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1. 发明申请

US20210296088A1 CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS 有权
公开(公告)号：US20210296088A1
公开(公告)日：2021-09-23
申请号：US17191022
申请日：2021-03-03
申请人： FEI Company
发明人： Pavel Stejskal , Bohuslav Sed'a , Petr Hlavenka , Libor Novák , Jan Stopka
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244 , H01J37/26
摘要： The invention relates to system and method of inspecting a specimen with a plurality of charged particle beamlets. The method comprises the steps of providing a specimen, providing a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen, and detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets.

2. 发明申请

US20200312610A1 CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS 审中-公开
公开(公告)号：US20200312610A1
公开(公告)日：2020-10-01
申请号：US16825827
申请日：2020-03-20
申请人： FEI Company
发明人： Petr Hlavenka , Bohuslav Sed'a
IPC分类号： H01J37/244 , H01J37/20 , H01J37/28 , H01J37/147
摘要： The invention relates to a charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets. The charged particle beam device comprises a specimen holder for holding a specimen, a source for producing a beam of charged particles, and an illuminator for converting said beam of charged particles into a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen. Furthermore, a detector assembly for detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets is provided. As defined herein, the charged particle beam device is arranged for directing said plurality of charged particle beamlets onto said specimen in an essentially 1D pattern, wherein said essentially 1D pattern forms part of an edge of an essentially 2D geometric shape. Furthermore, the detector assembly comprises a plurality of detector units arranged in a corresponding essentially 1D pattern.

3. 发明申请

US20170103868A1 INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPE 审中-公开
公开(公告)号：US20170103868A1
公开(公告)日：2017-04-13
申请号：US15206523
申请日：2016-07-11
申请人： FEI Company
发明人： Libor Novak , Petr Hlavenka , Marek Uncovsky , Martin Cafourek
IPC分类号： H01J37/244 , H01J37/22 , H01J37/20 , H01J37/28
CPC分类号： H01J37/244 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2001 , H01J2237/2065 , H01J2237/2443 , H01J2237/2445 , H01J2237/24475 , H01J2237/2448
摘要： A method of examining a specimen in a Charged Particle Microscope, comprising the following steps: Providing a specimen on a specimen holder; Heating the specimen to a temperature of at least 250° C.; Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen; Using a detector to detect a flux of electrons emanating from the specimen in response to said irradiation, wherein said detector comprises: A scintillator module, which produces photons in response to impingement by electrons in said flux; A photon sensor, for sensing said photons, and is configured to: Preferentially register a first category of photons, associated with impingement of electrons on said scintillator module; Selectively suppress a second category of photons, comprising thermal radiation from the heated specimen.

4. 发明申请

US20140361165A1 METHOD FOR IMAGING A SAMPLE IN A CHARGED PARTICLE APPARATUS 有权
标题翻译：用于在充电颗粒装置中成像的方法
公开(公告)号：US20140361165A1
公开(公告)日：2014-12-11
申请号：US14294772
申请日：2014-06-03
申请人： FEI Company
发明人： Bohuslav Sed'a , Lubomír Tùma , Petr Hlavenka , Petr Sytar
IPC分类号： H01J37/28 , H01J37/20 , H01J37/12
CPC分类号： H01J37/12 , H01J37/09 , H01J37/3005 , H01J2237/12 , H01J2237/20207
摘要： The invention relates to a dual beam apparatus equipped with an ion beam column and an electron beam column having an electrostatic immersion lens. When tilting the sample, the electrostatic immersion field is distorted and the symmetry round the electron optical axis is lost. As a consequence tilting introduces detrimental effects such as traverse chromatic aberration and beam displacement. Also in-column detectors, detecting either secondary electrons or backscattered electrons in the non-tilted position of the sample, will, due to the loss of the symmetry of the immersion field, show a mix of these electrons when tilting the sample.The invention shows how, by biasing the stage with respect to the grounded electrodes closest to the sample, these disadvantages are eliminated, or at least reduced.
摘要翻译：本发明涉及一种配备有离子束柱和具有静电浸没透镜的电子束柱的双光束装置。当倾斜样品时，静电浸没场失真，并且电子光轴周围的对称性丧失。因此，倾斜引入有害影响，例如横向色差和光束位移。在样品的非倾斜位置检测二次电子或后向散射电子的柱内检测器也将由于浸没场的对称性的损失而在倾斜样品时显示这些电子的混合物。本发明示出了如何通过相对于最接近样品的接地电极偏置级来消除或至少减少这些缺点。

5. 发明申请

US20200057011A1 METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE 审中-公开
公开(公告)号：US20200057011A1
公开(公告)日：2020-02-20
申请号：US16533291
申请日：2019-08-06
申请人： FEI Company
发明人： Tomas Tuma , Jan Hradil , Petr Hlavenka
IPC分类号： G01N23/2252 , H01J37/28 , G01J3/44
摘要： The disclosure relates to a method of examining a sample using a charged particle microscope. The method comprises the steps of detecting using a first detector emissions of a first type from the sample in response to the beam scanned over the area of the sample. Then, using spectral information of detected emissions of the first type, at least a part of the scanned area of the sample is divided into multiple segments. According to the disclosure, emissions of the first type at different positions along the scan in at least one of said multiple segments may be combined to produce a combined spectrum of the sample in said one of said multiple segments. In an embodiment, a second detector is used to detect emissions of a second type, and this is used to divide the area of the sample into multiple regions. The first detector may be an EDS, and the second detector may be based on EM. This way, EDS data and EM data can be effectively combined for producing colored images.

6. 发明授权

US09490100B2 Method of using a compound particle-optical lens 有权
标题翻译：使用复合粒子光学透镜的方法
公开(公告)号：US09490100B2
公开(公告)日：2016-11-08
申请号：US14021480
申请日：2013-09-09
申请人： FEI Company
发明人： Petr Syta{hacek over (r)} , Petr Hlavenka , Lubomír Tůma
IPC分类号： H01J37/14 , H01J37/145 , H01J37/28
CPC分类号： H01J37/14 , H01J37/145 , H01J37/28 , H01J2237/1035 , H01J2237/24475 , H01J2237/24485 , H01J2237/248
摘要： The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis. By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.
摘要翻译：本发明涉及一种用于扫描电子显微镜的复合物镜，其具有由第一透镜线圈激发的常规磁透镜，由第二透镜线圈激发的浸没磁透镜，以及由样品和静电透镜电极。对于透镜的预定激发，可以使用两个透镜线圈的激发的组合将电子束聚焦在样品上。当检测器区分击穿靠近轴的检测器的BSE（202）和撞击检测器进一步从轴移除的BSE（204）之后，可以获得更多的BSE信息。通过调整两个透镜线圈的激励的比率，可以改变从BSE撞击在检测器上的轴线的距离，并且复合透镜可以用作能量选择检测器。

7. 发明授权

US11373839B1 Method and system for component analysis of spectral data 有权
公开(公告)号：US11373839B1
公开(公告)日：2022-06-28
申请号：US17166885
申请日：2021-02-03
申请人： FEI Company
发明人： Petr Hlavenka , Jan Klusacek , Ondrej Sembera
IPC分类号： H01J37/244 , H01J37/28
摘要： Responsive to irradiation of a charged particle beam, emission from sample is acquired in the form of spectral data. The spectral data is decomposed by a machine learning estimator to abundances and spectral components based on a character of the detector. Images showing compositional information of the sample are generated based on the abundances and the spectral components.

8. 发明授权

US10937627B2 Multi-beam electron microscope 有权
公开(公告)号：US10937627B2
公开(公告)日：2021-03-02
申请号：US16423670
申请日：2019-05-28
申请人： FEI Company
发明人： Pavel Stejskal , Petr Hlavenka , Bohuslav Sed'a
IPC分类号： H01J37/244 , H01J37/20 , H01J37/28
摘要： An electron microscope comprising: A specimen holder, for holding a specimen; An electron beam column, for producing an array of electron beams and concurrently irradiating an array of target areas of said specimen therewith; A scanning assembly, for producing relative scanning motion of said beam array with respect to the specimen; A detector, for detecting radiation emanating from the specimen in response to said irradiation, wherein said detector is: A backscattered electron detector that can be disposed proximal to the specimen at a side thereof facing said electron beam column; Provided with an array of apertures that allow passage of said electron beams from said column to the specimen; Provided with a functionally sub-divided detection surface that enables segregated detection of a backscattered electron flux produced by each individual beam.

9. 发明授权

US09053899B2 Method for imaging a sample in a charged particle apparatus 有权
标题翻译：在带电粒子装置中成像样品的方法
公开(公告)号：US09053899B2
公开(公告)日：2015-06-09
申请号：US14294772
申请日：2014-06-03
申请人： FEI Company
发明人： Bohuslav Sed'a , Lubomír T{dot over (u)}ma , Petr Hlavenka , Petr Syta{hacek over (r)}
IPC分类号： H01J37/28 , H01J37/20 , H01J37/12 , H01J37/09 , H01J37/30
CPC分类号： H01J37/12 , H01J37/09 , H01J37/3005 , H01J2237/12 , H01J2237/20207
摘要： The invention relates to a dual beam apparatus equipped with an ion beam column and an electron beam column having an electrostatic immersion lens. When tilting the sample, the electrostatic immersion field is distorted and the symmetry round the electron optical axis is lost. As a consequence tilting introduces detrimental effects such as traverse chromatic aberration and beam displacement. Also in-column detectors, detecting either secondary electrons or backscattered electrons in the non-tilted position of the sample, will, due to the loss of the symmetry of the immersion field, show a mix of these electrons when tilting the sample.The invention shows how, by biasing the stage with respect to the grounded electrodes closest to the sample, these disadvantages are eliminated, or at least reduced.
摘要翻译：本发明涉及一种配备有离子束柱和具有静电浸没透镜的电子束柱的双光束装置。当倾斜样品时，静电浸没场失真，并且电子光轴周围的对称性丧失。因此，倾斜引入有害影响，例如横向色差和光束位移。在样品的非倾斜位置检测二次电子或后向散射电子的柱内检测器也将由于浸没场的对称性的损失而在倾斜样品时显示这些电子的混合物。本发明示出了如何通过相对于最接近样品的接地电极偏置级来消除或至少减少这些缺点。

10. 发明申请

US20140097341A1 IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN 审中-公开
标题翻译：颗粒光柱检测器
公开(公告)号：US20140097341A1
公开(公告)日：2014-04-10
申请号：US13975809
申请日：2013-08-26
申请人： FEI Company
发明人： Lubomír Tuma , Petr Hlavenka , Petr Sytar , Radek Ceska , Bohuslav Sed'a
IPC分类号： H01J37/244 , H01J37/26
CPC分类号： H01J37/26 , H01J37/145 , H01J37/244 , H01J37/28 , H01J2237/04926 , H01J2237/2443 , H01J2237/24465
摘要： The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.
摘要翻译：本发明涉及一种柱内反向散射电子检测器，该探测器放置在用于SEM的组合静电/磁性物镜中。检测器形成为带电粒子敏感表面，优选地形成作为形成静电聚焦场的电极面之一的闪烁体盘。在闪烁体中产生的光子被光子检测器（例如光电二极管或多像素光子检测器）检测。物镜可以配备有用于检测保持靠近轴线的二次电子的另一电子检测器。可以使用光导来在光子检测器和闪烁体之间提供电绝缘。

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