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1. 发明申请

US20170125210A1 POST COLUMN FILTER WITH ENHANCED ENERGY RANGE 有权
公开(公告)号：US20170125210A1
公开(公告)日：2017-05-04
申请号：US15230667
申请日：2016-08-08
申请人： FEI Company
发明人： Alexander Henstra , Peter Christiaan Tiemeijer
IPC分类号： H01J37/28 , H01J37/14 , H01J37/22 , H01J37/05
CPC分类号： H01J37/28 , H01J37/05 , H01J37/14 , H01J37/22 , H01J37/263 , H01J2237/057 , H01J2237/1534 , H01J2237/2802
摘要： The invention relates to a post-column filter (a PCF) for a (Scanning) Transmission Electron Microscope (a (S)TEM). Traditionally these filters use excitations of the optical elements before the slit plane that are identical in both the EFTEM and the EELS mode. Although this eases the task for the person skilled in the art of developing and tuning a PCF, as it reduces the number of degrees of freedom to a manageable amount. Inventors found ways to determine settings of the optical elements before the slit plane for EELS mode that are different from the EFTEM mode and where the performance of the PCF in EELS mode is improved (especially the relative energy range that can be imaged) without degrading the performance of the PCF in EFTEM mode.

2. 发明申请

US20160086762A1 SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE 有权
标题翻译：传输充电粒子微光谱中的光谱
公开(公告)号：US20160086762A1
公开(公告)日：2016-03-24
申请号：US14860586
申请日：2015-09-21
申请人： FEI Company
发明人： Erwin Fernand de Jong , Sorin Lazar , Peter Christiaan Tiemeijer , Rudolf Geurink
IPC分类号： H01J37/05 , H01J37/21 , H01J37/285 , H01J37/20
CPC分类号： H01J37/05 , H01J37/20 , H01J37/21 , H01J37/244 , H01J37/26 , H01J37/285 , H01J2237/0455 , H01J2237/057 , H01J2237/24485 , H01J2237/2802
摘要： A Transmission Charged-Particle Microscope includes an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus including: a dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis; a detector; an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of: a width of said aperture parallel to said dispersion direction; and a position of a center of said aperture relative to said propagation axis.
摘要翻译：透射带电粒子显微镜包括成像系统，用于将透射通过样本的带电粒子的通量引导到分光装置，所述分光装置包括：分散装置，用于将所述通量分散到基本上平行传播的光谱子束的能量分辨阵列到传播轴; 检测器用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入检测器的所述阵列的子集，所述孔径在垂直于所述传播轴线的分散方向上由第一和第二相对边缘限定每个边缘相对于所述传播轴线独立地定位，从而允许独立调整以下两者：平行于所述分散方向的所述孔的宽度; 以及所述孔的中心相对于所述传播轴的位置。

3. 发明申请

US20140061464A1 Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System 审中-公开
标题翻译：调查和纠正带电粒子透镜系统中的畸变的方法
公开(公告)号：US20140061464A1
公开(公告)日：2014-03-06
申请号：US14016997
申请日：2013-09-03
申请人： FEI Company
发明人： Ivan Lazic , Gijs van Duinen , Peter Christiaan Tiemeijer
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J2237/1534
摘要： A system of investigating aberrations in a charged-particle lens system, which lens system has an object space comprising an object plane and an image space comprising an image plane, includes: Selecting a fixed pivot point on said object plane; Directing a charged-particle beam through said pivot point, entrance pupil and lens system and onto said image plane, said beam having a relatively small cross-sectional area relative to the area of the entrance pupil; Changing the orientation of said beam through said pivot point, so as to trace out an entrance figure on said entrance pupil and a corresponding image figure on said image plane; Registering said image figure; Repeating this procedure at a series of different focus settings of the lens system, thus acquiring a set of registered image figures at different focus settings; Analyzing said set so as to derive lens aberrations therefrom.
摘要翻译：一种调查带电粒子透镜系统中的像差的系统，该透镜系统具有包括物平面的对象空间和包括图像平面的图像空间，包括：在所述物平面上选择固定的枢转点; 使带电粒子束通过所述枢转点，入射光瞳和透镜系统并引导到所述图像平面上，所述光束相对于入射光瞳的面积具有相对小的横截面积; 通过所述枢转点改变所述光束的方向，以便在所述图像平面上绘制所述入射光瞳上的入射图和对应的图像图; 注册图像图; 在镜头系统的一系列不同焦点设置下重复此过程，从而以不同的焦点设置获取一组注册的图像数字; 分析所述集合以从中导出透镜像差。

4. 发明申请

US20140007307A1 METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APPARATUS 有权
标题翻译：在光学设备中制备和形成LAMELLA的方法
公开(公告)号：US20140007307A1
公开(公告)日：2014-01-02
申请号：US13919656
申请日：2013-06-17
申请人： FEI Company
发明人： Brian Roberts Routh, JR. , Peter Christiaan Tiemeijer , Bart Jozef Janssen , Thomas G. Miller , David Foord , Ivan Lazic
IPC分类号： G01Q10/04
CPC分类号： H01J37/28 , B82Y35/00 , G01Q10/04 , H01J37/26 , H01J37/295 , H01J37/3056 , H01J2237/2067 , H01J2237/208 , H01J2237/226 , H01J2237/2442 , H01J2237/24455 , H01J2237/2447 , H01J2237/2611 , H01J2237/2614 , H01J2237/31749
摘要： The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator.The method comprising comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.
摘要翻译：本发明涉及使用装备有电子柱和离子束柱的粒子光学装置，相机系统，机械手来制备和成像样品的方法。该方法包括以下步骤：从第一电子图像导出样本的第一ptychographic图像，使样本变薄，并形成样本的第二ptychographic图像。在本发明的一个实施例中，用于第二图像的种子图像是第一个ptychografic图像。在另一个实施例中，第二ptychographic图像是在稀化期间去除的层的图像。在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。

5. 发明申请

US20220199353A1 MAGNETIC FIELD FREE SAMPLE PLANE FOR CHARGED PARTICLE MICROSCOPE 有权
公开(公告)号：US20220199353A1
公开(公告)日：2022-06-23
申请号：US17130987
申请日：2020-12-22
申请人： FEI Company
发明人： Alexander Henstra , Ali Mohammadi-Gheidari , Peter Christiaan Tiemeijer
IPC分类号： H01J37/14 , H01J37/28
摘要： An adjustable magnetic field free objective lens for a charged particle microscope is disclosed herein. An example charged particle microscope at least includes first and second optical elements arranged on opposing sides of a sample plane, a third optical element arranged around the sample plane, and a controller coupled to control the first, second and third optical elements. The controller coupled to excite the first and second optical elements to generate first and second magnetic lenses, the first and second magnetic lenses formed on opposing sides of the sample plane and oriented in the same direction, and excite the third optical element to generate a third magnetic lens at the sample plane that is oriented in an opposite direction, where a ratio of the excitation of the third optical element to the excitation of the first and second optical elements adjusts a magnetic field at the sample plane.

6. 发明授权

US10832901B2 EELS detection technique in an electron microscope 有权
公开(公告)号：US10832901B2
公开(公告)日：2020-11-10
申请号：US16424206
申请日：2019-05-28
申请人： FEI Company
发明人： Bert Henning Freitag , Sorin Lazar , Stephan Kujawa , Maarten Kuijper , Gerard Nicolaas Anne van Veen , Peter Christiaan Tiemeijer , Jamie McCormack
IPC分类号： H01J49/44 , H01J49/00 , H01J49/02 , H01J49/08
摘要： A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: Producing a beam of electrons from a source; Using an illuminator to direct said beam so as to irradiate the specimen; Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising: A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum; and A detector, comprising a detection surface that is sub-divided into a plurality of detection zones, specifically comprising: Using at least a first detection zone, a second detection zone and a third detection zone to register a plurality of EELS spectral entities; and Reading out said first and said second detection zones whilst said third detection zone is registering one of said plurality of EELS spectral entities.

7. 发明授权

US09978561B2 Post column filter with enhanced energy range 有权
公开(公告)号：US09978561B2
公开(公告)日：2018-05-22
申请号：US15230667
申请日：2016-08-08
申请人： FEI Company
发明人： Alexander Henstra , Peter Christiaan Tiemeijer
IPC分类号： H01J37/28 , H01J37/05 , H01J37/14 , H01J37/22 , H01J37/26
CPC分类号： H01J37/28 , H01J37/05 , H01J37/14 , H01J37/22 , H01J37/263 , H01J2237/057 , H01J2237/1534 , H01J2237/2802
摘要： The invention relates to a post-column filter (a PCF) for a (Scanning) Transmission Electron Microscope (a (S)TEM). Traditionally these filters use excitations of the optical elements before the slit plane that are identical in both the EFTEM and the EELS mode. Although this eases the task for the person skilled in the art of developing and tuning a PCF, as it reduces the number of degrees of freedom to a manageable amount. Inventors found ways to determine settings of the optical elements before the slit plane for EELS mode that are different from the EFTEM mode and where the performance of the PCF in EELS mode is improved (especially the relative energy range that can be imaged) without degrading the performance of the PCF in EFTEM mode.

8. 发明申请

US20150041647A1 METHOD OF USING AN ENVIRONMENTAL TRANSMISSION ELECTRON MICROSCOPE 有权
标题翻译：使用环境传输电子显微镜的方法
公开(公告)号：US20150041647A1
公开(公告)日：2015-02-12
申请号：US14455802
申请日：2014-08-08
申请人： FEI Company
发明人： Peter Christiaan Tiemeijer , Stan Johan Pieter Konings , Alexander Henstra
IPC分类号： H01J37/26 , H01J37/22 , H01J37/147
CPC分类号： H01J37/261 , H01J37/147 , H01J37/22 , H01J37/26 , H01J37/263 , H01J2237/006 , H01J2237/2605 , H01J2237/262
摘要： An environmental transmission electron microscope (ETEM) suffers from gas-induced resolution deterioration. Inventors conclude that the deterioration is due to ionization of gas in the sample chamber of the ETEM, and propose to use an electric field in the sample chamber to remove the ionized gas, thereby diminishing the gas-induced resolution deterioration. The electric field need not be a strong field, and can be caused by, for example, biasing the sample with respect to the sample chamber. A bias voltage of 100 V applied via voltage source is sufficient for a marked improvement the gas-induced resolution deterioration. Alternatively an electric field perpendicular to the optical axis can be used, for example by placing an electrically biased wire or gauze off-axis in the sample chamber.
摘要翻译：环境透射电子显微镜（ETEM）遭受气体分解劣化。发明人得出结论，劣化是由于ETEM的样品室中的气体的离子化，并且提出使用样品室中的电场来除去电离气体，从而减少气体诱导的分辨率劣化。电场不需要是强场，并且可以由例如相对于样品室偏置样品而引起。通过电压源施加的100V的偏置电压足以显着改善气体诱导的分辨率劣化。或者，可以使用垂直于光轴的电场，例如通过将电偏置的线或纱布离轴放置在样品室中。

9. 发明授权

US11450505B2 Magnetic field free sample plane for charged particle microscope 有权
公开(公告)号：US11450505B2
公开(公告)日：2022-09-20
申请号：US17130987
申请日：2020-12-22
申请人： FEI Company
发明人： Alexander Henstra , Ali Mohammadi-Gheidari , Peter Christiaan Tiemeijer
IPC分类号： H01J37/14 , H01J37/28
摘要： An adjustable magnetic field free objective lens for a charged particle microscope is disclosed herein. An example charged particle microscope at least includes first and second optical elements arranged on opposing sides of a sample plane, a third optical element arranged around the sample plane, and a controller coupled to control the first, second and third optical elements. The controller coupled to excite the first and second optical elements to generate first and second magnetic lenses, the first and second magnetic lenses formed on opposing sides of the sample plane and oriented in the same direction, and excite the third optical element to generate a third magnetic lens at the sample plane that is oriented in an opposite direction, where a ratio of the excitation of the third optical element to the excitation of the first and second optical elements adjusts a magnetic field at the sample plane.

10. 发明授权

US11024483B2 Transmission charged particle microscope with adjustable beam energy spread 有权
公开(公告)号：US11024483B2
公开(公告)日：2021-06-01
申请号：US16197448
申请日：2018-11-21
申请人： FEI Company
发明人： Peter Christiaan Tiemeijer
IPC分类号： H01J37/26 , H01J37/244 , H01J37/10 , H01J37/20 , H01J37/22
摘要： A transmission charged particle microscope includes a specimen holder for holding a specimen; a source for producing a charged particle beam; an illuminator for directing said beam to irradiate the specimen, wherein the illuminator comprising a monochromator and a condenser lens assembly; and an imaging system for receiving a flux of charged particles transmitted through the specimen. The microscope is controlled to produce a first energy spread of an emerging beam exiting said aperture by selecting at least one of parameters (a) an excitation of a first lens of said condenser lens assembly and (b) a width of a condenser aperture downstream of said first lens.

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