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    • 3. 发明申请
    • IMAGING LENS
    • 成像镜头
    • US20120162769A1
    • 2012-06-28
    • US13316690
    • 2011-12-12
    • Hisanori SuzukiShingo WatanabeKenichi KamadaKazuo Matsuoka
    • Hisanori SuzukiShingo WatanabeKenichi KamadaKazuo Matsuoka
    • G02B13/18G02B27/42
    • G02B13/0045G02B27/0037
    • An imaging lens with large aperture ratio, high-performance and low-cost is provided, which is applied to an imaging element of a small-size and high resolution, in which aberration is corrected satisfactorily and sufficient diffraction resolution is achieved. An imaging lens includes a first lens, a second lens, a third lens, a fourth lens, and a fifth lens arranged in sequence from an object side, wherein both surfaces of each lens are formed from aspheric surface, a diffraction optics surface exerting chromatic dispersion function is arranged on a surface on an image side of the second lens, each lens is configured from plastic material, and an aperture ratio is equal to or smaller than F/2.4.
    • 提供了一种具有大孔径比,高性能和低成本的成像透镜,其被应用于小尺寸和高分辨率的成像元件,其中像差被令人满意地校正并且实现了足够的衍射分辨率。 成像透镜包括从物体侧依次排列的第一透镜,第二透镜,第三透镜​​,第四透镜和第五透镜,其中每个透镜的两个表面由非球面形成,衍射光学表面施加彩色 色散功能被布置在第二透镜的像侧的表面上,每个透镜由塑料材料构成,孔径比等于或小于F / 2.4。
    • 4. 发明授权
    • Imaging lens
    • 成像镜头
    • US08767298B2
    • 2014-07-01
    • US13316690
    • 2011-12-12
    • Hisanori SuzukiShingo WatanabeKenichi KamadaKazuo Matsuoka
    • Hisanori SuzukiShingo WatanabeKenichi KamadaKazuo Matsuoka
    • G02B5/18G02B27/42
    • G02B13/0045G02B27/0037
    • An imaging lens with large aperture ratio, high-performance and low-cost is provided, which is applied to an imaging element of a small-size and high resolution, in which aberration is corrected satisfactorily and sufficient diffraction resolution is achieved. An imaging lens includes a first lens, a second lens, a third lens, a fourth lens, and a fifth lens arranged in sequence from an object side, wherein both surfaces of each lens are formed from aspheric surface, a diffraction optics surface exerting chromatic dispersion function is arranged on a surface on an image side of the second lens, each lens is configured from plastic material, and an aperture ratio is equal to or smaller than F/2.4.
    • 提供了一种具有大孔径比,高性能和低成本的成像透镜,其被应用于小尺寸和高分辨率的成像元件,其中像差被令人满意地校正并且实现了足够的衍射分辨率。 成像透镜包括从物体侧依次排列的第一透镜,第二透镜,第三透镜​​,第四透镜和第五透镜,其中每个透镜的两个表面由非球面形成,衍射光学表面施加彩色 色散功能被布置在第二透镜的像侧的表面上,每个透镜由塑料材料构成,孔径比等于或小于F / 2.4。
    • 7. 发明申请
    • EVAPORATING APPARATUS
    • 蒸气装置
    • US20100071623A1
    • 2010-03-25
    • US12441934
    • 2007-10-01
    • Shingo WatanabeYuji OnoKoyu HasegawaMasahiro OgawaKouichi Honda
    • Shingo WatanabeYuji OnoKoyu HasegawaMasahiro OgawaKouichi Honda
    • C23C16/00
    • C23C14/12C23C14/243
    • Disclosed is an evaporating apparatus for performing a film forming process on a target object to be processed by vapor deposition, wherein a processing chamber and a vapor generating chamber are disposed adjacent to each other, gas exhaust mechanisms for depressurizing an inside of the processing chamber and an inside of the vapor generating chamber are installed, a vapor discharge opening for discharging a vapor of the film forming material is disposed in the processing chamber, vapor generating units for vaporizing the film forming material and control valves for controlling a supply of the vapor of the film forming material are disposed in the vapor generating chamber, and flow paths, which are not exposed to an outside of the processing chamber and the vapor generating chamber, for supplying the vapor of the film forming material generated in the vapor generating units to the vapor discharge opening are installed.
    • 本发明公开了一种用于对通过气相沉积处理的目标物体进行成膜处理的蒸发装置,其中处理室和蒸汽发生室彼此相邻设置,用于对处理室内部进行减压的排气机构, 蒸汽发生室内部安装有用于排出成膜材料的蒸汽的蒸汽排放口,用于蒸发成膜材料的蒸汽发生单元和用于控制成膜材料供应的控制阀 成膜材料设置在蒸汽发生室中,并且没有暴露于处理室和蒸气发生室的外部的流路用于将在蒸汽发生单元中产生的成膜材料的蒸汽供应到 安装蒸汽排放口。
    • 8. 发明申请
    • Heat treatment system and method therefore
    • 热处理系统和方法因此
    • US20070166657A1
    • 2007-07-19
    • US11705443
    • 2007-02-13
    • Kazunari SakataKoyu HasegawaKeiichi KatabuchiShingo WatanabeShinya MochizukiMotoki AkimotoHiroshi Motono
    • Kazunari SakataKoyu HasegawaKeiichi KatabuchiShingo WatanabeShinya MochizukiMotoki AkimotoHiroshi Motono
    • F27D1/18
    • H01L21/67373F27B5/04F27B17/0025F27D3/0084F27D5/0037H01L21/67017H01L21/67109H01L21/67379H01L21/67389H01L21/67393H01L21/67739H01L21/67769H01L21/67772H01L21/67775H01L21/67778H01L21/68707Y10S269/903Y10S414/135Y10S414/137
    • There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment. In a vertical heat treatment system for carrying an object W to be treated, which is housed in a treating-object housing box 2 closed by an opening/closing lid 10, in a treating-object transfer area 46 via an opening 28, which is formed in a partition wall 26 separating a housing-box transfer area 44 for transferring the treating-object housing box from the treating-object transfer area 46 in an atmosphere of an inert gas, to carry out a predetermined treatment, a standby box transfer means 60 is provided in the housing-box transfer area for holding a treating-object housing box, which houses therein the next object to be carried in the treating-object transfer area, in the vicinity of the opening to cause the treating-object housing box to stand by. Thus, when the object to be treated is carried in via the opening of the partition wall, which separates the housing-box transfer area from the treating-object transfer area (wafer transfer area), to carry out a predetermined treatment, the structure of various mechanisms in the vicinity of the opening is simplified, and the space is saved.
    • 提供了一种垂直式热处理系统,其能够简化形成在将箱体搬送区域从处理对象搬送区域(晶片转移区域)分离的分隔壁的开口附近的各种机构的结构, 并且当通过开口在垂直热处理系统中承载待处理物体时,有助于节省空间,以进行预定处理。 在用于承载被打开/关闭盖10封闭的处理对象收纳箱2中的待处理对象物W的立式热处理系统经由开口28在处理对象转移区域46中 形成在隔离壁26中,隔离箱26分离用于在惰性气体气氛中将处理对象收纳箱从处理对象转移区域46传送的收纳箱传送区域44,以执行预定处理;待机箱传送装置 60设置在用于保持处理对象收纳箱的收纳箱传送区域中,处理对象收纳箱在其内容纳有待处理对象转移区域中的下一个物体的开口附近,从而使处理对象收纳箱 待命 因此,当待处理物体经由将箱体转移区域从处理对象转移区域(晶片转移区域)分离的分隔壁的开口进行预定处理时,结构 简化了开口附近的各种机构,节省了空间。
    • 10. 发明授权
    • Heat treatment apparatus
    • 热处理设备
    • US4976613A
    • 1990-12-11
    • US249780
    • 1988-09-26
    • Shingo Watanabe
    • Shingo Watanabe
    • H01L21/205C30B35/00H01L21/00H01L21/22H01L21/31H01L21/677F27D3/12
    • H01L21/67757C30B35/00H01L21/67115Y10S414/14
    • Disclosed is a heat treatment apparatus comprises a body having an opening section on the clear room side, a furance disposed in the body, a process tube arranged elevatably relative to the furnace, and a preventing plate arranged closably at the opening section for shutting off the opening section when it is closed, thereby it is possible to prevent dust from entering into the clean room by closing the opening section with the preventing plate. Further, disclosed is an heat treatment apparatus wherein the process tube is supported by arms, these arms being horizontally receiprocated between the space section below the furnace and position outside of the space section, where the process tube is located, while the arms are elevated and lowered so that the process tube supported on the arms is delivered to and received from the elevaotr, and the process tube is supported, elevated and lowered by the elevator, relative to the furnace, thereby it is possible to move the process tube and to mount and remove the same to and from the body without relying upon human hands, thereby it is possible to facilitate the movement operation of the process tube and enhance the economy of operation and the safety of working.
    • 公开了一种热处理设备,包括:在清洁室侧具有开口部分的主体,设置在主体中的保护件,相对于炉子高度设置的处理管;以及防止板,其设置在开口部处,用于切断 开闭部,因此能够通过用防止板关闭开口部来防止灰尘进入清洁室。 此外,公开了一种热处理设备,其中处理管由臂支撑,这些臂水平地接合在炉的下方的空间部分之间,并且在臂被提升的同时位于处理管所在的空间部分的外部, 下降,使得支撑在臂上的处理管被输送到电梯并从电动机接收,并且由电梯相对于炉子支撑,升高和降低处理管,从而可以移动处理管并安装 并且不依赖人手从身体去除,从而有助于加工管的移动操作,增强操作经济性和工作安全性。