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1. 发明授权

US09978624B2 Device for at least emptying a transport container 有权
公开(公告)号：US09978624B2
公开(公告)日：2018-05-22
申请号：US15036472
申请日：2014-11-17
申请人： Mechatronic Systemtechnik GmbH
发明人： Alexander Oremus , Arno Glantschnig
IPC分类号： B65H3/48 , H01L21/677 , H01L21/67 , H01L21/68 , H01L21/683 , B65G59/00 , B65G59/04 , G01B11/14 , B65H3/08
CPC分类号： H01L21/67778 , B65G59/005 , B65G59/04 , B65H3/0816 , B65H3/0883 , B65H3/48 , G01B11/14 , H01L21/67092 , H01L21/681 , H01L21/6838
摘要： A device for at least emptying a transport container having a stack of plate-shaped items, including semiconductor wafers and/or packaging material, includes at least one measuring device and a holder at least part of which can travel into the transport container. The holder has a holding surface, a number of holding nozzles for at least holding an item in the stack, and, in the region of the holding surface, at least one recess for the measuring device for acquiring measurement data from the item in the stack. At least one separating nozzle is arranged on the holder outside the holding surface such that the nozzle(s) can move between rest and separating positions. In the separating position, a gas stream directed towards the end face of the stack is formed, to release at least one item in the stack that is adhered to the item held by the holder.

2. 发明申请

US20170345700A1 VACUUM CLAMPING DEVICE FOR GRIPPING WORKPIECES 审中-公开
公开(公告)号：US20170345700A1
公开(公告)日：2017-11-30
申请号：US15537065
申请日：2015-12-17
申请人： mechatronic systemtechnik GmbH
发明人： Alexander Oremus
IPC分类号： H01L21/683 , H01L21/67
CPC分类号： H01L21/6838 , H01L21/67288
摘要： The present invention among other things relates to a vacuum clamping device for clamping of workpieces, in particular for clamping of flat substrates, with a vacuum clamping plate (10), which has a number of suction openings (16) which are distributed over its surface and which are formed in a suction surface (14) of the vacuum clamping plate (10) or which are in connection to a number of suction grooves (15 ) which are formed in the suction surface (14) of the vacuum clamping plate (10), wherein the vacuum clamping plate (10) has two or more vacuum zones (11,12) which are separate from each other and are individually switchable, wherein each vacuum zone (11,12) has corresponding suction openings (16) and/or suction grooves (15) with suction openings (16). In order to further develop the vacuum clamping device in such a way, that with it large holding forces can be generated in a targeted manner, wherein simultaneously damaging of the workpiece to be clamped has to be avoided, it is provided, that the vacuum clamping device has two or more separate vacuum circuits which are independent from each other, that each vacuum zone (11, 12) is assigned to one of the vacuum circuits or is part of one of the vacuum circuits and that each vacuum circuit is designed for generating a self-contained vacuum.

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