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1. 发明申请

US20120127615A1 TMR READER STRUCTURE AND PROCESS FOR FABRICATION 有权
标题翻译： TMR读取器结构和制造过程
公开(公告)号：US20120127615A1
公开(公告)日：2012-05-24
申请号：US12954334
申请日：2010-11-24
申请人： Liubo Hong , Honglin Zhu , Tsann Lin , Zheng Gao
发明人： Liubo Hong , Honglin Zhu , Tsann Lin , Zheng Gao
IPC分类号： G11B5/33 , G01R33/32
CPC分类号： G11B5/3912 , G01R33/098 , G11B5/3163 , G11B5/3932
摘要： The present invention generally relates to a TMR reader and a method for its manufacture. The TMR reader discussed herein adds a shield layer to the sensor structure. The shield layer is deposited over the capping layer so that the shield layer and the capping layer collectively protect the free magnetic layer within the sensor structure from damage during further processing. Additionally, the hard bias layer is shaped such that the entire hard bias layer underlies the hard bias capping layer so that a top lead layer is not present. By eliminating the top lead layer and including a shield layer within the sensor structure, the read gap is reduced while still protecting the free magnetic layer during later processing.
摘要翻译：本发明一般涉及TMR读取器及其制造方法。本文中讨论的TMR读取器将一个屏蔽层添加到传感器结构。屏蔽层沉积在覆盖层上，使得屏蔽层和覆盖层共同保护传感器结构内的自由磁性层免受进一步处理期间的损坏。此外，硬偏压层被成形为使得整个硬偏压层位于硬偏压覆盖层的下面，使得顶部引线层不存在。通过消除顶部引线层并且在传感器结构内包括屏蔽层，读取间隙减小，同时在稍后处理期间仍然保护自由磁性层。

2. 发明授权

US08553370B2 TMR reader structure having shield layer 有权
标题翻译：具有屏蔽层的TMR读取器结构
公开(公告)号：US08553370B2
公开(公告)日：2013-10-08
申请号：US12954334
申请日：2010-11-24
申请人： Liubo Hong , Honglin Zhu , Tsann Lin , Zheng Gao
发明人： Liubo Hong , Honglin Zhu , Tsann Lin , Zheng Gao
IPC分类号： G11B5/39
CPC分类号： G11B5/3912 , G01R33/098 , G11B5/3163 , G11B5/3932
摘要： The present invention generally relates to a TMR reader and a method for its manufacture. The TMR reader discussed herein adds a shield layer to the sensor structure. The shield layer is deposited over the capping layer so that the shield layer and the capping layer collectively protect the free magnetic layer within the sensor structure from damage during further processing. Additionally, the hard bias layer is shaped such that the entire hard bias layer underlies the hard bias capping layer so that a top lead layer is not present. By eliminating the top lead layer and including a shield layer within the sensor structure, the read gap is reduced while still protecting the free magnetic layer during later processing.
摘要翻译：本发明一般涉及TMR读取器及其制造方法。本文中讨论的TMR读取器将一个屏蔽层添加到传感器结构。屏蔽层沉积在覆盖层上，使得屏蔽层和覆盖层共同保护传感器结构内的自由磁性层免受进一步处理期间的损坏。此外，硬偏压层被成形为使得整个硬偏压层位于硬偏压覆盖层的下面，使得顶部引线层不存在。通过消除顶部引线层并且在传感器结构内包括屏蔽层，读取间隙减小，同时在稍后处理期间仍然保护自由磁性层。

3. 发明授权

US08797680B1 Perpendicular magnetic recording head having reduced shield notching 有权
标题翻译：垂直磁记录头具有减少的屏蔽开槽
公开(公告)号：US08797680B1
公开(公告)日：2014-08-05
申请号：US13417930
申请日：2012-03-12
申请人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
发明人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) transducer is provided. The PRM transducer includes a PMR pole having a top, a bottom, and at least one sidewall, the bottom having a bottom width, the top having a top width bigger than the bottom width. The PRM transducer further includes an intermediate layer adjacent to the at least one sidewall, a write gap on the PMR pole, the write gap including a first layer on the PMR pole, the first layer including a planarization stop layer, and a shield on the write gap.
摘要翻译：提供垂直磁记录（PMR）传感器。 PRM传感器包括具有顶部，底部和至少一个侧壁的PMR极，底部具有底部宽度，顶部具有大于底部宽度的顶部宽度。 PRM换能器还包括与至少一个侧壁相邻的中间层，PMR极上的写入间隙，写入间隙包括PMR极上的第一层，第一层包括平坦化停止层，以及屏蔽写差距。

4. 发明授权

US08547660B2 Magnetic write head manufactured by an enhanced damascene process producing a tapered write pole with a non-magnetic spacer and non-magnetic bump 有权
标题翻译：通过增强的镶嵌工艺制造的磁性写头，其产生具有非磁性间隔物和非磁性凸块的锥形写柱
公开(公告)号：US08547660B2
公开(公告)日：2013-10-01
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

5. 发明申请

US20120125886A1 PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) 失效
标题翻译：具有导向边缘屏蔽（LES）和导线边缘（LET）的PMR写入的过程
公开(公告)号：US20120125886A1
公开(公告)日：2012-05-24
申请号：US12954485
申请日：2010-11-24
申请人： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
发明人： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
IPC分类号： G01R1/16
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3163
摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.
摘要翻译：提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。对于具有锥形前缘的锥形磁极，将磁性材料沉积在平坦化表面上，形成图案化的抗蚀剂材料，并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

6. 发明申请

US20090244789A1 METHOD AND SYSTEM FOR PROVIDING A HARD BIAS CAPPING LAYER 有权
标题翻译：一种用于提供硬偏置覆盖层的方法和系统
公开(公告)号：US20090244789A1
公开(公告)日：2009-10-01
申请号：US12060724
申请日：2008-04-01
申请人： Liubo Hong , Honglin Zhu
发明人： Liubo Hong , Honglin Zhu
IPC分类号： G11B5/33
CPC分类号： H01L43/12 , H01L43/08
摘要： The method and system for providing a magnetoresistive device are disclosed. The magnetoresistive device is formed from a plurality of magnetoresistive layer. The method and system include providing a mask. The mask covers a first portion of the magnetoresistive element layers in at least one device area. The magnetoresistive element(s) are defined using the mask. The method and system include depositing hard bias layer(s). The method and system also include providing a hard bias capping structure on the hard bias layer(s). The hard bias capping structure includes a first protective layer and a planarization stop layer. The first protective layer resides between the planarization stop layer and the hard bias layer(s). The method and system also include performing a planarization. The planarization stop layer is configured for the planarization.
摘要翻译：公开了一种提供磁阻器件的方法和系统。磁阻器件由多个磁阻层形成。该方法和系统包括提供掩模。掩模在至少一个器件区域中覆盖磁阻元件层的第一部分。使用掩模限定磁阻元件。该方法和系统包括沉积硬偏压层。该方法和系统还包括在硬偏压层上提供硬偏压盖结构。硬偏压盖结构包括第一保护层和平坦化停止层。第一保护层位于平坦化停止层和硬偏压层之间。该方法和系统还包括执行平面化。平坦化停止层被配置为用于平坦化。

7. 发明授权

US08614864B1 Magnetoresistive device with a hard bias capping layer 有权
标题翻译：具有硬偏压盖层的磁阻器件
公开(公告)号：US08614864B1
公开(公告)日：2013-12-24
申请号：US13467354
申请日：2012-05-09
申请人： Liubo Hong , Honglin Zhu
发明人： Liubo Hong , Honglin Zhu
IPC分类号： G11B5/39
CPC分类号： H01L43/12 , H01L43/08
摘要： A magnetoresistive device is provided. The device includes at least one magnetoresistive element having at least one side, at least one hard bias layer in proximity to the at least one side of the at least one magnetic element, and a hard bias capping structure on the at least one hard bias layer. The hard bias capping structure includes a protective layer covering at least a first portion of the at least one hard bias layer and a planarization stop layer covering a second portion of the at least one hard bias layer. A portion of the protective layer resides between the planarization stop layer and the at least one hard bias layer.
摘要翻译：提供了一种磁阻器件。该器件包括至少一个具有至少一个侧面的磁阻元件，在至少一个磁性元件的至少一个侧面附近的至少一个硬偏置层，以及在该至少一个硬偏置层上的硬偏压封盖结构。所述硬偏压封盖结构包括覆盖所述至少一个硬偏置层的至少第一部分的保护层和覆盖所述至少一个硬偏置层的第二部分的平坦化停止层。保护层的一部分位于平坦化停止层和至少一个硬偏压层之间。

8. 发明授权

US08347489B2 Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield 有权
标题翻译：用于制造具有前缘锥形写极，自对准侧屏蔽和独立后屏蔽的垂直磁写头的方法
公开(公告)号：US08347489B2
公开(公告)日：2013-01-08
申请号：US12874116
申请日：2010-09-01
申请人： Liubo Hong , Aron Pentek , Yi Zheng , Honglin Zhu
发明人： Liubo Hong , Aron Pentek , Yi Zheng , Honglin Zhu
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/23 , G11B5/3116 , G11B5/315 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.
摘要翻译：一种用于制造具有锥形写柱以及前缘锥形的磁写头的方法，以及独立的后侧和侧面磁屏蔽。该方法允许写极通过干法进行构建，其中写极材料通过诸如溅射沉积或电镀的工艺沉积，并且写极形状通过掩模和离子铣削定义。写极具有阶梯特征，其可以用于在稍微从ABS处凹陷的位置处在后屏蔽和写极之间提供增加的磁间隔，或者可以是磁性材料，其增加写极的位置处的有效厚度从ABS略微凹进。可以在该阶梯特征上进一步构建凸块结构，以增强磁场梯度以及减少后屏蔽饱和度。

9. 发明申请

US20120127612A1 PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) 有权
公开(公告)号：US20120127612A1
公开(公告)日：2012-05-24
申请号：US12954422
申请日：2010-11-24
申请人： Kyusik Shin , Qiping Zhong , Honglin Zhu , Yingjian Chen , Liubo Hong , Fenglin Liu
发明人： Kyusik Shin , Qiping Zhong , Honglin Zhu , Yingjian Chen , Liubo Hong , Fenglin Liu
IPC分类号： G11B5/10 , G01R1/16
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

10. 发明授权

US08524095B2 Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET) 失效
公开(公告)号：US08524095B2
公开(公告)日：2013-09-03
申请号：US12954485
申请日：2010-11-24
申请人： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
发明人： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
IPC分类号： B44C1/22
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3163
摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

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