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    • 2. 发明申请
    • SUBSTRATE DAMAGE INSPECTION APPARATUS, PRODUCTION SYSTEM AND INSPECTION METHOD
    • 基板损坏检查装置,生产系统和检查方法
    • US20170038306A1
    • 2017-02-09
    • US14912577
    • 2015-08-11
    • BOE TECHNOLOGY GROUP CO., LTD.HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    • Zhiqiang WangBin WuGuangzhi LiXing YueXuequan YuJiajia Liu
    • G01N21/88H01L21/67G01N21/55
    • G01N21/88G01N21/55G01N21/95G01N2021/9513G01N2201/0853G01N2201/088H01L21/67288
    • The present invention relates to the technical field of display, and particularly relates to a substrate damage inspection apparatus, a production system and an inspection method. The substrate damage inspection apparatus comprises a drive unit, support rods, sensors and a controller, wherein the drive unit is connected with the support rods so as to drive the support rods to ascend or descend below a substrate to be detected; and the sensors are disposed on the support rods and communicatively connect with the controller, so as to emit light beams to the substrate to be detected, receive the light beams reflected by the substrate to be detected, and feed them back to the controller. By means of the drive unit and the support rods with the sensors, the substrate damage inspection apparatus realizes damage inspection for the substrate to be detected in a vertical direction. That is, a technical solution provided by the present invention allows for damage inspection for the substrate to be detected when it vertically moves. In addition, the substrate damage inspection apparatus is simple in structure and convenient to operate, thereby having strong utility value and significance of generalization.
    • 本发明涉及显示技术领域,特别涉及基板损伤检查装置,生产系统和检查方法。 基板损伤检查装置包括驱动单元,支撑杆,传感器和控制器,其中驱动单元与支撑杆连接,以驱动支撑杆上升或下降到待检测基板下方; 并且传感器设置在支撑杆上并且与控制器通信地连接,以将光束发射到待检测的基板,接收由待检测的基板反射的光束,并将其馈送到控制器。 通过驱动单元和具有传感器的支撑杆,基板损伤检查装置对垂直方向上要检测的基板实现损伤检查。 也就是说,本发明提供的技术方案允许当垂直移动时要检测的基板的损伤检查。 另外,基板损伤检查装置结构简单,操作方便,具有很强的实用价值和泛化意义。