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1. 发明授权

US07763852B2 Scanning electron microscope having time constant measurement capability 有权
标题翻译：具有时间常数测量能力的扫描电子显微镜
公开(公告)号：US07763852B2
公开(公告)日：2010-07-27
申请号：US11936377
申请日：2007-11-07
申请人： Akira Ikegami , Hideyuki Kazumi , Koichiro Takeuchi , Atsushi Kobaru , Seiko Oomori
发明人： Akira Ikegami , Hideyuki Kazumi , Koichiro Takeuchi , Atsushi Kobaru , Seiko Oomori
IPC分类号： H01J37/28
CPC分类号： G01N23/225 , H01J37/244 , H01J37/28 , H01J2237/24485 , H01J2237/2449
摘要： In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An energy filter is used to discriminate between energy levels. The change in yield of obtained electrons is used to measure the variation in specimen potential. The time constant of charging created during electron beam irradiation is extracted. The scanning method is optimized based on the extracted time constant to reduce the distortion and magnification variation that appear in a SEM image.
摘要翻译：在扫描电子显微镜中，确定用于减少一次电子束和二次电子的偏转量的最佳扫描方法以获得稳定的图像。能量滤波器用于区分能级。获得的电子的产量变化用于测量样品电位的变化。提取电子束照射期间产生的充电时间常数。基于提取的时间常数优化扫描方法，以减少出现在SEM图像中的失真和放大变化。

2. 发明申请

US20080116375A1 Scanning Electron Microscope Having Time Constant Measurement Capability 有权
标题翻译：具有时间恒定测量能力的扫描电子显微镜
公开(公告)号：US20080116375A1
公开(公告)日：2008-05-22
申请号：US11936377
申请日：2007-11-07
申请人： Akira Ikegami , Hideyuki Kazumi , Koichiro Takeuchi , Atsushi Kobaru , Seiko Oomori
发明人： Akira Ikegami , Hideyuki Kazumi , Koichiro Takeuchi , Atsushi Kobaru , Seiko Oomori
IPC分类号： G01N23/225
CPC分类号： G01N23/225 , H01J37/244 , H01J37/28 , H01J2237/24485 , H01J2237/2449
摘要： In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An energy filter is used to discriminate between energy levels. The change in yield of obtained electrons is used to measure the variation in specimen potential. The time constant of charging created during electron beam irradiation is extracted. The scanning method is optimized based on the extracted time constant to reduce the distortion and magnification variation that appear in a SEM image.
摘要翻译：在扫描电子显微镜中，确定用于减少一次电子束和二次电子的偏转量的最佳扫描方法以获得稳定的图像。能量滤波器用于区分能级。获得的电子的产量变化用于测量样品电位的变化。提取电子束照射期间产生的充电时间常数。基于提取的时间常数优化扫描方法，以减少出现在SEM图像中的失真和放大变化。

3. 发明授权

US08274048B2 Scanning electron microscope having time constant measurement capability 有权
标题翻译：具有时间常数测量能力的扫描电子显微镜
公开(公告)号：US08274048B2
公开(公告)日：2012-09-25
申请号：US12823296
申请日：2010-06-25
申请人： Akira Ikegami , Hideyuki Kazumi , Koichiro Takeuchi , Atsushi Kobaru , Seiko Oomori
发明人： Akira Ikegami , Hideyuki Kazumi , Koichiro Takeuchi , Atsushi Kobaru , Seiko Oomori
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , H01J37/244 , H01J37/28 , H01J2237/24485 , H01J2237/2449
摘要： In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An energy filter is used to discriminate between energy levels. The change in yield of obtained electrons is used to measure the variation in specimen potential. The time constant of charging created during electron beam irradiation is extracted. The scanning method is optimized based on the extracted time constant to reduce the distortion and magnification variation that appear in a SEM image.
摘要翻译：在扫描电子显微镜中，确定用于减少一次电子束和二次电子的偏转量的最佳扫描方法以获得稳定的图像。能量滤波器用于区分能级。获得的电子的产量变化用于测量样品电位的变化。提取电子束照射期间产生的充电时间常数。基于提取的时间常数优化扫描方法，以减少出现在SEM图像中的失真和放大变化。

4. 发明申请

US20050161602A1 Method of measurement accuracy improvement by control of pattern shrinkage 有权
标题翻译：通过控制图案收缩率来提高测量精度的方法
公开(公告)号：US20050161602A1
公开(公告)日：2005-07-28
申请号：US11009393
申请日：2004-12-13
申请人： Satoshi Ikeda , Hiroki Kawada , Atsushi Kobaru
发明人： Satoshi Ikeda , Hiroki Kawada , Atsushi Kobaru
IPC分类号： H01J37/147 , G01N23/00 , G01N23/225 , G21K7/00 , H01J37/28
CPC分类号： H01J37/28 , G01N23/2251 , H01J2237/2813
摘要： A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the second scan over the same location on the specimen is shortened by changing the scanning order of scan lines to enable the scanning to be performed successively while the shrink is small.
摘要翻译：提供一种用于扫描电子显微镜的扫描方法，其最小化由于样本收缩引起的尺寸测量精度的劣化。通过改变扫描线的扫描顺序来缩短样品上相同位置上的第一次扫描和第二次扫描之间的时间，以使得能够在收缩小的同时进行扫描。

5. 发明申请

US20070064100A1 Scanning electron microscope and image signal processing method 有权
标题翻译：扫描电子显微镜和图像信号处理方法
公开(公告)号：US20070064100A1
公开(公告)日：2007-03-22
申请号：US11520802
申请日：2006-09-14
申请人： Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
发明人： Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
IPC分类号： H04N7/18
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/221 , H01J2237/2448 , H01J2237/24585
摘要： The SEM has a dynamic range reference value setting unit for setting dynamic range reference values, a dynamic range adjustment unit for receiving an observation image signal delivered out of a secondary electron detector, adjusting the dynamic range of the observation image signal on the basis of the dynamic range reference values and outputting the thus adjusted observation image signal as an observation image signal after adjustment, a display image generation unit for determining luminous intensity levels of individual pixels of an image to be displayed based on the observation image signal after adjustment to generate a display image, a histogram generation unit for generating a histogram of luminous intensity levels of the display image and extracting, as a luminous intensity peak value, at which the frequency of luminous intensity is maximized, and a display unit for displaying the generated histogram and the extracted luminous intensity peak value.
摘要翻译： SEM具有用于设定动态范围基准值的动态范围基准值设定单元，用于接收从二次电子检测器输出的观察图像信号的动态范围调整单元，基于该观测图像信号调整观测图像信号的动态范围动态范围基准值，并输出调整后的观察图像信号作为调整后的观察图像信号;显示图像生成单元，其根据调整后的观察图像信号，决定要显示的图像的各个像素的发光强度水平，生成显示图像，直方图生成单元，用于生成显示图像的发光强度级别的直方图，并且提取作为发光强度的频率最大化的发光强度峰值，以及用于显示所生成的直方图的显示单元和提取发光强度峰值。

6. 发明授权

US5614713A Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US5614713A
公开(公告)日：1997-03-25
申请号：US617030
申请日：1996-03-18
申请人： Atsushi Kobaru , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
发明人： Atsushi Kobaru , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
IPC分类号： H01J37/20 , H01J37/21 , H01J37/22 , H01J37/244 , H01J37/26
CPC分类号： H01J37/22 , H01J2237/216 , H01J2237/2482
摘要： An electron beam is focused on a specimen by a focusing lens. A light beam is incident on the position of irradiation of the specimen with the electron beam and the reflected light beam is detected by a linear light detector. The output of the detector is used to measure the height of the specimen at the position of irradiation of the electron beam. The specimen is moved in a plane perpendicular to an optical axis of the focusing lens. A specimen height measuring device carries out the height measurement of the specimen at a position to be observed on the specimen and at positions thereon which are in the vicinity of the position to be observed, when those positions are located at the position of irradiation of the electron beam. The specimen height measuring device averages the measured values so as to produce a focusing correction signal on the basis thereof and controls the focusing lens on the basis of the focusing correction signal.
摘要翻译：电子束通过聚焦透镜聚焦在样本上。光束入射到具有电子束的样本的照射位置，并且通过线性光检测器检测反射光束。检测器的输出用于测量样品在电子束照射位置的高度。样本在垂直于聚焦透镜的光轴的平面内移动。样本高度测量装置在样本上观察的位置和在待观察位置附近的位置上执行样本的高度测量，当这些位置位于待观察位置的位置时电子束。样本高度测量装置对测量值进行平均，以便基于此产生聚焦校正信号，并且基于聚焦校正信号控制聚焦透镜。

7. 发明授权

US08362426B2 Scanning electron microscope and image signal processing method 有权
标题翻译：扫描电子显微镜和图像信号处理方法
公开(公告)号：US08362426B2
公开(公告)日：2013-01-29
申请号：US11520802
申请日：2006-09-14
申请人： Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
发明人： Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/221 , H01J2237/2448 , H01J2237/24585
摘要： The SEM has a dynamic range reference value setting unit for setting dynamic range reference values, a dynamic range adjustment unit for receiving an observation image signal delivered out of a secondary electron detector, adjusting the dynamic range of the observation image signal on the basis of the dynamic range reference values and outputting the thus adjusted observation image signal as an observation image signal after adjustment, a display image generation unit for determining luminous intensity levels of individual pixels of an image to be displayed based on the observation image signal after adjustment to generate a display image, a histogram generation unit for generating a histogram of luminous intensity levels of the display image and extracting, as a luminous intensity peak value, at which the frequency of luminous intensity is maximized, and a display unit for displaying the generated histogram and the extracted luminous intensity peak value.
摘要翻译： SEM具有用于设定动态范围基准值的动态范围基准值设定单元，用于接收从二次电子检测器输出的观察图像信号的动态范围调整单元，基于该观测图像信号调整观测图像信号的动态范围动态范围基准值，并输出调整后的观察图像信号作为调整后的观察图像信号;显示图像生成单元，其根据调整后的观察图像信号，决定要显示的图像的各个像素的发光强度水平，生成显示图像，直方图生成单元，用于生成显示图像的发光强度级别的直方图，并且提取作为发光强度的频率最大化的发光强度峰值，以及用于显示所生成的直方图的显示单元和提取发光强度峰值。

8. 发明授权

US07288763B2 Method of measurement accuracy improvement by control of pattern shrinkage 有权
标题翻译：通过控制图案收缩率来提高测量精度的方法
公开(公告)号：US07288763B2
公开(公告)日：2007-10-30
申请号：US11405456
申请日：2006-04-18
申请人： Satoshi Ikeda , Hiroki Kawada , Atsushi Kobaru
发明人： Satoshi Ikeda , Hiroki Kawada , Atsushi Kobaru
IPC分类号： H01J37/28 , H01J37/256
CPC分类号： H01J37/28 , G01N23/2251 , H01J2237/2813
摘要： A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the second scan over the same location on the specimen is shortened by changing the scanning order of scan lines to enable the scanning to be performed successively while the shrink is small.
摘要翻译：提供一种用于扫描电子显微镜的扫描方法，其最小化由于样本收缩引起的尺寸测量精度的劣化。通过改变扫描线的扫描顺序来缩短样品上相同位置上的第一次扫描和第二次扫描之间的时间，以使得能够在收缩小的同时进行扫描。

9. 发明授权

US07187345B2 Image forming method and charged particle beam apparatus 有权
标题翻译：成像方法和带电粒子束装置
公开(公告)号：US07187345B2
公开(公告)日：2007-03-06
申请号：US11298590
申请日：2005-12-12
申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
IPC分类号： G09G1/08 , G21K1/08 , H04N3/16
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译：一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。扫描位于第一扫描线和第二扫描线之间的第三扫描线。在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。

10. 发明申请

US20060192119A1 Method of measurement accuracy improvement by control of pattern shrinkage 有权
公开(公告)号：US20060192119A1
公开(公告)日：2006-08-31
申请号：US11405456
申请日：2006-04-18
申请人： Satoshi Ikeda , Hiroki Kawada , Atsushi Kobaru
发明人： Satoshi Ikeda , Hiroki Kawada , Atsushi Kobaru
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , G01N23/2251 , H01J2237/2813
摘要： A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the second scan over the same location on the specimen is shortened by changing the scanning order of scan lines to enable the scanning to be performed successively while the shrink is small.

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