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    • 5. 发明申请
    • METHODS FOR SURFACE EVALUATION
    • US20190145878A1
    • 2019-05-16
    • US16308262
    • 2017-07-06
    • ANTON PAAR TRITEC SA
    • Pierre-Jean COUDERTNicholas RANDALLGregory FAVAROBertrand BELLATON
    • G01N3/46
    • Method of evaluation a performance of a surface of a material, the method comprising steps of: measuring a first surface profile of a material sample along a predetermined track by bringing a tip of a stylus into contact with a surface of the sample and traversing said tip across the surface of the sample in a direction tangential to the tip of the stylus while recording said first surface profile, subsequently; applying a normal force to the surface of the sample with the stylus, said normal force being in a direction substantially perpendicular to the surface of the sample, subsequently; moving said tip across the surface of the sample following at least part of said predetermined track while applying said normal force, subsequently; measuring a second surface profile of said sample along at least part of said predetermined track by bringing said tip into contact with the surface of the sample and traversing said tip across the surface of the sample along said track while recording said second surface profile, calculating a first residual depth profile as a difference of said first surface profile and said second surface profile. According an aspect of the invention, the method comprises a step of determining a failure point of the surface of the sample by identifying when at least one value of a function of said first residual depth profile deviates from an expected magnitude value by at least a predetermined amount.
    • 7. 发明申请
    • MEASURING HEAD FOR NANOINDENTATION INSTRUMENT AND MEASURING METHOD
    • 用于纳米仪器的测量头和测量方法
    • US20160153881A1
    • 2016-06-02
    • US14898435
    • 2014-06-16
    • ANTON PAAR TRITEC SA
    • Bertrand BellatonRichard ConsiglioJacques Woirgard
    • G01N3/42G01Q60/24
    • G01N3/42G01N2203/0078G01N2203/0286G01N2203/0641G01Q60/24G01Q60/366
    • A measuring head for a nano-indentation instrument, said nano-indentation instrument comprising a positioning system arranged to position a sample relative to the measuring head, the measuring head comprising: a measuring subsystem attached to a frame adapted to be connected to the nano-indentation instrument, the measuring subsystem comprising a first actuator and an indenter adapted to indent a surface of said sample under application of a force applied by the first actuator on the indenter, the measuring subsystem further comprising a force sensing system adapted to detect said force applied by the first actuator; a reference subsystem attached to said frame, the reference subsystem comprising a second actuator, a reference structure in operative connection with the second actuator, and a separation detector adapted to determine a predetermined separation of the reference structure and said surface of said sample.
    • 一种用于纳米压痕仪器的测量头,所述纳米压痕仪器包括布置成相对于测量头定位样品的定位系统,所述测量头包括:附接到框架的测量子系统,适于连接到所述纳米压痕仪器, 所述测量子系统包括第一致动器和压头,所述第一致动器和压头适于在施加由所述第一致动器施加在所述压头上的力的作用下将所述样品的表面缩进,所述测量子系统还包括力感测系统,其适于检测施加的所述力 由第一执行机构 附接到所述框架的参考子系统,所述参考子系统包括第二致动器,与所述第二致动器可操作地连接的参考结构,以及适于确定所述参考结构和所述样品的所述表面的预定间隔的分离检测器。