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    • 6. 发明授权
    • Magnetoresistive memory element and method of fabricating same
    • 磁阻存储元件及其制造方法
    • US09419208B2
    • 2016-08-16
    • US15046483
    • 2016-02-18
    • Everspin Technologies, Inc.
    • Renu WhigJijun SunNicholas RizzoJon SlaughterDimitri HoussameddineFrederick Mancoff
    • H01L29/82H01L43/08H01L43/02H01L43/10G11C11/16
    • H01L43/12G11C11/161H01L43/02H01L43/08H01L43/10
    • A magnetoresistive memory element (e.g., a spin-torque magnetoresistive memory element) includes a fixed magnetic layer, a free magnetic layer having perpendicular magnetic anisotropy, and a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer. A first surface of the first dielectric is in contact with a first surface of the free magnetic layer. The magnetoresistive memory element further includes a second dielectric, having a first surface that is in contact with a second surface of the free magnetic layer, a conductor, including electrically conductive material, and an electrode, disposed between the second dielectric and the conductor. The electrode includes: (i) a non-ferromagnetic portion having a surface that is in contact with a second surface of the second dielectric, and (ii) a second portion including at least one ferromagnetic material disposed between the non-ferromagnetic portion of the electrode and the conductor.
    • 磁阻存储元件(例如,自旋转矩磁阻存储元件)包括固定磁性层,具有垂直磁各向异性的自由磁性层和设置在固定磁性层和自由磁性层之间的第一电介质。 第一电介质的第一表面与自由磁性层的第一表面接触。 磁阻存储元件还包括第二电介质,其具有与自由磁性层的第二表面接触的第一表面,包括导电材料的导体以及设置在第二电介质和导体之间的电极。 电极包括:(i)具有与第二电介质的第二表面接触的表面的非铁磁部分,和(ii)第二部分,其包括设置在第二电介质的非铁磁部分之间的至少一个铁磁材料 电极和导体。