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1. 发明授权

US08673450B2 Graphite member for beam-line internal member of ion implantation apparatus 有权
标题翻译：用于离子注入装置的束线内部构件的石墨构件
公开(公告)号：US08673450B2
公开(公告)日：2014-03-18
申请号：US12084206
申请日：2006-10-12
申请人： Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
发明人： Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
IPC分类号： A61N5/00 , G21K5/10 , H01J37/08 , G21G5/00 , C01B31/00 , C01B31/02 , C01B31/04 , H01L21/425
CPC分类号： H01J37/3171 , C04B35/522 , C04B35/532 , C04B2235/5436 , C04B2235/656 , C04B2235/77 , H01J37/16 , H01J2237/0213 , H01J2237/022 , H01J2237/31705
摘要： The problem of the present invention is to provide, in high current-low energy type ion implantation apparatuses, a graphite member for a beam line inner member of an ion implantation apparatus, which graphite member can markedly reduce particles incorporated in a wafer surface. This problem can be solved by the graphite member of the present invention, which is a graphite member for a beam line inner member of an ion implantation apparatus, which member having a bulk density of not less than 1.80 Mg/m3 and an electric resistivity of not more than 9.5 μΩ·m. Preferably, the R value obtained by dividing D band intensity at 1370 cm−1 by G band intensity at 1570 cm−1 in the Raman spectrum of a spontaneous fracture surface of the graphite member is not more than 0.20.
摘要翻译：本发明的问题在于，在高电流 - 低能量型离子注入装置中，提供一种用于离子注入装置的束线内部构件的石墨构件，该石墨构件可以显着地减少结合在晶片表面中的颗粒。该问题可以通过本发明的石墨构件来解决，该石墨构件是用于离子注入装置的束线内部构件的石墨构件，其堆积密度不小于1.80Mg / m 3，并且电阻率不超过9.5亩。优选地，在石墨构件的自发断裂面的拉曼光谱中，将1370cm -1处的D带强度除以1570cm -1处的G带强度获得的R值不大于0.20。

2. 发明申请

US20090181527A1 Graphite Member for Beam-Line Internal Member of Ion Implantation Apparatus 有权
标题翻译：离子植入装置的束线内部成员的石墨构件
公开(公告)号：US20090181527A1
公开(公告)日：2009-07-16
申请号：US12084206
申请日：2006-10-12
申请人： Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
发明人： Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
IPC分类号： H01L21/00 , H01J37/08 , H01J27/00
CPC分类号： H01J37/3171 , C04B35/522 , C04B35/532 , C04B2235/5436 , C04B2235/656 , C04B2235/77 , H01J37/16 , H01J2237/0213 , H01J2237/022 , H01J2237/31705
摘要： The problem of the present invention is to provide, in high current-low energy type ion implantation apparatuses, a graphite member for a beam line inner member of an ion implantation apparatus, which graphite member can markedly reduce particles incorporated in a wafer surface. This problem can be solved by the graphite member of the present invention, which is a graphite member for a beam line inner member of an ion implantation apparatus, which member having a bulk density of not less than 1.80 Mg/m3 and an electric resistivity of not more than 9.5 μΩ·m. Preferably, the R value obtained by dividing D band intensity at 1370 cm−1 by G band intensity at 1570 cm−1 in the Raman spectrum of a spontaneous fracture surface of the graphite member is not more than 0.20.
摘要翻译：本发明的问题在于，在高电流 - 低能量型离子注入装置中，提供一种用于离子注入装置的束线内部构件的石墨构件，该石墨构件可以显着地减少结合在晶片表面中的颗粒。该问题可以通过本发明的石墨构件来解决，该石墨构件是用于离子注入装置的束线内部构件的石墨构件，其堆积密度不小于1.80Mg / m 3，并且电阻率不超过9.5亩。优选地，在石墨构件的自发断裂面的拉曼光谱中，将1370cm -1处的D带强度除以1570cm -1处的G带强度获得的R值不大于0.20。

3. 发明授权

US5352501A Longitudinal magnetic recording medium comprising a circumterentially textured disk substrate, chromium primer layer and a cobalt chromium magnetic alloy layer having a segregation structure 失效
标题翻译：纵向磁记录介质包括周向纹理的盘基片，铬底漆层和具有偏析结构的钴铬磁合金层
公开(公告)号：US5352501A
公开(公告)日：1994-10-04
申请号：US631904
申请日：1990-12-21
申请人： Yukihiro Miyamoto , Fumiaki Yokoyama
发明人： Yukihiro Miyamoto , Fumiaki Yokoyama
IPC分类号： G11B5/64 , G11B5/73 , G11B5/00
CPC分类号： G11B5/656 , G11B5/7305 , Y10S428/90 , Y10S428/928 , Y10T428/12465 , Y10T428/1275 , Y10T428/12854 , Y10T428/12944 , Y10T428/265 , Y10T428/31
摘要： A longitudinal magnetic recording medium comprising a non-magnetic substrate having a texture with a arithmetric average roughness Ra in a circumferential direction of at least 20 .ANG. and a magnetic alloy layer comprising cobalt and chromium as the main components, formed on the substrate, wherein the magnetic alloy layer has (i) a feature that when the orientation degree of the hcp crystal structure is represented by the diffraction ray intensity of electron diffraction by transmission electron diffractiometry, the intensity ratio of the electron diffraction ring in the Co (002) plane between the circumferential direction and the radial direction of the substrate is at least 3, and (ii) a segregation structure having low chromium concentration regions surrounded by high chromium concentration regions, the diameters of the defined low chromium concentration regions being within a range of from 80 to 500 .ANG., and the number of the surrounded low chromium concentration regions being from 600 to 1,500 regions/.mu.m.sup.2.
摘要翻译：一种纵向磁记录介质，其特征在于，在所述基板上形成有具有周向的计算平均粗糙度Ra至少为20的非磁性基板和以钴和铬为主要成分的磁性合金层，磁性合金层具有（i）当通过透射电子衍射法测定电子衍射的衍射光强度来表示hcp晶体结构的取向度时，Co（002）面中的电子衍射环的强度比基板的圆周方向和径向方向为3以上，（ii）具有由高铬浓度区域包围的低铬浓度区域的偏析结构，所定义的低铬浓度区域的直径在80 到500 ANGSTROM，以及包围的低铬浓度区域的数量从600到1500个地区/亩。

4. 发明授权

US5736262A Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US5736262A
公开(公告)日：1998-04-07
申请号：US567417
申请日：1995-12-05
申请人： Shin Ohkijima , Masahiro Oka , Fumiaki Yokoyama
发明人： Shin Ohkijima , Masahiro Oka , Fumiaki Yokoyama
IPC分类号： G11B5/66 , G11B5/73
CPC分类号： G11B5/7325 , G11B5/66 , Y10S428/90 , Y10T428/12465 , Y10T428/12854 , Y10T428/12861 , Y10T428/24942 , Y10T428/24975 , Y10T428/265
摘要： A magnetic recording medium comprising: a non-magnetic substrate; a Co-based alloy magnetic layer (ML); and a non-magnetic Cr-based underlayer position between said magnetic layer and said substrate, compatibly provided with a high S/N and a high coercive force, and an intermediate layer (IL), formed of a Co-based alloy having the hcp structure, which is positioned between the magnetic layer and the non-magnetic underlayer, said intermediate layer having a ratio R=(BsIL*IL)/(BsML*ML), which is the product (BsIL*IL) of the saturation magnetic flux density (BsIL) of the Co-based alloy which constitutes said intermediate layer and the thickness (tIL) of the intermediate layer film to the product (BsML*ML) of the saturation magnetic flux density (BsML) of the Co-based alloy which constitutes said magnetic layer and the magnetic layer film thickness (tML) at 0.2 or less.
摘要翻译：一种磁记录介质，包括：非磁性基板; Co基合金磁性层（ML）; 以及在所述磁性层和所述基板之间的非磁性Cr基底层位置，兼容地具有高S / N和高矫顽力，以及由具有hcp的Co基合金形成的中间层（IL）其结构位于磁性层和非磁性底层之间，所述中间层具有作为饱和磁通量的乘积（BsIL * IL）的比R =（BsIL * IL）/（BsML * ML）构成所述中间层的Co基合金的密度（BsIL）和中间层膜的厚度（tIL）与Co基合金的饱和磁通密度（BsML）的乘积（BsML * ML）的比值构成所述磁性层，磁性层膜厚度（tML）为0.2以下。

5. 发明授权

US5536577A Magnetic recording medium comprising a protective layer and a lubricant layer which contains a host multidentate ligand and a guest reversibly trapped lubricant 失效
标题翻译：磁记录介质包括保护层和含有主体多齿配体的润滑剂层和客体可逆地捕获的润滑剂
公开(公告)号：US5536577A
公开(公告)日：1996-07-16
申请号：US313909
申请日：1994-09-28
申请人： Hideki Murayama , Keiichiro Sano , Kazuhiko Sawada , Fumiaki Yokoyama , Haruhiko Ikeuchi , Yutaka Teranishi
发明人： Hideki Murayama , Keiichiro Sano , Kazuhiko Sawada , Fumiaki Yokoyama , Haruhiko Ikeuchi , Yutaka Teranishi
IPC分类号： B05D1/18 , C10M105/24 , C10M105/60 , C10M105/64 , C10M105/68 , C10M105/70 , C10M107/38 , C10M111/00 , G11B5/725 , G11B5/00
CPC分类号： B82Y30/00 , B05D1/185 , B82Y40/00 , C10M105/24 , C10M105/60 , C10M105/64 , C10M105/68 , C10M105/70 , C10M107/38 , G11B5/725 , C10M2207/021 , C10M2207/044 , C10M2207/125 , C10M2207/129 , C10M2213/00 , C10M2213/04 , C10M2213/06 , C10M2215/08 , C10M2215/082 , C10M2215/22 , C10M2215/221 , C10M2215/225 , C10M2215/226 , C10M2215/28 , C10M2215/30 , C10M2219/042 , C10M2219/044 , C10M2223/04 , C10M2223/042 , C10M2223/047 , C10N2210/01 , C10N2240/20 , C10N2240/201 , C10N2240/202 , C10N2240/203 , C10N2240/204 , C10N2240/205 , Y10S428/90 , Y10S428/91 , Y10T428/30 , Y10T428/31504 , Y10T428/31536
摘要： The lubricant layer according to the present invention is used in a thin film magnetic recording medium in which a solid surface sliding at a high speed is required to retain its lubricating performance and abrasion resistance for a long period of time, comprising a host-guest complex composed of a lubricant molecule as a guest molecule and a multidentate ligand as a host compound to form the complex with the guest molecule.
摘要翻译：根据本发明的润滑剂层用于其中需要高速滑动的固体表面以保持其长时间的润滑性能和耐磨性的薄膜磁记录介质，其包含主体 - 客体络合物由作为客体分子的润滑剂分子和作为主体化合物的多齿配体形成与客体分子的络合物。

6. 发明授权

US5492745A Magnetic recording medium and method for its production 失效
标题翻译：磁记录介质及其制作方法
公开(公告)号：US5492745A
公开(公告)日：1996-02-20
申请号：US194636
申请日：1994-02-10
申请人： Fumiaki Yokoyama
发明人： Fumiaki Yokoyama
IPC分类号： G11B5/64 , G11B5/73 , G11B5/851 , B32B3/02 , C23C14/00 , G11B5/66
CPC分类号： G11B5/7325 , G11B5/656 , G11B5/851 , Y10S428/90 , Y10T428/12465 , Y10T428/12576 , Y10T428/12826 , Y10T428/12854 , Y10T428/12875 , Y10T428/265
摘要： A magnetic recording medium comprising a non-magnetic substrate and a magnetic alloy layer formed on the substrate with a non-magnetic primer layer containing chromium as the main component interposed therebetween, wherein the magnetic alloy layer contains cobalt and nickel as the main components and not more than 8 atomic % of boron and has been formed by sputtering under such a condition that a negative bias voltage is applied to the non-magnetic substrate.
摘要翻译：一种磁记录介质，其特征在于，包括非磁性基板和磁性合金层，所述磁性合金层以含有铬作为主要成分的非磁性底漆层形成在所述基板上，其中，所述磁性合金层含有钴和镍作为主要成分，超过8原子％的硼，并且通过在非磁性基板上施加负偏压的条件下通过溅射形成。

7. 发明授权

US5846628A Magnetic disc 失效
标题翻译：磁盘
公开(公告)号：US5846628A
公开(公告)日：1998-12-08
申请号：US626576
申请日：1996-04-02
申请人： Toru Kuroe , Fumiaki Yokoyama , Daisuke Mouri
发明人： Toru Kuroe , Fumiaki Yokoyama , Daisuke Mouri
IPC分类号： C03C15/00 , G11B5/73 , G11B5/738 , G11B5/84 , G11B5/82
CPC分类号： G11B5/8404 , C03C15/00 , G11B5/7315 , G11B5/7325 , G11B5/738 , Y10S428/90 , Y10T428/24355
摘要： Disclosed herein is a substrate for a magnetic disc comprising a glass substrate having fine protrusions on its surface, the protrusions having a height of 50 to 1000 .ANG., a width of 0.01 to 1 .mu.m, a density of 10 to 1000 per 100 .mu.m.sup.2 and an area ratio of 0.1 to 50%, and a ratio of peak height on a mean line (R.sub.p) to maximum height (R.sub.max) with respect to surface roughness of the substrate being at least 60%. Further, a process for preparing the substrate and a magnetic disc having the substrate are disclosed. Because the substrate according to the present invention has appropriate protrusions on its surface, a friction force and an adsorbing force between a head and a magnetic disc can be reduced, leading to the improvement of the CSS and the anti-head stick properties. In addition, the S/N ratio is not affected because the fine concave portions formed on the surface of the substrate are shallow.
摘要翻译：本发明公开了一种磁盘用基板，其特征在于，具有表面具有微细突起的玻璃基板，所述突起的高度为50〜1000，宽度为0.01〜1μm，密度为10〜1000 / 100m2 面积比为0.1〜50％，相对于基板的表面粗糙度，平均线（Rp）至最大高度（Rmax）的峰高比至少为60％。此外，公开了一种用于制备基板的方法和具有该基板的磁盘。由于根据本发明的基板在其表面上具有适当的突起，所以可以减小头部和磁盘之间的摩擦力和吸附力，从而提高CSS和抗头部粘合性能。此外，由于形成在基板的表面上的细凹部较浅，所以不影响S / N比。

8. 发明授权

US5618448A Glass substrate having surface protrusions for use as a magnetic disc substrate 失效
标题翻译：具有用作磁盘基板的表面突起的玻璃基板
公开(公告)号：US5618448A
公开(公告)日：1997-04-08
申请号：US447604
申请日：1995-05-23
申请人： Toru Kuroe , Fumiaki Yokoyama , Daisuke Mouri
发明人： Toru Kuroe , Fumiaki Yokoyama , Daisuke Mouri
IPC分类号： C03C15/00 , G11B5/73 , G11B5/738 , G11B5/84 , C09K13/08
CPC分类号： G11B5/8404 , C03C15/00 , G11B5/7315 , G11B5/7325 , G11B5/738 , Y10S428/90 , Y10T428/24355
摘要： Disclosed herein is a substrate for a magnetic disc comprising a glass substrate having fine protrusions on its surface, the protrusions having a height of 50 to 1000 .ANG., a width of 0.01 to 1 .mu.m, a density of 10 to 1000 per 100 .mu.m.sup.2 and an area ratio of 0.1 to 50%, and a ratio of peak height on a mean line (R.sub.p) to maximum height (R.sub.max) with respect to surface roughness of the substrate being at least 60%. Further, a process for preparing the substrate and a magnetic disc having the substrate are disclosed. Because the substrate according to the present invention has appropriate protrusions on its surface, a friction force and an adsorbing force between a head and a magnetic disc can be reduced, leading to the improvement of the CSS and the anti-head stick properties. In addition, the S/N ratio is not affected because the fine concave portions formed on the surface of the substrate are shallow.
摘要翻译：本发明公开了一种磁盘用基板，其特征在于，具有表面具有微细突起的玻璃基板，所述凸部的高度为50〜1000，宽度为0.01〜1μm，密度为10〜1000 / 100m2 面积比为0.1〜50％，相对于基板的表面粗糙度，平均线（Rp）至最大高度（Rmax）的峰高比至少为60％。此外，公开了一种用于制备基板的方法和具有该基板的磁盘。由于根据本发明的基板在其表面上具有适当的突起，因此可以减小头部和磁盘之间的摩擦力和吸附力，从而提高CSS和抗头部粘合性能。此外，由于形成在基板的表面上的细凹部较浅，所以不影响S / N比。

9. 发明授权

US5494722A Magnetic recording medium and method for its production 失效
标题翻译：磁记录介质及其制作方法
公开(公告)号：US5494722A
公开(公告)日：1996-02-27
申请号：US9002
申请日：1993-01-26
申请人： Masahiro Oka , Fumiaki Yokoyama
发明人： Masahiro Oka , Fumiaki Yokoyama
IPC分类号： G11B5/66 , G11B5/64 , G11B5/73 , G11B5/738 , G11B5/85 , G11B5/851 , H01F10/16 , H01F41/18 , B32B3/02 , B32B5/16 , B32B15/00
CPC分类号： G11B5/656 , Y10S428/90 , Y10S428/928 , Y10T428/12458 , Y10T428/12847 , Y10T428/12854 , Y10T428/12931 , Y10T428/26 , Y10T428/265
摘要： A thin-film rigid disk magnetic medium is prepared having a non-magnetic substrate and a magnetic alloy layer formed on the substrate with a non-magnetic underlayer containing chromium as the main component interposed therebetween, where the magnetic alloy layer contains cobalt as the main component and not more than 8 atomic % of boron, not more than 40 atomic % of nickel, not more than 26 atomic % of chromium and not more than 10 atomic % of tantalum. Preferably, the magnetic alloy layer is formed by sputtering while a voltage relatively lower than the plasma potential is applied to the non-magnetic substrate.
摘要翻译：制备具有非磁性基板和磁性合金层的薄膜刚性磁盘介质，其中磁性合金层含有以非铬磁性层为主要成分的非磁性底层，其中磁性合金层含有钴作为主要成分不超过8原子％的硼，不超过40原子％的镍，不超过26原子％的铬和不超过10原子％的钽。优选地，通过溅射形成磁性合金层，同时将相对低于等离子体电位的电压施加到非磁性基板。

10. 发明授权

US5830577A Surface having a coating of a host multidentate ligand and a reversibly trapped lubricant 失效
标题翻译：具有主体多齿配体和可逆捕获的润滑剂的涂层的表面
公开(公告)号：US5830577A
公开(公告)日：1998-11-03
申请号：US669810
申请日：1996-06-27
申请人： Hideki Murayama , Keiichiro Sano , Kazuhiko Sawada , Fumiaki Yokoyama , Haruhiko Ikeuchi , Yutaka Teranishi
发明人： Hideki Murayama , Keiichiro Sano , Kazuhiko Sawada , Fumiaki Yokoyama , Haruhiko Ikeuchi , Yutaka Teranishi
IPC分类号： B05D1/18 , C10M105/24 , C10M105/60 , C10M105/64 , C10M105/68 , C10M105/70 , C10M107/38 , C10M111/00 , G11B5/725
CPC分类号： B82Y30/00 , B05D1/185 , B82Y40/00 , C10M105/24 , C10M105/60 , C10M105/64 , C10M105/68 , C10M105/70 , C10M107/38 , G11B5/725 , C10M2207/021 , C10M2207/044 , C10M2207/125 , C10M2207/129 , C10M2213/00 , C10M2213/04 , C10M2213/06 , C10M2215/08 , C10M2215/082 , C10M2215/22 , C10M2215/221 , C10M2215/225 , C10M2215/226 , C10M2215/28 , C10M2215/30 , C10M2219/042 , C10M2219/044 , C10M2223/04 , C10M2223/042 , C10M2223/047 , C10N2210/01 , C10N2240/20 , C10N2240/201 , C10N2240/202 , C10N2240/203 , C10N2240/204 , C10N2240/205 , Y10S428/90 , Y10S428/91 , Y10T428/30 , Y10T428/31504 , Y10T428/31536
摘要： The lubricant layer according to the present invention is used in a thin film magnetic recording medium in which a solid surface sliding at a high speed is required to retain its lubricating performance and abrasion resistance for a long period of time, comprising a host-guest complex composed of a lubricant molecule as a guest molecule and a multidentate ligand as a host compound to form the complex with the guest molecule.
摘要翻译：根据本发明的润滑剂层用于其中需要高速滑动的固体表面以保持其长时间的润滑性能和耐磨性的薄膜磁记录介质，其包含主体 - 客体络合物由作为客体分子的润滑剂分子和作为主体化合物的多齿配体形成与客体分子的络合物。

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