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1. 发明申请

US20170309448A1 THREE-DIMENSIONAL IMAGING IN CHARGED-PARTICLE MICROSCOPY 审中-公开
公开(公告)号：US20170309448A1
公开(公告)日：2017-10-26
申请号：US15413216
申请日：2017-01-23
申请人： FEI Company
发明人： Faysal Boughorbel , Pavel Potocek , Ingo Gestmann
IPC分类号： H01J37/28 , H01J37/244 , H01J37/20
CPC分类号： H01J37/28 , G01N23/225 , G01N2223/079 , G01N2223/08 , G01N2223/423 , H01J37/20 , H01J37/222 , H01J37/244 , H01J2237/226
摘要： A method of investigating a specimen using charged-particle microscopy, comprising the following steps: (a) On a surface of the specimen, selecting a virtual sampling grid extending in an XY plane and comprising grid nodes to be impinged upon by a charged-particle probing beam during a two-dimensional scan of said surface; (b) Selecting a landing energy Ei for said probing beam, with an associated nominal Z penetration depth di below said surface; (c) At each of said nodes, irradiating the specimen with said probing beam and detecting output radiation emanating from the specimen in response thereto, thereby generating a scan image Ii; (d) Repeating steps (b) and (c) for a series {Ei} of different landing energies, corresponding to an associated series {di} of different penetration depths, further comprising the following steps: (e) Pre-selecting an initial energy increment ΔEi by which Ei is to be altered after a first iteration of steps (b) and (c); (f) Associating energy increment ΔEi with a corresponding depth increment Δd in the value of di; (g) Selecting said sampling grid to have a substantially equal node pitch p in X and Y, which pitch p is matched to the value of Δd so as to produce a substantially cubic sampling voxel; (h) Selecting subsequent energy values in the series {Ei} so as to maintain a substantially constant depth increment Δd between consecutive members of the series {di}, within the bounds of selected minimum and maximum landing energies Emin and Emax, respectively.

2. 发明授权

US09620330B2 Mathematical image assembly in a scanning-type microscope 有权
公开(公告)号：US09620330B2
公开(公告)日：2017-04-11
申请号：US14743780
申请日：2015-06-18
申请人： FEI Company
发明人： Pavel Poto{hacek over (c)}ek , Cornelis Sander Kooijman , Hendrik Nicolaas Slingerland , Gerard Nicolaas Anne van Veen , Faysal Boughorbel
IPC分类号： H01J37/28 , G02B21/00 , H01J37/22
CPC分类号： H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
摘要： A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.

3. 发明申请

US20160365224A1 METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED-PARTICLE MICROSCOPE 审中-公开
标题翻译：分析电荷显微镜中样品表面修饰的方法
公开(公告)号：US20160365224A1
公开(公告)日：2016-12-15
申请号：US15177242
申请日：2016-06-08
申请人： FEI Company
发明人： Pavel Potocek , Faysal Boughorbel , Mathijs Petrus Wilhelmus van den Boogaard , Emine Korkmaz
IPC分类号： H01J37/30 , H01J37/317 , H01J37/244 , H01J37/26 , H01J37/20
CPC分类号： H01J37/3005 , G01N1/286 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/304 , H01J37/3056 , H01J37/317 , H01J2237/2067 , H01J2237/221 , H01J2237/24495
摘要： A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

4. 发明申请

US20140312226A1 CHARGED-PARTICLE MICROSCOPE PROVIDING DEPTH-RESOLVED IMAGERY 审中-公开
标题翻译：充电颗粒显微镜提供深度解析的图像
公开(公告)号：US20140312226A1
公开(公告)日：2014-10-23
申请号：US14257742
申请日：2014-04-21
申请人： FEI Company
发明人： Faysal Boughorbel , Eric Gerardus Theodoor Bosch , Pavel Potocek , Xiaodong Zhuge , Berend Helmerus Lich
IPC分类号： H01J37/26
CPC分类号： H01J37/222 , G01N1/06 , G01N1/36 , G01N23/225 , G01N2223/401 , G01N2223/418 , H01J37/26 , H01J37/261 , H01J37/28 , H01J2237/206 , H01J2237/208 , H01J2237/221 , H01J2237/226 , H01J2237/31745
摘要： A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R═{(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.
摘要翻译：一种使用带电粒子显微镜检查样品的方法，包括将样品安装在样品架上; 使用粒子光学柱将至少一束颗粒辐射引导到样品的表面S上，从而产生使得发射的辐射从样品中发出的相互作用; 使用检测器装置来检测所述发射辐射的至少一部分，其方法包括体现检测器装置以检测所发射的辐射中的电子; 记录所述检测器装置的输出On作为所述电子的动能En的函数，从而针对多个En值编制测量集M = {（On，En）}; 使用计算机处理装置自动地对测量集M进行解卷积并将其空间解析为结果集R = {（Vk，Lk）}，其中空间变量V表示在参考表面的相关离散深度级Lk处的值Vk S，其中n和k是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。

5. 发明申请

US20200312611A1 ARTIFICIAL INTELLIGENCE ENABLED VOLUME RECONSTRUCTION 审中-公开
公开(公告)号：US20200312611A1
公开(公告)日：2020-10-01
申请号：US16369975
申请日：2019-03-29
申请人： FEI Company
发明人： Pavel Potocek , Faysal Boughorbel , Maurice Peemen
IPC分类号： H01J37/26 , H01J37/31 , G06N3/08 , G06N20/00
摘要： Methods and apparatuses for implementing artificial intelligence enabled volume reconstruction are disclosed herein. An example method at least includes acquiring a first plurality of multi-energy images of a surface of a sample, each image of the first plurality of multi-energy images obtained at a different beam energy, where each image of the first plurality of multi-energy images include data from a different depth within the sample, and reconstructing, by an artificial neural network, at least a volume of the sample based on the first plurality of multi-energy images, where a resolution of the reconstruction is greater than a resolution of the first plurality of multi-energy images.

6. 发明授权

US10545100B2 X-ray imaging technique 有权
公开(公告)号：US10545100B2
公开(公告)日：2020-01-28
申请号：US15264132
申请日：2016-09-13
申请人： FEI Company
发明人： Bart Buijsse , Faysal Boughorbel
IPC分类号： G01N23/04 , H01J35/00 , H01J37/28
摘要： An x-ray source for computer tomography uses several sub-sources. An electron beam impacts the several sub-sources to achieve a high x-ray flux with high resolution. The several sub-sources produce a composite image, which is deconvolved to disentangle the composite image and render a useful image. The configuration of the several sub-sources can be optimized for a given specimen structure.

7. 发明申请

US20190051492A1 METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED-PARTICLE MICROSCOPE 审中-公开
公开(公告)号：US20190051492A1
公开(公告)日：2019-02-14
申请号：US16155297
申请日：2018-10-09
申请人： FEI Company
发明人： Pavel Potocek , Faysal Boughorbel , Mathijs Petrus Wilhelmus van den Boogaard , Emine Korkmaz
IPC分类号： H01J37/30 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/317 , G01N1/28 , H01J37/304 , H01J37/305
摘要： Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

8. 发明授权

US09312098B2 Method of examining a sample in a charged-particle microscope 有权
标题翻译：在带电粒子显微镜中检查样品的方法
公开(公告)号：US09312098B2
公开(公告)日：2016-04-12
申请号：US14629387
申请日：2015-02-23
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch , Faysal Boughorbel , Bart Buijsse , Kasim Sader , Sorin Lazar
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.
摘要翻译：在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

9. 发明授权

US10128080B2 Three-dimensional imaging in charged-particle microscopy 有权
公开(公告)号：US10128080B2
公开(公告)日：2018-11-13
申请号：US15413216
申请日：2017-01-23
申请人： FEI Company
发明人： Faysal Boughorbel , Pavel Potocek , Ingo Gestmann
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244 , H01J37/22 , G01N23/225
摘要： A method of investigating a specimen using charged-particle microscopy, and a charged particle microscope configured for same. In one embodiment, the method includes: (a) selecting a virtual sampling grid on a surface of a specimen, the virtual sampling grid extending in an XY plane and comprising nodes to be impinged upon by a beam of charged particles; (b) selecting a landing energy for the beam, the landing energy associated with a penetration depth; (c) generating a scan image by irradiating the specimen at each of the nodes with the beam, and detecting output radiation emanating from the specimen in response thereto; (d) repeating steps (b) and (c) for a series of different landing energies corresponding to an associated series of penetration depths, (e) pre-selecting an energy increment by which the landing energy is to be altered after a first iteration of steps (b) and (c); (f) associating the energy increment with a corresponding depth increment; (g) selecting the virtual sampling grid to have a substantially equal node pitch p in X and Y, which pitch p is matched to the value of the depth increment so as to produce a substantially cubic sampling voxel; and (h) selecting subsequent energy values in the series of landing energies so as to maintain a substantially constant depth increment between consecutive members of the series of penetration depths.

10. 发明申请

US20170138870A1 NOVEL X-RAY IMAGING TECHNIQUE 审中-公开
公开(公告)号：US20170138870A1
公开(公告)日：2017-05-18
申请号：US15264132
申请日：2016-09-13
申请人： FEI Company
发明人： Bart Buijsse , Faysal Boughorbel
IPC分类号： G01N23/04 , H01J37/28
CPC分类号： G01N23/04 , G01N2223/204 , G01N2223/401 , G01N2223/418 , G01N2223/419 , H01J35/08 , H01J37/28 , H01J2235/068 , H01J2235/086
摘要： A method of imaging a specimen using an X-ray imaging apparatus, comprising the following steps: Providing the specimen on a specimen holder; Directing a flux of X-rays from a source through the specimen and onto an X-ray camera, which method additionally comprises the following steps: Embodying the source as a cluster of component sources, with a confined angular span relative to the specimen; Using said camera to record a cumulative, composite image from said component sources; Mathematically deconvolving said composite image.

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