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    • 1. 发明授权
    • Semiconductor device and drive method of electrostatic actuator
    • 静电执行器的半导体器件和驱动方法
    • US08604725B2
    • 2013-12-10
    • US13719924
    • 2012-12-19
    • Tamio IkehashiTakayuki MiyazakiHiroyuki Hara
    • Tamio IkehashiTakayuki MiyazakiHiroyuki Hara
    • H01L41/04
    • H02N1/006
    • According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.
    • 根据一个实施例,半导体器件包括静电致动器,其包括第一和第二下部电极,上部电极和设置在上部电极与第一和第二下部电极之间的绝缘膜,第一下部电极和上部电极构成第一 可变电容元件,第二下电极和构成第二可变电容元件的上电极,连接到第一下电极的第一固定电容元件,连接到第二下电极的第二固定电容元件,以及连接到上电极的检测电路 电极,并且被配置为检测存储在绝缘膜中的电荷量。
    • 2. 发明授权
    • Electrostatic actuator apparatus
    • 静电执行机构
    • US08274324B2
    • 2012-09-25
    • US13444953
    • 2012-04-12
    • Tamio Ikehashi
    • Tamio Ikehashi
    • G05F1/10H01G5/00
    • H02M3/07H02M3/44H02N1/006
    • According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.
    • 根据一个实施例,静电致动器装置包括:第一电压产生电路,被配置为产生第一电压;连接在第一电压产生电路和第一节点之间的第一开关;被配置为产生第二电压的第二电压产生电路; 连接在第二电压产生电路和第二节点之间的第二开关,连接在第一节点和第二节点之间的电容器,具有连接到第一节点的驱动电极的静电致动器,以及被配置为执行顺序地操作的控制电路 打开第一个开关,当静电执行器被驱动时,关闭第一个开关并打开第二个开关。
    • 3. 发明申请
    • VOLTAGE GENERATING CIRCUIT FOR ELECTROSTATIC MEMS ACTUATOR
    • 用于静电MEMS致动器的电压发生电路
    • US20100237929A1
    • 2010-09-23
    • US12649809
    • 2009-12-30
    • Tamio Ikehashi
    • Tamio Ikehashi
    • H03K17/687
    • H02M3/07H02N1/006
    • A plurality of capacitors each of which has a first and a second electrode. A plurality of first switches is connected between the first electrodes of the plurality of capacitors and a first power supply. A plurality of second switches is connected between the second electrodes of the plurality of capacitors and a second power supply. A plurality of resistances each of which is connected between the first electrode of one of the plurality of capacitors and the second electrode of another capacitor and which connect the plurality of capacitors in series, a voltage for driving an actuator being output from the last stage of the plurality of capacitors connected in series.
    • 多个电容器,每个电容器具有第一和第二电极。 多个第一开关连接在多个电容器的第一电极和第一电源之间。 多个第二开关连接在多个电容器的第二电极和第二电源之间。 多个电阻被连接在多个电容器中的一个电容器的第一电极和另一个电容器的第二电极之间并且串联连接多个电容器,用于驱动致动器的电压从最后阶段 多个电容串联连接。
    • 8. 发明授权
    • Semiconductor integrated circuit
    • 半导体集成电路
    • US06674318B2
    • 2004-01-06
    • US10231082
    • 2002-08-30
    • Kazushige KandaTamio IkehashiKen TakeuchiKenichi Imamiya
    • Kazushige KandaTamio IkehashiKen TakeuchiKenichi Imamiya
    • G05F110
    • G11C7/062
    • A semiconductor integrated circuit includes a limiter circuit for outputting a voltage determining flag in order to set a boosted voltage level of a booster circuit to be a predetermined value, and a monitoring circuit for monitoring a monitoring node of the limiter circuit to output a monitoring signal for the stabilization of a boosted voltage to a first external terminal. The monitoring circuit detects a first level change of the voltage determining flag from “H” to “L” after the starting of the operation of the limiter circuit, by means of a comparator, to which an external power supply voltage and external reference voltage supplied from second and third external terminals are given, and thereafter, outputs a monitoring signal for holding a constant logical level during the operation of the limiter circuit. In order to provide a voltage trimming function, a voltage intended to be set in an external terminal may be given from the outside to deactivate a feedback system of the limiter circuit to operate a resistance value of the limiter circuit to detect and store a limiter flag. Thus, there is provided a semiconductor integrated circuit capable of simply monitoring the output voltage state of an internal power supply circuit by the external terminal and easily trimming an internal voltage.
    • 半导体集成电路包括限幅电路,用于输出电压确定标志,以便将升压电路的升压电压设定为预定值;以及监视电路,用于监视限幅器电路的监视节点以输出监视信号 用于稳定第一外部端子的升压电压。 监控电路通过比较器检测在限制器电路的操作开始之后电压确定标志从“H”到“L”的第一电平变化,供给外部电源电压和外部参考电压 给出第二和第三外部端子,然后在限幅器电路的操作期间输出用于保持恒定逻辑电平的监视信号。 为了提供电压调整功能,可以从外部给出旨在设置在外部端子中的电压以去激活限幅器电路的反馈系统,以操作限幅器电路的电阻值以检测和存储限幅器标志 。 因此,提供了能够简单地通过外部端子监视内部电源电路的输出电压状态并容易地修整内部电压的半导体集成电路。