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    • 9. 发明授权
    • Method of forming film of ultrafine particles
    • 形成超微粒膜的方法
    • US06280802B1
    • 2001-08-28
    • US09360450
    • 1999-07-26
    • Jun AkedoHideki Takagi
    • Jun AkedoHideki Takagi
    • B05D102
    • C23C4/12C23C4/02C23C4/134C23C24/04
    • A method of forming a film of ultrafine particles includes the steps of accelerating ultrafine particles within a vacuum chamber to cause them to collide with a substrate and be deposited, and, at least before said ultrafine particles collide with said substrate, irradiating the ultrafine particles and the substrate with an ionic, atomic or molecular beam or low-temperature plasma or other high-speed, high-energy beam of high-energy atoms or molecules, whereby the surfaces of the ultrafine particles and substrate are activated without being fused, thus promoting bonding between said ultrafine particles and substrate or between the ultrafine particles to form a dense deposit that has good film properties and good adhesion to the substrate while maintaining the crystal properties of the ultrafine particles.
    • 形成超微粒子膜的方法包括以下步骤:在真空室内加速超细颗粒,使其与基材碰撞并沉积,并且至少在所述超细颗粒与所述基材碰撞之前,照射超细颗粒和 具有离子,原子或分子束或低温等离子体或其他高能量高能量高能原子或分子束的衬底,由此超微粒子和衬底的表面被激活而不被熔化,从而促进 在所述超微粒子与基底之间或超微粒子之间键合,形成致密的沉积物,其具有良好的膜性能和对基底的良好粘附性,同时保持超微粒子的晶体性质。