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    • 3. 发明授权
    • Method and apparatus for assessing controller performance
    • 评估控制器性能的方法和装置
    • US07340318B1
    • 2008-03-04
    • US10325611
    • 2002-12-20
    • Gregory A. CherryErnest D. Adams, III
    • Gregory A. CherryErnest D. Adams, III
    • G06F19/00
    • G05B19/4184G05B2219/45031Y02P90/14
    • A method includes providing a process controller for controlling a process tool. The process tool is controlled in accordance with a process parameter. Measurements associated with the processing parameter for a plurality of runs of the process tool are accessed. A performance measure for the process controller is generated based on the process parameter and the measurements. A system includes a process tool, a process controller, and a performance monitor. The process controller is configured to control the process tool in accordance with a process parameter. The performance monitor is configured to retrieve measurements associated with the processing parameter for a plurality of runs of the process tool and generate a performance measure for the process controller based on the measured processing parameters.
    • 一种方法包括提供用于控制处理工具的过程控制器。 过程工具根据过程参数进行控制。 访问与处理工具的多个运行的处理参数相关联的测量。 基于过程参数和测量值生成过程控制器的性能指标。 系统包括处理工具,过程控制器和性能监视器。 过程控制器被配置为根据过程参数来控制过程工具。 性能监视器被配置为检索与用于多个处理工具运行的处理参数相关联的测量,并且基于所测量的处理参数生成过程控制器的性能测量。