638506
申请日：2000-08-15
申请人： Salvador Umotoy , Vincent Ku , Xiaoxiong Yuan , Lawrence Chung-Lai Lei
发明人： Salvador Umotoy , Vincent Ku , Xiaoxiong Yuan , Lawrence Chung-Lai Lei
IPC分类号： C23C1600
CPC分类号： C23C16/45576 , C23C16/16 , C23C16/455
摘要： A dispersion plate for evenly flowing at low pressure into a processing chamber vaporized material, such as a tungsten compound for deposition of metal layers onto a semiconductor, has a disc-like body with a center axis, an input face and an output face. The dispersion plate has a cup-like entrance along the center axis in its input face for receiving a stream of vaporized material and a plurality of passages for flow of vapor with each passage having a length and a diameter and extending radially from the entrance like the spokes of a wheel at inclined angles relative to the center axis from the input face to the output face. Two annular grooves are cut into the output face and intersect with the respective ends of the passages. The plate has a center hole with a flared diameter extending along the center axis from the entrance in the input face to the output face. The hole and plurality of passages are designed to have sufficiently large diameters so as to keep pressure drops low with respect to vapor flowing through the plate.
摘要翻译：用于在低压下均匀流动到处理室的分散板，例如用于将金属层沉积到半导体上的钨化合物的气化材料具有中心轴，输入面和输出面的盘状体。分散板在其输入面中具有沿着中心轴线的杯状入口，用于接收气化材料流和多个用于蒸汽流动的通道，每个通道具有长度和直径并且从入口径向延伸，如轮的轮辐相对于从输入面到输出面的中心轴线呈倾斜角。两个环形槽被切割成输出面并与通道的相应端相交。该板具有中心孔，该中心孔具有沿着中心轴线从输入面入口到输出面延伸的扩口直径。孔和多个通道被设计成具有足够大的直径，以便相对于流过板的蒸气保持压力降低。

10. 发明申请

US20080072823A1 SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT 有权
标题翻译：自动对准非接触阴影环工艺包
公开(公告)号：US20080072823A1
公开(公告)日：2008-03-27
申请号：US11870285
申请日：2007-10-10
申请人： Joseph Yudovsky , Lawrence Lei , Salvador Umotoy , Tom Madar , Girish Dixit , Gwo-Chuan Tzu
发明人： Joseph Yudovsky , Lawrence Lei , Salvador Umotoy , Tom Madar , Girish Dixit , Gwo-Chuan Tzu
IPC分类号： C23C16/458
CPC分类号： C23C16/4585 , C30B25/12 , C30B31/14
摘要： The invention provides a removable first edge ring configured for pin and recess/slot coupling with a second edge ring disposed on the substrate support. In one embodiment, a first edge ring includes a plurality of pins, and a second edge ring includes one or more alignment recesses and one or more alignment slots for mating engagement with the pins. Each of the alignment recesses and alignment slots are at least as wide as the corresponding pins, and each of the alignment slots extends in the radial direction a length that is sufficient to compensate for the difference in thermal expansion between the first edge ring and the second edge ring.
摘要翻译：本发明提供了可拆卸的第一边缘环，其被配置用于与设置在基板支撑件上的第二边缘环的销和凹槽/狭槽联接。在一个实施例中，第一边缘环包括多个销，并且第二边缘环包括一个或多个对准凹槽和用于与销配合接合的一个或多个对准槽。每个对准凹槽和对准槽至少与相应的销一样宽，并且每个对准槽在径向方向上延伸的长度足以补偿第一边缘环和第二边缘之间的热膨胀差边缘环。

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