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1. 发明授权

US08892494B2 Device for classifying defects and method for adjusting classification 有权
标题翻译：分类缺陷的设备和分类调整方法
公开(公告)号：US08892494B2
公开(公告)日：2014-11-18
申请号：US13376390
申请日：2010-07-08
申请人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
发明人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
IPC分类号： G06F15/18 , G06T7/00
CPC分类号： G06T7/001 , G06T2207/10056 , G06T2207/20076 , G06T2207/30148
摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
摘要翻译：公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据分类为第一类组的缺陷的特征量。并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。

2. 发明申请

US20120117010A1 DEVICE FOR CLASSIFYING DEFECTS AND METHOD FOR ADJUSTING CLASSIFICATION 有权
标题翻译：用于分类缺陷的装置和调整分类的方法
公开(公告)号：US20120117010A1
公开(公告)日：2012-05-10
申请号：US13376390
申请日：2010-07-08
申请人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
发明人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
IPC分类号： G06F15/18
CPC分类号： G06T7/001 , G06T2207/10056 , G06T2207/20076 , G06T2207/30148
摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
摘要翻译：公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据分类为第一类组的缺陷的特征量。并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。

3. 发明授权

US09342879B2 Method and apparatus for reviewing defect 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：US09342879B2
公开(公告)日：2016-05-17
申请号：US14347127
申请日：2012-07-06
申请人： Yohei Minekawa , Kenji Nakahira , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
发明人： Yohei Minekawa , Kenji Nakahira , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
IPC分类号： G06K9/00 , G06T7/00
CPC分类号： G06T7/0004 , G06T7/001 , G06T2207/10061 , G06T2207/20016 , G06T2207/30148
摘要： A method for reviewing defect, comprising the steps of: as an image acquisition step, imaging a surface of a sample using arbitrary image acquisition condition selected from a plurality of image acquisition conditions and obtaining a defect image; as a defect position calculation step, proceeding the defect image obtained by the image acquisition step and calculating a defect position on the surface of the sample; as a defect detection accuracy calculation step, obtaining a defect detection accuracy of the defect position calculated by the defect position calculation step; and as a conclusion determination step, determinating whether the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined requirement or not; wherein until it is determined that the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined in the conclusion determination step, the image acquisition condition is selected from the plurality of image acquisition conditions once again and the image acquisition step, the defect position calculation step, the defect detection accuracy calculation step and the conclusion determination step are repeated.
摘要翻译：一种检查缺陷的方法，包括以下步骤：作为图像获取步骤，使用从多个图像获取条件中选择的任意图像获取条件对样本的表面进行成像并获得缺陷图像; 作为缺陷位置计算步骤，进行通过图像获取步骤获得的缺陷图像，并计算样本表面上的缺陷位置; 作为缺陷检测精度计算步骤，获得由缺陷位置计算步骤计算的缺陷位置的缺陷检测精度; 以及作为结论确定步骤，确定由缺陷检测精度计算步骤获得的缺陷检测精度是否满足预定要求; 其中直到确定由缺陷检测精度计算步骤获得的缺陷检测精度在结论确定步骤中达到预定值时，再次从多个图像获取条件中选择图像获取条件，并且图像获取步骤，缺陷位置计算步骤，重复缺陷检测精度计算步骤和结论确定步骤。

4. 发明授权

US08824773B2 Defect observation method and defect observation device 有权
标题翻译：缺陷观察方法和缺陷观察装置
公开(公告)号：US08824773B2
公开(公告)日：2014-09-02
申请号：US13515643
申请日：2010-11-19
申请人： Yohei Minekawa , Ryo Nakagaki , Kenji Nakahira , Takehiro Hirai , Katsuhiro Kitahashi
发明人： Yohei Minekawa , Ryo Nakagaki , Kenji Nakahira , Takehiro Hirai , Katsuhiro Kitahashi
IPC分类号： G06K9/00 , G06K9/46 , G01N23/22 , H01J37/26 , G06T7/00
CPC分类号： H01J37/26 , G01N23/22 , G01N2223/421 , G01N2223/6116 , G01N2223/6466 , G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148
摘要： A defect observation device including an input-output unit supplied with information of a taught defect, and information of an ideal output of the taught defect, and configured to display a processing result based upon a determined image processing parameter set; and an automatic determination unit configured to: select image processing parameter sets which are less in number than the total number of all image processing parameter sets, out of all image processing parameter sets, calculate image processing results on an input defect image, by using the selected image processing parameter sets, calculate a coincidence degree for each of the selected image processing parameter sets, estimate distribution of an index value in all image processing parameter sets from distribution of the coincidence degree for the selected image processing parameter sets, and determine an image processing parameter set to have a high coincidence degree out of all image processing parameter sets.
摘要翻译：一种缺陷观察装置，包括：提供教导缺陷的信息的输入输出单元和教导缺陷的理想输出的信息，并且被配置为基于确定的图像处理参数集显示处理结果; 以及自动确定单元，被配置为：在所有图像处理参数组中，选择数量少于所有图像处理参数组的总数的图像处理参数组，通过使用所述图像处理参数组来计算输入缺陷图像上的图像处理结果选择的图像处理参数组，对所选择的图像处理参数组中的每一个计算一致度，根据所选择的图像处理参数组的重合程度的分布来估计所有图像处理参数组中的索引值的分布，并且确定图像处理参数设置为在所有图像处理参数集中具有高重合度。

5. 发明申请

US20130140457A1 DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE 有权
标题翻译：缺陷观察方法和缺陷观察装置
公开(公告)号：US20130140457A1
公开(公告)日：2013-06-06
申请号：US13515643
申请日：2010-11-19
申请人： Yohei Minekawa , Ryo Nakagaki , Kenji Nakahira , Takehiro Hirai , Katsuhiro Kitahashi
发明人： Yohei Minekawa , Ryo Nakagaki , Kenji Nakahira , Takehiro Hirai , Katsuhiro Kitahashi
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , G01N23/22 , G01N2223/421 , G01N2223/6116 , G01N2223/6466 , G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148
摘要： A defect observation device supplied with a taught defect and an ideal output obtained by conducting image processing on the taught defect as its input and capable of conducting work of setting image processing parameters required to classify defect kinds easily and fast is provided.The defect observation device includes an input-output unit 123 which is supplied with information of a taught defect and information of an ideal output of the taught defect and which displays a processing result based upon a determined image processing parameter set, and an automatic determination unit 124 for selecting image processing parameter sets which are less in number than the total number of all image processing parameter sets, out of all image processing parameter sets, calculating image processing results on an input defect image, by using the selected image processing parameter sets, calculating a coincidence degree for each of the selected image processing parameter sets, estimating distribution of an index value in all image processing parameter sets from distribution of the coincidence degree for the selected image processing parameter sets, and determining an image processing parameter set having a high coincidence degree out of all image processing parameter sets.
摘要翻译：提供了一种缺陷观察装置，其提供了教导缺陷和通过对教导缺陷进行图像处理而获得的理想输出作为其输入并且能够进行设置容易且快速地分类缺陷种类所需的图像处理参数的工作。缺陷观察装置包括输入输出单元123，该输入输出单元123被提供有教导缺陷的信息和教导缺陷的理想输出的信息，并且基于确定的图像处理参数集显示处理结果;以及自动确定单元 124，用于选择数量少于所有图像处理参数组的总数的图像处理参数组，在所有图像处理参数组中，通过使用所选择的图像处理参数集计算输入缺陷图像上的图像处理结果，计算所选择的图像处理参数组中的每一个的一致度，根据所选择的图像处理参数组的一致度分布来估计所有图像处理参数组中的索引值的分布，并且确定具有高的图像处理参数组所有图像处理参数集合的重合度。

6. 发明授权

US09401015B2 Defect classification method, and defect classification system 有权
标题翻译：缺陷分类方法和缺陷分类系统
公开(公告)号：US09401015B2
公开(公告)日：2016-07-26
申请号：US14112105
申请日：2012-04-16
申请人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
发明人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
IPC分类号： G06K9/00 , G06T7/00 , G01N23/225 , G06K9/62 , G06T5/00 , G01N21/95 , H01L21/66
CPC分类号： G06T7/001 , G01N21/9501 , G01N23/225 , G01N2223/421 , G01N2223/611 , G01N2223/646 , G06K9/6267 , G06T5/00 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： In automatic defect classification, a classification recipe must be set for each defect observation device. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created. This defect classification system has a classification recipe storage unit; an information specification unit, the stage of a stored image, and device information. A corresponding defect specification unit specifies images of the same type of defect from images obtained from different image pickup devices at the same stage. An image conversion unit converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.
摘要翻译：在自动缺陷分类中，必须为每个缺陷观察装置设定分类处方。如果多个设备在同一阶段进行操作，则分类配方中的分类等级必须相同。当创建新的分类配方时，出现了在不同装置中的分类等级中出现差异的问题。该缺陷分类系统具有分类配方存储单元; 信息指定单元，存储图像的级和设备信息。相应的缺陷指定单元从在相同阶段从不同图像拾取装置获得的图像中指定相同类型的缺陷的图像。图像转换单元将从相同阶段的不同图像拾取装置获得的图像转换成可比较的相似图像; 并且配方更新单元将分类类别记录在与相同类型的缺陷的指定图像相对应的分类配方中。

7. 发明申请

US20140219546A1 Method and Apparatus for Reviewing Defect 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：US20140219546A1
公开(公告)日：2014-08-07
申请号：US14347127
申请日：2012-07-06
申请人： Yohei Minekawa , Kenji Nakahira , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
发明人： Yohei Minekawa , Kenji Nakahira , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G06T7/001 , G06T2207/10061 , G06T2207/20016 , G06T2207/30148
摘要： A method for reviewing defect, comprising the steps of: as an image acquisition step, imaging a surface of a sample using arbitrary image acquisition condition selected from a plurality of image acquisition conditions and obtaining a defect image; as a defect position calculation step, proceeding the defect image obtained by the image acquisition step and calculating a defect position on the surface of the sample; as a defect detection accuracy calculation step, obtaining a defect detection accuracy of the defect position calculated by the defect position calculation step; and as a conclusion determination step, determinating whether the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined requirement or not; wherein until it is determined that the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined in the conclusion determination step, the image acquisition condition is selected from the plurality of image acquisition conditions once again and the image acquisition step, the defect position calculation step, the defect detection accuracy calculation step and the conclusion determination step are repeated.
摘要翻译：一种检查缺陷的方法，包括以下步骤：作为图像获取步骤，使用从多个图像获取条件中选择的任意图像获取条件对样本的表面进行成像并获得缺陷图像; 作为缺陷位置计算步骤，进行通过图像获取步骤获得的缺陷图像，并计算样本表面上的缺陷位置; 作为缺陷检测精度计算步骤，获得由缺陷位置计算步骤计算的缺陷位置的缺陷检测精度; 以及作为结论确定步骤，确定由缺陷检测精度计算步骤获得的缺陷检测精度是否满足预定要求; 其中直到确定由缺陷检测精度计算步骤获得的缺陷检测精度在结论确定步骤中达到预定值时，再次从多个图像获取条件中选择图像获取条件，并且图像获取步骤，缺陷位置计算步骤，重复缺陷检测精度计算步骤和结论确定步骤。

8. 发明申请

US20140072204A1 DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM 有权
标题翻译：缺陷分类方法和缺陷分类系统
公开(公告)号：US20140072204A1
公开(公告)日：2014-03-13
申请号：US14112105
申请日：2012-04-16
申请人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
发明人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
IPC分类号： G06T7/00 , G06K9/62
CPC分类号： G06T7/001 , G01N21/9501 , G01N23/225 , G01N2223/421 , G01N2223/611 , G01N2223/646 , G06K9/6267 , G06T5/00 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： In automatic defect classification, a classification recipe must be set for each defect observation device. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created. This defect classification system has a classification recipe storage unit; an information specification unit, the stage of a stored image, and device information. A corresponding defect specification unit specifies images of the same type of defect from images obtained from different image pickup devices at the same stage. An image conversion unit converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.
摘要翻译：在自动缺陷分类中，必须为每个缺陷观察装置设定分类处方。如果多个设备在同一阶段进行操作，则分类配方中的分类等级必须相同。当创建新的分类配方时，出现了在不同装置中的分类等级中发生差异的问题。该缺陷分类系统具有分类配方存储单元; 信息指定单元，存储图像的级和设备信息。相应的缺陷指定单元从在相同阶段从不同图像拾取装置获得的图像中指定相同类型的缺陷的图像。图像转换单元将从相同阶段的不同图像拾取装置获得的图像转换成可比较的相似图像; 并且配方更新单元将分类类别记录在与相同类型的缺陷的指定图像相对应的分类配方中。

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