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    • 1. 发明申请
    • THIN-FILM TRANSISTOR, THIN-FILM TRANSISTOR PRODUCING METHOD, AND DISPLAY APPARATUS
    • 薄膜晶体管,薄膜晶体管生产方法和显示装置
    • US20090021661A1
    • 2009-01-22
    • US12234127
    • 2008-09-19
    • Shinzo Tsuboi
    • Shinzo Tsuboi
    • G02F1/136H01L21/336H01L29/04
    • H01L29/78621H01L29/04H01L29/66757
    • A thin-film transistor includes a semiconductor thin film provided on an insulating surface of a support substrate, a gate insulator provided on the semiconductor thin film, and a gate electrode layer formed on the semiconductor thin film with the gate insulator interposed therebetween. The semiconductor thin film includes a channel region disposed below the gate electrode layer, and source and drain regions disposed on both sides of the channel region. The source region has an impurity concentration profile in which an impurity concentration is lowered from an interface with the gate insulator toward an interface with the support substrate in a thickness direction of the semiconductor thin film. The impurity concentration near the support substrate is lower than the impurity concentration near the gate insulator by a factor of 100 or more in the impurity concentration profile of the source region.
    • 薄膜晶体管包括设置在支撑基板的绝缘表面上的半导体薄膜,设置在半导体薄膜上的栅极绝缘体和形成在半导体薄膜上的栅电极层,栅极绝缘体插入其间。 半导体薄膜包括设置在栅电极层下方的沟道区,以及设置在沟道区两侧的源区和漏区。 源区具有杂质浓度分布,其中杂质浓度从栅极绝缘体的界面朝向与半导体薄膜的厚度方向的支撑基板的界面降低。 在源极区域的杂质浓度分布图中,支撑基板附近的杂质浓度低于栅极绝缘体附近的杂质浓度为100倍以上。
    • 9. 发明授权
    • Perpendicular magnetic recording medium and manufacturing process therefor
    • 垂直磁记录介质及其制造工艺
    • US06387483B1
    • 2002-05-14
    • US09172911
    • 1998-10-15
    • Hirotaka HokkyoShinzo Tsuboi
    • Hirotaka HokkyoShinzo Tsuboi
    • G11B566
    • G11B5/667G11B5/66G11B5/851Y10S428/90Y10T428/26Y10T428/265
    • It is intended to reduce the media noise, and to improve the recording density dependence of read output voltage. The present invention provides a perpendicular magnetic recording media and its manufacturing process, wherein a perpendicular magnetic recording medium comprises a soft magnetic underlayer film and a perpendicular magnetizing film, these films being formed on a substrate in this order, a smoothness control film such as Cr film, being inserted between the substrate and the soft magnetic underlayer film. Therefore, perpendicular orientation and surface smoothness are improved for the perpendicular magnetizing film laminated on the smooth surface of the soft magnetic underlayer film. As the perpendicular orientation is improved for the perpendicular magnetizing film, the initial layer is reduced, thereby media noise being lowered and recording density dependence of read output voltage being improved. In addition, as the surface smoothness is improved for the perpendicular magnetizing film, sliding characteristics of a recording/reproducing head is also improved, thereby this also lowering the media noise.
    • 旨在降低介质噪声,并提高读取输出电压的记录密度依赖性。 本发明提供一种垂直磁记录介质及其制造方法,其中垂直磁记录介质包括软磁下层膜和垂直磁化膜,这些膜依次形成在基板上,平滑度控制膜如Cr 膜,插入在基板和软磁下层膜之间。 因此,对于层压在软磁下层膜的光滑表面上的垂直磁化膜,垂直取向和表面平滑度得到改善。 随着垂直磁化膜的垂直取向得到改善,初始层减小,从而介质噪声降低,读取输出电压的记录密度依赖性得到改善。 此外,随着垂直磁化膜的表面平滑度得到改善,记录/再现头的滑动特性也得到改善,从而也降低了介质噪声。