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1. 发明申请

US20180210008A1 SCANNING PROBE MICROSCOPY SYSTEM FOR MAPPING HIGH ASPECT RATIO NANOSTRUCTURES ON A SURFACE OF A SAMPLE 审中-公开
公开(公告)号：US20180210008A1
公开(公告)日：2018-07-26
申请号：US15744160
申请日：2016-07-14
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Stefan Kuiper , William Edward Crowcombe
IPC分类号： G01Q70/02 , G01Q20/00
CPC分类号： G01Q70/02 , G01Q20/00
摘要： The invention is directed at a scanning probe microscopy system for mapping nanostructures on a surface of a sample, the system being arranged for sensing a high aspect ratio nanostructure, the high aspect ratio nanostructure comprising at least one face having a slope with a slope angle relative to the surface of the sample that exceeds a predetermined threshold angle, the system comprising a metrology frame, a sample support structure for supporting a sample, a sensor head including a probe, wherein the probe comprises a cantilever and a probe tip, and wherein the scanning probe microscopy system further comprises an actuator for scanning the probe tip relative to the substrate surface for mapping of the nanostructures, wherein, for sensing the high aspect ratio nanostructure, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface, and wherein the system further comprises a sensor head carrier for receiving the sensor head, the sensor head carrier and the sensor head being provided with a mutually cooperating mounting structure for forming a kinematic mount having at least three contact points for detachable mounting of the sensor head on the sensor head carrier.

2. 发明申请

US20170356931A1 Scanning Probe System with Multiple Probes 有权
公开(公告)号：US20170356931A1
公开(公告)日：2017-12-14
申请号：US15617402
申请日：2017-06-08
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q30/00 , G01Q20/00
CPC分类号： G01Q30/00 , G01Q20/00 , G01Q70/06
摘要： A method of operating a scanning probe system that includes a probe support and probes carried by the probe support is disclosed. Each probe includes a cantilever extending from the support to a free end and a tip carried by the free end. The system is operated to perform interaction cycles, each including in an approach phase, moving the support so that the tips move together towards the sample surface; in a detection step, generating a surface signal on detection of an interaction of the tip(s) of a first subset of the probes with the sample surface before the rest of the probes have interacted with the sample; in a response step changing a shape of the cantilever(s) of the first subset in response to the generation of the surface signal; and in a retract phase moving the support so that the tips retract together away from the sample surface.

3. 发明申请

US20160341764A1 Systems and Methods for Non-Destructive Surface Chemical Analysis of Samples 有权
公开(公告)号：US20160341764A1
公开(公告)日：2016-11-24
申请号：US14717336
申请日：2015-05-20
申请人： AIST-NT, Inc.
发明人： Sergey A. Saunin , Andrey V. Krayev , Vladimir V. Zhishimontov , Vasily V. Gavrilyuk , Leonid N. Grigorov , Alexey V. Belyaev , Dmitry A. Evplov
IPC分类号： G01Q30/02 , G01Q10/00
CPC分类号： G01Q30/02 , G01Q10/00 , G01Q20/00 , G01Q30/025 , G01Q60/06
摘要： Aspects of the present invention include systems, devices, and methods of surface chemical analysis of solid samples, and particularly it relates to methods of chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, devices, and non-destructive methods combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining most important information regarding vibration spectra of atoms and molecular groups contained in thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that carefully regulate the motion of, and force applied to probes of atomic force microscopes.

4. 发明授权

US09453856B2 Scanning probe microscope and scanning probe microscopy 有权
标题翻译：扫描探针显微镜和扫描探针显微镜
公开(公告)号：US09453856B2
公开(公告)日：2016-09-27
申请号：US14874088
申请日：2015-10-02
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
IPC分类号： G01Q20/00 , G01Q60/32
CPC分类号： G01Q20/00 , G01Q60/32
摘要： A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference.
摘要翻译：扫描探针显微镜包括：振动单元，用于基于振动信号振动悬臂;位移检测单元，输出指示悬臂的位移的位移信号;相位调整单元，用于向相位差提供相位偏移，振动信号和位移信号;相位信号产生单元，用于产生包括关于相位差和相位偏移的信息的相位信号;以及控制单元，用于根据相位信号来控制探头与采样之间的距离。相位调整单元将在探头和样本不接触的状态下抵消出现的初始相位差的第一相位量与等于或大于（0 [rad]）且小于或等于到（π/ 2 [rad]），并提供与相位差的组合量。

5. 发明申请

US20160178659A1 Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode 有权
公开(公告)号：US20160178659A1
公开(公告)日：2016-06-23
申请号：US14970237
申请日：2015-12-15
申请人： Bruker Nano, Inc.
发明人： Chunzeng Li , Yan Hu , Ji Ma , Jianli He , Lin Huang , Stephen C. Minne , Henry Mittel , Weijie Wang , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q60/34
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

6. 发明申请

US20160047841A1 SIGNAL DETECTION CIRCUIT AND SCANNING PROBE MICROSCOPE 有权
标题翻译：信号检测电路和扫描探针显微镜
公开(公告)号：US20160047841A1
公开(公告)日：2016-02-18
申请号：US14779622
申请日：2014-03-04
申请人： NATIONAL UNIVERSITY CORPORATION KANAZAWA UNIVERSITY
发明人： Takeshi FUKUMA , Kazuki MIYATA
IPC分类号： G01Q20/00
CPC分类号： G01Q20/00 , G01Q10/065 , G01Q60/32 , H03D3/007 , H03D5/00 , H03D7/165
摘要： A signal detection circuit includes: a VCO that generates a reference signal; a complex signal generation circuit that generates a complex signal from an input signal and the reference signal; a vector operation circuit that calculates an argument of the complex signal by performing a vector operation; and a subtracting phase comparator that compares the argument with a phase of the reference signal by calculating a difference between the argument and the phase of the reference signal, wherein the complex signal generation circuit includes: a multiplication circuit that multiplies the input signal by the reference signal; and an HPF that removes a DC component from a signal output from the multiplication circuit.
摘要翻译：信号检测电路包括：产生参考信号的VCO; 复信号发生电路，从输入信号和参考信号产生复信号; 矢量运算电路，通过执行矢量运算来计算复信号的自变量; 以及减法相位比较器，通过计算参考信号的参数和相位之间的差，将参数与参考信号的相位进行比较，其中复数信号产生电路包括：乘法电路，将输入信号乘以参考信号; 以及从乘法电路输出的信号中去除直流分量的HPF。

7. 发明申请

US20160025770A1 SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPY 有权
标题翻译：扫描探针显微镜和扫描探针显微镜
公开(公告)号：US20160025770A1
公开(公告)日：2016-01-28
申请号：US14874088
申请日：2015-10-02
申请人： OLYMPUS CORPORATION
发明人： Nobuaki SAKAI
IPC分类号： G01Q20/00
CPC分类号： G01Q20/00 , G01Q60/32
摘要： A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference.
摘要翻译：扫描探针显微镜包括：振动单元，用于基于振动信号振动悬臂;位移检测单元，输出指示悬臂的位移的位移信号;相位调整单元，用于向相位差提供相位偏移，振动信号和位移信号;相位信号产生单元，用于产生包括关于相位差和相位偏移的信息的相位信号;以及控制单元，用于根据相位信号来控制探头与采样之间的距离。相位调整单元将在探头和样本不接触的状态下抵消出现的初始相位差的第一相位量与等于或大于（0 [rad]）且小于或等于到（＆pgr; / 2 [rad]），并提供与相位差的组合量。

8. 发明申请

US20150355226A1 Methods, Devices, and Systems for Forming Atomically Precise Structures 有权
标题翻译：用于形成原子精确结构的方法，装置和系统
公开(公告)号：US20150355226A1
公开(公告)日：2015-12-10
申请号：US14209659
申请日：2014-03-13
申请人： Zyvex Labs, LLC
发明人： John Neal Randall , James R. Von Ehr , James H.G. Owen , Joshua B. Ballard , Ehud Fuchs
IPC分类号： G01Q20/00 , G01Q60/10 , G01Q80/00 , G01Q10/00
CPC分类号： G01Q20/00 , B82B3/0038 , G01Q10/00 , G01Q60/10 , G01Q80/00 , H01J2237/31759
摘要： Methods, devices, and systems for forming atomically precise structures are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a scanning tunneling microscope (STM) to remove portions of a monolayer of atoms or molecules from a crystalline surface to form atomically precise structures. The STM is utilized to both image the sample and remove the desired portions of the monolayer of atoms or molecules. In some instances, the lattice structure of the crystalline surface is utilized as a coordinate system by a control system of the STM to facilitate the automated removal of specific atoms or molecules from the crystalline surface.
摘要翻译：提供了用于形成原子精确结构的方法，装置和系统。在一些实施例中，本公开的方法，装置和系统利用扫描隧道显微镜（STM）从晶体表面去除单层原子或分子的部分以形成原子精确的结构。 STM用于对样品进行成像和去除单层原子或分子的所需部分。在一些情况下，通过STM的控制系统将结晶表面的晶格结构用作坐标系，以促进特定原子或分子从结晶表面的自动去除。

9. 发明授权

US08769710B2 Atomic force microscope system using selective active damping 有权
标题翻译：原子力显微镜系统采用选择性主动阻尼
公开(公告)号：US08769710B2
公开(公告)日：2014-07-01
申请号：US13675251
申请日：2012-11-13
申请人： Agilent Technologies, Inc.
发明人： Christopher Ryan Moon , Richard K. Workman
IPC分类号： G01Q10/06 , G01Q10/00 , G01Q10/04 , G01Q20/00 , G01Q20/02 , G01Q60/24
CPC分类号： G01Q10/065 , G01Q10/00 , G01Q10/04 , G01Q10/045 , G01Q20/00 , G01Q20/02 , G01Q60/24
摘要： An atomic force microscope (AFM) system comprises a cantilever arm attached to a probe tip. The system controls a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample, to detect a disturbance of the cantilever arm after the separation of the probe tip from the surface, and to engage active damping of the cantilever arm to suppress the disturbance.
摘要翻译：原子力显微镜（AFM）系统包括连接到探针尖端的悬臂。该系统控制悬臂的高度，以将探针尖端压靠在样品上，然后将探针尖端与样品分开，以在探针尖端与表面分离之后检测悬臂的干扰，并且使活动悬臂的阻尼来抑制扰动。

10. 发明授权

US08650660B2 Method and apparatus of using peak force tapping mode to measure physical properties of a sample 有权
标题翻译：使用峰值力攻丝模式测量样品的物理性质的方法和装置
公开(公告)号：US08650660B2
公开(公告)日：2014-02-11
申请号：US13306867
申请日：2011-11-29
申请人： Jian Shi , Yan Hu , Shuiqing Hu , Ji Ma , Chanmin Su
发明人： Jian Shi , Yan Hu , Shuiqing Hu , Ji Ma , Chanmin Su
IPC分类号： G01Q20/00
CPC分类号： G01Q20/04 , G01Q10/065 , G01Q20/00 , G01Q60/32
摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.
摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘，该模式可在不同的环境中工作，包括气态，流体和真空。通过消除专家用户监控成像的需要，便于使用。

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