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    • 6. 发明授权
    • Method for forming light-transmitting regions
    • 形成透光区域的方法
    • US07732244B2
    • 2010-06-08
    • US12003186
    • 2007-12-20
    • Chieh-Yuan ChengTzu-Han LinPai-Chun Peter Zung
    • Chieh-Yuan ChengTzu-Han LinPai-Chun Peter Zung
    • H01L21/00
    • H01L27/14623H01L27/14627H01L27/14685H01L27/14818
    • A method for forming a light-transmitting region comprises providing a support feature. A sacrificial layer is formed over a portion of the support feature, wherein the sacrificial layer comprises an energy-induced swelling material. A light-blocking layer is conformably formed over the support feature to cover the sacrificial layer and the support feature. The support feature, the sacrificial layer, and the light-blocking layer are subjected to an energy source to swell the sacrificial layer until bursting to thereby delaminate a portion of the light-blocking layer from the support feature and leave a light-transmitting region exposed with a portion of the support feature in the light-blocking layer. A gas flow or scrub cleaning force is provided to clean up the light-transmitting region and a top surface of the light-blocking layer remains over the support feature.
    • 形成透光区域的方法包括提供支撑特征。 在支撑特征的一部分上形成牺牲层,其中牺牲层包括能量引起的膨胀材料。 在支撑特征上顺应地形成遮光层以覆盖牺牲层和支撑特征。 支撑特征,牺牲层和遮光层经受能量源以使牺牲层溶胀直到爆裂,从而使遮光层的一部分与支撑特征分层,并使透光区域暴露 其中一部分支撑特征在遮光层中。 提供气流或洗涤清洁力以清洁透光区域,并且遮光层的顶表面保留在支撑特征上。
    • 9. 发明授权
    • Image sensor package and fabrication method thereof
    • 图像传感器封装及其制造方法
    • US07595220B2
    • 2009-09-29
    • US11822011
    • 2007-06-29
    • Jui-Ping WengJang-Cheng HsiehTzu-Han LinPai-Chun Peter Zung
    • Jui-Ping WengJang-Cheng HsiehTzu-Han LinPai-Chun Peter Zung
    • H01L21/00H01L23/02
    • H01L27/14618H01L27/14683H01L2224/10
    • The invention provides an image sensor package and method for fabricating the same. The image sensor package comprises a first substrate comprising a sensor device thereon and a hole therein. A bonding pad comprising a first opening is formed on an upper surface of the first substrate. A second substrate comprising a spacer element with a second opening therein is disposed on the first substrate. A conductive plug is formed in the hole and passes through the first and second openings to the second substrate to electrically contact with the bonding pad. A conductive layer is formed on a lower surface of the first substrate and electrically connects to the conductive plug. A solder ball is formed on the conductive layer and electrically connects to the bonding pad by the conductive plug. The image sensor package further comprises a second substrate bonding to the first substrate. The image sensor package is relatively less thick, thus, the dimensions thereof are relatively reduced.
    • 本发明提供一种图像传感器封装及其制造方法。 图像传感器封装包括其上包括传感器装置的第一基板和其中的孔。 包括第一开口的焊盘形成在第一基板的上表面上。 包括其中具有第二开口的间隔元件的第二基板设置在第一基板上。 导电插塞形成在孔中,并通过第一和第二开口到第二基板,以与接合焊盘电接触。 导电层形成在第一基板的下表面上并电连接到导电插塞。 在导电层上形成焊球,并通过导电插塞与焊盘电连接。 图像传感器封装还包括与第一基板结合的第二基板。 图像传感器封装相对较薄,因此其尺寸相对减小。