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    • 5. 发明授权
    • Parasitic extraction in an integrated circuit with multi-patterning requirements
    • 具有多图案化要求的集成电路中的寄生提取
    • US09171124B2
    • 2015-10-27
    • US14139023
    • 2013-12-23
    • INTERNATIONAL BUSINESS MACHINES CORPORATION
    • Nathan BuckBrian DreibelbisJohn P. DubuqueEric A. ForemanPeter A. HabitzDavid J. HathawayJeffrey G. HemmettNatesan VenkateswaranChandramouli VisweswariahVladimir Zolotov
    • G06F17/50
    • G06F17/5081G06F17/5036G06F2217/82
    • Systems and methods are provided for extracting parasitics in a design of an integrated circuit with multi-patterning requirements. The method includes determining resistance solutions and capacitance solutions. The method further includes performing parasitic extraction of the resistance solutions and the capacitance solutions to generate mean values for the resistance solutions and the capacitance solutions. The method further includes capturing a multi-patterning source of variation for each of the resistance solutions and the capacitance solutions during the parasitic extraction. The method further includes determining a sensitivity for each captured source of variation to a respective vector of parameters. The method further includes determining statistical parasitics by multiplying each of the resistance solutions and the capacitance solutions by the determined sensitivity for each respective captured source of variation. The method further includes generating as output the statistical parasitics in at least one of a vector form and a collapsed reduced vector form.
    • 提供了用于在具有多图案化要求的集成电路的设计中提取寄生效应的系统和方法。 该方法包括确定电阻解和电容解。 该方法还包括执行电阻解和电容解的寄生提取以产生电阻解和电容解的平均值。 该方法还包括在寄生提取期间捕获每个电阻解决方案和电容解的多图案变化源。 该方法还包括确定每个捕获的变化源与相应的参数矢量的灵敏度。 该方法还包括通过将每个电阻解和电容解乘以每个相应捕获的变化源的灵敏度来确定统计寄生效应。 该方法还包括以矢量形式和折叠缩小矢量形式中的至少一个生成统计寄生效应作为输出。