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1. 发明授权

US08791426B2 Electron beam diagnostic system using computed tomography and an annular sensor 有权
标题翻译：使用计算机断层扫描和环形传感器的电子束诊断系统
公开(公告)号：US08791426B2
公开(公告)日：2014-07-29
申请号：US12917028
申请日：2010-11-01
申请人： John W. Elmer , Alan T. Teruya
发明人： John W. Elmer , Alan T. Teruya
IPC分类号： H01J37/244 , G01T1/29
CPC分类号： H01J37/244 , G01T1/2914 , H01J37/315 , H01J2237/24405 , H01J2237/24542 , H01J2237/28 , H01J2237/30472
摘要： A system for analyzing an electron beam including a circular electron beam diagnostic sensor adapted to receive the electron beam, the circular electron beam diagnostic sensor having a central axis; an annular sensor structure operatively connected to the circular electron beam diagnostic sensor, wherein the sensor structure receives the electron beam; a system for sweeping the electron beam radially outward from the central axis of the circular electron beam diagnostic sensor to the annular sensor structure wherein the electron beam is intercepted by the annular sensor structure; and a device for measuring the electron beam that is intercepted by the annular sensor structure.
摘要翻译：一种用于分析包括适于接收电子束的圆形电子束诊断传感器的电子束的系统，所述圆形电子束诊断传感器具有中心轴线; 环形传感器结构可操作地连接到圆形电子束诊断传感器，其中传感器结构接收电子束; 用于将电子束从圆形电子束诊断传感器的中心轴径向向外扫描到环形传感器结构的系统，其中电子束被环形传感器结构拦截; 以及用于测量被环形传感器结构拦截的电子束的装置。

2. 发明授权

US5554926A Modified Faraday cup 失效
标题翻译：修改法拉第杯
公开(公告)号：US5554926A
公开(公告)日：1996-09-10
申请号：US509552
申请日：1995-07-31
申请人： John W. Elmer , Alan T. Teruya , Dennis W. O'Brien
发明人： John W. Elmer , Alan T. Teruya , Dennis W. O'Brien
IPC分类号： G01R19/00 , G01R13/00
CPC分类号： G01R19/0061
摘要： A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-din-tensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.
摘要翻译：一种用于使用从修改的法拉第杯获得的电子束轮廓数据来测量电子束中的电流密度分布以在高功率和低功率光束中产生电流密度的图像的断层摄影技术。修改后的法拉第杯包括狭窄的狭缝，并由步进电机旋转，并可在x，y和z方向上移动。光束扫过与其垂直的狭缝并由偏转线圈控制，狭缝旋转，使得波形从0°至360°每隔几度进行，波形由数字化存储示波器记录。可以通过计算机断层扫描从该信息重建光束中的电流密度分布的二维和三维图像，提供关于束聚焦和对准的定量信息。

3. 发明授权

US5468966A System for tomographic determination of the power distribution in electron beams 失效
公开(公告)号：US5468966A
公开(公告)日：1995-11-21
申请号：US283438
申请日：1994-08-01
申请人： John W. Elmer , Alan T. Teruya , Dennis W. O'Brien
发明人： John W. Elmer , Alan T. Teruya , Dennis W. O'Brien
IPC分类号： G01R19/00 , H01J37/26 , G01R13/00
CPC分类号： G01R19/0061 , H01J37/265 , H01J2237/24405 , H01J2237/282
摘要： A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-dimensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.

4. 发明授权

US5382895A System for tomographic determination of the power distribution in electron beams 失效
标题翻译：电子束功率分布断层扫描测定系统
公开(公告)号：US5382895A
公开(公告)日：1995-01-17
申请号：US996892
申请日：1992-12-28
申请人： John W. Elmer , Alan T. Teruya , Dennis W. O'Brien
发明人： John W. Elmer , Alan T. Teruya , Dennis W. O'Brien
IPC分类号： G01R19/00 , H01J37/26 , G01R13/00 , G01T1/29
CPC分类号： G01R19/0061 , H01J37/265 , H01J2237/24405 , H01J2237/282
摘要： A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-dimensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.
摘要翻译：一种用于使用从修改的法拉第杯获得的电子束轮廓数据来测量电子束中的电流密度分布以在高功率和低功率光束中产生电流密度的图像的断层摄影技术。修改后的法拉第杯包括狭窄的狭缝，并由步进电机旋转，并可在x，y和z方向上移动。光束扫过与其垂直的狭缝并由偏转线圈控制，狭缝旋转，使得波形从0°至360°每隔几度进行，波形由数字化存储示波器记录。可以通过计算机断层摄影从该信息重建光束中的电流密度分布的二维和三维图像，提供关于束聚焦和对准的定量信息。

5. 发明申请

US20110121180A1 ELECTRON BEAM DIAGNOSTIC SYSTEM USING COMPUTED TOMOGRAPHY AND AN ANNULAR SENSOR 有权
标题翻译：电子束诊断系统使用计算机图形和环形传感器
公开(公告)号：US20110121180A1
公开(公告)日：2011-05-26
申请号：US12917028
申请日：2010-11-01
申请人： John W. Elmer , Alan T. Teruya
发明人： John W. Elmer , Alan T. Teruya
IPC分类号： G01T1/00
CPC分类号： H01J37/244 , G01T1/2914 , H01J37/315 , H01J2237/24405 , H01J2237/24542 , H01J2237/28 , H01J2237/30472
摘要： A system for analyzing an electron beam including a circular electron beam diagnostic sensor adapted to receive the electron beam, the circular electron beam diagnostic sensor having a central axis; an annular sensor structure operatively connected to the circular electron beam diagnostic sensor, wherein the sensor structure receives the electron beam; a system for sweeping the electron beam radially outward from the central axis of the circular electron beam diagnostic sensor to the annular sensor structure wherein the electron beam is intercepted by the annular sensor structure; and a device for measuring the electron beam that is intercepted by the annular sensor structure.
摘要翻译：一种用于分析包括适于接收电子束的圆形电子束诊断传感器的电子束的系统，所述圆形电子束诊断传感器具有中心轴线; 环形传感器结构可操作地连接到圆形电子束诊断传感器，其中传感器结构接收电子束; 用于将电子束从圆形电子束诊断传感器的中心轴径向向外扫描到环形传感器结构的系统，其中电子束被环形传感器结构拦截; 以及用于测量被环形传感器结构拦截的电子束的装置。

6. 发明授权

US07348568B2 Electron beam diagnostic for profiling high power beams 有权
标题翻译：用于分析高功率光束的电子束诊断
公开(公告)号：US07348568B2
公开(公告)日：2008-03-25
申请号：US11159978
申请日：2005-06-22
申请人： John W. Elmer , Todd A. Palmer , Alan T. Teruya
发明人： John W. Elmer , Todd A. Palmer , Alan T. Teruya
IPC分类号： G01K1/16
CPC分类号： G01R19/0061 , H01J37/244 , H01J2237/24405 , H01J2237/30433 , H01J2237/31
摘要： A system for characterizing high power electron beams at power levels of 10 kW and above is described. This system is comprised of a slit disk assembly having a multitude of radial slits, a conducting disk with the same number of radial slits located below the slit disk assembly, a Faraday cup assembly located below the conducting disk, and a start-stop target located proximate the slit disk assembly. In order to keep the system from over-heating during use, a heat sink is placed in close proximity to the components discussed above, and an active cooling system, using water, for example, can be integrated into the heat sink. During use, the high power beam is initially directed onto a start-stop target and after reaching its full power is translated around the slit disk assembly, wherein the beam enters the radial slits and the conducting disk radial slits and is detected at the Faraday cup assembly. A trigger probe assembly can also be integrated into the system in order to aid in the determination of the proper orientation of the beam during reconstruction. After passing over each of the slits, the beam is then rapidly translated back to the start-stop target to minimize the amount of time that the high power beam comes in contact with the slit disk assembly. The data obtained by the system is then transferred into a computer system, where a computer tomography algorithm is used to reconstruct the power density distribution of the beam.
摘要翻译：描述了用于表征功率水平为10kW及以上的高功率电子束的系统。该系统由具有多个径向狭缝的狭缝盘组件，位于狭缝盘组件下方的相同数量的径向狭缝的导电盘，位于导电盘下方的法拉第杯组件和位于靠近狭缝盘组件。为了在使用过程中保持系统过热，将散热器放置在紧邻上述部件的位置，并且使用例如水的主动冷却系统可以集成到散热器中。在使用期间，高功率光束最初被引导到起停目标上，并且在达到其全部功率之后，围绕狭缝盘组件平移，其中光束进入径向狭缝和导电盘径向狭缝，并在法拉第杯部件。触发探针组件也可以集成到系统中，以帮助确定重建过程中光束的正确定向。在通过每个狭缝之后，光束然后迅速地转回到启动 - 停止目标，以最小化高功率光束与狭缝盘组件接触的时间量。然后将由系统获得的数据传送到计算机系统中，其中使用计算机断层摄影算法来重建光束的功率密度分布。

7. 发明授权

US07288772B2 Diagnostic system for profiling micro-beams 失效
标题翻译：微型射影诊断系统
公开(公告)号：US07288772B2
公开(公告)日：2007-10-30
申请号：US11116697
申请日：2005-04-27
申请人： John W. Elmer , Todd A. Palmer , Alan T. Teruya , Chris C. Walton
发明人： John W. Elmer , Todd A. Palmer , Alan T. Teruya , Chris C. Walton
IPC分类号： G01J1/00 , G03C5/00 , G01R13/00
CPC分类号： H01J37/315 , H01J37/304 , H01J37/3056 , H01J2237/153 , H01J2237/30433 , H01J2237/317
摘要： An apparatus for characterization of a micro beam comprising a micro modified Faraday cup assembly including a first layer of material, a second layer of material operatively connected to the first layer of material, a third layer of material operatively connected to the second layer of material, and a fourth layer of material operatively connected to the third layer of material. The first layer of material comprises an electrical conducting material and has at least one first layer radial slit extending through the first layer. An electrical ground is connected to the first layer. The second layer of material comprises an insulating material and has at least one second layer radial slit corresponding to the first layer radial slit in the first layer of material. The second layer radial slit extends through the second layer. The third layer of material comprises a conducting material and has at least one third layer radial slit corresponding to the second layer radial slit in the second layer of material. The third layer radial slit extends through the third layer. The fourth layer of material comprises an electrical conducting material but does not have slits. An electrical measuring device is connected to the fourth layer. The micro modified Faraday cup assembly is positioned to be swept by the micro beam.
摘要翻译：一种用于表征微束的装置，包括微修改的法拉第杯组件，其包括第一材料层，可操作地连接到第一材料层的第二材料层，与第二材料层可操作地连接的第三层材料，以及可操作地连接到第三层材料的第四层材料。第一层材料包括导电材料，并且具有延伸穿过第一层的至少一个第一层径向狭缝。电接地连接到第一层。第二层材料包括绝缘材料，并且具有至少一个与第一层材料中的第一层径向狭缝相对应的第二层径向狭缝。第二层径向狭缝延伸穿过第二层。第三层材料包括导电材料，并且具有与第二层材料中的第二层径向狭缝相对应的至少一个第三层径向狭缝。第三层径向狭缝延伸穿过第三层。第四层材料包括导电材料，但不具有狭缝。电测量装置连接到第四层。微改装的法拉第杯组件定位成被微梁扫过。

8. 发明授权

US07902503B2 Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams 有权
标题翻译：用于确定电子和离子束功率密度的修改法拉第杯诊断用狭缝盘
公开(公告)号：US07902503B2
公开(公告)日：2011-03-08
申请号：US12188398
申请日：2008-08-08
申请人： Alan T. Teruya , John W. Elmer , Todd A. Palmer
发明人： Alan T. Teruya , John W. Elmer , Todd A. Palmer
IPC分类号： H01J47/00
CPC分类号： H01J37/244 , H01J2237/24405
摘要： A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam.
摘要翻译：用于表征电子束或离子束的诊断系统包括耐火材料的导电盘，其具有圆周，中心和法拉第杯组件，其定位成接收电子束或离子束。盘中的至少一个狭缝提供电子束或离子束的诊断特征。所述至少一个狭缝位于圆盘的圆周和中心之间，并包括与中心径向对准的径向部分和偏离与中心的径向对准的部分。电子束或离子束被引导到盘上并平移到至少一个狭缝，其中电子束或离子束进入至少一个狭缝，用于提供电子束或离子束的诊断特性。

9. 发明申请

US20100032562A1 Slit Disk for Modified Faraday Cup Diagnostic for Determing Power Density of Electron and Ion Beams 有权
标题翻译：用于确定电子和离子束功率密度的修正法拉第杯诊断用狭缝盘
公开(公告)号：US20100032562A1
公开(公告)日：2010-02-11
申请号：US12188398
申请日：2008-08-08
申请人： Alan T. Teruya , John W. Elmer , Todd A. Palmer
发明人： Alan T. Teruya , John W. Elmer , Todd A. Palmer
IPC分类号： H01J47/00 , H01J3/14
CPC分类号： H01J37/244 , H01J2237/24405
摘要： A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam.
摘要翻译：用于表征电子束或离子束的诊断系统包括耐火材料的导电盘，其具有圆周，中心和法拉第杯组件，其定位成接收电子束或离子束。盘中的至少一个狭缝提供电子束或离子束的诊断特征。所述至少一个狭缝位于圆盘的圆周和中心之间，并包括与中心径向对准的径向部分和偏离与中心的径向对准的部分。电子束或离子束被引导到盘上并平移到至少一个狭缝，其中电子束或离子束进入至少一个狭缝，用于提供电子束或离子束的诊断特性。

10. 发明申请

US20080088295A1 MINIATURE MODIFIED FARADAY CUP FOR MICRO ELECTRON BEAMS 失效
标题翻译：微型电子微型微调微型杯
公开(公告)号：US20080088295A1
公开(公告)日：2008-04-17
申请号：US11166716
申请日：2005-06-23
申请人： Alan T. Teruya , John W. Elmer , Todd A. Palmer , Chris C. Walton
发明人： Alan T. Teruya , John W. Elmer , Todd A. Palmer , Chris C. Walton
IPC分类号： G01N27/00
CPC分类号： H01J37/244 , G01R19/0061 , H01J2237/24405 , H01J2237/24507 , H01J2237/24514 , H01J2237/24542 , H01J2237/30472
摘要： A micro beam Faraday cup assembly includes a refractory metal layer with an odd number of thin, radially positioned traces in this refractory metal layer. Some of the radially positioned traces are located at the edge of the micro modified Faraday cup body and some of the radially positioned traces are located in the central portion of the micro modified Faraday cup body. Each set of traces is connected to a separate data acquisition channel to form multiple independent diagnostic networks. The data obtained from the two diagnostic networks are combined and inputed into a computed tomography algorithm to reconstruct the beam shape, size, and power density distribution.
摘要翻译：微型法拉第杯组件包括难熔金属层，该难熔金属层在该难熔金属层中具有奇数个薄的径向定位的迹线。一些径向定位的迹线位于微改进的法拉第杯体的边缘，并且一些径向定位的迹线位于微改进的法拉第杯体的中心部分。每组轨迹连接到单独的数据采集通道，形成多个独立的诊断网络。将从两个诊断网络获得的数据组合并输入到计算机断层摄影算法中以重建波束形状，大小和功率密度分布。

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