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    • 5. 发明授权
    • Semiconductor integrated circuit and method of manufacturing the same
    • 半导体集成电路及其制造方法
    • US06989597B2
    • 2006-01-24
    • US10685387
    • 2003-10-16
    • Takeya FujinoFumihiro Kimura
    • Takeya FujinoFumihiro Kimura
    • H01L23/48
    • H01L23/5226H01L2924/0002H01L2924/00
    • Prevention of coming off of the layer where the contacts are formed and the isolating film and breakage of the LSI is realized. To do this, a contact array is provided in which a plurality of contacts is formed so as to be aligned in the vertical and the horizontal directions. In the contact array, the contact formation spacing in both of the vertical and the horizontal directions is larger than the contact formation spacing determined by the manufacturing process. Consequently, the number of contacts formed in the contact array can be reduced to not more than the number of contacts that can be formed in the unit area determined by the process, so that prevention of coming off of the layer where the contacts are formed and the isolating film and breakage of the LSI can be realized.
    • 防止形成触点的层的脱落和LSI的隔离膜破损。 为此,提供一种接触阵列,其中多个触点形成为在垂直和水平方向上对齐。 在接触阵列中,垂直和水平方向上的接触形成间距大于由制造过程确定的接触形成间距。 因此,可以将形成在接触阵列中的触点的数量减少到不大于在由该工艺确定的单位面积中形成的触点的数量,从而防止形成触点的层的脱落;以及 可以实现LSI的隔离膜和断裂。