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1. 发明授权

US09970851B2 Measuring head for nanoindentation instrument and measuring method 有权
公开(公告)号：US09970851B2
公开(公告)日：2018-05-15
申请号：US14898435
申请日：2014-06-16
申请人： ANTON PAAR TRITEC SA
发明人： Bertrand Bellaton , Richard Consiglio , Jacques Woirgard
IPC分类号： G01N3/42 , G01Q60/36 , G01Q60/24
CPC分类号： G01N3/42 , G01N2203/0078 , G01N2203/0286 , G01N2203/0641 , G01Q60/24 , G01Q60/366
摘要： A measuring head for a nano-indentation instrument, said nano-indentation instrument comprising a positioning system arranged to position a sample relative to the measuring head, the measuring head comprising: a measuring subsystem attached to a frame adapted to be connected to the nano-indentation instrument, the measuring subsystem comprising a first actuator and an indenter adapted to indent a surface of said sample under application of a force applied by the first actuator on the indenter, the measuring subsystem further comprising a force sensing system adapted to detect said force applied by the first actuator; a reference subsystem attached to said frame, the reference subsystem comprising a second actuator, a reference structure in operative connection with the second actuator, and a separation detector adapted to determine a predetermined separation of the reference structure and said surface of said sample.

2. 发明申请

US20170138982A1 METHOD OF MEASURING A TOPOGRAPHIC PROFILE AND/OR A TOPOGRAPHIC IMAGE 审中-公开
公开(公告)号：US20170138982A1
公开(公告)日：2017-05-18
申请号：US15001049
申请日：2016-01-19
申请人： Anton Paar TriTec SA
发明人： Bertrand Bellaton , Richard Consiglio , Jacques Woirgard
IPC分类号： G01Q20/00 , G01Q60/38
CPC分类号： G01Q20/00 , G01N3/42 , G01Q30/02 , G01Q60/38
摘要： Measuring a topographic profile and/or a topographic image of a surface of a sample includes positioning an indenter out of contact with a sample and in a constant position with respect to a headstock; positioning a topographic tip to detect a surface of the sample and positioning a reference structure at a predetermined distance from said surface; measuring the relative position of the indenter with respect to the reference structure by a relative position sensor; translating said sample perpendicular to said longitudinal axis while maintaining the reference structure at said predetermined distance from the surface of the sample by the feedback control system and the second actuator while measuring the relative position of the indenter with respect to the reference structure by the relative position sensor; and generating a topographic profile and/or a topographic image based on measurements of the relative position.

3. 发明授权

US10132830B2 Method of measuring a topographic profile and/or a topographic image 有权
公开(公告)号：US10132830B2
公开(公告)日：2018-11-20
申请号：US15001049
申请日：2016-01-19
申请人： Anton Paar TriTec SA
发明人： Bertrand Bellaton , Richard Consiglio , Jacques Woirgard
IPC分类号： G01Q20/00 , G01Q30/02 , G01N3/42 , G01Q60/38
摘要： Measuring a topographic profile and/or a topographic image of a surface of a sample includes positioning an indenter out of contact with a sample and in a constant position with respect to a headstock; positioning a topographic tip to detect a surface of the sample and positioning a reference structure at a predetermined distance from said surface; measuring the relative position of the indenter with respect to the reference structure by a relative position sensor; translating said sample perpendicular to said longitudinal axis while maintaining the reference structure at said predetermined distance from the surface of the sample by the feedback control system and the second actuator while measuring the relative position of the indenter with respect to the reference structure by the relative position sensor; and generating a topographic profile and/or a topographic image based on measurements of the relative position.

4. 发明申请

US20160153881A1 MEASURING HEAD FOR NANOINDENTATION INSTRUMENT AND MEASURING METHOD 有权
标题翻译：用于纳米仪器的测量头和测量方法
公开(公告)号：US20160153881A1
公开(公告)日：2016-06-02
申请号：US14898435
申请日：2014-06-16
申请人： ANTON PAAR TRITEC SA
发明人： Bertrand Bellaton , Richard Consiglio , Jacques Woirgard
IPC分类号： G01N3/42 , G01Q60/24
CPC分类号： G01N3/42 , G01N2203/0078 , G01N2203/0286 , G01N2203/0641 , G01Q60/24 , G01Q60/366
摘要： A measuring head for a nano-indentation instrument, said nano-indentation instrument comprising a positioning system arranged to position a sample relative to the measuring head, the measuring head comprising: a measuring subsystem attached to a frame adapted to be connected to the nano-indentation instrument, the measuring subsystem comprising a first actuator and an indenter adapted to indent a surface of said sample under application of a force applied by the first actuator on the indenter, the measuring subsystem further comprising a force sensing system adapted to detect said force applied by the first actuator; a reference subsystem attached to said frame, the reference subsystem comprising a second actuator, a reference structure in operative connection with the second actuator, and a separation detector adapted to determine a predetermined separation of the reference structure and said surface of said sample.
摘要翻译：一种用于纳米压痕仪器的测量头，所述纳米压痕仪器包括布置成相对于测量头定位样品的定位系统，所述测量头包括：附接到框架的测量子系统，适于连接到所述纳米压痕仪器，所述测量子系统包括第一致动器和压头，所述第一致动器和压头适于在施加由所述第一致动器施加在所述压头上的力的作用下将所述样品的表面缩进，所述测量子系统还包括力感测系统，其适于检测施加的所述力由第一执行机构附接到所述框架的参考子系统，所述参考子系统包括第二致动器，与所述第二致动器可操作地连接的参考结构，以及适于确定所述参考结构和所述样品的所述表面的预定间隔的分离检测器。

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