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1. 发明申请

US20180313771A1 METHOD FOR CHECKING THE LOCATION OF ELEMENTS IN A TIRE IN AN X-RAY INSPECTION SYSTEM, X-RAY INSPECTION SYSTEM FOR CARRYING OUT SUCH A METHOD AS WELL AS USE OF SUCH AN X-RAY INSPECTION SYSTEM FOR CARRYING OUT SUCH METHOD 审中-公开
公开(公告)号：US20180313771A1
公开(公告)日：2018-11-01
申请号：US15963657
申请日：2018-04-26
申请人： YXLON INTERNATIONAL GMBH
发明人： Karsten KOCH
IPC分类号： G01N23/04
CPC分类号： G01N23/04 , G01N23/185 , G01N2223/627 , G01N2223/646
摘要： A method for checking the location of elements in a tire in an X-ray inspection system. The X-ray inspection system has an X-ray tube, a linear X-ray detector and a manipulator. The method includes: using a three-dimensional model of the tire, in which potential locations of the elements in the tire are described; recording two-dimensional X-ray line images of the tire elements consisting of pixels, which are described by a vector from the X-ray tube through the element to the X-ray detector; allocation of the pixels of an element from the two-dimensional X-ray line image to the three-dimensional model of the tire, in that the intersection point of a straight line through the X-ray tube with the vector of the pixel from the two-dimensional X-ray line image is assigned with the potential location of the element of the three-dimensional model as a point in the space for the pixel.

2. 发明授权

US10054432B2 X-ray inspection apparatus and control method 有权
公开(公告)号：US10054432B2
公开(公告)日：2018-08-21
申请号：US15685031
申请日：2017-08-24
申请人： OMRON Corporation
发明人： Hironori Kasahara , Shinji Sugita , Takako Onishi
IPC分类号： G01B11/00 , G01B11/25 , H04N13/282 , G06T7/55 , G01N23/083 , G01N23/18 , G01N23/223 , G01S15/89 , G06T7/00 , H04N13/02 , G01N23/046
CPC分类号： G01B11/2527 , G01N23/044 , G01N23/046 , G01N23/083 , G01N23/18 , G01N23/223 , G01N2223/611 , G01N2223/645 , G01N2223/646 , G01S15/8925 , G06T7/0002 , G06T7/55 , H04N13/282
摘要： An X-ray inspection apparatus includes a 3D processing unit that performs 3D imaging of a first area in an inspection area, a 2D processing unit that performs 2D imaging of a second area in the inspection area, an extraction unit that extracts 3D information for a first inspection target from a 3D image of the first area, and 2D information for a second inspection target from a 2D image of the second area, a 3D information estimation unit that estimates 3D information for the second inspection target using the extracted 3D information for the first inspection target, and an inspection unit that inspects the second inspection target using the 2D information for the second inspection target and the estimated 3D information for the second inspection target.

3. 发明授权

US09916965B2 Hybrid inspectors 有权
公开(公告)号：US09916965B2
公开(公告)日：2018-03-13
申请号：US15394792
申请日：2016-12-29
申请人： KLA-Tencor Corporation
发明人： Kris Bhaskar , Grace Hsiu-Ling Chen , Keith Wells , Wayne McMillan , Jing Zhang , Scott Young , Brian Duffy
IPC分类号： G01N21/00 , H01J37/22 , G01N21/95 , G01N23/225 , H01J37/06 , H01J37/28
CPC分类号： H01J37/222 , G01N21/9501 , G01N23/2251 , G01N2201/12 , G01N2223/304 , G01N2223/401 , G01N2223/418 , G01N2223/6116 , G01N2223/646 , G03F7/7065 , H01J37/06 , H01J37/226 , H01J37/28 , H01J2237/24475 , H01J2237/24495 , H01J2237/2817 , H01L22/20
摘要： Hybrid inspectors are provided. One system includes computer subsystem(s) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.

4. 发明授权

US09753150B2 Low-rate inexpensive digital γ-ray imaging/inspection system 有权
公开(公告)号：US09753150B2
公开(公告)日：2017-09-05
申请号：US14493982
申请日：2014-09-23
申请人： Sharpxview AS
发明人： Einar Nygard
IPC分类号： G01N23/18 , G01T1/20 , G01T1/208 , G01N23/04 , G01T1/202 , G01T7/00
CPC分类号： G01T1/2018 , G01N23/04 , G01N23/18 , G01N2223/202 , G01N2223/301 , G01N2223/3303 , G01N2223/628 , G01N2223/646 , G01T1/202 , G01T1/208 , G01T7/00
摘要： A γ-ray scanner includes a Solid-State Single-Photon Detector (“SSSPD”) and a γ-ray source, which may be a radioisotope such as Americium oxide (Am-241) that may not require certification since it has a low intensity that is safe even over extended periods of exposure to a human body. The γ-ray scanner may be used for monitoring a fixed object such as a pipe and includes an imaging assembly having a stationary annular gantry surrounding the pipe and an armature that fixedly supports the γ-source and the detector in mutual opposed alignment, so that they are constrained to move together. The armature rides around an inside periphery of the gantry, while the armature or the gantry moves laterally in a direction parallel to a rotation axis of the armature so as to move the γ-ray beam around and along the pipe.

5. 发明申请

US20170108444A1 DEFECT OBSERVATION METHOD AND DEVICE AND DEFECT DETECTION DEVICE 审中-公开
公开(公告)号：US20170108444A1
公开(公告)日：2017-04-20
申请号：US15317065
申请日：2015-05-27
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yuko OTANI , Yuta URANO , Toshifumi HONDA
IPC分类号： G01N21/88 , G01N23/225 , G01B11/06 , G02B27/09 , G02B21/10 , G02B21/00 , G02B21/26 , G02B27/58 , G01N21/95 , G01B21/00
CPC分类号： G01N21/8806 , G01B11/0608 , G01B11/2513 , G01B11/2527 , G01B11/30 , G01B15/08 , G01B21/00 , G01B2210/56 , G01N21/9501 , G01N21/956 , G01N23/2251 , G01N2021/8822 , G01N2021/8825 , G01N2021/8861 , G01N2021/8867 , G01N2201/068 , G01N2223/33 , G01N2223/418 , G01N2223/6116 , G01N2223/646 , G02B21/0016 , G02B21/10 , G02B21/26 , G02B27/0933 , G02B27/58 , G03F7/7065
摘要： A defect observation method for observing a defect on a sample detected by another inspection device with a scanning electron microscope including the steps of: optically detecting the defect using the position information for the defect: illuminating the sample including the defect with an illumination intensity pattern having periodic intensity variation in two dimensions by irradiating a plurality of illumination light beams onto the surface of the sample while phase modulating the light beams in a single direction and successively moving the light beams in small movements in a direction different from the single direction, imaging the surface of the sample that is illuminated by the illumination intensity pattern having periodic intensity variation in two dimensions and includes the defect detected by the other inspection device, and detecting the defect detected by the other inspection device from the image obtained through the imaging of the surface of the sample.

6. 发明申请

US20170030844A1 SCANNING INSTRUMENT 审中-公开
标题翻译：扫描仪
公开(公告)号：US20170030844A1
公开(公告)日：2017-02-02
申请号：US15106977
申请日：2014-12-18
申请人： JOHNSON MATTHEY PUBLIC LIMITED COMPANY
发明人： James CAMPBELL , Emanuele RONCHI
IPC分类号： G01N23/18
CPC分类号： G01N23/18 , G01N2223/419 , G01N2223/628 , G01N2223/646
摘要： A scanning apparatus for measuring the attenuation of radiation passing from a radiation source along a radiation path to a radiation detector includes a source of radiation; at least one radiation detector capable of detecting radiation emitted by the source a data processor associated with the at least one radiation detector for calculating a property of material present in a linear radiation path between the source and the at least one detector; and a spacer arranged between the source and the at least one detector. The spacer defines a space which is capable of excluding water and having an average density which is less than 1 gcm−3. The provision of a spacer in the radiation path enables more radiation to be passed along the radiation path because water can be replaced with a material which is less attenuating to radiation.
摘要翻译：一种扫描装置，用于测量从辐射源沿着辐射路径到辐射探测器的辐射的衰减，包括辐射源; 至少一个辐射检测器，其能够检测由所述源发射的与所述至少一个辐射检测器相关联的数据处理器的辐射，用于计算存在于所述源极和所述至少一个检测器之间的线性辐射路径中的材料的性质; 以及布置在所述源和所述至少一个检测器之间的间隔物。间隔物限定了能够排除水并具有小于1g / cm 3的平均密度的空间。在辐射路径中设置间隔物使得能够沿着辐射路径通过更多的辐射，因为可以用对辐射较弱的材料代替水。

7. 发明申请

US20160343123A1 ALIGNMENT FILM DETECTING DEVICE AND ALIGNMENT FILM DETECTING METHOD 审中-公开
标题翻译：对准膜检测装置和对准膜检测方法
公开(公告)号：US20160343123A1
公开(公告)日：2016-11-24
申请号：US15098384
申请日：2016-04-14
申请人： BOE TECHNOLOGY GROUP CO., LTD. , HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
发明人： Yangkun JING , Changjun JIANG
IPC分类号： G06T7/00
CPC分类号： G02F1/13 , G01N23/18 , G01N2223/611 , G01N2223/646 , G02F1/1309 , G02F1/133784 , G06T7/0006 , G06T2207/10116 , G06T2207/30121
摘要： The present disclosure provides in some embodiments an alignment film detecting device including: an imaging unit configured to obtain image information of the alignment grooves on the alignment film of the substrate; and an image processing unit configured to determine whether there is a defect in the alignment grooves on the alignment film based on the image information. According to the alignment film detecting device and the alignment film detecting method provided the present disclosure, the defect of the alignment film on the substrate may be detected, and the image information of the alignment grooves on the alignment film of the substrate may be obtained by the imaging unit, and a recognizing process may be implemented by the image processing unit based on the image information, so that it may accurately determine whether there is a defect in the alignment grooves. As compared with a method of manually detecting the defect in the alignment grooves by vapor in a conventional alignment film detecting technique, it may overcome disadvantages of manually detecting the defect in the alignment grooves of the substrate, such as low recognition rate, being vulnerable to false detection, and inefficient detection, so as to improve detection efficiency as well as accuracy and credibility of the detection result.
摘要翻译：本公开在一些实施方案中提供了一种取向膜检测装置，包括：成像单元，被配置为获得所述基板的取向膜上的对准槽的图像信息; 以及图像处理单元，被配置为基于图像信息来确定取向膜上的对准槽是否存在缺陷。根据本公开的取向膜检测装置和取向膜检测方法，可以检测基板上的取向膜的缺陷，并且可以通过以下方式获得基板的取向膜上的对准槽的图像信息：成像单元和识别处理可以由图像处理单元基于图像信息来实现，使得其可以准确地确定对准凹槽中是否存在缺陷。与以往的取向膜检测技术中通过蒸汽手动检测对准槽的缺陷的方法相比，可以克服手动检测基板的对准槽中的缺陷的缺点，例如低识别率，易受到错误检测和低效检测，从而提高检测效率以及检测结果的准确性和可信度。

8. 发明申请

US20160139064A1 X-RAY DEVICE AND MANUFACTURING METHOD OF STRUCTURE 审中-公开
标题翻译： X射线装置和结构的制造方法
公开(公告)号：US20160139064A1
公开(公告)日：2016-05-19
申请号：US14935837
申请日：2015-11-09
申请人： NIKON CORPORATION , NIKON METROLOGY NV
发明人： Takashi WATANABE , Daniel HILTON , Sam HAWKER
IPC分类号： G01N23/04
CPC分类号： G01N23/046 , G01N23/04 , G01N23/06 , G01N23/083 , G01N23/087 , G01N2223/33 , G01N2223/646 , G01V5/0016 , G01V5/005 , G01V5/0066
摘要： Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.
摘要翻译：提供了能够抑制检测精度下降的装置及其结构的制造方法。检测装置是通过X射线照射被检体并检测通过被检体传播的X射线的装置，并且包括发射X射线的X射线源，保持被检体的表，检测器从X射线源发射并透射通过对象的透射X射线的至少一部分，以及引导台的移动的第一引导装置和第二引导装置，所述第一引导装置和第二引导装置沿平行于X射线的光轴的方向引导台的移动，支持桌面。在该检测装置中，平行于光轴并且被调节台的移动的平面的引导平面穿过检测器的透射X射线的检测区域的内部。

9. 发明授权

US09312099B2 Charged particle beam device and method for analyzing defect therein 有权
标题翻译：带电粒子束装置及其中的缺陷分析方法
公开(公告)号：US09312099B2
公开(公告)日：2016-04-12
申请号：US14655081
申请日：2013-12-26
申请人： Hitachi High-Technologies Corporation
发明人： Kenji Obara , Satoshi Umehara , Naomasa Suzuki
IPC分类号： H01J37/28 , H01J37/147 , H01J37/06 , H01J37/20
CPC分类号： H01J37/28 , G01N23/225 , G01N2223/6116 , G01N2223/646 , H01J37/06 , H01J37/1472 , H01J37/20 , H01J2237/15 , H01J2237/2007 , H01J2237/2806 , H01J2237/2817 , H01L22/12
摘要： The present invention provides a charged particle beam device capable of automatically setting proper analysis positions for defects having various shapes. This charged particle beam device includes: an electron source for emitting an electron beam; a condenser lens for converging the electron beam emitted from the electron source; deflection means for changing a position of the electron beam converged by the condenser lens; an objective lens for constricting the electron beam changed by the deflection means so as to irradiate an inspection object therewith; a sample stage on which the inspection object is to be mounted; and defect analysis means for analyzing a defect based on information as to elements released from a defective portion of the inspection object by the irradiation with the electron beam, wherein the defect analysis means determines an analysis point based on a shape of the defect from among defect areas decided as one defect by the defect analysis means.
摘要翻译：本发明提供一种能够自动设定具有各种形状的缺陷的适当分析位置的带电粒子束装置。该带电粒子束装置包括：用于发射电子束的电子源; 聚光透镜，用于会聚从电子源发射的电子束; 用于改变由聚光透镜会聚的电子束的位置的偏转装置; 用于收缩由偏转装置改变的电子束以便照射检查对象的物镜; 要安装检查对象的样品台; 以及缺陷分析装置，用于基于通过电子束的照射从检查对象的缺陷部分释放的元素的信息来分析缺陷，其中所述缺陷分析装置根据缺陷的形状确定分析点区域由缺陷分析手段决定为一个缺陷。

10. 发明授权

US09272794B2 Systems and methods for non-destructive inspection of airplanes 有权
公开(公告)号：US09272794B2
公开(公告)日：2016-03-01
申请号：US14571310
申请日：2014-12-16
申请人： Aerobotics, Inc.
发明人： Douglas Allen Froom , William T. Manak
IPC分类号： B64F5/00 , G01N29/04 , G01N23/00 , G01N29/44 , G01M5/00
CPC分类号： B64F5/0045 , B64F5/00 , B64F5/40 , B64F5/60 , G01M5/0016 , G01M5/0033 , G01M5/0041 , G01M5/0091 , G01N23/00 , G01N23/04 , G01N29/04 , G01N29/44 , G01N2223/646 , G01N2291/2694 , Y10S901/44
摘要： A method for managing an airplane fleet is described. The method includes: (i) developing a gold body database for an airplane model for each non-destructive inspection system implemented to detect defects; (ii) inspecting, over a period of time, a plurality of candidate airplanes of the airplane model, using different types of non-destructive inspection systems and the gold body database associated with each of the different types of non-destructive inspection systems, to identify defects present on the plurality of candidate airplanes; (iii) repairing or monitoring defects detected on the plurality of candidate airplanes; (iv) conducting a trend analysis by analyzing collective defect data obtained from inspecting of plurality of candidate airplanes; and (v) maintaining the airplane fleet, which includes plurality of candidate airplanes, by performing predictive analysis using results of trend analysis.

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